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6197164 |
Method and apparatus to improve the uniformity of ion beam deposited films in an ion beam sputtering system
An ion beam sputtering system having a chamber and a target, a substrate, and a movable flux regulator located between the target and the substrate in the chamber. The position of the movable flux...
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6190511 |
Method and apparatus for ion beam sputter deposition of thin films
A technique for ion beam sputter deposition of optical coatings. The technique includes the following features (i) an assist chemical emitted towards the sputter target to oppose the tendency of...
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6174592 |
Composite glass and method for producing a coated plastic foil, preferably therefor
A compound glass arrangement comprises between two glass layers (5a, 5b) and embedded between two foils (3) a layer carrier foil (1). On the carrier foil (1) there is provided a coating (2) which...
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6165567 |
Process of forming a semiconductor device
A film is formed over a substrate using a physical vapor deposition method. When using ionized metal plasma physical vapor deposition, the deposition chamber configuration or operating parameters...
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6162495 |
Protective overcoat for replicated diffraction gratings
An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin...
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H001924 |
Load-adaptive nanocrystalline carbon/amorphous diamond-like carbon composite and preparation method
Nanocrystalline carbide/diamond-like carbon composite films and synthesis method near room temperature are described wherein combined magnetron sputtering and pulsed laser ablation produce plasma...
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6153061 |
Method of synthesizing cubic boron nitride films
A method of forming cubic phase boron nitride films in which a hexagonal boron nitride film target is positioned in front of an RF magnetron sputtering gun and is impacted with ions to cause atoms...
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6149778 |
Article comprising fluorinated amorphous carbon and method for fabricating article
The invention provides a device containing a low κ, hydrogen-free a-C:F layer with good adhesion and thermal stability. It was found that the combination of desirable properties was attainable by...
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6126790 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as...
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6117280 |
Duplex coated steel composite products and method of manufacturing them
Duplex coated steel composite products comprising a first layer of a nitrd layer formed by applying glow discharge at a current density from 0.001 to 2.0 mA/cm 2 to the surface of metal parts by...
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6113753 |
Systems and methods for making a magnetic recording medium on a flexible metal substrate
A method is provided for processing a metal foil sheet to produce magnetic recording media. The method comprises providing an elongate metal foil sheet having a first side and a second side. The...
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6113752 |
Method and device for coating substrate
A device and a process for multilayer PVD ("Physical Vapor Deposition") coating of substances includes one or more sputter target systems. A sputter target system generally consists of a plurality...
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6090457 |
Process of making a thin film
The film-forming apparatus includes a gas introduction tube for introducing an inert gas into a vacuum chamber, a vapour source and a target, and forms a thin film by depositing sputtered particles...
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6077569 |
Highly durable and abrasion-resistant dielectric coatings for lenses
An abrasion-resistant dielectric composite product is described comprising a substrate and an abrasion wear resistant coating material comprising carbon, hydrogen, silicon, and oxygen and a...
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6063436 |
Use of multiple masks to control uniformity in coating deposition
The uniformity of individual layers of multiple coating materials deposited on a substrate in a vacuum deposition process (such as for manufacturing mirrors for use in ring laser gyroscopes) is...
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6063244 |
Dual chamber ion beam sputter deposition system
A dual chamber deposition system comprising two ion beam sputtering (IBS) deposition chambers connected by a wafer handler chamber for depositions of multilayer thin film structures with improved...
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6059937 |
Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof
The present invention relates to a sensor for detecting hydrocarbon type gas such as methane gas and propane gas, and process for manufacturing thereof. SiO 2 was deposited in 1 μm by ion beam...
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6051120 |
Thin film forming apparatus
There is provided a thin film forming apparatus in which plasma of high frequency is made of raw material gas in a film forming chamber 7, a thin film is formed on a surface of a substrate 12 in...
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6039847 |
Method of forming a highly pure thin film and apparatus therefor
A material of ions is sputtered with cesium ions to generate negative ions and, the negative ions are accelerated and mass-separated to obtain a negative ion beam, and a material of thin film is...
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6036825 |
Magnetic film forming method
In a magnetic film forming method, a plurality of chips formed of Fe 3 O 4 and a plurality of chips formed of HfO 2 are disposed on a target formed of Fe. The composition ratio of a Fe--Hf--O...
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6033532 |
Oxide film fabrication method and electronic device
A method of forming an oxide film over the substrate of an electronic device. In one embodiment, a first metal oxide film layer is deposited on the substrate of the electronic device by bias...
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6017430 |
Cathode for use in electrolytic cell
A cathode wherein the electrocatalytically-active outer layer is of substantially uniform thickness and has contours which are at least substantially the same as the contours of the substrate...
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6010600 |
Maskless deposition technique for the physical vapor deposition of thin film and multilayer coatings with subnanometer precision and accuracy
The invention is a method for the production of axially symmetric, graded and ungraded thickness thin film and multilayer coatings that avoids the use of apertures or masks to tailor the deposition...
