|
Match
|
Document |
Document Title |
|
|
7618548 |
Silicon-containing structure with deep etched features, and method of manufacture
We have developed an uncomplicated method of plasma etching deeply recessed features such as deep trenches, of at least 5 μm in depth, in a silicon-containing substrate, in a manner which...
|
|
|
7606132 |
Cantilever-type near-field probe for optical data storage and method of manufacturing the same
Disclosed are a cantilever-type near-field probe capable of easily improving an optical throughput and being applied to a head of an optical data storage and a method of manufacturing the same. An...
|
|
|
7604749 |
Techniques of anisotropic wet etch micromachining for comb drive transducers and resonance frequency reduction
Wet anisotropic etching techniques are well known micromachining apparatus in MEMS technology. The wet anisotropic etchant etch some of the material crystal planes faster than the other. For...
|
|
|
7601620 |
Methods for fabricating nanocoils
Improved nanocoils, systems and methods for fabricating nanocoils. Embodiments enable wet etching techniques for releasing coiling arm structures and forming nanocoils. A method for fabricating...
|
|
|
7597819 |
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films
Etchant solutions comprising a redox buffer can be used during the release etch step to reduce damage to the structural layers of a MEMS device that has noble material films. A preferred redox...
|
|
|
7595539 |
Method for release of surface micromachined structures in an epitaxial reactor
A method for releasing from underlying substrate material micromachined structures or devices without application of chemically aggressive substances or excessive forces. The method starts with the...
|
|
|
7595206 |
Manufacturing method for semiconductor light emitting device
A semiconductor light emitting device can have stable electric characteristics and can emit light with high intensity from a substrate surface. The device can include a transparent substrate and a...
|
|
|
7585417 |
Method of fabricating a diaphragm of a capacitive microphone device
A method of fabricating a diaphragm of a capacitive microphone device is provided. First, a substrate is provided, and a dielectric layer is formed on a first surface of the substrate. Than, a...
|
|
|
7581645 |
Method for manufacturing carbon nanotubes with desired length
A method for manufacturing carbon nanotubes with a desired length includes the steps of: providing an array of carbon nanotubes; placing a mask having at least an opening defined therein on the...
|
|
|
7572300 |
Monolithic high aspect ratio nano-size scanning probe microscope (SPM) tip formed by nanowire growth
A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may...
|
|
|
7563722 |
Method of making a textured surface
A method of micro- and nanotexturing of various solid surfaces in plasma where carbon nanotubes are used as an etch mask. The method allows obtaining textures with feature sizes that can be...
|
|
|
7563382 |
Mask and method of fabricating the same, and method of machining material
A method of fabricating a mask which can endure use for a long time and can be used for forming an isolated pattern with a high aspect ratio. The method includes the steps of: forming a soft...
|
|
|
7563379 |
Dry etching method and photonic crystal device fabricated by use of the same
In a dry etching method in which clusters formed by agglomeration of atoms or molecules are ionized and accelerated as a cluster ion beam for irradiation of an object surface to etch away therefrom...
|
|
|
7562429 |
Suspended device and method of making
A substrate defining a cavity comprising a wide, shallow first portion and a narrow, deep second portion is provided. The first portion of the cavity extends into the substrate from the front side...
|
|
|
7560040 |
Etching method and article etched molded by that method
A tuning-fork crystal wafer 1 A which has legs 11, 12 with grooves 11 c, 12 c is shaped by etching of a crystal substrate 2 . To improve processing precision of the depth of the grooves 11...
|
|
|
7560036 |
System and method for drug delivery and microfluidic applications using microneedles
The invention relates to a method of fabricating a microneedle array in a substrate, a drug delivery device comprising one or more microneedles extending upwards from the front surface of the...
|
|
|
7541007 |
Microreactor and method of use to produce hydrogen by methanol reforming
Microreactor for carrying out methanol reforming for hydrogen production. The microreactor consists of a network of catalyst-packed parallel microchannels of cross-sectional dimensions from 400 to...
|
|
|
7540968 |
Micro movable device and method of making the same using wet etching
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base...
|
|
|
7538927 |
MEMS mirror with short vertical comb teeth and long in-plane comb teeth
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a wafer to form a first support layer having short stationary comb teeth extending from...
|
|
|
7524427 |
Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
Some embodiments of the present invention are directed to techniques for building up single layer or multi-layer structures on dielectric or partially dielectric substrates. Certain embodiments...
|
|
|
7520998 |
Method of fabricating micro actuator having media stage
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage...
|
|
|
7514283 |
Method of fabricating electromechanical device having a controlled atmosphere
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of fabricating or manufacturing MEMS having mechanical structures that...
|
|
|
7514012 |
Pre-oxidization of deformable elements of microstructures
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present...
|
|
|
7511282 |
Sample preparation
Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred...
|
|
|
7510663 |
Method for manufacturing organic molecular device
Disclosed is a method for manufacturing a conductive organic thin film device. An air-bridge type of an upper electrode is formed over a lower electrode by using a sacrificial layer and then a gap...
|
|
|
7507346 |
Method for manufacturing electronic component, and electronic component
A method for manufacturing an electronic component includes preparing an element substrate having a function section for providing a function of an electronic component, and an external-connection...
