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7622244 |
Method for contaminant removal
Method for removing contaminants from a surface during semiconductor fabrication. A preferred embodiment comprises developing a resist layer on a top surface of a semiconductor substrate, curing...
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7611639 |
Glass substrate for information recording medium and method for manufacturing same
A method for manufacturing a glass substrate having projections of the same height. The method includes forming a surface layer having a decreased chemical resistance on a glass plate, forming a...
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7591957 |
Method for atmospheric pressure reactive atom plasma processing for surface modification
Reactive atom plasma processing can be used to shape, polish, planarize and clean the surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch,...
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7590326 |
Optical integrated device manufacturing process and device manufactured by the process thereof
The invention relates to a process for manufacturing an integrated optical device comprising the deposition on a support substrate of a multilayer being formed by first and second cladding layers...
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7582219 |
Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same
A method is provided of fabricating a reflective mirror having a reflective surface on which light is incident. This method includes: coating at least one of opposite faces of a plate-shaped...
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7582217 |
Etchant composition, methods of patterning conductive layer and manufacturing flat panel display device using the same
An etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid,...
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7538927 |
MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from...
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7537868 |
Method of manufacturing color filters
The present invention provides a method of manufacturing color filters using a first mixed gas and a second mixed gas. In the method, a stopper layer whose etching rate by the second mixed gas is...
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7524428 |
Display device and method of manufacturing transparent substrate for display device
A display device comprises a substrate and a laminate structure formed on the substrate and comprising a plurality of layers including a display region. The laminate structure has a...
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7517465 |
Ultra lightweight photovoltaic device and method for its manufacture
An ultra lightweight semiconductor device such as a photovoltaic device is fabricated on a non-etchable barrier layer which is disposed upon an etchable substrate. The device is contacted with an...
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7514012 |
Pre-oxidization of deformable elements of microstructures
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present...
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7510664 |
Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
Fabrication apparatus and methods are disclosed for shaping and finishing difficult materials with no subsurface damage. The apparatus and methods use an atmospheric pressure mixed gas plasma...
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7510093 |
Method of manufacturing a wiring substrate, method of manufacturing an electro-optical device, method of manufacturing an electronic apparatus
An etching method of the invention includes arranging droplets including a film-forming material on a substrate, drying each of the droplets to form a dry film having a width smaller than the...
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7486432 |
Method for preparing a periodically poled structure
A method for preparing a periodically poled structure according to this aspect of the present invention comprises the steps of providing a ferroelectric substrate and performing a poling process by...
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7485236 |
Interference display cell and fabrication method thereof
An optical interference display unit with a first electrode, a second electrode and support structures located between the two electrodes is provided. The second electrode has at least a first...
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7481545 |
Method of forming and mounting an angled reflector
In a method of forming a device so as to include a reflective surface at a specific angle to an incident optical axis, a region of a first major surface of a substrate is exposed to an anisotropic...
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7477823 |
Optical waveguide device and fabricating method thereof
Optical waveguide device has waveguide strip-shaped in the depth direction of the drawing and protruding from peripheral portion. A core (not illustrated) is disposed inside waveguide. Wall to be...
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7470622 |
Fabrication and use of polished silicon micro-mirrors
A method of fabricating silicon micro-mirrors includes etching from opposite sides of a silicon wafer with a polished surface on at least one of the opposite sides, to form silicon bars each having...
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7470373 |
Optical interference display panel
An optical interference display panel is disclosed that has a substrate, an optical interference reflection structure, and an opaque protection structure. The optical interference reflection...
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7455957 |
Blazed holographic grating, method for producing the same and replica grating
A substrate is subjected to holographic exposure to a sinusoidal or half-sinusoidal resist pattern corresponding to grating groove thereon. Thereafter, the substrate and the resist pattern are...
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7455787 |
Etching of solar cell materials
A solar cell is fabricated by etching one or more of its layers without substantially etching another layer of the solar cell. In one embodiment, a copper layer in the solar cell is etched without...
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7445723 |
Optical scanner and method of fabricating the same
An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An...
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7432026 |
Method of manufacturing dichroic filter array
A method of manufacturing a dichroic filter array is provided and comprises forming a first dichroic filter material layer on a substrate, and then forming a patterned photoresist layer on the...
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7430072 |
System and method for increasing image quality in a display system
System and method for maximizing image quality by eliminating vias on a reflective surface. A preferred embodiment comprises depositing a first portion of a mirror surface over a support surface,...
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7429334 |
Methods of fabricating interferometric modulators by selectively removing a material
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of...
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7425275 |
Shadow mask and method of fabricating vertically tapered structure using the shadow mask
A method of fabricating a vertically tapered structure. The method includes placing a spacer layer at a predetermined area on a wafer, placing a mask layer at a predetermined area on the spacer...
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7419912 |
Laser patterning of light emitting devices
Light extraction features are provided for a light emitting device having a substrate and a semiconductor light emitting element on the substrate by shaping a surface of a layer of semiconductor...
