|
Match
|
Document |
Document Title |
|
|
4495044 |
Diamondlike flakes
A carbon coating (36) is vacuum arc deposited on a smooth surface of a target (10) which is simultaneously ion beam sputtered. The bombarding ions have sufficient energy to create diamond bonds....
|
|
|
4490229 |
Deposition of diamondlike carbon films
A diamondlike carbon film is deposited in the surface of a substrate by exposing the surface to an argon ion beam containing a hydrocarbon. The current density in the ion beam is low during initial...
|
|
|
4486286 |
Method of depositing a carbon film on a substrate and products obtained thereby
There is disclosed a method for depositing a diamond or diamond-like carbon film on at least one substrate employing a hydrocarbon gas and at least one gas which preferentially removes by chemical...
|
|
|
4460436 |
Deposition of polymer films by means of ion beams
A patterned polymer film is deposited on a substrate by pattern-wise exposing a monomer vapor to a beam of ions and dry developing by etching with oxygen plasma.
|
|
|
4457803 |
Processing method using a focused ion beam
A processing method using a focused ion beam is proposed which uses a focused ion beam radiation apparatus. When a specimen is irradiated with the focused ion beam in order to be etched, the...
|
|
|
4457950 |
Process for producing wiring circuit board
A wiring circuit board with a fine wiring pattern free from disconnection and poor insulation is produced by forming an insulating layer consisting of at least two insulating substances having...
|
|
|
4450031 |
Ion shower apparatus
An ion shower apparatus comprising a plasma formation chamber in which plasma is produced so as to produce ions, a single ion extraction grid disposed in one portion of the plasma formation chamber...
|
|
|
4437962 |
Diamondlike flake composites
A carbon coating (36) is vacuum arc deposited on a smooth surface of a target (10) which is simultaneously ion beam sputtered. The bombarding ions have sufficient energy to create diamond bonds....
|
|
|
4434038 |
Sputtering method and apparatus utilizing improved ion source
Method and apparatus for sputtering an element with a magnetron plasma source where a plasma is formed between two generator cathode surfaces of the source and a generator anode disposed adjacent...
|
|
|
4430183 |
Method of making coherent multilayer crystals
A new material consisting of a coherent multilayer crystal of two or more elements where each layer is composed of a single element. Each layer may vary in thickness from about 2 Å to 2500 Å....
|
|
|
4424103 |
Thin film deposition
Disclosed is a method and apparatus for thin film deposition comprising bombarding a target obliquely in a vacuum chamber with a linear ion gun. The linear ion gun generates an ion beam which...
|
|
|
4419203 |
Apparatus and method for neutralizing ion beams
Apparatus is described for neutralizing high intensity ion beams. A technique for neutralizing a positive ion beam from internally plasma produced electrons is provided whereby electrons are added...
|
|
|
4419201 |
Apparatus and method for plasma-assisted etching of wafers
In a plasma-assisted etching apparatus and method designed to pattern aluminum or polysilicon, surfaces in the reaction chamber are coated with a layer of aluminum oxide. Contamination of wafers...
|
|
|
4416755 |
Apparatus and method for producing semiconducting films
Apparatus and method for producing semiconducting films on a substrate in a vacuum chamber comprising a plasma generator, means for directing and accelerating an ion beam from the plasma to a...
|
|
|
4412905 |
Vacuum deposition apparatus
A vacuum deposition apparatus including a cathode, an anode associated with the substrate to be coated and permanent magnet means whose lines of force are directed substantially parallel to the...
|
|
|
4411733 |
SPER Device for material working
A segmented plasma excitation and recombination (SPER) device is employed in a deposition scheme in which the plasma generated in the gap between adjacent electrodes is formed into a beam of...
|
|
|
4407061 |
Fabrication procedure using arsenate glasses
A fabrication technique is described for making various devices in which a certain type of glass is used as a surface protection layer. The glass layers are formed by particle bombardment...
