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8168057 |
Balancing pressure to improve a fluid seal
A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the...
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8099861 |
Current-leveling electroplating/electropolishing electrode
A current-leveling electrode for improving electroplating and electrochemical polishing uniformity in the electrochemical plating or electropolishing of metals on a substrate is disclosed. The...
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7993502 |
Coaxial symmetrical completely open electrolytic bath
An electrolytic bath includes a shell, an upper cover joined on an upper end of the shell, an outer supporting member held in the shell, a hollow cylindrical positive electrode plate held in the...
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7803257 |
Current-leveling electroplating/electropolishing electrode
A current-leveling electrode for improving electroplating and electrochemical polishing uniformity in the electrochemical plating or electropolishing of metals on a substrate is disclosed. The...
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7682493 |
Electrode cartridge and a system for measuring an internal stress for a film of plating
The electrode cartridge for measuring an internal stress of a film of plating includes a cathode support, an anode support, a shield plate and an anode shell. The anode support supports an anode...
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7393439 |
Integrated microfeature workpiece processing tools with registration systems for paddle reactors
Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that...
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7384522 |
Ergonomic loading apparatus for electroplating processes
A loading apparatus for use in electroplating processes includes a container designed to sealingly receive a plurality of airfoil blades fitted with gaskets. Each fitted airfoil blade is disposed...
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7347920 |
Production, refining and recycling of lightweight and reactive metals in ionic liquids
Lightweight and reactive metals can be produced from ore, refined from alloy, and recycled from metal matrix composites using electrolysis in electrolytes including an ionic liquid containing a...
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7285195 |
Electric field reducing thrust plate
A method and apparatus for an electrochemical processing cell that is configured to minimize bevel and backside deposition. The apparatus includes a contact ring assembly for supporting a...
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7267749 |
Workpiece processor having processing chamber with improved processing fluid flow
A processing container (610) for providing a flow of a processing fluid during immersion processing of at least one surface of a microelectronic workpiece is set forth. The processing container...
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7264699 |
Workpiece holder for processing apparatus, and processing apparatus using the same
An inexpensive workpiece holder having high reliability and a processing apparatus equipped with the workpiece holder are provided, in which damage caused by oxygen in the air is prevented. The...
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7214297 |
Substrate support element for an electrochemical plating cell
A contact ring for an electrochemical plating system is provided. The contact ring includes an annular substrate supporting member, a plurality of radially positioned conductive substrate contact...
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7204920 |
Contact ring design for reducing bubble and electrolyte effects during electrochemical plating in manufacturing
A contact ring for use in electroplating of a substrate material is constructed such that fluid (e.g., electrolyte) is allowed to flow radially away from the axis of a toroidal support ring, thus...
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7204918 |
High efficiency plating apparatus and method
An improved apparatus for treating plate-like workpieces with a designated chemical solution, including printed circuit boards, includes: (1) a tray for holding the chemical solution, with the tray...
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7138039 |
Liquid isolation of contact rings
Embodiments of the invention may further provide a contact ring for an electrochemical plating system. The contact generally includes a substrate receiving member having a substrate support surface...
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7122101 |
Electrically conductive plastic electrode sealingly embedded in an insulating plastic valve seat
A sensor including at least one electrode (3, 4) which is made of electrically conductive plastic and is connected to one end of an electrical conductor (5, 6). The electrode (3, 4) and conductor...
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7087144 |
Contact ring with embedded flexible contacts
A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an...
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7067045 |
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
An apparatus for securing a substrate in an electrochemical deposition system is provided. The apparatus generally includes a substrate support member adapted to receive the substrate and a thrust...
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6855235 |
Anode impedance control through electrolyte flow control
Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned...
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6843897 |
Anode slime reduction method while maintaining low current
Embodiments of the invention generally provide an electrochemical plating cell having an electrolyte container assembly configured to hold a plating solution therein, a head assembly positioned...
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6740164 |
Plating apparatus and method of manufacturing semiconductor device
Plating apparatus and plating method that can plate more uniformly on a processing surface of a workpiece are provided. The plating apparatus is comprised of a plating solution bathe which is...
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6616817 |
Electrodeposition device
The invention relates to an electrodeposition device, having two or more emission electrodes that can be connected to a common electrical supply line and an electrically insulating electrode...
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6531038 |
Cathode arrangement
A cathode arrangement having a mounting rail (1) and a cathode plate (2) bonded to the mounting rail (1). Two parallel, flanges extending in its longitudinal direction are formed on the underside...
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6521103 |
Plating clamp assembly
A plating clamp assembly for use with a plating system including a plating bath and an article transport assembly to selectively engage an article to be plated as the article is moved through the...
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6478937 |
Substrate holder system with substrate extension apparatus and associated method
An apparatus and associated method that removes electrolyte solution from a substrate, the apparatus comprises a thrust plate and a substrate extension unit. The thrust plate at least partially...
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6391170 |
Anode box for electrometallurgical processes
An anode box sized and configured for retaining an anode plate therein is disclosed for use in an electrolytic tank of the type used for electrowinning or electrorefining. The anode box is...
