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7638030 |
Electrolytic processing apparatus and electrolytic processing method
An electrolytic processing apparatus which, while eliminating a CMP processing entirely or reducing a load on a CMP processing to the least possible extent, can process and flatten a conductive...
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7625468 |
Electrode for electrochemical machining
An electrode containing a dielectric layer on a surface of the electrode and an active zone containing a metal embedded below the surface of the electrode, wherein the electrode is configured to...
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7611617 |
Method of manufacturing a dielectric component, and dielectric components manufactured by such a method
A method of forming a dielectric component, such as a capacitor is disclosed. In such a method, a conductive surface is applied to a dielectric to form a coated dielectric. Then a portion of the...
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7608173 |
Biased retaining ring
A retaining ring for electrochemical mechanical processing is described. The ring has a conductive portion having an upper surface and a lower surface and an insulating portion. The insulating...
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7594987 |
Method and device for electroerosive material machining of a workpiece
A method and an apparatus for electroerosive material machining of a workpiece with an elongated tool electrode are described. The tool electrode is guided in an electrode guide, in which an oval...
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7566385 |
Apparatus adapted for membrane-mediated electropolishing
This invention provides a membrane-mediated electropolishing apparatus for polishing and/or planarizing metal work-pieces. The work-piece is wetted with a low-conductivity fluid. The wetted...
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7524406 |
Processing apparatus including a reactor for electrochemically etching microelectronic workpiece
Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a...
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7524410 |
Methods and apparatus for removing conductive material from a microelectronic substrate
A method and apparatus for removing conductive material from a microelectronic substrate is disclosed. One method includes disposing an electrolytic liquid between a conductive material of a...
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7520968 |
Conductive pad design modification for better wafer-pad contact
An apparatus and method for manufacturing and refurbishing a conductive polishing pad assembly for performing an electrochemical process on a substrate is disclosed. The conductive polishing pad...
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7501049 |
ECM-machine
ECM machine for electrochemically machining metallic workpieces by anodic dissolution of the workpiece by means of an electrolyte and an applied dc voltage, comprising at least one revolving table...
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7479208 |
Electrode for electrochemical reduction
An electrode ( 10 ) is provided for electrochemical reduction of a workpiece ( 20 ) that is to be treated. The electrode ( 10 ) has a predefined contour and contains an electrically conductive...
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7476303 |
Electrolytic processing apparatus and electrolytic processing method
There are provided an electrolytic processing apparatus and an electrolytic processing method which can regenerate an ion exchanger with an enhanced regeneration rate of ion-exchange capacity...
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7473344 |
Segmented counterelectrode for an electrolytic treatment system
In order to even out the electrolytic treatment of workpieces 9 made of electrically non-conductive material and having a very thin base metallising 6, 8, a device is employed in a manner...
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7462273 |
Method and apparatus for forming by electrochemical material removal
When forming metallic components, in particular three-dimensionally curved blades, which constitute a single piece with the blading of turbomachine rotor wheels, the linear oscillation of the...
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7442282 |
Electrolytic processing apparatus and method
An electrolytic processing apparatus according to an embodiment of the present invention includes: a substrate holder for holding a substrate; a first electrode to make contact with the substrate...
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7427340 |
Conductive pad
A method and apparatus for a processing pad assembly for polishing a substrate is disclosed. The processing pad assembly has a conductive processing pad having a plurality of raised features made...
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7425250 |
Electrochemical mechanical processing apparatus
A system for electrochemical mechanical polishing of a conductive surface of a wafer is provided. The system includes a wafer holder to hold the wafer and a belt pad disposed proximate to the wafer...
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7399516 |
Long-life workpiece surface influencing device structure and manufacturing method
A top layer comprises a flexible support and a plurality of hard elements anchored in a binder over the flexible support, and a method of forming the same is provided. In one embodiment, certain...
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7378004 |
Pad designs and structures for a versatile materials processing apparatus
An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate is provided. It includes a rigid member having a top surface...
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7344431 |
Pad assembly for electrochemical mechanical processing
Embodiments of a processing pad assembly for processing a substrate are provided. The processing pad assembly includes an upper layer having a processing surface and an electrode having a top side...
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7344623 |
System and method for radially positioning a workpiece for electrochemical machining
A system and method are described for radially positioning a workpiece for electrochemical machining. In one embodiment, a pressurized air chamber is configured to contain pressurized air. In...
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7341649 |
Apparatus for electroprocessing a workpiece surface
The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the...
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7338586 |
Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus
An insulated vibration-stirring apparatus comprising a vibration generating means containing a vibration motor and a vibrating member attached to that motor, and a vibrating rod attached by an...
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7338580 |
Monolithic printhead with multiple ink feeder channels and relative manufacturing process
A thermal ink jet printhead ( 40 ) for the emission of drops of ink on a print medium ( 46 ) comprises a tank ( 103 ) containing ink ( 142 ), a lamina ( 67 ), a groove ( 45 ) and a plurality of...
