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8182703 |
Tuning fork resonator element and tuning fork resonator
A tuning fork resonator element that has a base portion, first and second resonating arms extending from the base portion in a first direction, and a support frame sandwiching the first and second...
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8159056 |
Package for an electronic device
A method of forming a device is provided. A substrate having a component is provided and a sacrificial layer is formed over the component. The sacrificial layer includes a cavity portion disposed...
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8158075 |
Etching solution reproducing apparatus and etching solution reproduction method
This invention intends to enable silicon compound to be removed from waste etching solution at a high removal rate and waste etching solution to be recycled without disposing it. The etching...
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8147914 |
Orientation-controlled self-assembled nanolithography using a block copolymer
Disclosed is a structure made of a trench patterned substrate having a pre-determined trench period and a pre-determined mesa to trench width ratio, and a block copolymer on top of the trench...
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8142670 |
Micro-oscillating element and method of making the same
A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first...
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8142672 |
Manufacturing method of opto-electric hybrid board
An opto-electric hybrid board manufacturing method which improves the alignment accuracy of an optical element with respect to a core of an optical waveguide. When a core (7) of an optical...
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8142669 |
Electromechanical element, electric circuit device and production method of those
An electromechanical element includes a mechanically movable element through a hollow formed on a substrate, and a plurality of holes formed in the movable element. In the electromechanical...
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8137572 |
Reflective planar lightwave circuit waveguide
A method of making a planar lightwave circuit (PLC) waveguide capable of being integrated with a surface-mounted component is presented. The method entails etching a silicon substrate to form a...
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8138088 |
Manufacturing method of structure by imprint
A manufacturing method of a structure by an imprint process includes a first imprint step of forming a first resin material layer by applying a first resin material onto a substrate and then...
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8137569 |
Method of fabricating a membrane having a tapered pore
A method of fabricating a membrane having a tapered pore, a polymeric membrane having a tapered pore, and uses of such polymeric membrane are disclosed. The membrane includes apertures of...
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8123961 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method
Methods for fabricating sublithographic, nanoscale arrays of openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are...
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8123963 |
Method for producing a semiconductor component and a semiconductor component produced according to the method
A method for producing a semiconductor component includes forming an n-doped layer in a p-doped layer of the semiconductor component, wherein the n-doped layer comprises at least one of: a...
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8123962 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces
Methods for fabricating sublithographic, nanoscale microstructures arrays including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from...
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8123960 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
Methods for fabricating sublithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed...
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8114300 |
Multi-layer method for formation of registered arrays of cylindrical pores in polymer films
Methods for fabricating sublithographic, nanoscale polymeric microstructures utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
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8114301 |
Graphoepitaxial self-assembly of arrays of downward facing half-cylinders
Methods for fabricating sublithographic, nanoscale microstructures in line arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
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8110117 |
Method to form a recess for a microfluidic device
A method includes forming a recess in a first surface of a substrate, the recess having a width, depth, and height selected to correspond to a width, depth, and height of a fluid chamber, forming a...
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8105496 |
Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer
Improvements in an interferometric modulator that cavity defined by two walls.
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8101091 |
Introducer assembly and method for forming an introducer assembly
An introducer assembly includes a sheath having a sheath proximal end and distal end, and a passage therethrough. The introducer assembly further includes a handle assembly that is mechanically...
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8097173 |
Magnetic porous particles and method of making
The invention provides porous particles that produce a predetermined optical response and that may be manipulated magnetically. A preferred particle of the invention has a porous structure that...
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8097222 |
Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body...
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8097174 |
MEMS device and interconnects for same
A microelectromechanical systems device having an electrical interconnect connected to at least one of an electrode and a movable layer within the device. At least a portion of the electrical...
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8088293 |
Methods of forming reticles configured for imprint lithography
The invention includes methods of forming reticles configured for imprint lithography, methods of forming capacitor container openings, and methods in which capacitor container openings are...
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8083953 |
Registered structure formation via the application of directed thermal energy to diblock copolymer films
Methods for fabricating sublithographic, nanoscale linear microchannel arrays over surfaces without defined features utilizing self-assembling block copolymers, and films and devices formed from...
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8080481 |
Method of manufacturing a nanowire device
The present invention provides a method for manufacturing a semiconductor nanowire device in mass production at a low cost without an additional complex nanowire alignment process or SOI substrate...
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8069565 |
Method of forming a nozzle chamber incorporating an ink ejection paddle and nozzle chamber rim
A method of forming a nozzle chamber of a printhead includes steps of forming a first laminate of sacrificial layers on a substrate, the first laminate of sacrificial layers being formed as a ring...
