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7374642 |
Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith
A continuous, uninterrupted two-step treatment process capable of forming nanometer scale physical structures on the surface of articles fabricated from metallic, ceramic, glass, or plastic...
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7370416 |
Method of manufacturing an injector plate
A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After...
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7341648 |
Method for coating piston rings for internal combustion engine
The invention relates to a method for coating piston rings ( 10 ) for internal combustion engines, wherein at least the bearing surface of the piston ring is provided with an anti-abrasion and...
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H002209 |
Large area metallization pretreatment and surface activation system
A large area metallization pretreatment and surface activation system that uses an electron beam-produced plasma capable of delivering substantial ion and radical fluxes at low temperatures over...
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7314688 |
Method of producing a reflection mask blank, method of producing a reflection mask, and method of producing a semiconductor device
A reflection mask blank and a method of producing a reflection mask blank by forming, on a substrate, at least a multilayer reflection film for reflecting exposure light and an absorber layer...
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7309405 |
Method of forming ITO film
Disclosed is a method of forming an ITO film by optimized sequential sputter deposition of seed and bulk layers having different sputter process conditions, which is applicable to various display...
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7300556 |
Method for depositing a thin film adhesion layer
A method of physical vapor deposition (PVD) is disclosed in which xenon is used as the operating gas in the vacuum chamber in the deposition of an adhesion layer, preferably silicon, which allows...
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7264741 |
Coater having substrate cleaning device and coating deposition methods employing such coater
A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device...
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7244341 |
Method to achieve low and stable ferromagnetic coupling field
A method for making a spin valve includes providing a substrate; depositing a first ferromagnetic layer having a first surface on the substrate; depositing a spacer layer having a second surface;...
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7229532 |
Sputtering apparatus
A sputtering apparatus for forming a film by a physical gas-phase growth on a substrate having a irregular or flat shape is provided including three or more axes for independently varying a...
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7204921 |
Vacuum apparatus and vacuum processing method
A vacuum apparatus which can easily regenerate plasma is provided. A matching box used in the vacuum apparatus can vary the impedance thereof by varying the magnitudes of the inductance of variable...
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7204013 |
Method of manufacturing a magnetoresistive sensor
In a method of forming a magnetoresistive sensor, first and second magnetic leads are formed. Next, a junction of magnetic and electrically conductive material is formed between the first and...
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7122100 |
Porous getter devices with reduced particle loss and method for manufacturing same
A method for reducing the loss of particles from the surface of porous getter bodies is taught herein. The method consists in producing on the surface of the porous getter a thin layer of a metal...
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7062348 |
Dynamic mask for producing uniform or graded-thickness thin films
A method for producing single layer or multilayer films with high thickness uniformity or thickness gradients. The method utilizes a moving mask which blocks some of the flux from a sputter target...
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7048836 |
Thermal-insulating material having an essentially magnetoplumbitic crystal structure
Thermal-insulating material provided on a metal substrate by means of an EB-PVD process includes a metal having a substantially magnetoplumbitic crystal structure and having a chemical composition...
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7037595 |
Thin hafnium oxide film and method for depositing same
A thin layer of hafnium oxide or stacking of thin layers comprising hafnium oxide layers for producing surface treatments of optical components, or optical components, in which at least one layer...
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7007373 |
Method of manufacturing enhanced spin-valve sensor with engineered overlayer
A method for making an enhanced spin valve sensor with engineered overlayer for sensing magnetically recorded information on a data storage medium. The method includes forming a ferromagnetic free...
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6998028 |
Methods for forming superconducting conductors
A method for producing a superconducting conductor is disclosed, including providing a substrate, depositing a buffer film having a biaxial texture to overlie the substrate by reactive sputtering,...
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6994775 |
Multilayer composites and manufacture of same
The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam...
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6982132 |
Rechargeable thin film battery and method for making the same
A rechargeable, stackable, thin film, solid-state lithium electrochemical cell, thin film lithium battery and method for making the same is disclosed. The cell and battery provide for a variety...
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6923891 |
Copper interconnects
A method for forming a conductive region on a first portion of a substrate, the method being constituted by exposing the first portion to a filtered beam of substantially fully ionised metallic...
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6921463 |
Method of manufacturing electrode for lithium secondary cell
An electrode for a lithium secondary cell capable of attaining excellent charge/discharge characteristics with high discharge capacity is obtained by properly controlling a component of a collector...
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6905578 |
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
An apparatus and method for depositing plural layers of materials on a substrate within a single vacuum chamber allows high-throughput deposition of structures such as these for GMR and MRAM...
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6878240 |
Apparatus and method for obtaining symmetrical junctions between a read sensor and hard bias layers
A sputtering system is provided with a substrate and a sputtering material layer that are located in a sputtering chamber. The sputtering material layer has a sputtering surface where atoms of the...
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6869508 |
Physical vapor deposition apparatus and process
A PVD process and apparatus ( 120 ) for depositing a coating ( 132 ) from multiple sources ( 110, 111 ) of different materials. The process and apparatus ( 120 ) are particulaity intended to...
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6858115 |
Process for reforming surface of substrate, reformed substrate and apparatus for the same
Sputtering particles are deposited immediately after activating a surface of a substrate composed of a carbon-containing material. Accordingly, a process for reforming a surface of a substrate, a...
