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7249409 |
Method for trimming resistors
There is provided a method and circuit for trimming a functional resistor on a thermally isolated micro-platform such that a second functional resistor on the same micro-platform remains...
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7214295 |
Method for tantalum pentoxide moisture barrier in film resistors
The present invention discloses a method of manufacturing a thin film resistor with a moisture barrier by depositing a metal film layer on a substrate and depositing a layer of tantalum pentoxide...
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7037595 |
Thin hafnium oxide film and method for depositing same
A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer...
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6787047 |
Methods for manufacturing a microstructured sensor
A method for manufacturing a sensor, the sensor including a three-dimensional interdigital electrode arrangement positioned on a substrate, comprising applying a temperature sensing resistor onto...
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6706156 |
Method of making an improved MR sensor
A method of making a magnetoresistance sensor which detects stored information from a medium and which provides an output voltage to a auxiliary circuitry is disclosed. The method comprises...
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6562207 |
Refractory metal silicide alloy sputter targets, use and manufacture thereof
Sputter target, method of manufacture of same and sputter coating process using the target as a sputtering source are disclosed. The sputter target comprises an Me/Si multi-phase, consolidated...
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6413385 |
Thin-film temperature-sensitive resistor material and production process thereof
Described are a thin-film temperature-sensitive resistor material which comprises, at a temperature-sensitive resistor portion, a mixed crystal of a nitride and oxide of a transition metal such as...
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6368729 |
Tungsten film, method of manufacturing the same, and thin-film heater
The invention provides a thin-film heater having a high heat-resisting property and a high resistivity and suitable for low power consumption and for a compact and fine structure, and a method of...
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6238531 |
Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system
An ion beam sputtering system having a chamber, an ion beam source, multiple targets, a shutter, and a substrate stage for securely holding a wafer substrate during the ion beam sputtered...
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6217722 |
Process for producing Ti-Cr-Al-O thin film resistors
Thin films of Ti-Cr-Al-O are used as a resistor material. The films are rf sputter deposited from ceramic targets using a reactive working gas mixture of Ar and O 2 . Resistivity values from 10 4 ...
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6210494 |
High temperature ZrN and HfN IR scene projector pixels
A structure and method of making resistive emitting members which exhibit high resistivity while at the same time providing high temperature operation significantly above that known in the art....
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6203673 |
Method of producing a thin-film platinum temperature-sensitive resistor for a thin-film microstructure sensor
A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the...
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6171922 |
SiCr thin film resistors having improved temperature coefficients of resistance and sheet resistance
A process for increasing the sheet resistance and lowering the temperature coefficient of resistance of a thin film resistor deposited on a wafer, the process comprising ramping the temperature of...
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6153062 |
Magnetoresistive sensor and head
PtMn films are used as antiferromagnetic layers of a dual spin-valve type magnetoresistive sensor. An exchange anisotropic magnetic field is achieved regardless of whether the PtMn film is formed...
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6013160 |
Method of making a printhead having reduced surface roughness
The nucleation efficiency of a thermal ink jet printhead is improved by providing a heater resistor with a thin planar oxide film formed over a conductive heater resistive layer. In a preferred...
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5948216 |
Method for making thin film tantalum oxide layers with enhanced dielectric properties and capacitors employing such layers
The present applicants have discovered a method for making thin films comprising tantalum oxide that enhances the dielectric constant with or without TiO 2 doping. Specifically, applicants have...
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5665209 |
Method for forming refractory metal nitride film
A method for forming a refractory metal nitride film having excellent diffusion barrier properties suitable for a dielectric electrode includes a step of depositing a refractory metal film...
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5585776 |
Thin film resistors comprising ruthenium oxide
In a first embodiment of the invention a layer of ruthenium oxide is reactively deposited onto a substrate, then annealed for TCR adjustment and for stabilization. In a second, bi-layer embodiment...
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5549977 |
Article comprising magnetoresistive material
A magnetoresistance ratio of 200% (absolute value) or more at room temperature in a field of 6T can be achieved in a layer of material of nominal composition XMnO y (X is La and at least one of...
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5468672 |
Thin film resistor and method of fabrication
A method of fabricating a thin film resistor includes a step of sputter depositing a thin film of resistive material such as a chromium diboride compound on an insulative substrate using an argon...
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5446437 |
Temperature sensor
An improved temperature sensor is designed for the sensitive detection of temperature changes. The temperature sensor includes a frame 9 of monocrystalline silicon and a dielectric diaphragm 13...
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5382341 |
Method of making smoke detector
This invention relates to solid-state smoke detectors and smoke (fire) alarm systems, and more particularly to a novel and improved smoke-sensitive element comprising a bismuth oxide film deposited...
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5367285 |
Metal oxy-nitride resistance films and methods of making the same
Film resistors, for example, thin film thermistors having a negative temperature coefficient (NTCR) or near-zero TCR electronics resistors, are formed of an alloy of both an electrically insulating...
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5288380 |
Method for fabrication of thin-film bolometric material
A technique for fabrication of thin-film bolometric materials for use in -ohm resistance multi-detector devices. A group IB periodic table element is reactively co-sputtered with small amounts of a...
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5281485 |
Structure and method of making Alpha-Ta in thin films
The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta...
