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6436466 |
Method for the operation of an electron beam
A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the...
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6214408 |
Method for the operation of an electron beam
A method is disclosed for the operation of a high-power electron beam for the vaporization of materials in a target. With this method, static and dynamic deflection errors are corrected. First, the...
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6110318 |
System for selective electron beam irradiation
Provided is the ability to selectively irradiate a designated irradiation target portion of a target material with a beam of electrons. Target material is moved at a substantially constant velocity...
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6052424 |
Method of welding for fabricating double-wall structures
A double-wall structure consisting of an inner wall, an outer wall surrounding said inner wall and reinforcing ribs that connect said outer and inner walls is produced by a piercing welding method...
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5245546 |
Welding arc length control system
The present invention is a welding arc length control system. The system includes, in its broadest aspects, a power source for providing welding current, a power amplification system, a motorized...
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4974736 |
Multi-electron-beam pattern drawing apparatus
A multi-electron-beam pattern drawing apparatus having a plurality of electron beam sources and a plurality of electron beam sensors, provided on a common base member, is disclosed. The electron...
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4794259 |
Charged particle collection
A charged particle collector assembly, particularly for use with an electron beam gun, is described. The assembly comprises a reflection member onto which electrons impinge in use, the reflection...
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4654506 |
Method and apparatus for detecting and regulating position of welding electron beam
A method and apparatus for detecting and regulating a focused condition of an electron beam emitted from an electron gun of an electron beam welding apparatus. An electron beam of a low intensity...
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4560854 |
Electron beam welder control
A control for an electron beam welder for maintaining the point of impact of an electron beam 16 on the intended weld line 6 between two weldments 2 and 4 and for monitoring or controlling the beam...
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4546232 |
Method for the topically precise subsequent engraving of printing cylinders
A method for the topically precise subsequent-engraving of printing cylinders wherein special marks are engraved in the cylinder and evaluated. The marks are engraved in the form of cups forming a...
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4546260 |
Alignment technique
An alignment system for registration of a scanning beam in a mask inspection tool. Minimum scan widths (W) in the registration process are attained thereby increasing registration sensitivity. This...
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4468568 |
Generating power from the ocean utilizing the thermal properties of magnetic material
A power generation system is taught utilizing a ferromagnetic material contained in a tape and rotatably disposed in a triangular configuration around a series of pulleys. The entire system is...
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4467170 |
Electron beam drilling apparatus
An electron beam drilling apparatus for drilling a number of holes in a substrate by an electron beam is disclosed. The holes are drilled at a high speed by scanning the electron beam along a...
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4423305 |
Method and apparatus for controlling alignment of an electron beam of a variable shape
An electron beam, which is applied along an axis from a source to a target, is aligned along the axis by deflecting the beam off the axis to a reference location. At the reference location, the...
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4400609 |
Device for detecting seam between abutting workpieces by electron beam
A device, for tracking a seam between abutting workpieces by a scanning electron beam, includes a scanning electron beam generating source, a power supply source of the scanning electron beam...
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4376886 |
Method for electron beam welding
This invention concerns a process of welding by an electron beam. The process is one in which the beam is rapidly deflected from point to point of a predetermined matrix of spots over which the...
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4363953 |
Electron beam scribing method
A plurality of band-shaped regions on a specimen are successively scanned by an electron beam having a ribbon-shaped rectangular cross-section. This scanning is effected by deflecting the electron...
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4348576 |
Position regulation of a charge carrier beam
In a charge carrier beam machine, as an electron beam welding machine, a system for establishing the relative position of a beam impingement spot on a workpiece surface and a machine reference...
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4338508 |
Inscribing apparatus and methods
Apparatus and methods for inscribing workpieces for the fabrication of masks and direct fabrication of microcircuits are described. The invention is primarily concerned with correcting for...
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4334139 |
Apparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particles
An apparatus is described for writing patterns in a layer on a substrate by using a beam of electrically-charged particles. The apparatus is provided with an optical height-measuring system for...
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4317981 |
Method and apparatus for controlling a movable energy source when it is operated to heat the surface of an object
A method of controlling a movable energy source includes controlling the velocity and the power of the energy source moved along the predetermined path in accordance with a difference between the...
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4314134 |
Beam position control for electron beam welder
An electron beam position control for maintaining the position of a beam of charged particles that strikes a workpiece at an impact spot includes an adjustable aperture through which X-rays...
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4278866 |
Automatic electron beam deflecting circuit
Apparatus for use in conjunction with a work piece positioned on a work table and having an interface spaced from the work table which is provided for controlling the impingement of the beam from...
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4272665 |
Energy beam welding a gap of varying width
A method of energy beam welding, as electron beam welding is disclosed, wherein the supply rate of filler material is continuously varied in accordance with the width of a gap between two workpiece...
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4223200 |
Charged particle beam processing with magnetic field compensation
A device for compensating for spurious magnetic fields in an energy beam device includes first and second pairs of electromagnetic poles arranged along the particle path and providing magnetic...
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4164640 |
Method and apparatus for positioning a charged particle beam
A method and apparatus for seam welding by means of a charged particle beam is disclosed, wherein any misalignment of the beam with respect to the gap between opposed surfaces of two workpiece...
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4152599 |
Method for positioning a workpiece relative to a scanning field or a mask in a charged-particle beam apparatus
An improved method for positioning a workpiece having at least one marking in a charged-particle beam apparatus relative to either a scanning field or a mask and in which a scanning beam linearly...
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4145597 |
Electron beam lithographic system
An electron beam lithographic system which exposes a desired area of an electron beam resist so as to form a desired pattern to be used for manufacturing large scale integrated circuits. This...