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7416674 |
Method for fabricating micro optical elements using CMP
A technique for fabricating the required surface shapes for micro optical elements, such as curved micro mirrors and lenses, starts with a simple, binary for example, approximation to the desired...
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7410591 |
Method and system for making a nano-plate for imprint lithography
Provided is a method and system for manufacturing a nano-plate. The method includes depositing two or more types of film around a central core to form a plurality of film layers, each film layer...
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7407595 |
Optical member, manufacturing method of the optical member, waveguide substrate, and photo-electric integrated substrate
A manufacturing method of an optical member for optical path conversion to be connected to an optical waveguide provided in a substrate includes forming plural inclined surfaces on a wafer by...
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7402255 |
MEMS scanning mirror with trenched surface and I-beam like cross-section for reducing inertia and deformation
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more...
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7399421 |
Injection molded microoptics
A wafer-scale apparatus and method is described for the automation of forming, aligning and attaching two-dimensional arrays of microoptic elements on semiconductor and other image display devices,...
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7399420 |
Method of fabricating stamper and focusing grating coupler using the same
Provided are a stamper fabricated by using an embossing master and a focusing grating coupler fabricated by using the stamper, which is applicable to a subminiature pickup head for a mobile optic...
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7394961 |
Waveguide having low index substrate
An optical waveguide includes a porous substrate having pores of first width, a barrier layer having apertures aligned with the pore openings, and a core material layer adjacent the barrier layer....
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7381339 |
Increased yield of cubic crystalline optical elements by crystal orientation
Increased yield of optical elements from cubic crystal rods, such as made of calcium fluoride, is made possible by orienting the optical elements for supporting the propagation of light along one...
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7368062 |
Method and apparatus for a low parasitic capacitance butt-joined passive waveguide connected to an active structure
Undoped layers are introduced in the passive waveguide section of a butt-joined passive waveguide connected to an active structure. This reduces the parasitic capacitance of the structure.
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7361285 |
Method for fabricating cliche and method for forming pattern using the same
A method for fabricating a cliché including: providing a transparent glass substrate; depositing a metal layer on the substrate; patterning the metal layer and thereby forming a first metal...
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7355781 |
Spatial light modulator with perforated hinge
A spatial light modulator (SLM) is disclosed that increases speed and efficiency of an SLM through the use of a perforated hinge. The hinge may take many forms, but generally includes an elongated...
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7354733 |
Method for sorting and separating living cells
We disclose methods of sorting or separating mixtures of living cells (e.g., eukaryotic, prokaryotic, mammalian, pathogenic, bacterial, viral, etc.). We perform our methods by activating...
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7354520 |
Method of manufacturing optical element
An optical element comprising at least a plurality of pixels formed on a substrate and partition walls arranged respectively between adjacent pixels is manufactured by a method comprising steps of...
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7349141 |
Method and post structures for interferometric modulation
An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror....
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7341826 |
Method for fabricating a patterned core for a light guide plate
A method for fabricating a patterned core for a light guide plate includes: providing a substrate ( 500 ); coating a photo-resist layer ( 600 ) on the substrate; exposing the photo-resist layer to...
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7341681 |
Method of manufacturing optical fiber probe and for finishing micro material
In a method for manufacturing an optical fiber probe in which an optical fiber is formed as an optical fiber probe by etching a tip section and sharpening a core region of the optical fiber, the...
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7339758 |
Etching method, a substrate with a plurality of concave portions, a microlens substrate, a transmission screen and a rear projection
An etching method is disclosed. The etching method includes the steps of: preparing a substrate 5; forming first and second films 61, 62 each having predetermined internal stress on the...
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7329372 |
Method for producing aspherical structure, and aspherical lens array molding tool and aspherical lens array produced by the same method
A method for producing an aspherical structure according to the invention includes the steps of: forming a layer on a surface of a substrate so that the layer exhibits an etching rate distribution...
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7323123 |
Method of fabricating light-guide plate
A method of fabricating a light-guide plate includes preparing an upper mold frame having an inclined inner surface and a lower mold frame having a space therein, preparing a micro pattern plate...
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7323114 |
Method of making optical elements for an optical disc system
A large diameter glass wafer is pattern-etched to provide a plurality of elongated lens elements arranged side-by-side, the etching leaving small rods in place to keep the lens elements connected...
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7312019 |
Linear grating formation method
A method of forming a linear grating is disclosed. When forming a first resist pattern covering certain surface regions of a substrate, the mask pattern position is shifted and the first resist...
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7294282 |
Method for fabricating an actuator system
An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of said flexures results substantially from variations in intrinsic...
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7294281 |
Optical information recording medium, original disc for optical information recording medium, and method of manufacturing the same
An optical information recording medium, which includes both of a land surface and a groove surface as a recording track and presents high signal quality. The optical information recording medium...
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