|
|
|
4407933 |
Alignment marks for electron beam lithography
In a fabrication sequence for VLSI MOS devices, an advantageous alignment mark for a wafer to be directly processed by electron beam lithography is made of tantalum disilicide protected by a...
|
|
|
4407712 |
Hollow cathode discharge source of metal vapor
A hollow cathode discharge device is disclosed for ion plating a substrate with high temperature metal vapor. A hollow cathode tube is adapted to receive pellets of the high temperature metal at a...
|
|
|
4404233 |
Ion implanting method
The ion implantation is performed in a manner to vary the angle between an ion beam and an article to be implanted with ions, whereby it can be accomplished with remarkable ease while providing the...
|
|
|
4389299 |
Sputtering device
The present application discloses a sputtering device comprising a target electrode having a target and a flat magnet located under the target and constituted by an annular magnetic pole having one...
|
|
|
4381453 |
System and method for deflecting and focusing a broad ion beam
A method and system for deflecting a broad ion plasma beam which includes an ion source for forming an ion plasma, an extraction means for extracting a broad ion plasma beam from the ion plasma,...
|
|
|
4376688 |
Method for producing semiconductor films
A method for producing semiconducting films on a substrate wherein a plasma of a reactive gas is generated and an ion beam from the plasma is directed and accelerated toward a target of material of...
|
|
|
4358783 |
Superconducting thin films
This invention relates to granular metal and metal oxide superconducting films formed by ion beam sputter deposition. Illustratively, the films comprise irregularly shaped, randomly oriented, small...
|
|
|
4351712 |
Low energy ion beam oxidation process
A surface reaction process for controlled oxide growth is disclosed using a directed, low energy ion beam for compound or oxide formation. The technique is evaluated by fabricating Ni-oxide-Ni and...
|
|
|
4278890 |
Method and means of directing an ion beam onto an insulating surface for ion implantation or sputtering
A beam of ions is directed under control onto an insulating surface by supplying simultaneously a stream of electrons directed at the same surface in a quantity sufficient to neutralize the overall...
|
|
|
4260466 |
Method of producing magnetic recording medium
A method of producing a magnetic recording layer on a support comprising simultaneously depositing a ferromagnetic material and a polymer on a support using a vapor deposition technique such as...
|
|
|
4250009 |
Energetic particle beam deposition system
An energetic particle beam is accelerated towards a sputtering target. The target is located at an angle to the path of the beam (although it need not be). The target material which is dislodged by...
|
|
|
4248687 |
Method of forming transparent heat mirrors on polymeric substrates
Transparent heat-mirrors are disclosed which are formed from tin-doped indium oxide films or antimony-doped tin oxide films deposited onto polymeric substrates. Low temperature deposition...
|
|
|
4235662 |
Layer of crystalline silicon having (111) orientation on (111) surface of lithium aluminum
Low strain heteroepitaxy of (111) silicon on (111) lithium aluminum between the reconstructed 7×7 surface of (111) silicon and a 6×6 array of aluminum atoms on the surface of the (111) lithium...
|
|
|
4218495 |
Schottky barrier type solid-state element
A Schottky barrier type solid-state element and a method of producing the same, the Schottky barrier type solid-state element comprising a Schottky barrier type element portion consisting of a...
|
|
|
4173522 |
Method and apparatus for producing carbon coatings by sputtering
A method for producing carbon coatings by sputtering comprises placing the target material to be sputtered which is made of a fibrous carbon material such as paper, velvet, wood, etc. which has...
|
|
|
4161418 |
Ionized-cluster-beam deposition process for fabricating p-n junction semiconductor layers
A p-n junction type solid-state element having at least a pair of p-n junction type semiconductor layers formed of a p-type semiconductor and an n-type semiconductor joined with each other and a...
