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7498587 |
Bi-directional filtered arc plasma source
An apparatus for generating plasma includes a cathode having an evaporable surface configured to emit a material comprising plasma and macroparticles; oppositely directed output apertures...
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7381311 |
Filtered cathodic-arc plasma source
A filtered cathodic-arc plasma source of lower plasma losses and higher output plasma current to input current efficiency is disclosed. Plasma filtering is accomplished in a right angle bend...
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7300559 |
Filtered cathodic arc deposition method and apparatus
An apparatus for the application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting system communicating with a first plasma source and a coating chamber in which...
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7160616 |
DLC layer system and method for producing said layer system
The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the...
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7131392 |
Vacuum evaporator
A vacuum evaporator according to the present invention comprises a vacuum chamber, a rod-like evaporation source provided to be liftable into and out of the vacuum chamber, and a work support means...
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7060167 |
Vacuum arc vapor deposition apparatus
A vacuum arc vapor deposition apparatus can form a film of good quality without uselessly increasing a time from start of film deposition to completion thereof even when a trigger electrode induces...
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7033462 |
Vacuum arc vapor deposition process and apparatus
To prevent the film forming characteristic deterioration by a magnetic field of a magnetic filter to thereby make vacuum arc vapor deposition uniform, in the invention, plurality of magnets...
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7029560 |
Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
In the rod target for an arc evaporation source, of which the outer peripheral surface is used as an evaporation surface, the opposite ends thereof in the longitudinal direction thereof are each...
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7025863 |
Vacuum system with separable work piece support
A vacuum system for the treatment of work pieces has an evacuatable treatment chamber having a centrally disposed low voltage arc discharge arrangement and laterally disposed loading opening. A...
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7014738 |
Enhanced macroparticle filter and cathode arc source
A cathode arc source for depositing a coating on a substrate has an anode and a cathode station for a target, a first filter means comprising a filter duct having at least one bend, and first...
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7005047 |
Film deposition apparatus and film deposition method
A particle film deposition apparatus and method are provided, with which ultra fine particles are generated by arc heating. The generated ultra fine particles can be efficiently sucked up into a...
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6998034 |
Vacuum arc deposition apparatus
An arc evaporation source constituting this vacuum arc deposition apparatus has a plurality of cathodes, a trigger electrode, a trigger drive unit, a shutter, and a shutter drive unit. The trigger...
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6989083 |
Method for preparing carbon nano-fine particle, apparatus for preparing the same and mono-layer carbon nanotube
A graphite cathode and a graphite anode are placed opposite each other through an insulating plate having a notch. A voltage is applied between both of the electrodes to generate arc discharge at...
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6936145 |
Coating method and apparatus
A method and apparatus used for the application of plating/coating in a cathodic arc process to improve coating uniformity, deposition rates, quality, cost, packaging, arc triggering, target wear...
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6929727 |
Rectangular cathodic arc source and method of steering an arc spot
The invention provides an arc coating apparatus having a steering magnetic field source comprising steering conductors disposed along the short sides of a rectangular target behind the target, and...
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6923891 |
Copper interconnects
A method for forming a conductive region on a first portion of a substrate, the method being constituted by exposing the first portion to a filtered beam of substantially fully ionised metallic...
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6878248 |
Method of manufacturing an object in a vacuum recipient
A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier...
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6875326 |
Plasma processing apparatus with real-time particle filter
A plasma processing device include a plasma generation unit for generating plasma by using a cathodic arc discharge, first and second magnetic field ducts arranged in a row for transporting the...
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6869509 |
Source for vacuum treatment process
The invention relates to an arc source or a source for vaporizing or sputtering of materials and a method for operating a source. The source comprises an insulated counter-electrode and/or an AC...
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6866753 |
Vacuum arc vapor deposition apparatus and vacuum arc vapor deposition method
A vacuum arc vapor deposition apparatus includes a plurality of magnetic coils for guiding a plasma produced by a vacuum arc evaporating source to the vicinity of a substrate in a film forming...
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6866752 |
Method of forming ultra thin film devices by vacuum arc vapor deposition
A method for providing an ultra thin electrical circuit integral with a portion of a surface of an object, including using a focal Vacuum Arc Vapor Deposition device having a chamber, a nozzle and...
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6855237 |
Pulsed carbon plasma apparatus
The present invention provides a pulsed carbon plasma apparatus to produce a diamond-like carbon coating over an extended object, the coating having a high degree of thickness uniformity achieved...
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6824836 |
Protection overcoat for recording media
A magnetic recording medium comprising a magnetic layer and a protective carbon-containing overcoat comprising a first carbon density, preferably of a low-density carbon, and a second carbon...
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6821399 |
Cathode mounting system for cathodic arc cathodes
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes: an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode...
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6821579 |
Surface treatment method using electric discharge, and an electrode for the surface treatment method
A discharge electrode comprising a material having solid lubricant effect, such as molybdenum, is used to generate discharge in a pulse form between the discharge electrode and a workpiece, the...
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6797131 |
Design of hardware features to facilitate arc-spray coating applications and functions
A method and apparatus for forming a coating on a sputter chamber workpiece. The apparatus generally includes a sputter chamber having at least one workpiece. The at least one workpiece generally...
