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7635436 |
Etchant composition and manufacturing method for thin film transistor array panel
The present invention provides an etchant composition containing 60 to 75 wt % of phosphoric acid (H 3 PO 4 ), 0.5 to 15 wt % of nitric acid (HNO 3 ), 2 to 15 wt % of acetic acid (CH 3 COOH), and...
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7629266 |
Etch compositions and methods of processing a substrate
The invention includes an etchant composition containing isopropyl alcohol and one or more of HF, NH 4 F and tetramethyl ammonium fluoride (TMAF). The invention encompasses a method of processing a...
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7611639 |
Glass substrate for information recording medium and method for manufacturing same
A method for manufacturing a glass substrate having projections of the same height. The method includes forming a surface layer having a decreased chemical resistance on a glass plate, forming a...
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7608547 |
Etchant and method for fabricating liquid crystal display using the same
Provided are an etchant used for a transparent conductive oxide layer and a method for fabricating a liquid crystal display (LCD) using the etchant. The etchant includes 2-5 wt % sulfuric acid,...
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7591955 |
Method for forming an etched soft edge metal foil and the product thereof
A metal processing method includes etching to remove material from a thin metal part. A pattern of etch resistant material is used to prevent etching of the metal in desired locations. The etch...
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7592264 |
Process for removing material from substrates
A method of removing materials, and preferably photoresist, from a substrate comprises dispensing a liquid sulfuric acid composition comprising sulfuric acid and/or its desiccating species and...
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7591959 |
Etchants and etchant systems with plural etch selectivities
An etchant for removing materials with a plurality of selectivities exhibits a first etch selectivity at a first temperature and a second etch selectivity at a second temperature. The etchant may...
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7582217 |
Etchant composition, methods of patterning conductive layer and manufacturing flat panel display device using the same
An etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid,...
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7581645 |
Method for manufacturing carbon nanotubes with desired length
A method for manufacturing carbon nanotubes with a desired length includes the steps of: providing an array of carbon nanotubes; placing a mask having at least an opening defined therein on the...
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7578947 |
Method for etching non-conductive substrate surfaces
An etching composition for non-conductive substrates such as polyester, polyether, polyimide, polyurethane, epoxy resin, polysulfone, polyethersulfone, polyetherimide, and polyamide, comprising a...
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7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications...
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7575694 |
Method of selectively stripping a metallic coating
A process for chemically stripping a metallic coating on an external surface of a substrate without attacking an internal surface defined by an internal passage within the substrate. Processing...
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7560040 |
Etching method and article etched molded by that method
A tuning-fork crystal wafer 1 A which has legs 11, 12 with grooves 11 c, 12 c is shaped by etching of a crystal substrate 2 . To improve processing precision of the depth of the grooves 11...
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7547398 |
Self-aligned process for fabricating imprint templates containing variously etched features
A process that enables coplanarization of the structures that have been created in multiple independent etch steps. The various etches are performed independently by selectively exposing only...
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7544624 |
Systems and methods for processing microfeature workpieces
Systems and methods for processing microfeature workpieces are disclosed herein. In one embodiment, the system comprises a processing chamber having a workpiece processing site configured to...
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7541094 |
Firepolished quartz parts for use in semiconductor processing
Described are methods and chemistries for preparing firepolished quartz parts for use in semiconductor processing. The quartz parts in need of preparation include newly manufactured parts as well...
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7540968 |
Micro movable device and method of making the same using wet etching
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base...
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7534359 |
Process for producing structure, structure thereof, and magnetic recording medium
The present invention relates to a process for producing a structure having holes at prescribed positions. The structure is produced through steps of (A) providing an impressing member having...
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7531047 |
Method of removing residue from a substrate after a DRIE process
The present disclosure provides a method of cleaning a semiconductor substrate after a DRIE etch process, wherein residue from the DRIE process is removed without damaging the substrate. The...
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7527742 |
Etchant, method of etching, laminate formed thereby, and device
An etchant including a halogenated salt, such as Cryolite (Na 3 AlF 6 ) or potassium tetrafluoro borate (KBF 4 ), is provided. The salt may be present in the etchant in an amount sufficient to etch...
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7527743 |
Apparatus and method for etching insulating film
An apparatus and a method for etching insulating film prevents generation of spots by spraying etchant on a lower surface of the substrate as well as the upper surface.
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7524428 |
Display device and method of manufacturing transparent substrate for display device
A display device comprises a substrate and a laminate structure formed on the substrate and comprising a plurality of layers including a display region. The laminate structure has a...
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7524432 |
Metal pattern forming method
A method of forming a metal pattern comprising forming a metal film having a lower layer made of a metal and an upper layer made of a metal different from the metal of the lower layer, forming a...
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7517464 |
Method for manufacturing an LCD device
A method for manufacturing a TFT panel of an LCD device includes the steps of wet etching a multilayer metallic structure including a high-melting-point metal film (HMPM) film, Al film and another...
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7517465 |
Ultra lightweight photovoltaic device and method for its manufacture
An ultra lightweight semiconductor device such as a photovoltaic device is fabricated on a non-etchable barrier layer which is disposed upon an etchable substrate. The device is contacted with an...