|
|
|
7504644 |
Method and devices for producing corpuscular radiation systems
The invention pertains to a process for the production of particle beam systems ( 10 - 10″″, 12 - 12 ″), in which at least one first particle beam system ( 10 - 10 ″″) is produced on a...
|
|
|
7501069 |
Flexible structures for sensors and electronics
This invention provides free-standing structures, functionalized free-standing structures and functional devices that are flexible, including nano- and micromachined flexible fabrics comprising...
|
|
|
7501068 |
Method for manufacturing resonator
A method for manufacturing a resonator of the present invention includes the steps of (a) forming a resonator film including a piezoelectric film made of piezoelectric material and (b) preparing a...
|
|
|
7497958 |
Methods of forming capacitors
The invention includes methods of forming reticles configured for imprint lithography, methods of forming capacitor container openings, and methods in which capacitor container openings are...
|
|
|
7494594 |
Method of manufacturing an electrostatic actuator
An electrostatic actuator for increasing a swing (deflection angle) of a movable structure includes a laminate substrate in which a thin film silicon layer is formed on a silicon substrate through...
|
|
|
7494593 |
Method for forming a cantilever and tip
A method is disclosed for forming a single crystal cantilever and tip on a substrate. The method can include the operation of defining an implant area on the substrate with a layer of photoresist....
|
|
|
7482587 |
Circular silicon substrates with thin film membranes for electron microscopy
The present invention disclosure relates to the use of a silicon substrate with a thin film membrane as a transparent substrate for the imaging of biological- and material-related specimens using a...
|
|
|
7481943 |
Method suitable for etching hydrophillic trenches in a substrate
A method suitable for etching hydrophilic trenches into a substrate, such as silicon, is provided. The method comprises etching and sidewall passivation processes for achieving anisotropy....
|
|
|
7479233 |
Mask blank for charged particle beam exposure, method of forming mask blank and mask for charged particle beam exposure
The present invention provides a mask blank used for the charged particle beam exposure made by employing an SOI substrate having a silicon membrane higher reliability in quality, without the...
|
|
|
7479232 |
Method for producing a semiconductor component and a semiconductor component produced according to the method
A method is for producing a semiconductor component, e.g., a multilayer semiconductor element, e.g., a micromechanical component, e.g., a pressure sensor, having a semiconductor substrate, e.g.,...
|
|
|
7476951 |
Selective isotropic etch for titanium-based materials
A process for etching a sacrificial layer of a structure. The structure is exposed to a plasma derived from nitrogen trifluoride for etching the sacrificial layer. The process is selective in that...
|
|
|
7476327 |
Method of manufacture for microelectromechanical devices
A method of manufacturing a microelectromechanical device includes forming at least two conductive layers on a substrate. An isolation layer is formed between the two conductive layers. The...
|
|
|
7473533 |
Membrane arrays and methods of manufacture
The invention relates to G protein-coupled receptor (GPCR) microarrays on porous substrates for structural or functional analyses of GPCRs, and methods of preparing porous substrate surfaces for...
|
|
|
7470631 |
Methods for fabricating residue-free contact openings
A two-step via cleaning process that removes metal polymer and oxide polymer residues from a via with substantially no damage to the via or underlying structures on a semiconductor substrate. The...
|
|
|
7468138 |
Flexural plate wave sensor
A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer,...
|
|
|
7466022 |
Wafer-level seal for non-silicon-based devices
One embodiment disclosed relates to a method for sealing an active area of a non-silicon-based device on a wafer. The method includes providing a sacrificial material over at least the active area...
|
|
|
7462292 |
Silicon carbide imprint stamp
A method of fabricating a silicon carbide imprint stamp is disclosed. A mold layer has a cavity formed therein. A spacer is formed in the cavity to reduce a first feature size of the cavity. A...
|
|
|
7459399 |
Method for manufacturing probe structure of probe card
A method for manufacturing a probe structure of a probe card is disclosed. In accordance with the method of the present invention, a dual etching process of a silicon substrate or an etching...
|
|
|
7459094 |
Method for making a surface acoustic wave device package
A method for making a SAW device package includes the steps of: forming a pattern of a metal layer, that defines transmitting and receiving transducers of a SAW die, on a wafer; forming a pattern...
|
|
|
7459093 |
MEMS mirror made from topside and backside etching of wafer
A process for constructing a micro-electro-mechanical system (MEMS) device includes etching the topside of a silicon wafer to form a first support layer having asymmetric pads. The backside of the...
|
|
|
7455884 |
Atomic layer deposition with point of use generated reactive gas species
A method for atomic layer deposition providing a dispenser unit used to prevent mixing of a precursor gas and an input gas. From the dispenser unit a flow of the input gas is provided over a...
|
|
|
7449122 |
Micro-fabricated electrokinetic pump
An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes...
|
|
|
7445119 |
Chip receptacle, method for fabricating a chip receptacle and chip transport container
Cavities for holding semiconductor chips are etched anisotropically into a semiconductor wafer. An orientation of the wafer in the (100) pulling direction results in geometrically exactly etched...
|
|
|
7443002 |
Encapsulated microstructure and method of producing one such microstructure
A microstructure including in a first layer insulated from a substrate by an insulator layer at least one sensitive element connected to at least one contact pad by an electrical connection and...
|