|
Match
|
Document |
Document Title |
|
|
RE43400 |
Laser segmented cutting, multi-step cutting, or both
UV laser cutting throughput through silicon and like materials is improved by dividing a long cut path (112) into short segments (122), from about 10 μm to 1 mm. The laser output (32) is scanned ...
|
|
|
8178819 |
Thermal flux processing by scanning a focused line beam
The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus,...
|
|
|
8168918 |
Laser welding system and laser welding control method
A laser processing head mounted on a robot arm moves from with a constant speed in a direction from a welding point to a next welding point, while a reflection mirror continuously turns in order to...
|
|
|
8168919 |
Laser working apparatus and method of controlling laser working apparatus
A laser working apparatus includes: a laser head provided with a reflector which changes the direction of any one of a laser beam and a visible light; a robot which moves the laser head; and a...
|
|
|
8158493 |
Laser-based material processing methods and systems
Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a...
|
|
|
8148037 |
Optical component for EUVL and smoothing method thereof
The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL. The present invention relates to a method for smoothing the...
|
|
|
8148662 |
Method and device for robot-aided remote laser welding with simplified control of focusing direction of laser beam
Device for remote laser welding of metal sheet structures comprises an anthropomorphous robot onto whose wrist is mounted an accessory device carrying a focusing head for the laser beam coming from...
|
|
|
8143552 |
Laser beam machining system
A laser beam machining system including a chuck table for holding a work, and a laser beam irradiation unit for irradiating the work held on the chuck table with a laser beam, wherein the laser...
|
|
|
8097829 |
Laser processing method and laser processing apparatus
A laser processing method involving moving first and second laser beams relative to a workpiece, wherein the first and second laser beams have at least a differing wavelength or intensity. The...
|
|
|
8084706 |
System and method for laser processing at non-constant velocities
A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of...
|
|
|
8035877 |
Laser treatment apparatus and method of manufacturing semiconductor device
A laser treatment apparatus is provided which is capable of irradiating a laser beam to the position where a TFT is to be formed over the entire surface of a large substrate to achieve the...
|
|
|
7964820 |
Process for laser scribing
A method for accurately laser scribing lines on a panel utilising a laser beam scanner unit (13) including an optical system and a scanner lens. The unit (13) moves a laser beam (12) in a first...
|
|
|
7943885 |
Laser irradiation method and method of manufacturing semiconductor device
By laser beam being slantly incident to the diffractive optics, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface...
|
|
|
7927983 |
Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device
Attenuation regions of laser light are removed or reduced in size using a slit located in the immediate vicinity of a surface to be irradiated so that a steep energy distribution is obtained in the...
|
|
|
7910855 |
No gap laser welding of coated steel
Welding using a laser, which leaves keyhole portions at each pass, that allow gases to vent. That keyhole portion is an area within the interior portion, e.g., an inside of a spiral or a circular...
|
|
|
7875829 |
Thermal flux processing by scanning a focused line beam
The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus,...
|
|
|
7872209 |
Thermal flux processing by scanning a focused line beam
The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus,...
|
|
|
7863541 |
Laser annealing apparatus and semiconductor device manufacturing method
This invention is intended to provide a laser annealing method by employing a laser annealer lower in running cost so as to deal with a large-sized substrate, for preventing or decreasing the...
|
|
|
7851726 |
Apparatus for laser cutting and/or marking
An apparatus for cutting and/or marking products using laser beams includes at least one laser light emitter moveable in a first direction along a cross-bar, the cross-bar being in turn moveable...
|
|
|
7772523 |
Laser irradiation apparatus and laser irradiation method
It is an object of the present invention to provide a laser irradiation apparatus and a laser irradiation method for conducting a laser process homogeneously to the whole surface of a semiconductor...
|
|
|
7742212 |
Precision laser machining apparatus
A focused laser beam having an optical axis passes sequentially through a simple, positive lens, a pair of plane, parallel windows, and a second, simple, negative lens. Each of the plane, parallel...
|
|
|
7732729 |
Laser processing device
A laser processing device capable of recognizing a failure of pulsed laser beam irradiation during a process of pulsed laser beam irradiation and taking appropriate measures. A first judgment...
|
|
|
7696449 |
Silicon crystallizing device
A silicon crystallizing device includes a laser beam source emitting a laser beam, a projector unit converging and changing a pattern of the laser beam from the laser beam source, a stage...
|
|
|
7635825 |
Arrangement and method for producing a three-dimensional product
An arrangement and method for production of three-dimensional bodies by successive fusing together of selected areas of a powder bed, which parts correspond to successive cross sections of the...
|
|
|
7591069 |
Methods of bonding solder balls to bond pads on a substrate, and bonding frames
Methods and apparatuses for bonding solder balls to bond pads are described. In one embodiment, portions of a plurality of solder balls are placed within a frame and in registered alignment with...
|
|
|
7525707 |
Parallel-beam scanning for surface patterning of materials
A system and method for parallel-beam scanning a surface. An energetic beam source emits an energetic collimated beam which is received by an optical device, comprising: one or more optical media,...