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6843891 |
Apparatus for sputter deposition
In one embodiment of this invention, the apparatus for sputter deposition within an evacuated volume comprises a compact gridless ion source into which an ionizable gas is introduced and from which...
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6835289 |
Particle implantation apparatus and particle implantation method
The particle implantation apparatus comprises a target, an ion beam source, a target scanning mechanism, a slit plate, a holder, and a holder scanning mechanism. The target is used for sputtering....
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6824654 |
Method of making a cube
A cube used to perform optical functions in a system, such as beam splitting or polarizing, or both, is manufactured by optically contacting a coated prism with an uncoated prism. The coated prism...
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6821624 |
Amorphous carbon covered member
For machine parts, cutting tools and molds used under extremely high contact pressures, an amorphous carbon film is provided which has a sufficient adhesion to a substrate. The amorphous carbon...
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6809066 |
Ion texturing methods and articles
Ion texturing methods and articles are disclosed.
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6793778 |
Method of fabricating slider pads for a transducer operating with moving magnetic media
A method for fabricating a transducer with landing pads without edge fences is described. Preferably an adhesion layer and then the pad layer are deposited in voids in a photoresist. The thickness...
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6783874 |
Magnetic sensor having second antiferromagnetic layers and two types of electrode layers on free magnetic layer and manufacturing method thereof
First electrode layers are formed on second antiferromagnetic layers, and in a step separate from the above, second electrode layers are formed above internal end surfaces of the second...
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6783637 |
High throughput dual ion beam deposition apparatus
An ion beam deposition system for sputtering material layers comprising a vacuum chamber, a substrate positioned in the vacuum chamber, a first target holder capable of holding at least one target...
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6783635 |
Spin valve sensor free layer structure with a cobalt based layer that promotes magnetic stability and high magnetoresistance
A method of making a nickel iron (NiFe) layer and a cobalt or cobalt based layer of a free layer structure forms the cobalt or cobalt based layer by oblique ion beam sputter deposition with the...
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6764579 |
Solar management coating system including protective DLC
A substrate is coated with a solar management coating system including at least one infrared (IR) reflective layer. A diamond-like carbon (DLC) inclusive protective coating system (e.g., including...
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6761803 |
Large area silicon cone arrays fabrication and cone based nanostructure modification
A method and an apparatus have been developed to fabricate large area uniform silicon cone arrays using different kinds of ion-beam sputtering methods. The apparatus includes silicon substrate as...
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6755944 |
Ion beam deposition targets having an interlocking interface and a replaceable insert
An ion beam deposition target source consisting of a removable, centrally located inner insert surrounded by an outer region. The insert can be removed and replaced when eroded, while the outer...
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6753538 |
Electron beam processing
A method and apparatus for electron beam processing using an electron beam activated gas to etch or deposit material. The invention is particularly suitable for repairing defects in lithography...
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6743369 |
Method for manufacturing electrode for secondary battery
A method of manufacturing an electrode for a secondary battery by depositing a thin film composed of active material on a current collector in which a surface-treated layer such as an...
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6736942 |
Freestanding reactive multilayer foils
Reactive foils and their uses are provided as localized heat sources useful, for example, in ignition, joining and propulsion. An improved reactive foil is preferably a freestanding multilayered...
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6726812 |
Ion beam sputtering apparatus, method for forming a transparent and electrically conductive film, and process for the production of a semiconductor device
An ion beam sputtering apparatus comprising: a first means for generating an ion beam and directing said ion beam in a prescribed direction, a second means for supporting a target at a position...
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6716322 |
Method and apparatus for controlling film profiles on topographic features
A deposition system includes a substrate holder supporting a substrate defining at least one topographical feature. In addition, the system includes a deposition plume that is directed toward the...
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6676811 |
Method of depositing nanoparticles for flux pinning into a superconducting material
A method of depositing nanoparticles for flux pinning into a superconducting material is described. According to the method of the present invention, a target made of superconducting material and a...
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6676741 |
Methods for producing enhanced interference pigments
Methods and apparatus are provided for uniformly depositing a coating material from a vaporization source onto a powdered substrate material to form a thin coalescence film of the coating material...
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6669824 |
Dual-scan thin film processing system
A deposition system is described. The deposition system includes a deposition source that generates deposition flux comprising neutral atoms and molecules. A shield defining an aperture is...
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6663753 |
Method of making coated article including DLC inclusive layer over low-E coating
A substrate is coated with a low-E coating system including at least one infrared (IR) reflective layer. A diamond-like carbon (DLC) inclusive protective coating system (e.g., including at least...
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6641704 |
Method for manufacturing an optical filter having laminate film
A plurality of composite target materials containing a plurality of metal elements and oxygen, wherein the mix ratio of the metal elements is different individually for each of the target...
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6635124 |
Method of depositing a thermal barrier coating
A process of forming a ceramic coating on a component. The process generally entails placing the component in a coating chamber containing oxygen and an inert gas, heating a surface of the...
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6620527 |
Hillock-free aluminum wiring layer and method of forming the same
A hillock-free wiring layer and method of forming the same are provided. The wiring layer includes at least two aluminum (Al) layers formed on a substrate, and each of the Al layers includes Al...
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