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7374656 |
Combined electrochemical system for scale treatment and eradicating Legionella pneumophila bacteria in water supply systems
A combined electrochemical system for scale treatment and eradicating bacteria in water supply systems having: (a) a first electro-chemical cell including: (i) a first metallic tank for receiving a...
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7374646 |
Electrolytic processing apparatus and substrate processing method
The present invention provides an electrolytic processing apparatus which is capable of increasing an in-plane uniformity of a film thickness of a plated film by making more uniform an electric...
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7368049 |
Method and apparatus for electrowinning copper using the ferrous/ferric anode reaction and a flow-through anode
The present invention relates, generally, to a method and apparatus for electrowinning metals, and more particularly to a method and apparatus for copper electrowinning using the ferrous/ferric...
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7357850 |
Electroplating apparatus with segmented anode array
An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The...
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RE40218 |
Electro-chemical deposition system and method of electroplating on substrates
The invention provides an apparatus and a method for achieving reliable, consistent metal electroplating or electrochemical deposition onto semiconductor substrates. More particularly, the...
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7351315 |
Chambers, systems, and methods for electrochemically processing microfeature workpieces
Chambers, systems, and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, an electrochemical deposition chamber includes a processing unit...
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7344623 |
System and method for radially positioning a workpiece for electrochemical machining
A system and method are described for radially positioning a workpiece for electrochemical machining. In one embodiment, a pressurized air chamber is configured to contain pressurized air. In...
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7335291 |
Water treating method, water treating apparatus, and hydroponics system using the apparatus
There are provided a water treating method and water treating apparatus which can significantly improve an effect of eliminating microorganisms contained in water intended for drinking and cooking...
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7326329 |
Commercial production of hydrogen from water
Large quantities of low cost hydrogen free of carbon oxides are required as fuel for the hydrogen economy. Commercial quantities of hydrogen can be produced from the electrolysis of water using a...
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7309408 |
Industrial wastewater treatment and metals recovery apparatus
An apparatus for industrial wastewater treatment and the electrolytic recovery of metals from solutions is disclosed. It comprises two or more plates with electricity conducting surfaces arranged...
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7294244 |
Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece...
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7288172 |
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
A method and apparatus for transmitting electrical signals and fluids to and/or from a microelectronic workpiece. An apparatus in accordance with one embodiment of the invention includes a shaft...
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7267749 |
Workpiece processor having processing chamber with improved processing fluid flow
A processing container ( 610 ) for providing a flow of a processing fluid during immersion processing of at least one surface of a microelectronic workpiece is set forth. The processing container...
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7264704 |
Electrolysis cell for restoring the concentration of metal ions in electroplating processes
It is described an electrolysis cell wherein the anodic dissolution of metals is carried out, in particular of metals characterised by a relatively high oxidation potential, such as copper, or...
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7247223 |
Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces
A method and apparatus for processing a microfeature workpiece. In one embodiment, the apparatus includes a support member configured to carry a microfeature workpiece at a workpiece plane, and a...
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7244348 |
System and method for treatment of ballast water
A system and method for treating ballast water within an ocean going vessel by generating hypochlorite for treating the ballast water. The system comprises one or more hypochlorite electrolytic...
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7238265 |
Electroplating apparatus with functions of voltage detection and flow rectification
The present invention provides a fountain-type electroplating apparatus with functions of voltage detection and flow rectification, comprising: an electroplating tank, a rectification device, and...
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7232507 |
High volumetric efficiency electrochemical cell design for treatment of low concentrations of contaminants in low conductivity water
An electrochemical cell design is disclosed for the particular application of the electrochemical treatment of contaminants in water. The cell is designed to allow the treatment of low...
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7223323 |
Multi-chemistry plating system
Embodiments of the invention generally provide an electrochemical plating system. The plating system includes a substrate loading station positioned in communication with a mainframe processing...
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7217346 |
Water treating method, water treating apparatus, and hydroponics system using the apparatus
There is provided a water treating method which can not only improve an effect of eliminating microorganisms in water intended for cooking and drinking or waste water but also prevent a reduction...
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7211185 |
Method and apparatus for electrocoagulation of liquids
An electrocoagulation treatment device includes a plurality of spaced reaction plates disposed within a reaction chamber. A voltage is applied to selected reaction plates to create an electrical...
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7211176 |
Replaceable chlorinator electrode assembly
The invention relates to an apparatus for electrolytic purification, comprising:
(a) a pressure vessel having at least one access opening, at least one fluid flow inlet, and at least one...
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7208069 |
Device for etching semiconductors with a large surface area
The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a...
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7204918 |
High efficiency plating apparatus and method
An improved apparatus for treating plate-like workpieces with a designated chemical solution, including printed circuit boards, includes: (1) a tray for holding the chemical solution, with the tray...
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7201829 |
Mask plate design
The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate...
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7195701 |
Electrochemical depositions applied to nanotechnology composites
A method of improving the material properties of a composite by electrodepositing various polymers, organic compounds or inorganic compounds onto each individual carbon (graphite) fiber strand,...