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8071413 |
Micro-electro-mechanical system (MEMS) sensor and method for making same
The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended...
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8066890 |
Spatial light modulator with multi-layer landing structures
A method of fabricating a spatial light modulator. The method includes providing a first substrate including a first bonding surface, forming a first layer coupled to the bonding surface, wherein...
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8057988 |
Catalyst for microelectromechanical systems microreactors
A microreactor comprising a silicon wafer, a multiplicity of microchannels in the silicon wafer, and a catalyst coating the microchannels. In one embodiment the catalyst coating the microchannels...
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8048322 |
Method for manufacturing thermal interface material having carbon nanotubes
A method for manufacturing a thermal interface material includes the following steps: providing a carbon nanotube array formed on a substrate, the carbon nanotube array having a number of carbon...
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8043513 |
Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a method for forming the same
Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of...
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8039847 |
Printable semiconductor structures and related methods of making and assembling
The present invention provides a high yield pathway for the fabrication, transfer and assembly of high quality printable semiconductor elements having selected physical dimensions, shapes,...
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8034247 |
Manufacturing method of silicon nozzle plate and manufacturing method of inkjet head
A manufacturing method of a silicon nozzle plate, having; a film forming process to provide the film representing an etching mask for etching the silicon substrate on a surface of the silicon...
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8029686 |
Method of fabricating an ink jet nozzle with a heater element
The invention relates to a method of fabricating an ink jet nozzle. The method includes the steps of depositing and etching a passivation layer on a silicon substrate having drive circuitry and an...
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8029851 |
Nanowire fabrication
Techniques for making nanowires with a desired diameter are provided. The nanowires can be grown from catalytic nanoparticles, wherein the nanowires can have substantially same diameter as the...
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8019458 |
Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures
The invention provides a method of processing a wafer using multilayer processing sequences and Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models and libraries that can include one or more...
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8019186 |
Photonic crystal circuit comprising a guided mode adapter and optical system including said circuit coupled with an optical fiber
The invention relates to a photonic crystal circuit comprising a guide produced in a photonic crystal membrane on the surface of a substrate and a mode adapter coupled to said guide, wherein the...
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8012363 |
Metal film protection during printhead fabrication with minimum number of MEMS processing steps
A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle...
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8000001 |
Method of forming polymeric microarray support
The invention comprises a polymeric microarray support (1) for an optical assay arrangement (2) comprising optical means (3, 4, 6) for detection of light emitted from the support. The microarray...
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7998355 |
CPL mask and a method and program product for generating the same
A method of generating a mask for printing a pattern including a plurality of features. The method includes the steps of depositing a layer of transmissive material having a predefined percentage...
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7998356 |
Optical integrated device manufacturing process
The invention relates to a process for manufacturing an integrated optical device. The method involves forming a silicon dioxide multilayer structure on a silicon substrate containing, in a first...
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7997123 |
Nanotipped device and method
A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing...
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7993534 |
Chemical microreactor and method thereof
A method for forming a chemical microreactor includes forming at least one capillary microchannel in a substrate having at least one inlet and at least one outlet, integrating at least one heater...
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7988875 |
Differential etch rate control of layers deposited by chemical vapor deposition
A method and apparatus is provided for controlling the etch profile of a multilayer layer stack by depositing a first and second material layer with differential etch rates in the same or different...
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7981303 |
Method of manufacturing monocrystalline silicon micromirrors
A novel silicon micromirror structure for improving image fidelity in laser pattern generators is presented. In some embodiments, the micromirror is formed from monocrystalline silicon. Analytical-...
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7976714 |
Single SOI wafer accelerometer fabrication process
Methods for producing a MEMS device from a single silicon-on-insulator (SOI) wafer. An SOI wafer includes a silicon (Si) handle layer, a Si mechanism layer and an insulator layer located between...
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7973373 |
Microminiature moving device
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the...
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7968017 |
Stamper for optical disc, method for manufacturing optical disc, and optical disc
This invention relates to a stamper for optical disc and a method for manufacturing an optical disc by using this stamper. A photoresist is applied to a substrate (2) and this photoresist is...
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7951299 |
Method of fabricating a microresonator
A method of fabricating a microresonator is disclosed. Initially, silica is deposited on a substrate, and the substrate is etched to form a pillar, the top portion of which supports the silica. The...
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7950847 |
Breguet overcoil balance spring made of micro-machinable material
The invention relates to a Breguet overcoil balance spring (1) that includes a hairspring (3) mounted in a single part, made of micro-machinable material, and coaxially with a collet (5). According...
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