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8182722 |
Methods for manufacturing zinc oxide base sputtering target and transparent electrically conductive film
A method for manufacturing a zinc oxide based sputtering target includes the step of producing a zinc oxide based sputtering target by using γ-Al2O3 as a dopant material.
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8173474 |
Method of manufacturing solar battery
When a layered structure of a transparent electrode layer and a metal layer is formed as a back side electrode layer over a surface on a side opposite to a side of incidence of light of a thin film...
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8168049 |
Sputtering apparatus and method of manufacturing solar battery and image display device by using the same
A sputtering apparatus of a continuous system that a first target 17a and a second target 17b are arranged to obliquely face a substrate 6 and other targets to form a film while conveying the...
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8153031 |
In-Ga-Zn-Sn type oxide sinter and target for physical film deposition
An oxide sintered body including an indium element (In), a gallium element (Ga), a zinc element (Zn) and a tin element (Sn), and including a compound shown by Ga2In6Sn2O16 or (Ga,In)2O3.
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8080182 |
Oxide sintered body and an oxide film obtained by using it, and a transparent base material containing it
The oxide sintered body mainly consists of gallium, indium, and oxygen, and a content of the gallium is more than 65 at. % and less than 100 at. % with respect to all metallic elements, and the...
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8080141 |
ITO-coated article and/or method of making the same via heat treating
Certain example embodiments of this invention relate to techniques for making a coated article including a transparent conductive indium-tin-oxide (ITO) film supported by a heat treated glass...
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8012317 |
Front electrode including transparent conductive coating on patterned glass substrate for use in photovoltaic device and method of making same
This invention relates to a photovoltaic device including an electrode such as a front electrode/contact. In certain example embodiments, the front electrode of the photovoltaic device includes a...
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7998603 |
Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same
A transparent conductive film which is amorphous, has a high transmittance of light in the visible region of short wavelengths, and is hard to beak with respect to bending is provided. The...
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7960033 |
Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same
A transparent conductive film which is amorphous, has a high transmittance of light in the visible region of short wavelengths, and is hard to beak with respect to bending is provided. The...
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7871502 |
Method for manufacturing chalcopyrite thin-film solar cell
A method for fabricating a chalcopyrite-type thin film solar cell includes a first step of forming onto a Mo electrode layer 2 a precursor including an In metal layer and a Cu—Ga alloy layer by s...
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7829147 |
Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device
A method for hermetically sealing a device without performing a heat treatment step and the resulting hermetically sealed device are described herein. The method includes the steps of: (1)...
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7785449 |
Magnetron unit, magnetron sputtering apparatus, and method of manufacturing electronic device
A magnetron unit includes a plurality of first magnet elements each including first magnets which have the same polarity and are provided on two end portions of a yoke plate made of a magnetic...
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7763151 |
Process for producing transparent conductive laminate
A process for producing a transparent conductive laminate having a completely crystallized, transparent conductive layer on a substrate comprising an organic polymer molding is provided. The...
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7754110 |
Indium-oxide-based transparent conductive film and method for producing the film
The invention provides a transparent conductive film which exhibits low resistance and high transmittance, is an amorphous film, can be relatively readily patterned by etching with a weak acid, and...
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7744949 |
Light emitting device and method of manufacturing method thereof and thin film forming apparatus
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a...
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7744731 |
Sputtering apparatus of forming thin film
A sputtering deposit apparatus capable of depositing a thin film having uniform sheet resistance value is provided. The sputtering deposit apparatus is arranged with at least two magnetron...
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7722929 |
Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device
A sealing method for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device (e.g., a hermetically sealed OLED device) are described herein. The...
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7674357 |
Transparent electroconductive film and process for producing same
There are provided: (1) a process for producing an InSbO4-containing transparent electroconductive film, which comprises the step of sputtering simultaneously: (i) a target (A) for sputtering,...
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7641818 |
Ga-In-O amorphous oxide transparent conductive film, and transparent conductive base material comprising this conductive film formed thereon
A sintered body target for transparent conductive film fabrication is chiefly composed of Ga, In, and O; has a Ga content ranging from 49.1 at. % to 65 at. % with respect to all metallic atoms; is...
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7628896 |
Coated article with transparent conductive oxide film doped to adjust Fermi level, and method of making same
A transparent conductive oxide (TCO) based film is formed on a substrate. The film may be formed by sputter-depositing, so as to include both a primary dopant (e.g., Al) and a co-dopant (e.g., Ag)....
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7575698 |
TI and W containing transparent oxide electrode film
A transparent oxide electrode film is provided to have crystalline indium oxide as its main component in which the indium in the indium oxide is substituted with titanium at a titanium/indium...
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7514023 |
Electrically conductive material
To provide an electrically conductive material excellent in electrical conductivity and capable of exhibiting p-type electrical conductivity. An electrically conductive material containing Sn, W...
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7507357 |
Transparent oxide electrode film and manufacturing method thereof, transparent electroconductive base material, solar cell and photo detection element
A transparent oxide electrode film is provided to have crystalline indium oxide as its main component, in which the indium in the indium oxide is substituted with titanium at a titanium/indium...
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7462372 |
Light emitting device, method of manufacturing the same, and thin film forming apparatus
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a...
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7450233 |
Measuring device for the measurement of optical properties of coated substrates
A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by...
