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8153523 |
Method of etching a layer of a semiconductor device using an etchant layer
A method of semiconductor fabrication including an etching process is provided. The method includes providing a substrate and forming a target layer on the substrate. An etchant layer is formed on...
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8105867 |
Self-aligned three-dimensional non-volatile memory fabrication
A self-aligned fabrication process for three-dimensional non-volatile memory is disclosed. A double etch process forms conductors at a given level in self-alignment with memory pillars both...
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8105497 |
Method for fabricating cylinder type capacitor
A method for fabricating a cylinder type capacitor includes forming connection contacts passing through a lower layer over a semiconductor substrate; forming a mold layer covering the connection...
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7938977 |
Method of modulating resonant frequency of torsional MEMS device
A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform...
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7902081 |
Methods of etching polysilicon and methods of forming pluralities of capacitors
A method of etching polysilicon includes exposing a substrate comprising polysilicon to a solution comprising water, HF, and at least one of a conductive metal nitride, Pt, and Au under conditions...
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7872394 |
MEMS device with two axes comb drive actuators
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to...
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7767107 |
Process for producing aluminum electrode foil for capacitor and aluminum foil for etching
A process for producing an aluminum electrode foil for a capacitor, which includes a first step of preparing an emulsion from a mixture including a first phase of a liquid resin or a resin solution...
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7745300 |
Method for forming a capacitor in a semiconductor and a capacitor using the same
Disclosed is a capacitor and method for forming a capacitor in a semiconductor. The method includes the steps of: (a) forming a lower electrode pattern on a silicon semiconductor substrate; (b)...
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7736527 |
Siloxane polymer compositions and methods of manufacturing a capacitor using the same
Siloxane polymer compositions and methods of manufacturing a capacitor are described. In some embodiments, a mold layer pattern is formed on a substrate having a conductive structure, and the mold...
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7704548 |
Method for manufacturing wiring board
A method for manufacturing a wiring board which can simplify a manufacturing step. In a preparation step, a core board and an electronic component are prepared. In an insulating layer formation and...
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D595537 |
Bottle cover
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7531078 |
Chemical printing of raw aluminum anode foil to induce uniform patterning etching
A method of producing a highly etched electrode for a capacitor from a foil is disclosed. The method comprises first applying a composition to the foil to form a plurality of deposits on the foil...
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7452473 |
Laser marking of raw aluminum anode foil to induce uniform patterning etching
A method of producing a highly etched electrode for a capacitor from a foil is disclosed. The method comprises first applying a laser beam to the foil to form a plurality of marks on the foil...
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7427359 |
Self-filling wet electrochemical cells by laser processing
A method of preparing high capacity hydrous ruthenium oxide micro-ultracapacitors. A laser direct-write process deposits a film of hydrous ruthenium oxide in sulfuric acid under ambient temperature...
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7279765 |
Transparent electrode made from indium-zinc-oxide and etchant for etching the same
A pixel electrode employs a transparent electrode made from indium-zinc-oxide (IZO) that is capable of preventing damage and bending thereof. In a liquid crystal display device containing pixel...
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7252773 |
Clean for high density capacitors
One aspect of the invention relates to a method of cleaning high density capacitors. According to the method, the capacitors are cleaned with a plasma that includes fluorine-containing radicals....
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7045070 |
Method of producing an electrode configuration and method of electrically contacting the electrode configuration
The electrode configuration includes at least one structured layer. A mask is produced on the layer to be structured and the layer is dry etched. The mask is at least slightly etchable by dry...
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7022246 |
Method of fabrication of MIMCAP and resistor at same level
A method is disclosed of fabricating a MIMCAP (a capacitor (CAP) formed by successive layers of metal, insulator, metal (MIM)) and a thin film resistor at the same level. A method is also disclosed...
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6974547 |
Flexible thin film capacitor and method for producing the same
According to a flexible thin film capacitor of the present invention, an adhesive film is formed on a substrate composed of at least one selected from the group consisting of an organic polymer and...
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6884363 |
Method of surface treatment for stainless steel product for fuel cell
A method for treating the surface of a stainless steel product for a fuel cell containing, in wt %, 0.15% or less of C, 17 to 36% of Cr, 0.005 to 3.5% of B, which comprises the first step of...
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6885887 |
Method of constructing a capacitor stack for a flat capacitor
In one aspect, a method of manufacturing a capacitor includes disposing one or more conductive layers of a first electrode stack in a recess of an alignment mechanism, where the recess is...
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6852240 |
Method of manufacturing a ferroelectric capacitor configuration
A ferroelectric capacitor configuration is configured with at least two different coercitive voltages. A first electrode structure having a surface which forms at least two levels is firstly...
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6841080 |
Multi-layer conductor-dielectric oxide structure
A dielectric film is formed on a free-standing conductive metal layer to form a multi-layer foil comprising a conductive metal layer, a barrier layer and a dielectric oxide layer. Such multi-layer...
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6790786 |
Etching processes for integrated circuit manufacturing including methods of forming capacitors
The invention includes semiconductor processing methods, including methods of forming capacitors. In one implementation, a semiconductor processing method includes providing a semiconductor...
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6784761 |
Thermal transfer sheet, thermal transfer recording method, thermal transfer recording system, resonance circuit and process for producing the same
A thermal transfer sheet is equipped with an approval information of being approved as applicable to the predetermined printer. The thermal transfer sheet is set on a printer and, when a...
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6780337 |
Method for trench etching
The invention relates to a method for trench etching, in particular a method for anisotropic deep trench (DT) etching in an Si substrate by plasma dry etching, such as reactive ion etching (RIE),...
