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7608173 |
Biased retaining ring
A retaining ring for electrochemical mechanical processing is described. The ring has a conductive portion having an upper surface and a lower surface and an insulating portion. The insulating...
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7601248 |
Substrate holder and plating apparatus
The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily...
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7566390 |
Wafer support apparatus for electroplating process and method for using the same
A multi-layered wafer support apparatus is provided for performing an electroplating process on a semiconductor wafer (“wafer”). The multi-layered wafer support apparatus includes a bottom film...
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7534329 |
Frame for holding sheet material taut
A frame for holding sheet material taut comprises a support as well as two legs which extend essentially parallel to one another transversely from the support, on which legs fixing elements are...
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7507319 |
Anode holder
An anode holder is used to hold an anode in a plating tank. The anode holder includes a bar having a conductive portion connected to a power source, a conductive anode shaft attached to the bar,...
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7494576 |
Electroplating apparatus and method for making an electroplating anode assembly
Apparatus for electroplating a workpiece includes an unassembled electroplating anode assembly having weldable first and second structural anode members. The first structural anode member includes...
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7416648 |
Image sensor system for monitoring condition of electrode for electrochemical process tools
A system for use in manufacturing semiconductor devices, is provided. The system includes an electrochemical processing tool and an image sensor. The electrochemical processing tool includes an...
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7384522 |
Ergonomic loading apparatus for electroplating processes
A loading apparatus for use in electroplating processes includes a container designed to sealingly receive a plurality of airfoil blades fitted with gaskets. Each fitted airfoil blade is disposed...
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RE40035 |
Modular ceramic oxygen generator
A ceramic oxygen generator is described which is capable of modular construction to permit the oxygen generation capacity to be expanded. An ionically conducted ceramic electrolyte is formed into a...
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7294243 |
Contact assemblies for electrochemical processing of microelectronic workpieces and method of making thereof
Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assembly ( 400 ) can comprise a support member ( 410 ) that includes an inner wall ( 412 ) which defines...
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7264699 |
Workpiece holder for processing apparatus, and processing apparatus using the same
An inexpensive workpiece holder having high reliability and a processing apparatus equipped with the workpiece holder are provided, in which damage caused by oxygen in the air is prevented. The...
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7214297 |
Substrate support element for an electrochemical plating cell
A contact ring for an electrochemical plating system is provided. The contact ring includes an annular substrate supporting member, a plurality of radially positioned conductive substrate contact...
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7211178 |
Fixture for electro-chemical machining
On a fixture for electro-chemical machining for the production of long, curved cavities ( 11 ) in a component ( 12 ), the working electrode ( 3 ) of the electro-chemical machining tool ( 1 ) is...
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7208070 |
Stent manufacture
The present invention provides improvements in methods for the manufacture of stents. Specifically, the invention provides methods wherein stents are placed on jigs of various designs which...
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7204920 |
Contact ring design for reducing bubble and electrolyte effects during electrochemical plating in manufacturing
A contact ring for use in electroplating of a substrate material is constructed such that fluid (e.g., electrolyte) is allowed to flow radially away from the axis of a toroidal support ring, thus...
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7172184 |
Substrate carrier for electroplating solar cells
A carrier for use in processing of a plurality of wafers or other substrates includes a support frame on which the wafers are mounted and in one embodiment at least one auxiliary frame for holding...
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7138039 |
Liquid isolation of contact rings
Embodiments of the invention may further provide a contact ring for an electrochemical plating system. The contact generally includes a substrate receiving member having a substrate support surface...
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7087144 |
Contact ring with embedded flexible contacts
A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an...
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7070688 |
Electroplating tool and method for selective plating
A tool for electroplating a portion of the surface of each of a plurality of pieces includes a first plate having a plurality of holes, and a second plate having a plurality of retaining elements....
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7067045 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
An apparatus for securing a substrate in an electrochemical deposition system is provided. The apparatus generally includes a substrate support member adapted to receive the substrate and a thrust...
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7025862 |
Plating uniformity control by contact ring shaping
An apparatus for providing an electrical bias to a substrate in a processing system is described. The apparatus generally includes a conductive annular body defining a central opening. The...
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7022211 |
Semiconductor wafer holder and electroplating system for plating a semiconductor wafer
A semiconductor wafer holder including first and second holding members between which a semiconductor wafer is held. The second holding member includes a second conductive element placed in contact...
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6966976 |
Electroplating panel with plating thickness-compensation structures
An electroplating panel having a strip of components to be electroplated. The components are spaced apart from one another along an edge of the strip. The panel includes a main buss and a plating...
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6962649 |
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces
Contact assemblies for electrochemical processing of microelectronic workpieces. The contact assemblies can comprise a support member that includes an inner wall which defines an opening configured...
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6911128 |
Device for decontamination of water
The invention relates to a device for the decontamination of water, particularly of heavy metals and/or arsenic and/or their compounds, by means of electrolysis, wherein the water to be purified is...