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5221449 |
Method of making Alpha-Ta thin films
The present invention relates generally to a structure and a method of making Alpha-Ta films, and more particularly, to a structure and a method of making Alpha-Ta in thin films. A seed layer of Ta...
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5218335 |
Electronic circuit device having thin film resistor and method for producing the same
In an electronic circuit device, a thin film resistor is formed on a substrate and includes first regions including one kind of atom such as Cr and exhibiting an electric conductivity and a second...
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5216404 |
SiC thin-film thermistor
A thin-film thermistor element which has an electrically insulating substrate having first and second surfaces opposite to each other and also having a pair of through-holes defined therein so as...
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5139858 |
Cryogenic resistance thermometer comprising a granular nickel in silica film
R.F. sputtered nickel in silica films containing 64 to 70 atomic percent nickel are employed as electrical resistance elements in a resistance thermometer for measuring temperatures of 50° K and...
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5118661 |
Sputtering target for use in fabricating integrated circuit device
A sputtering target for forming a thin film of an alloy on a substrate includes a first component having a first mass number and a second component having a second mass number larger than the first...
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5039570 |
Resistive laminate for printed circuit boards, method and apparatus for forming the same
A relatively large dimensioned sputter coated resistive laminate providing uniform laminate dimensions and resistance tolerances over the surface area thereof and a method for making the laminate...
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5023589 |
Gold diffusion thin film resistors and process
A low-resistance nickel-chromium-based thin film resistor and method for forming same. A nickel-chromium alloy film is coated on at least one side with a layer of gold, the resulting gold-coated...
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4988422 |
Process and apparatus for depositing coatings of high electrical resistance by cathode sputtering
Apparatus for reactive sputtering of an electrically resistive coating onto a planar substrate includes a magnetron cathode with a planar target of a metal which forms one component of the coating....
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4987010 |
Method for manufacturing a film resistor
A method for manufacturing a film resistor for use as a thermal conductivity detector, particularly for gas analyzers. The film resistor is composed of a carrier of insulating material and of a...
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4970487 |
Pressure sensor
A sensor is provided for detecting a physical quantity such as fluid pressure and acceleration of a mass and converting same into electrical signals. The sensor has a diaphragm made of a metal...
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4920635 |
A method of manufacturing a thermo-sensitive resistor
A thermo-sensitive resistor including an electrically insulating substrate, a thin-film heating resistor formed on the substrate and lead wires electrically connected to the thin-film heating...
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4846949 |
High resistivity chromium silicide films
High resistivity chromium silicide coatings that are chemically, physically, and electrically stable at high temperatures are provided. The coatings are applied to substrates, optionally over a...
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4847639 |
Liquid jet recording head and recording system incorporating the same
A liquid jet recording head such as an ink jet recording head has liquid passages having liquid outlets through which a recording liquid is discharged in the form of jet of droplet, and...
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4820393 |
Titanium nitride sputter targets
The present invention provides a sputter target for the deposition of titanium nitride films. The sputter target has a target face comprising titanium nitride having a density of at least 90% of...
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4759836 |
Ion implantation of thin film CrSi.sub.2 and SiC resistors
A thin film resistor is formed using sputtering to deposit a thin film of resistive material on an insulating surface. The sputter target is composed of constituents which are normally present in...
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4758321 |
Method of sputtered depositing chromium-silicon-nitrogen resistor
A resistor having an insulating substrate bearing a thin layer of the alloy CrSi x , where 1≤x≤5 and which layer is doped with nitrogen. The doping may be spread homogeneously throughout the...
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4734709 |
Thermal head and method for fabricating
A thermal head which comprises a heating resistor film made of tantalum nitride orientated in (101) direction by a reactive sputtering process.
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4724106 |
Process for forming organic film
A process for preparing an organic film comprising the steps of ejecting an organic material in a gaseous state from an injection nozzle into a vacuum region to form clusters due to adiabatic...
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4681812 |
Reactively sputtered chrome silicon nitride resistors
A thin film having high electrical resistivity is produced on a substrate by radio frequency sputtering from a chrome/silicon source in a nitrogen/argon atmosphere.
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4682143 |
Thin film chromium-silicon-carbon resistor
An improved thin film resistor material is disclosed which comprises a chromium-silicon-carbon material containing from about 25 to 35 wt. % chromium, about 45 to 55 wt. % silicon, and about 20 to...
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4629514 |
Method of producing II-V compound semiconductors
A method of producing II-V compound semiconductors with greatly reduced intrinsic defect levels comprises the step of causing atoms or ions of at least one member selected from the group consisting...
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4627902 |
Method of producing a resistance element for a resistance thermometer
A resistance thermometer element having a thin layer of platinum metal on an insulating substrate is formed by magnetron sputtering in a gaseous atmosphere containing at least 10% by volume of...
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4620365 |
Method of making a thin-film strain gauge
A thin-film strain gauge and a method for producing it are proposed; the strain gauge is advantageously capable of integration into a thin-film circuit. The strain gauge comprises an elastically...
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4608293 |
Composite substrate for a thin-film magnetic head
A composite substrate for a thin-film magnetic head comprises a substrate material, and an insulating oxide film formed thereon, and defining a smooth and stress-free surface having a surface...
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4545881 |
Method for producing electro-thermal transducer
An electro-thermal transducer is composed of a substrate, a resistive heater element formed on the substrate, and electrically conductive members to supply electric power to the resistive heater...
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