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7329335 |
Device providing electrical contact to the surface of a semiconductor workpiece during processing
Substantially uniform deposition of conductive material on a surface of a substrate, which substrate includes a semiconductor wafer, from an electrolyte containing the conductive material can be...
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7318884 |
Apparatus for electrochemical precision machining
On an apparatus for electrochemical precision machining, the tool holder ( 1 ) performing the oscillatory motion is supported by bearing bushes ( 25, 26 ) made of a swelling material within a...
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7311808 |
Device and method for increasing mass transport at liquid-solid diffusion boundary layer
A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact...
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7303462 |
Edge bead removal by an electro polishing process
A method and apparatus for the removal of a deposited conductive layer along an edge of a substrate using an electrode configured to electro polish a substrate edge are disclosed. The electro...
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7297239 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn...
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7294038 |
Process control in electrochemically assisted planarization
In one embodiment, a pad assembly for electro-processing a substrate is provided which includes a first conductive layer having a working surface adapted to contact the substrate during a polishing...
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7294244 |
Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with another independent aspect of the present invention, the workpiece...
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7285036 |
Pad assembly for electrochemical mechanical polishing
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to...
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7270735 |
System and method for holding and releasing a workpiece for electrochemical machining
A system and method are described for holding and releasing a workpiece for electrochemical machining. In one embodiment, a workpiece holder has a workpiece surface that couples to the workpiece...
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7255778 |
Electrochemical machining method and apparatus
An electrochemical machining apparatus comprises a machining chamber for holding ultrapure water, a cathode/anode immersed in the ultrapure water held in the machining chamber, and a workpiece...
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7252746 |
Electropolishing apparatus and method for medical implants
An electropolishing apparatus and method are provided for polishing stents and other medical implants. The apparatus includes a motor that rotates a roller. The roller continuously rotates the...
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7244347 |
Method and system to provide electrical contacts for electrotreating processes
Systems and methods to provide electrical contacts to a workpiece to facilitate electrotreating processes, including electroplating and electroetching processes are presented.
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7238092 |
Low-force electrochemical mechanical processing method and apparatus
The present invention relates to semiconductor integrated circuit technology and discloses an electrochemical mechanical processing system for uniformly distributing an applied force to a workpiece...
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7239121 |
Quantative extraction of micro particles from metallic disk spacer rings
Embodiments of the present invention include a method for quantitatively detecting embedded particles of a disk spacer ring comprising. The method includes dissolving a layer of a disk spacer ring...
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7229535 |
Hydrogen bubble reduction on the cathode using double-cell designs
An apparatus and method for planarizing a surface of a substrate using a chamber separated into two parts by a membrane, and two separate electrolytes is provided. The embodiments of the present...
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7211175 |
Method and apparatus for potential controlled electroplating of fine patterns on semiconductor wafers
Controlled-potential electroplating provides an effective method of electroplating metals onto the surfaces of high aspect ratio recessed features of integrated circuit devices. Methods are...
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7211178 |
Fixture for electro-chemical machining
On a fixture for electro-chemical machining for the production of long, curved cavities ( 11 ) in a component ( 12 ), the working electrode ( 3 ) of the electro-chemical machining tool ( 1 ) is...
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7207878 |
Conductive polishing article for electrochemical mechanical polishing
Embodiments of a polishing article for processing a substrate are provided. In one embodiment, a polishing article for processing a substrate comprises a fabric layer having a conductive layer...
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7204918 |
High efficiency plating apparatus and method
An improved apparatus for treating plate-like workpieces with a designated chemical solution, including printed circuit boards, includes: (1) a tray for holding the chemical solution, with the tray...
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7204926 |
Tandem blisk electrochemical machining
A tandem blisk is mounted in a multiaxis electrochemical machine. A first row of blades is electrochemically machined in sequence. A second row of blades is then electrochemically machined in...
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7201829 |
Mask plate design
The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate...
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7198704 |
Methods of reducing interlayer discontinuities in electrochemically fabricated three-dimensional structures
Disclosed methods reduce the discontinuities between individual layers of a structure that are formed at least in part using electrochemical fabrication techniques. Discontinuities may exist...
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7186322 |
Methods of producing and polishing semiconductor device and polishing apparatus
A method of production and a method of polishing a semiconductor device and a polishing apparatus, capable of easily flattening an initial unevenness of a metal film, excellent in efficiency of...
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7153410 |
Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
Methods and apparatuses for electrochemical-mechanical processing of microelectronic workpieces. One embodiment of an electrochemical processing apparatus in accordance with the invention comprises...
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7144482 |
Method and apparatus for forming grooves within journals and on flat plates
An apparatus, method and means is provided for electrochemical machining of hydrodynamic bearing assemblies in spindle motors. In an aspect, a cartridge is provided that receives and accurately...
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7137868 |
Pad assembly for electrochemical mechanical processing
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to...
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