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6365019 |
Universal fuel basket for use with an improved oxide reduction vessel and electrorefiner vessel
A basket, for use in the reduction of UO2 to uranium metal and in the electrorefining of uranium metal, having a continuous annulus between inner and outer perforated cylindrical walls, with a...
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6355148 |
Diaphragm workholding device for ECM
A workholder for an ECM process comprises a set of jaws which define an interior workpiece holding region are mounted on the surface of a diaphragm which is movable under air pressure from a flat...
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6299745 |
Flexible substrate plating rack
A rack suitable for holding a flexible substrate panel, the rack having a plurality of clamps for providing current to a panel clamped to the rack, the clamps being positioned to uniformly...
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6251251 |
Anode design for semiconductor deposition
An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow...
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6231730 |
Cathode frame
A cathode frame for receiving and retaining a cathode plate for electrowinning and/or electrorefining processes is constructed as an integrally-formed frame body having a base member and side...
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6228231 |
Electroplating workpiece fixture having liquid gap spacer
A fixture for supporting a workpiece during electroplating of a metal upon the workpiece in a conductive electroplating bath includes a non-conductive frame member for receiving the workpiece...
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6190530 |
Anode container, electroplating system, method and plated object
An anode container, electroplating system, method and object so plated. A feature of the invention is that an anode container has an interior cross-sectional area, at or near a lower end thereof,...
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6156169 |
Electroplating anode titanium basket
An electroplating anode titanium basket including a fixing section, a resolution section and a surrounding section. The surrounding section can effectively increase the area of the insoluble anode...
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6146586 |
Dual current method and apparatus for sterilization of medical devices
In order to completely sterilize all of the surfaces of a medical instrument on which biofilms are apt to form, the device is immersed in a container containing an antibiotic solution in a manner...
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6143146 |
Filter system
A filter system includes a tank for holding waste water with an inlet port for receiving waste water from an electroplating process, and an outlet port for dispensing filtered water back to the...
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6113759 |
Anode design for semiconductor deposition having novel electrical contact assembly
An anode assembly includes a perforated anode and an electrical contact assembly attached to the anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in...
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6080288 |
System for forming nickel stampers utilized in optical disc production
A system and method for electro-forming a metal layer on a substrate. The system has a rotary jet planarizer in an electro-forming or galvanic cell. The cell includes a toroidally-shaped manifold...
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6077405 |
Method and apparatus for making electrical contact to a substrate during electroplating
A method and apparatus for electroplating a film onto a substrate. Electrical power is supplied to the plating surface through electrical contact made to contact pads on the underside of the...
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6045669 |
Structure of electric contact of electrolytic cell
The present invention provides a structure of an electric contact of an electrolytic cell, wherein an elongated conductive member is provided as a bus bar 10 on a wall of an electrolytic cell for...
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6036838 |
Method for determining the substance conversion during electrochemical reactions and electrochemical unit
In order to improve a method for determining the substance conversion during areal electrochemical reactions in at least one local surface area between a counterelectrode arrangement of an areal...
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5997701 |
Galvanic deposition cell with a substrate holder
The invention relates to an apparatus for the galvanic deposition of a metal layer on a substrate and comprises a substrate holder connected to a drive shaft that extends in a direction...
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5976331 |
Electrodeposition apparatus for coating wafers
An apparatus may be used to deposit metal or conductive layers upon semiconductor wafers using an electrochemical process. The apparatus comprises a housing for retaining a first electrode (e.g.,...
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5976329 |
Galvanic deposition cell with an adjusting device
This invention relates to an apparatus for the galvanic deposition of a ml layer on a substrate. The apparatus comprises a container for holding an electrolyte, and an anode container filled with...
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5938899 |
Anode basket for continuous electroplating
An anode containment basket for holding soluble anodes in a horizontal plane within the plating bath of a continuous electroplating line. The basket includes a nonconductive conduit having a...
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5908540 |
Copper anode assembly for stabilizing organic additives in electroplating of copper
A process and assembly for stabilizing organic additives in an electrolytic solution while electroplating copper. The process includes forming a protective film on a first surface of an anode and...
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5885427 |
Cast iron anode and method of making
A solid high silicon cast iron elongated anode has a midpoint electrical connection keeping the connection as far as possible from the ends to combat the deleterious pencil effect. The anode is...
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5817220 |
Electroplating apparatus
An electroplating apparatus comprises a rotating cage with a shaft therethrough and connecting seats, each of the connecting seats being tangent to the shaft, and a plurality of containers which...
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5788829 |
Method and apparatus for controlling plating thickness of a workpiece
A method and apparatus for electroplating a workpiece to achieve a uniform plating thickness includes a cathode rack having a hook from which the workpiece is suspended and spaced apart from a...
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5776327 |
Method and apparatus using an anode basket for electroplating a workpiece
A method and apparatus are provided for electroplating a workpiece. The apparatus includes an anode basket containing particles of an electroplating material. A mask is positioned around the anode...
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