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6793982 |
ELECTRODE OF GREEN COMPACT FOR DISCHARGE SURFACE TREATMENT, METHOD OF PRODUCING THE SAME, METHOD OF DISCARGE SURFACE TREATMENT, APPARATUS THEREFOR, AND METHOD OF RECYCLING ELECTRODE OF GREEN COMPACT FOR DISCHARGE SURFACE TREATMENT
A green-compact electrode ( 1 ) for discharge surface treatment for use in a discharge surface treatment operation for forming a hard coating film ( 9 ) on the surface of an object ( 2 ) which must...
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6770178 |
Cathodic arc disposable sting shielding
A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft and a...
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6761805 |
Cathode arc source with magnetic field generating means positioned above and below the cathode
A cathode arc source has means for generating first and second magnetic fields, of opposite or reverse direction to each other. The resultant magnetic field includes a null point between the target...
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6736949 |
Filtered cathode arc source deposition apparatus
Deposition apparatus incorporating either a single or multiple filtered cathodic arc (FCA) source for depositing coatings such as tetrahedral amorphous carbon (TAC); metal oxides; compounds and...
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6706157 |
Vacuum arc plasma gun deposition system
A vacuum arc plasma gun deposition system includes a cathode, several anode assemblies that define a plasma channel, a current source for causing electrical current to flow from the anode...
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6702934 |
Pulsed arc molecular beam deposition apparatus and methodology
Deposition of thin films or powders by reactive pulsed arc molecular beam deposition. To produce these films and powders, a reactive or non-reactive gas is pulsed between a pair of electrodes...
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6702931 |
Method for manufacturing a cathodic arc coated workpiece
A method of manufacturing a coated workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an oxygen...
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6692624 |
Vacuum coating apparatus
The present invention provides a vacuum coating apparatus to produce high quality coatings with a low degree of roughness and a high degree of thickness uniformity. The vacuum coating apparatus...
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6635156 |
Producing electric arc plasma in a curvilinear plasmaguide and substrate coating
The present invention relates to a method and apparatus for producing electric arc plasma and for use thereof for deposition coatings on a substrate. Electric arc separated plasma is produced using...
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6602390 |
Coating a workpiece and operating a cathodic arc discharge
A process and apparatus for coating at least one workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an...
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6592726 |
Vacuum arc evaporation method, vacuum arc evaporation system, and rotary cutting tool
A vacuum arc coating process that can form a hard coating layer excellent in both bonding quality with the substrate and surface roughness, a coating machine for this process, and a revolving...
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6579428 |
Arc evaporator, method for driving arc evaporator, and ion plating apparatus
An arc evaporator comprises: an anode; an evaporation source electrode as a cathode; and a current control unit for supplying an AC square wave arcing current across the anode and the evaporation...
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6533908 |
Device and method for coating substrates in a vacuum utilizing an absorber electrode
The invention relates to a device and method for coating substrates in a vacuum, wherein a plasma is to be generated from a target and ionized particles of the plasma are to be deposited on the...
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6524431 |
Apparatus for automatically cleaning mask
An apparatus for automatically cleaning a mask applied to a mask cleaning step after an evaporation process. An RF plasma is used to clean the mask. By isolating the RF plasma generator, the wafer...
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6517692 |
Apparatus for flow-line treatment of articles in an artificial medium
An apparatus for flow-line treatment of articles has two chambers. The first chamber is a vacuum working chamber to treat articles in an artificial atmosphere. First transport means transport...
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6506292 |
Film forming apparatus
The vacuum arc evaporation apparatus removes coarse particles from plasma containing cathode materials generated from a cathode 7 provided to a evaporation source 6 by a vacuum arc discharge,...
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6495002 |
Method and apparatus for depositing ceramic films by vacuum arc deposition
A method and apparatus for depositing a ceramic film on a substrate by vacuum arc deposition, includes a vacuum chamber, a cathode comprised of an electrically conductive ceramic material to be...
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6483678 |
Arc-extinguishing circuit and arc-extinguishing method
An arc extinguishing circuit for use with glow discharges employed in manufacturing thin-film apparatus (such as, sputtering apparatus etc.), and is capable of more rapidly extinguishing arc...
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6471837 |
Vacuum coating installation and coupling device
A vacuum coating installation has at least a central distribution station which can be evacuated and has a transport arrangement driven in a controlled manner essentially along a plane, for the...
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6413387 |
Cathode arc source for metallic and dielectric coatings
A cathode arc source generates positive ions from a non-graphite target. The cathode arc source includes (a) a cathode station to receive the target; (b) a first magnet to generate a first magnetic...
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6409898 |
Cooling system for cathodic arc cathodes
An apparatus for cathodic arc coating is provided. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target connected to the power supply. The cathode...
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6395151 |
Vacuum ARC vapor deposition method and apparatus for applying identification symbols to substrates
An apparatus for applying permanent markings onto products using a Vacuum Arc Vapor Deposition (VAVD) marker by accelerating atoms or molecules from a vaporization source onto a substrate to form...
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6391164 |
Deposition of coatings and thin films using a vacuum arc with a non-consumable hot anode
A process and apparatus for depositing thin films and coatings using a vacuum arc plasma source having hot, non-consumable anode is described. Plasma and macroparticles of the cathode material are...
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6361663 |
Vacuum arc evaporator
The invention relates to a vacuum arc evaporator with which a wide variety of substrates can be provided with various coatings or to which various systems of layers can be applied. The invention is...
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