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4127762 |
Method for controlling and stabilizing fusion depth in electron-beam welding and device for effecting same
In the course of welding measurements are taken of the concentration of metallic vapor in the cloud of vapor over the welding zone, the diameter of the hot spot on the article being welded being...
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4112137 |
Process for coating insulating substrates by reactive ion plating
An insulating substrate, such as a glass windscreen, is coated with a conductive coating of an oxide of at least one metal by a process in which the substrate is subjected, in a rarefied oxygen...
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4012620 |
Electron beam seam finding device
This invention relates to a method and apparatus for determining the relative position between the point of impingement of an electron beam on a work surface and the seam between parts to be...
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4008402 |
Method and apparatus for electron beam alignment with a member by detecting X-rays
A method and apparatus are provided for alignment of an electron beam with precisely located areas of a major surface of a member. Marks of predetermined shape are formed of X-ray producing...
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3993889 |
Seam tracking method improvement
This invention is for a method for controlling the motion of an electron beam gun with respect to a workpiece so that the electron beam will follow the path along the seam between the two parts...
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3988567 |
Method of detecting the state of fusion of the workpiece in welding
In welding a workpiece from its one side by arc or electron beam welding, a method of detecting the state of fusion of the workpiece which comprises superposing on the arc or electron beam current...
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3901814 |
Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
A square-shaped beam of charged particles is passed over a registration mark, which is formed by a depression or a rise in the surface of a semiconductor wafer. When the beam passes over one edge...
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3900736 |
Method and apparatus for positioning a beam of charged particles
A beam of charged particles is stepped from one predetermined position to another to form a desired pattern on a semiconductor wafer to which the beam is applied in accordance with a predetermined...
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3894271 |
Method and apparatus for aligning electron beams
A square-shaped electron beam is stepped from one predetermined position to another to form a desired pattern on each chip of a semiconductor wafer to which the beam is applied. During various...
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3875415 |
Method and apparatus for detecting a registration mark on a target such as a semiconductor wafer
A square-shaped beam of charged particles is passed over a registration mark, which is formed by a depression in the surface of a semiconductor wafer. When the beam passes over one edge of the...
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3875416 |
METHODS AND APPARATUS FOR THE PRODUCTION OF SEMICONDUCTOR DEVICES BY ELECTRON-BEAM PATTERNING AND DEVICES PRODUCED THEREBY
This specification describes the method and apparatus for the exposure of sensitive resists by the use of closely scanned rasters described by a focussed electron beam. Variation in the line width...
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3873802 |
ELECTOR BEAM WELDING APPARATUS CHICORPORATING A HOLE CENTER LOCATING MEANS
This invention relates to electron beam welding apparatus incorporating means for locating the geometrical center of a hole in a piecepart to be welded into a structure, for example the part may be...
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3864597 |
DEVICE FOR INCREASING THE ACCURACY OF ADDRESSING AN ELECTRON BEAM STRIKING A TARGET
The present invention relates to systems which utilise a very thin electron beam (diameter one-tenth of a micron or less) to reach a point upon a given surface or to write-in an information there...
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3857041 |
ELECTRON BEAM PATTERNING SYSTEM FOR USE IN PRODUCTION OF SEMICONDUCTOR DEVICES
This Specification describes the method and apparatus for the exposure of sensitive resists by the use of closely scanned rasters described by a focussed electron beam. Variation in the line width...
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3849659 |
ALIGNMENT OF A PATTERNED ELECTRON BEAM WITH A MEMBER BY ELECTRON BACKSCATTER
A patterned electron beam from a photocathode source is aligned with precisely located areas of a major surface of a member. At least one and preferably two detector marks of predetermined shape...
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3842236 |
PROCESS TO CONTROL THE MOVEMENT OF A WORKPIECE WITH RESPECT TO A BEAM OF A STOCK PROCESSING MACHINE OPERATING BY MEANS OF CONTROLLABLE POWER IRRADIATION
The invention relates to apparatus and method for controlling the machining or processing of a workpiece by means of a controllable beam of radiant energy which may be a charge carrier beam, an...
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3832561 |
METHOD AND APPARATUS FOR ELECTRON BEAM ALIGNMENT WITH A SUBSTRATE BY SCHOTTKY BARRIER CONTACTS
A method and apparatus are provided for precision alignment of an electron beam with selected areas of a major surface of a substrate. At least one and preferably two spaced apart detector marks of...
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3814896 |
HOLE CENTER LOCATOR
This invention relates to electron beam welding equipment and, more specifically, to a method which is used to determine the center of a circle, for example, the circle which represents the seam...
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3783228 |
METHOD OF MANUFACTURING INTEGRATED CIRCUITS
In the manufacture of a pattern of an integrated circuit, a reference mark is detected by an electron beam scan to correctly determine the position of the pattern on each semiconductor chip, or to...
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3775581 |
SEAM TRACKING METHOD
There is herein disclosed a method for controlling the motion of an electron beam gun with respect to a work piece so that the electron beam will follow the path along the seam between the two...
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3743776 |
DEVICE FOR TRACING SEAMS FOR WELDING BY ELECTRON BOMBARDMENT
This invention concerns electron bombardment welding techniques. The invention teaches a method and a device for keeping a welding beam centered on a seam plane. The detector includes two detectors...
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3714416 |
METHOD AND APPARATUS FOR IRRADIATION TREATMENT OF ELONGATE MATERIALS
An irradiation method and apparatus in which an electron beam is diverted along a path which is caused to rotate about the beam axis and to intersect and sweep about a cone directed through the...
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