|
|
|
4152478 |
Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate
The present ion source called "Vaporized-Metal Cluster Ion Source" is adapted to produce ionized vapor aggregate (ionized cluster) instead of atomic or molecular ions in conventional ion sources....
|
|
|
4147573 |
Method of depositing III-V compounds on group IV element wafers by the cluster ion technique
A method of producing a compound semiconductor wafer which comprises cleaning the surface of a monocrystalline substrate of a group-IV element semiconductor by ion beam etching in a high vacuum,...
|
|
|
4145481 |
Process for producing elevated temperature corrosion resistant metal articles
A process for providing coatings on metal articles whereby the articles will be resistant to corrosion at elevated temperatures. The process involves the application of an overlay on an article...
|
|
|
4140546 |
Method of producing a monocrystalline layer on a substrate
A monocrystalline layer is vapor-deposited on a substrate surface while substantially simultaneously such surface is irradiated with an ion beam having ions with a kinetic energy of at least 10...
|
|
|
4120700 |
Method of producing p-n junction type elements by ionized cluster beam deposition and ion-implantation
A p-n junction type solid-state element having a substrate, a substrate electrode coated on the substrate, a p-n junction type semiconductor layer coated on the substrate having the substrate...
|
|
|
4112137 |
Process for coating insulating substrates by reactive ion plating
An insulating substrate, such as a glass windscreen, is coated with a conductive coating of an oxide of at least one metal by a process in which the substrate is subjected, in a rarefied oxygen...
|
|
|
4108751 |
Ion beam implantation-sputtering
Material is deposited onto and implanted into a substrate by directing a beam of ions against a target, comprised of the material to be deposited, so as to sputter neutral particles and ionized...
|
|
|
4091138 |
Insulating film, sheet, or plate material with metallic coating and method for manufacturing same
This invention provides a method for forming a dense, electrically conductive, metallic coating having a sufficient adherence without use of an adhesive on an insulating film, sheet, or plate such...
|
|
|
4057476 |
Thin film photovoltaic diodes and method for making same
Photovoltaic diodes prepared by the methods of the invention include p-n (or n-p) heterojunction or homojunction diodes as well as Schottky barrier diodes where both elements of the diode comprise...
|
|
|
4045318 |
Method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer
This invention pertains to a method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer wherein the poly(olefin sulfone) layer is exposed to ultra violet...
|
|
|
4033843 |
Simple method of preparing structurally high quality PbSnTe films
The method of the present invention comprises depositing by sputtering, from a single target or source, a thin high quality single crystal film in a predictable and repeatable manner having the...
|
|
|
4028206 |
Method for cool deposition of layers of materials onto a substrate
In systems in which material is deposited on a substrate in such a way that substantial heating of the substrate by radiant transmission occurs, such heating is reduced by first depositing a...
|
|
|
4010291 |
Method of making a low resistance indium oxide conductive film
A low resistance indium oxide conductive film is made on a substrate in an atmosphere for vacuum evaporation or sputtering where aqueous vapor or gas mixed with the vapor is introduced or wherein...
|
|
|
4006268 |
Vapor collimation in vacuum deposition of coatings
An improved method is disclosed for coating substrates, such as turbine engine parts, at high rates by a physical vapor deposition process. The substrate to be coated and a vapor source, such as a...
|
|
|
3953619 |
Method for ionization electrostatic plating
In ionization electrostatic plating, a cathode is incorporated separately of the article subjected to plating which has conventionally been adapted to function as makeshift cathode. The electric...
|
|
|
3941630 |
Method of fabricating a charged couple radiation sensing device
Method of fabricating an image sensing array, such as one of the charge coupled device (CCD) type, with a set of transparent insulated conductors over the image receiving surface. A transparent...
|
|
|
3898496 |
Means for obtaining a metal ion beam from a heavy-ion cyclotron source
A simple method for producing a high intensity metal ion beam from a high-powered Penning-type ion source in a cyclotron is provided. A small amount of an inert support gas maintains the usual...
|