|
|
|
7525708 |
Scanner head for a laser machining device
A scanner head is provided for processing a workpiece by means of a focused laser beam. The scanner head includes a first module, rotatably supported in a first direction in order to deflect the...
|
|
|
7518086 |
Method and device for adjusting wavelength distribution pattern in laser
A plurality of configurations is simultaneously formed in a material by a single laser beam having a desired distribution pattern of wavelengths. An input laser beam has an initial wavelength...
|
|
|
7485828 |
Residual stress improving apparatus for piping technical field
A residual stress improving apparatus for piping, which can heat an outer peripheral surface of piping to reduce (including eliminate) the residual stress of the piping is provided. The apparatus...
|
|
|
7402774 |
Flexible scan field
An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values....
|
|
|
7399945 |
Method of thermal processing a substrate with direct and redirected reflected radiation
Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image...
|
|
|
7355614 |
Filling an area of an image marked on a material with a laser
A system converts graphic images, such as those created by graphics applications, to a format that can be efficiently printed on a material by a laser printing system. An image can be converted to...
|
|
|
7313501 |
Method and system for determining the location of a potential defect in a device based on a temperature profile
According to one embodiment of the invention a method for determining the location of a potential defect in a device includes scanning a surface of the device with a temperature sensor while...
|
|
|
7279657 |
Scanned rapid thermal processing with feed forward control
A thermal processing system and method including scanning a line beam of intense radiation in a direction transverse to the line direction for thermally processing a wafer with a localized...
|
|
|
7245412 |
On-the-fly laser beam path error correction for specimen target location processing
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such...
|
|
|
7241667 |
Method of separating layers of material
A lift off process is used to separate a layer of material from a substrate by irradiating an interface between the layer of material and the substrate. According to one exemplary process, the...
|
|
|
7238915 |
Methods and apparatus for irradiating a substrate to avoid substrate edge damage
Methods and apparatus (100) for scanning a surface (12) of a substrate (10) with an obliquely incident radiation beam (20) over a select scan path (210) to avoid damage (30) to the curved edge (14)...
|
|
|
7227098 |
Method and system for decreasing the effective pulse repetition frequency of a laser
Methods and systems operate a machine having a laser characterized by a PRF (pulse repetition frequency) parameter that specifies a PRF at which pulses produced by the laser have desirable pulse...
|
|
|
7223938 |
Method for manufacturing a display device including irradiating overlapping regions
A display device is manufactured by forming a semiconductor film over a substrate and irradiating the film with laser light. The laser light is generated from an oscillator, passes through an...
|
|
|
7091444 |
Process for laser beam welding with reduced formation of end craters
During laser beam welding a so-called end crater forms at the end of the weld seam. The end crater is formed by the volume shrinkage of the solidifying melt after the laser beam reaches the seam...
|
|
|
7078651 |
Thermal flux deposition by scanning
A substrate is initially positioned in the reaction chamber. One or more gases are introduced into the reaction chamber. A predetermined speed for translating a line of radiation is determined....
|
|
|
7060934 |
High resolution laser beam delivery apparatus
A laser material processing system and method focus a laser beam to a smaller spot size with a high power density using a movable beam expander to provide high resolution laser beam for engraving...
|
|
|
7038165 |
Laser machining robot
If a machining program is reproduced in a robot controller and a robot is moved on a machining route, then a detection signal of a distance sensor is fetched through a distance sensor amplifier,...
|
|
|
7009141 |
Rotary scanning laser head with coaxial refractive optics
A rotary refractive laser scanner head uses two sets of lenses and prisms aligned along a common optical axis. Each prism is paired with one of the lenses. The lens-prism pairs are separately...
|
|
|
6974930 |
Laser scanner
Disclosed is a device for machining a workpiece transportable in a chosen direction in accordance with a selected pattern by a focussed laser beam. The device includes a scanner with a converging...
|
|
|
6858262 |
Method for producing a surface-alloyed cylindrical, partially cylindrical or hollow cylindrical component and a device for carrying out said method
The invention relates to a method for manufacturing a surface-alloyed cylindrical, partly cylindrical or hollow cylindrical structural member where in the zone of incidence of the energy beam there...
|
|
|
6833526 |
Flex to flex soldering by diode laser
A method to solder flex circuits by diode laser. First and second flex circuits composed of polymer flex substrate are provided. Each flex circuit has a top and a bottom side and at least one...
|
|
|
6816294 |
On-the-fly beam path error correction for memory link processing
Laser beam positioners (300, 340) employ a steering mirror (236, 306) that performs small-angle deflection of a laser beam (270) to compensate for cross-axis (110) settling errors of a positioner...
|
|
|
6812430 |
Glass cutting method and apparatus with controlled laser beam energy
A glass cutting apparatus includes a positioning unit that positions a laser beam along a virtual line on a glass to be cut. A laser beam unit irradiates a laser beam onto the glass along the...
|
|
|
6770843 |
Laser processing apparatus and method
In a laser processing apparatus including a laser oscillator for emitting laser light onto a workpiece through an fθ lens for drilling a hole in the workpiece, a wavelength selector for passing ...
|