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7347958 |
Oxide sintered body and sputtering target, and manufacturing method for transparent conductive oxide film as electrode
An oxide sintered body for sputtering target is provided wherein the main component is indium oxide, and it contains titanium such that the atomic ratio of Ti/In is 0.003 to 0.120, and the specific...
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7309405 |
Method of forming ITO film
Disclosed is a method of forming an ITO film by optimized sequential sputter deposition of seed and bulk layers having different sputter process conditions, which is applicable to various display...
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7282123 |
Composite sputter target and phosphor deposition method
The invention is a novel sputter target and deposition method for multi-element thin film phosphors for thick film dielectric electroluminescent displays in which the deposited phosphors provide a...
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7135097 |
Box-shaped facing-targets sputtering apparatus and method for producing compound thin film
Disclosed is a box-shaped facing-targets sputtering apparatus capable of forming, at low temperature, a compound thin film of high quality while causing minimal damage to an underlying layer. The...
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7041430 |
Information recording media, manufacturing technique and information recording method
Problem to be solved is that when an information recording medium is repeatedly subjected to recording of information several hundreds times, the atoms in a protective layer are diffused and...
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7008519 |
Sputtering target for forming high-resistance transparent conductive film, and method for producing the film
The present invention provides an ITO sputtering target for forming a high-resistance transparent conductive film which target can be used virtually in a DC magnetron sputtering apparatus and can...
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6995891 |
Electrochromic safety glazing
An electrochromic device is achieved that exhibits the characteristics of impact-resistant safety glass by starting with a solid electrolyte sheet material and a peripheral sealant material...
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6860974 |
Long-Term sputtering method
There are provided techniques of forming a back reflecting layer with constant characteristics throughout long-term film formation and forming a metal oxide film so as to be able to maintain a...
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6822158 |
Thin-film solar cell and manufacture method therefor
A thin-film solar cell including a transparent electrode layer, a semiconductor photovoltaic conversion layer, a rear transparent electrode layer and a rear reflective metal layer, said layers...
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6793782 |
Sputter deposition process for electroluminescent phosphors
The invention is a novel sputter deposition process for thin film phosphors that provide high luminance and colors required for TV applications.
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6685805 |
Method of manufacturing substrate having transparent conductive film, substrate having transparent conductive film manufactured using the method, and touch panel using the substrate
In a method of manufacturing a substrate having a transparent conductive film in which sputtering is carried out on a transparent insulating substrate using an indium oxide/tin oxide target under...
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6679977 |
Method of producing flat panels
A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually...
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6660931 |
Substrate for solar cell, solar cell having the same, and production process of solar cell
A substrate for a solar cell is provided which comprises a support having a metal surface and a zinc oxide film formed on the metal surface and having a water content of 7.5×10−3 mol/cm3 or le...
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6596135 |
Sputtering target, transparent conductive film, and method for producing the same
A sputtering target which comprises an oxide containing Zn, Al and Y, which can be used for a DC sputtering method, and with which a transparent conductive film having a resistivity of from 10−2 t...
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6596134 |
Method of fabricating transparent contacts for organic devices
A multicolor organic light emitting device employs vertically stacked layers of double heterostructure devices which are fabricated from organic compounds. The vertical stacked structure is formed...
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6572940 |
Coatings with a silver layer
A glass sheet includes a coating comprising at least one silver layer and inner and outer antireflection layers. The glass sheet is formed by a magnetron sputtering process. The inner...
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6559593 |
Sputter deposition
A method of sputter deposition onto an organic material, wherein the discharge gas of the sputtering operation is a gas having a spectrum of light emission of a lower energy than that of argon.
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6555233 |
Mask for sputtering
In a sputtering process of forming a transparent electrode film (13) on a color filter (14), the dielectric breakdown of a peripheral portion of the color pattern film (10) due to abnormal...
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6554973 |
Film formation method using sputtering and production method of photovoltaic element using same
In a film formation method comprising introducing a sputtering gas into a film forming chamber and forming a film on a substrate therein, the partial pressure of H2O in an atmosphere inside the...
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6528442 |
Optical transparent film and sputtering target for forming optical transparent film
To provide an optically transparent film containing 0.01 to 20% by weight glass forming oxide consisting of Nb2O5, V2O5, B2O3, SiO2, and P2O6; 0.01 to 20% by weight Al2O3 or Ga2O3; and 0.01 to 5%...
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6495000 |
System and method for DC sputtering oxide films with a finned anode
A system and method have been provided for an improved oxide deposition process using a DC sputtering magnetron. The invention prolongs the useful life of the anode by providing shielded electron...
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6478932 |
Combination process of vacuum sputtering and wet coating for high conductivity and light attenuation anti-reflection coating on CRT surface
A combination process of vacuum sputtering and wet coating produces a high conductivity and light attenuation anti-reflection coating on a substrate of a CRT surface. The coating includes five...
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6475354 |
Deposited film producing process, photovoltaic device producing process, and deposited film producing system
This invention relates to a deposited film producing process that enables reduction of the time for adjusting the conditions for film formation, and brings about an improvement in the...
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6468403 |
Methods for producing functional films
A method for producing a transparent conductive film composed mainly of an oxide by sputtering using a sputtering target capable of forming a transparent conductive film, wherein intermittent...
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6425990 |
Method for fabricating transparent conductive ITO film
A method capable of fabricating a transparent conductive ITO film with a resistivity within a predetermined range until the end of the life of the target when transparent conductive ITO films are...
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