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6565759 |
Etching process
A method for etching a pattern within a silicon containing dielectric layer upon a substrate employed within a microelectronics fabrication, employing a plasma activated reactive gas mixture, with...
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6533948 |
Method of manufacturing semiconductor device having ferro-dielectric material film
A reaction byproduct which is generated when a ferro-dielectric material film is etched is removed without giving adverse effect on the semiconductor element. After the etching of the...
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6511918 |
Method of structuring a metal-containing layer
The processes allow structuring of a metal-containing layer. The metal-containing layer is etched, using an etching mask, in a plasma-assisted etching gas atmosphere at a temperature of over 130° ...
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6368514 |
Method and apparatus for batch processed capacitors using masking techniques
Batch thin film capacitors and their methods of manufacture using semiconductor manufacturing techniques. A mask, photo mask or shadow mask, having a pattern is used to form a matrix of rows and...
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6342164 |
Pinhole-free dielectric films
A method for producing a pinhole-free dielectric film comprising applying a photopolymer to a first dielectric surface of a dielectric film having pinholes, exposing a second and opposing surface...
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6315912 |
Process for forming a lower electrode of a cylindrical capacitor
In a process for forming a lower electrode of a cylindrical capacitor in a semiconductor memory, a polysilicon film is formed on an insulator film to cover an inner surface of a hole formed in the...
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6284146 |
Etching gas mixture for transition metal thin film and method for etching transition metal thin film using the same
An etching gas mixture for a transition metal thin film, and an etching method using the etching gas mixture are provided. The etching gas mixture is composed of two gases. The first gas is one...
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6099744 |
Test sample fabrication technique
A fabrication technique for a test sample to characterize pyroelectric and erroelectric thin films for use in uncooled infrared focal plane arrays operated at a nominal 60 Hz. Most layers are...
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5989784 |
Etch recipe for embedded DRAM passivation with etch stopping layer scheme
A method of forming an etch stop layer 40 above a fuse 16 in a fuse opening (or window) 92 using a specialized 2 stage etch process. The invention has two important features: First, the etch stop...
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5972231 |
Imbedded PCB AC coupling capacitors for high data rate signal transfer
A method and apparatus for coupling high speed data components using imbedded PCB AC coupling capacitors is disclosed. The capacitor comprises a first and a second conductive plate of polygonal...
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5968209 |
Method for manufacturing a solid electrolytic capacitor
Cathode and anode sides of a plurality of solid electrolytic capacitors are connected by simultaneous electric welding. The welding step is effected to connect an anode lead of a lead frame to the...
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5945348 |
Method for reducing the heights of interconnects on a projecting region with a smaller reduction in the heights of other interconnects
A region is formed in a semiconductor substrate and extends beyond the substrate surface. First and second interconnects each having a predetermined thickness and a surface approximately parallel...
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5922215 |
Method for making anode foil for layered electrolytic capacitor and capacitor made therewith
A method for making anode foil plates for use with layered electrolytic capacitors and capacitors made with such plates. A high purity aluminum foil is provided for generation of anode foil plates....
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5899748 |
Method for anchoring via/contact in semiconductor devices and devices formed
The present invention discloses a noel method for anchoring a via/contact or the forming of a capacitor having increasing capacitance in a semiconductor device by utilizing alternating layers of...
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5901032 |
Method of producing aluminum foil for electrolytic capacitors and product thereof
An electrochemical cell for etching a metal workpiece such as an aluminum foil, a method for etching the foil using the electrochemical cell, and foil thus produced is provided. The cell includes...
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5893980 |
Semiconductor device capacitor fabrication method
A semiconductor device capacitor fabrication method comprises forming a first insulation film on a substrate and an undoped semiconductor layer on the first insulation film, patterning the undoped...
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5840200 |
Method of manufacturing semiconductor devices
A device insulating film, a lower-layer platinum film, a ferroelectric film, an upper-layer platinum film, and a titanium film are sequentially formed on a semiconductor substrate in this order. On...
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5789323 |
Fabrication of metal-ferroelectric-metal capacitors with a two step patterning sequence
A method of fabricating a metal-ferroelectric-metal ("MFM") capacitor includes the steps of depositing a silicon dioxide layer on a silicon or other substrate, a lower platinum or other noble metal...
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5739045 |
Semiconductor device with increased on chip decoupling capacitance
A semiconductor device has an on-board decoupling capacitor provided at its interconnect region. The decoupling capacitor comprises two layers of metallurgy separated by a dielectric layer wherein...
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5716532 |
Demetallization of polymer/metal multilayer films by etching
A method of improving the breakdown strength of polymer multi-layer (PML) capacitors is provided. The method comprises removing metal, specifically, aluminum, from the cut edge. This is done by...
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5698375 |
Process for formation of capacitor electrode for semiconductor device
The invention discloses a process for formation of a capacitor for a semiconductor device. The upper node electrode is supported by side wall spacers and a central pole, so that the supporting...
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5695860 |
Resonant tag and method of manufacturing the same
A resonant tag has one electrode plate of a capacitor and an electric circuit, which is electrically connected to the capacitor, formed on one surface of the insulating film composing the resonant...
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5660737 |
Process for making a capacitor foil with enhanced surface area
An improved electrolytic capacitor is provided by producing an anode foil which has areas which are not subject to stress during manufacturing being highly etched and those areas which are subject...
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5658820 |
Method for manufacturing ferroelectric thin-film capacitor
A method for manufacturing ferroelectric thin-film which is used as a memory cell for an FRAM includes the steps of: (a) forming a lower electrode, a ferroelectric thin-film and an upper Pt...
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