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6235638 |
Simplified etching technique for producing multiple undercut profiles
A process for producing multiple undercut profiles in a single material. A resist pattern is applied over a work piece and a wet etch is performed to produce an undercut in the material. This first...
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6218264 |
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3)....
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6187412 |
Silicon article having columns and method of making
A silicon article including a silicon base and columns extending from the silicon base. The columns define a gap between the columns which is devoid of material so that the article can act as a...
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6187210 |
Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device
A probe includes an elongated body with a top surface, a bottom surface, a first side wall between the top surface and the bottom surface, and a second side wall between the top surface and the...
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6174820 |
Use of silicon oxynitride as a sacrificial material for microelectromechanical devices
The use of silicon oxynitride (SiO x N y ) as a sacrificial material for forming a microelectromechanical (MEM) device is disclosed. Whereas conventional sacrificial materials such as silicon...
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6165374 |
Method of forming an array of emitter tips
A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres...
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6156243 |
Mold and method of producing the same
(1) Alignment mark transfer portion(s) is/are formed on the transfer molding surface of a mold that is used for press-molding a optical element fixing member and having alignment marks; (2)...
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6156216 |
Method for making nitride cantilevers devices
A method for making a silicon stylus protruding through a nitride layer is used to fabricate nitride micro-apertures, silicon styluses supported by nitride cantilever arms and charge sensitive...
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6156215 |
Method of forming a projection having a micro-aperture, projection formed thereby, probe having such a projection and information processor comprising such a probe
A projection having a micro-aperture is formed by formiNg a dent having a pointed front end on a substrate, then depositing a light blocking material on the substrate except the front end of the...
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6143382 |
Glass substrate having fine holes
A glass substrate having fine holes formed therein by use of a laser beam without cracks or fragmentation occurring. A glass substrate is used in which silver is contained in the form Ag atoms, Ag...
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6139759 |
Method of manufacturing silicided silicon microtips for scanning probe microscopy
A micromechanical sensor probe for a scanned-probe tool comprising a silicon probe and a coating of a refractory metal silicide formed at least on the tip of the probe. Titanium silicide is...
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6136209 |
Perforating and slitting die sheet, methods of constructing the same and paper product produced therefrom
A first method of constructing a die sheet includes covering a die surface with a first, spaced pattern of a first photo-resist material and then covering the first pattern with a second,...
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6136208 |
Manufacturing method for planar microprobe including electrostatic actuator using sacrificial layer technology
The present invention discloses a planar microprobe and method of manufacturing the same. The present invention utilizes semiconductor process technologies that includes electroplating technology...
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6126845 |
Method of forming an array of emmitter tips
A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres...
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6117344 |
Method for manufacturing low work function surfaces
Methods for fabricating nano-structured surfaces having geometries in which the passage of elementary particles through a potential barrier is enhanced are described. The methods use combinations...
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6103479 |
Miniaturized cell array methods and apparatus for cell-based screening
The present invention discloses devices and methods of performing high throughput screening of the physiological response of cells to biologically active compounds and methods of combining...
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6103133 |
Manufacturing method of a diamond emitter vacuum micro device
The present invention intends to provide a manufacturing method of a vacuum micro device, including the steps of forming diamond nuclei on a substrate, forming emitters by etching the substrate...
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6099698 |
Magnetic disc and method of manufacturing same
It is an object of the present invention to provide a method of making a magnetic disk having a uniform textured structure with micro-waviness of fabrication depth of less than 20 nm, preferably...
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6093334 |
Glass wave guide element and method of manufacturing the same
A glass wave guide element, which is small in size and amenable to integration and mass-production, and a method of manufacturing the glass wave guide element are provided. The glass wave guide...
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6093330 |
Microfabrication process for enclosed microstructures
A single-mask process for fabricating enclosed, micron-scale subsurface cavities in a single crystal silicon substrate includes the steps of patterning the substrate to form vias, etching the...
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6086774 |
Method of making released micromachined structures by directional etching
A method of making released structures by using at least two directional etching steps. Cantilevers, bridges and many other structures can be made with the present invention. In a preferred...
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6080325 |
Method of etching a substrate and method of forming a plurality of emitter tips
A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres...
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6059982 |
Micro probe assembly and method of fabrication
A probe assembly including an integral fine probe tip, conductive line with terminal connection for testing semiconductor devices and a method of construction of the probe assembly is described....
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6056887 |
Process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope
A process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope, consists in creating a "positive" first mold by isotropically or anisotropically...
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6051149 |
Coated beads and process utilizing such beads for forming an etch mask having a discontinuous regular pattern
A process for forming an etch mask having a discontinuous regular pattern utilizes beads, each of which has a substantially unetchable core covered by a removable spacer coating. Beads which have a...
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6045711 |
Vacuum seal for field emission arrays
A vacuum seal suitable for use with field emission arrays is described. This seal has high reliability because the expansion coefficients of the metal and the glass are closely matched. Materials...