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7189313 |
Substrate support with fluid retention band
An apparatus and method for supporting a substrate is provided. In one embodiment, an apparatus for supporting a substrate includes a body having a band extending therefrom. The band is adapted to...
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7179359 |
Cup-shaped plating apparatus
Provided is a cup-shaped plating apparatus which can plate the whole area of a plating target surface with a uniform film thickness. In a cup-shaped plating apparatus including a placement portion...
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7169287 |
Decomposition apparatus and decomposition method
A decomposition apparatus that decomposes a decomposition target is provided. The decomposition apparatus includes a decomposition chamber having a decomposition section that continuously...
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7163665 |
Apparatus for decomposing gaseous aliphatic hydrocarbon halide compounds
A method for decomposing a gaseous aliphatic hydrocarbon halide compound more simply is provided. The method includes the steps of mixing the gaseous aliphatic hydrocarbon halide compound and a...
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7153400 |
Apparatus and method for depositing and planarizing thin films of semiconductor wafers
An electroplating apparatus for depositing a metallic layer on a surface of a wafer is provided. In one example, a proximity head capable of being electrically charged as an anode is placed in...
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7147760 |
Electroplating apparatus with segmented anode array
An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The...
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7135099 |
Water treating method and water treating system
In a circulation system of treatment-object water (waste water), a water treating apparatus and a pH adjuster are provided. A carbon fiber that can collect at least microorganisms is disposed in...
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7118658 |
Electroplating reactor
A reactor for electroplating a workpiece includes a vessel having a ring contact arranged to support a workpiece in a horizontal orientation. In an embodiment of the invention, an electrode is...
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7101465 |
Electrolytic processing device and substrate processing apparatus
There is provided an electrolytic processing device including: a processing electrode to be brought into contact with or close to a workpiece; a feeding electrode for supplying electricity to the...
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7090750 |
Plating
An apparatus and method for treating a substrate to deposit, clean or etch material on a substrate using a first horizontal chuck to which a plurality of substrates is attached and electrically...
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7087117 |
Substrate processing apparatus and substrate processing method
The present invention relates to a substrate processing apparatus useful for plating a substrate or processing a substrate by dipping a substrate in a processing liquid. A substrate processing...
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7067048 |
Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath
A method and apparatus which uses a plating electrode in an electrolyte bath. The plating electrode works to purify an electrolyte polishing solution during the electro-polishing process....
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7048842 |
Electrolysis cell for generating chlorine dioxide
A method for making chlorine dioxide, by passing an aqueous feed solution comprising sodium chlorite into a non-membrane electrolysis cell comprising an anode and a cathode, adjacent to the anode,...
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7048838 |
Ion exchange membrane electrolyzer
The invention provides an ion exchange membrane electrolyzer ensuring a satisfactory circulation of electrolyte, high electrolytic efficiency and great ridigity. An anode chamber partition in a...
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7045040 |
Process and system for eliminating gas bubbles during electrochemical processing
A method and system for preventing gas bubble formation on a selected region of a wafer surface as the surface is brought in contact with a process solution for an electrochemical process is...
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7033481 |
Electroionic processing system
The present invention provides an electroionic processing system having a high frequency alternating current (AC) power source for treating potable water, process water, wastewater, biosolids,...
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7033478 |
Ion separation and removal unit with gas extraction
This invention is applied to any ionized solution of dissolved solids and electrolytes, such as sea water, which is forced through a conduit equipped with a magnetic wall of rectangular...
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7033465 |
Clamshell apparatus with crystal shielding and in-situ rinse-dry
Certain mechanisms of a plating apparatus address problems associated with interaction between plating solutions or other processing solutions and the components of the plating apparatus (such as...
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7033463 |
Substrate plating method and apparatus
A method and apparatus plate a substrate to form wiring by efficiently filling a fine recess formed in a semiconductor substrate with plating metal without a void or contamination. The plating of...
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7025860 |
Method and apparatus for the electrochemical deposition and removal of a material on a workpiece surface
An apparatus for performing an electrochemical process on a metallic surface of a workpiece, comprised of a substantially incompressible workpiece support plate. A platen for supporting the...
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7014740 |
Brown gas mass production apparatus including a line style electrolytic cell
Disclosed is a Brown gas mass production apparatus having a line style electrolytic cell in which an electrolytic cell case having an electrolyte distribution and discharging pipe mounted on the...
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7008536 |
Oil desalting and dewatering
The invention includes a method for dewatering and/or desalting a water-in-oil emulsion comprising introducing a plurality of streams of the emulsion into the electrostatic field under opposed flow...
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7008523 |
Electrolytic cell for surface and point of use disinfection
The present invention is an apparatus and method for disinfecting or sanitizing a desired object. The apparatus includes a container for an aqueous solution; the container may be a spray bottle....
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7005046 |
Apparatus for electro chemical deposition
A system is provided in which a smaller flow of deposition solution is diverted from a larger flow of deposition solution flowing on an electrochemical deposition tool platform. The smaller flow is...
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