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6855235 |
Anode impedance control through electrolyte flow control
Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned...
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6849167 |
Electroplating reactor including back-side electrical contact apparatus
An apparatus for electroplating a workpiece is disclosed in which the apparatus includes a workpiece holding structure. The workpiece holding structure includes a workpiece support having at least...
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6843897 |
Anode slime reduction method while maintaining low current
Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned...
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6695961 |
Carrier serving to supply current to workpieces or counter-electrodes that are to be treated electrolytically and a method for electrolytically treating workpieces
The invention relates to carriers serving to supply current to workpieces to be treated electrolytically or counter-electrodes and a method for the electrolytic treatment of workpieces. The...
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6673218 |
Cathode cartridge for electropating tester
A cathode cartridge (N) for an electroplating tester includes a cathode conductor ( 10 ) that conducts electricity to a surface (Wa) to be plated of a silicon wafer (W) as an object to be plated, a...
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6673219 |
Transverse conveyor for electrodes
The invention relates to a transverse conveyor for electrodes used in the production of metals. This transverse conveyor consists of a transfer device, located below the electrodes to be...
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6663765 |
Method and device for the manufacture of the medical expanding stents
Method and device for manufacturing of expandable cylindrical metal meshes for use in expandable stents and in particular for customized manufacturing. The method includes determining the type and...
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6635159 |
Device for removing deposit created in electrolytic refining or electrowinning
The invention relates to a device for at least partly removing a deposit created in the electrolytic refining or electrowinning of metal from the surface of the mother plate used as an electrode in...
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6607600 |
Electrostatic coating apparatus and method
The invention relates to an intermediate component for protecting hangers associated with electrostatic coating processes. The component is an electrically conductive, pliable, tubular member, and...
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6582570 |
Electroplating apparatus for wheel disk
An electroplating apparatus for wheel disk comprises an electrolytic cell containing electrolytic bath, a cathode plate, an auxiliary anode, at least one anode plate and a driving mechanism. Part...
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6572743 |
Electroplating assembly for metal plated optical fibers
An electrode assembly for electroplating conducting portions of nonconductors comprises an insulating frame having a first projection opposite a second projection. Preferably the insulating frame...
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6569302 |
Substrate carrier
The invention relates to a substrate carrier for holding substrates, especially semiconductor wafers. Good sealing of the wafer surface and electrical contact are made possible in that the...
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6521103 |
Plating clamp assembly
A plating clamp assembly for use with a plating system including a plating bath and an article transport assembly to selectively engage an article to be plated as the article is moved through the...
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6485621 |
Cathode
An improvement to a cathode used in an electrorefining or electrowinning of copper. The cathode has a solid copper head bar with a horizontal groove on its undersurface. The upper edge of a...
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6478934 |
Motorized frame for adjusting the interelectrodic gap in mercury cells
The invention concerns a motorized device for adjusting the interelectrodic gap in mercury cathode electrolysis cells, mainly consisting of a frame, to which a number of anodes are suspended,...
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6454917 |
High throughput and high performance copper electroplating tool
An electroplating tool, which includes at least of a deposition cassette which is installed on a negative electrode and copper piece in an electroplating tank, or a copper rod is installed on the...
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6406542 |
Equipment for treatment of workpieces
In equipment for powder-coating, workpieces such as escalator steps are subjected to a current treatment in an anodizing unit. A conveying means advancing carriers for the workpieces is lowered...
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6342138 |
Clamp for electroplating articles
An electroplating rack includes a cathode flight bar from which depends an insulated rack bar over an acid bath. A clamp is fixed to the rack bar, and has a bridge electrically connected to the...
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6342137 |
Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly...
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6325903 |
Parallel action holding clamp for electroplating articles
A holding clamp device, for releasably holding a thick planar article over ground, comprising: an elongated main arm member, defining first and second opposite end portions; a pair of first and...
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6309517 |
Apparatus for inline plating
This invention comprises a driven conveyor for transporting work pieces into one or more flood plating cells for electroplating a metal onto the planar surfaces and surfaces of the through holes of...
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6267860 |
Method and apparatus for electroplating
Electrolytic plating of a workpiece is enhanced by providing a resistor between the workpiece and electrically conductive support member.
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6162335 |
Apparatus for selectively electroplating an airfoil
A process and apparatus for selectively electroplating the tip portion of an airfoil. The airfoil includes a root portion and a blade portion having a tip. At least part of the blade including the...
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6156169 |
Electroplating anode titanium basket
An electroplating anode titanium basket including a fixing section, a resolution section and a surrounding section. The surrounding section can effectively increase the area of the insoluble anode...
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6152436 |
Coupling assembly for a machining device
A coupling assembly for a machining tool is proposed that serves for mounting a work piece in a torsionally fixed manner. The work piece is received on a pallet that is located on a pallet support...
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