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6037104 |
Methods of forming semiconductor devices and methods of forming field emission displays
In one aspect the invention includes a method of forming a semiconductor device, comprising: a) forming a layer over a substrate; b) forming a plurality of openings extending into the layer; c)...
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6027659 |
Polishing pad conditioning surface having integral conditioning points
A pad conditioner having integral conditioning points. The pad conditioner includes a conditioning surface having a first integral conditioning point extending from the conditioning surface. For...
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6020215 |
Process for manufacturing microstructure
A microstructure comprising a substrate (1), a patterned structure (beam member) (2) suspended over the substrate (1) with an air-space (4) therebetween and supporting structure (3) for suspending...
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6011261 |
Probe formed of mono-crystalline SI, the manufacturing method thereof, and an information processing device using the probe
A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of...
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6010831 |
Ultra-fine microfabrication method using an energy beam
An ultra-fine microfabrication method using an energy beam is based on the use of shielding provided by nanometer or micrometer sized micro-particles to produce a variety of three-dimensional fine...
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5991484 |
Assembly of an optical component and an optical waveguide
A silicon-on-insulator chip has a location recess formed therein for receiving a laser diode. The location recess includes two non-parallel location surfaces adapted to abut against two reference...
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5985166 |
Chemical etching of fiber probe
A two-phase etching system having an etchant solution and an overlayer of a protective solvent. The physical properties of the etchant solution and the protective solvent are matched to form a...
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5981304 |
Self-alignment process usable in microelectronics, and application to creating a focusing grid for micropoint flat screens
Self-alignment process usable in microelectronics to obtain alignment of at least one group of holes, one of said holes (or large diameter hole) being formed in an upper level and the other hole...
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5944975 |
Method of forming a lift-off layer having controlled adhesion strength
A method of fabricating an emitter plate 12 for use in a field emission device comprising the steps of providing an insulating substrate 18 and forming a first conductive layer 13 on the insulating...
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5939171 |
Micromechanical component
Micromechanical component, wherein there are present, between a movable part (2) and a substrate (1), narrowly bounded spikes or spacers (3) which are composed of dielectric and which prevent the...
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5928525 |
Method for optical fiber with tapered end core protruding from clad
An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for...
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5925259 |
Lithographic surface or thin layer modification
A process for producing lithographic features in a substrate layer is is described, comprising the steps of lowering a stamp (15) carrying an reactant (14) onto a substrate (10), confining the...
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5914274 |
Substrate on which bumps are formed and method of forming the same
A bi-layer bump comprises a base layer composed of sprayed aluminum thick film having a thickness of about 20 μm formed to cover the periphery of the passivation film formed on each pad electrode,...
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5910256 |
Method for manufacturing a diffraction type optical element
In a method for manufacturing a diffraction type optical element having an arbitrary cross-section, a laser beam of a single mode is divided into two and then is again focused on a thin film on a...
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5908562 |
Method for producing optical fiber having core with sharpened tip protruding from light-shielding coating
An optical fiber made up of a core for propagating the light and a cladding covering the core for interrupting light propagated within the core. The optical fiber includes a tip formed by...
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5897790 |
Field-emission electron source and method of manufacturing the same
A withdrawn electrode is formed on a silicon substrate with intervention of upper and lower silicon oxide films each having circular openings corresponding to regions in which cathodes are to be...
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5895580 |
Method for manufacturing cold cathode arrays
A cold cathode emitter structure is described together with two methods for manufacturing it. These methods are cost effective and relatively simple to implement. A key feature is the incorporation...
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5885469 |
Topographical structure of an electrostatic chuck and method of fabricating same
An apparatus for retaining a workpiece and a method of fabricating same. The apparatus contains an electrostatic chuck having a workpiece support surface. The workpiece support surface has...
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5885468 |
Micromechanical component and production method
The component has a movable section (2) over a substrate (1), in which spacers (3) preferably made of fluorocarbon are present on the top side of the substrate and prevent the movable section from...
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5882533 |
Field emission based print head
A photoprinter is described, including a print head comprising parallel substrates. The bottom substrate supports an array of microtips that rest on cathode columns. Gate lines, orthogonally...
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5874010 |
Pole trimming technique for high data rate thin film heads
A method for trimming a pole used in a read-write head comprises the step of depositing a metallic layer on a layer of pole material, patterning the metallic layer so that it can serve as a mask,...
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5863232 |
Fabrication method of micro tip for field emission display device
A method for making a micro tip of an FED device includes the steps converting impurity layer regions into porous semiconductor layer regions by performing an anodic reaction using an HF aqueous...
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5849204 |
Coupling structure for waveguide connection and process for forming the same
A simplified, suitable-to-mass-production and high-reliable coupling structure for connection between optical waveguides or between an optical waveguide and an optical fiber is provided. A tenon is...
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5830527 |
Flat panel display anode structure and method of making
In accordance with the principles of the present invention, there is disclosed herein a structure and method of fabricating an anode plate for use in a field emission device. The method comprises...
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