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7513986 |
Method and device for locally removing coating from parts
A method and a device for locally removing coatings from components. An absorbent medium supplied with a coating removal liquid is brought into contact with one or more areas of a component from...
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7510668 |
Low cost antenna array fabrication technology
Methods are provided for producing large volumes of small antenna arrays. In one embodiment, the method comprises the steps of creating an antenna array pattern as a computer file, printing the...
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7510093 |
Method of manufacturing a wiring substrate, method of manufacturing an electro-optical device, method of manufacturing an electronic apparatus
An etching method of the invention includes arranging droplets including a film-forming material on a substrate, drying each of the droplets to form a dry film having a width smaller than the...
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7507346 |
Method for manufacturing electronic component, and electronic component
A method for manufacturing an electronic component includes preparing an element substrate having a function section for providing a function of an electronic component, and an external-connection...
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7501069 |
Flexible structures for sensors and electronics
This invention provides free-standing structures, functionalized free-standing structures and functional devices that are flexible, including nano- and micromachined flexible fabrics comprising...
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7501070 |
Slotted substrate and method of making
The described embodiments relate to a slotted substrate for use in a fluid ejecting device. One exemplary embodiment includes a substrate having a thickness between generally opposing first and...
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7497963 |
Etching method
In this etching method, since an etching gas is introduced before introduction of free radicals into a processing chamber, the etching gas has been adsorbed on the surface of substrates when the...
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7494597 |
Method and apparatus for etching disk-like member
Disclosed are a method and apparatus for etching disk-shaped members, especially a method and apparatus for etching semiconductor wafers. In a method wherein wafers ( 30 ) are rotated and etched in...
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7491341 |
Method of making tapered capillary tips with constant inner diameters
Methods of forming electrospray ionization emitter tips are disclosed herein. In one embodiment, an end portion of a capillary tube can be immersed into an etchant, wherein the etchant forms a...
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7491650 |
Etch compositions and methods of processing a substrate
The invention includes an etchant composition containing isopropyl alcohol and one or more of HF, NH 4 F and tetramethyl ammonium fluoride (TMAF). The invention encompasses a method of processing a...
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7462291 |
Method of fabricating array substrate for liquid crystal display device
A method of fabricating an array substrate for a liquid crystal display device is provided. The method includes steps of forming an amorphous silicon pattern on a substrate; forming a catalyst...
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7459094 |
Method for making a surface acoustic wave device package
A method for making a SAW device package includes the steps of: forming a pattern of a metal layer, that defines transmitting and receiving transducers of a SAW die, on a wafer; forming a pattern...
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7459093 |
MEMS mirror made from topside and backside etching of wafer
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the...
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7455787 |
Etching of solar cell materials
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without...
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7445724 |
Method for manufacturing printing plate
A method for manufacturing a printing plate to acheive a precise and fine pattern by minimizing a variation of etching critical dimension is disclosed. The method uses a hard mask having an opening...
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7442319 |
Poly etch without separate oxide decap
The use of an ammonium hydroxide spike to a hot tetra methyl ammonium hydroxide (TMAH) solution to form an insitu poly oxide decapping step in a polysilicon (poly) etch process, results in a single...
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7442317 |
Method of forming a nozzle rim
A method of forming a nozzle rim for a nozzle aperture is provided. The method is suitable for forming part of a printhead fabrication process. The method comprises the steps of: (a) depositing a...
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7442323 |
Potassium monopersulfate solutions
A composition comprising a solution of potassium monopersulfate having an active oxygen content of from about 3.4% to about 6.8% and a process for its preparation including neutralization with an...
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7435355 |
Liquid-based gravity-driven etching-stop technique for controlling structure dimension
A liquid-based gravity-driven etching-stop technique for controlling structure dimension is provided, where opposite etching trenches in cooperation with an etching-stop solution are used for...
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7431860 |
Etching process
A method for etching a pattern in a material in precise target areas comprising depositing selectively onto the material droplets of a substance for dissolving or reacting chemically with the...
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7431855 |
Apparatus and method for removing photoresist from a substrate
An apparatus and method for removing photoresist from a substrate, which includes treating the photoresist with a first reactant to cause swelling, cracking or delamination of the photoresist,...
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7427360 |
Process and ink for making electronic devices
A process for making an electronic device comprising a dielectric substrate laminated with an electrically conductive metal or alloy which comprises applying a non-aqueous etch-resistant ink by ink...
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7425357 |
Surface modification of expanded ultra high molecular weight polyethylene(eUHMWPE) for improved bondability
A balloon catheter and a method of making the balloon catheter, having a balloon which is bonded to an elongated shaft, and which has a first layer and a second layer and an improved bond between...
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7422696 |
Multicomponent nanorods
Multicomponent nanorods having segments with differing electronic and/or chemical properties are disclosed. The nanorods can be tailored with high precision to create controlled gaps within the...
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7422982 |
Method and apparatus for electroprocessing a substrate with edge profile control
A method and apparatus for electroprocessing a substrate is provided. In one embodiment, a method for electroprocessing a substrate includes the steps of biasing a first electrode to establish a...
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