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5967873 |
Emissive flat panel display with improved regenerative cathode
Method and apparatus are presented for the generation, regeneration, and transplantation of field enhancing whiskers to provide for an improved cathode in flat panel displays in particular, and in...
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5968326 |
Composite inorganic-polymer thin film cation-selective membrane, method of fabricating same and applications
A composite membrane is disclosed fabricated by depositing an inorganic ion-conducting thin film on a cation-selective organic polymer membrane substrate using Pulse Laser Deposition (PLD) or...
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5961792 |
Method for making titanium or titanium-alloy substrate for magnetic-recording media
An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. Precision cold-rolled titanium or titanium alloy is the substrate for a...
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5962080 |
Deposition of insulating thin film by a plurality of ion beams
A method of depositing insulating thin films on a substrate employs a target that is formed of material which includes a constituent element of the insulating thin film. An ion beam preferably of...
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5939133 |
Method of manufacturing a slider having a carbon overcoat and an electrically conductive adhesive layer
A slider of the type for use with a rotatable magnetic disk is disclosed. The slider has two ends and a bottom surface which includes an air bearing surface. An adhesive layer and continuous...
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5922179 |
Apparatus for etching and coating sample specimens for microscopic analysis
An apparatus and process for the etching and coating of samples in a single vacuum chamber, thus minimizing handling and transfer of the samples is provided. The apparatus includes a sealed chamber...
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5903416 |
Magnetic head and manufacturing method thereof
A magnetic head has a titanium oxide layer and titanium layer between a chip core and a diamond-like carbon (DLC) layer, to improve adhesion between the DLC layer and the chip core and thereby...
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5876848 |
Thin film magnetic structure having ferromagnetic and antiferromagnetic layers
A method of forming a magnetic structure having layers with different magnetization orientations provided by a common magnetic bias layer includes the steps of depositing an antiferromagnetic layer...
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5871622 |
Method for making a spin valve magnetoresistive sensor
A process for making a spin valve magnetoresistive (SVMR) sensor includes forming a nickel-oxide (NiO) layer as the antiferromagnetic layer for pinning the magnetization of the pinned ferromagnetic...
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5859404 |
Method and apparatus for plasma processing a workpiece in an enveloping plasma
A plasma heating apparatus for heating a workpiece includes a chamber of sufficient size to receive a workpiece therein and a source of a reduced gas pressure within the chamber of from about 0.01...
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5783282 |
Resputtering to achieve better step coverage of contact holes
An improved apparatus and method for manufacturing semiconductor devices, and, in particular, for depositing material at the bottom of a contact hole, comprises sputtering a material onto a...
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5783262 |
Growth of oxide exchange bias layers
An oxide (NiO, CoO, NiCoO) antiferromagnetic exchange bias layer produced by ion beam sputtering of an oxide target in pure argon (Ar) sputtering gas, with no oxygen gas introduced into the system....
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5773834 |
Method of forming carbon nanotubes on a carbonaceous body, composite material obtained thereby and electron beam source element using same
A composite material is produced by irradiating a surface of a shaped body of a carbonaceous material with an ion beam to form a layer of carbon nanotubes on the surface. The composite material is...
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5741404 |
Multi-planar angulated sputtering target and method of use for filling openings
Disclosed is a multi-plans sputtering target and a method of using the multi-planar sputtering target in PVD sputtering for filling high aspect ratio interconnect structure openings. The...
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5733418 |
Sputtering method and apparatus
A method and apparatus are provided for sputtering particles from a target as a film on a substrate. The target and substrate are maintained in a main housing in a first vacuum. The target is...
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5711860 |
Method and apparatus for producing a substrate with low secondary electron emissions
The present invention is directed to a method and apparatus for producing a highly-textured surface on a copper substrate with only extremely small amounts of texture-inducing seeding or masking...
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5707705 |
Titanium or titanium-alloy substrate for magnetic-recording media
An improved magnetic-recording disk and a process for manufacturing magnetic-recording disks are disclosed. Precision cold-rolled titanium or titanium alloy is the substrate for a...
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5658438 |
Sputter deposition method for improved bottom and side wall coverage of high aspect ratio features
A method of sputter deposition for improved side wall and bottom coverage of high aspect ratio features on a substrate includes alternatingly exposing the substrate having high aspect ratio...
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5645897 |
Process and device for surface-modification by physico-chemical reactions of gases or vapors on surfaces, using highly-charged ions
The invention concerns a process and a device for surface-modification by physico-chemical reactions with the following steps: a) contacting a solid surface having a crystalline or amorphous...
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5628659 |
Method of making a field emission electron source with random micro-tip structures
A system and method is available for fabricating a field emitter device, where in an emitter material, such as copper, is deposited over a resistive layer which has been deposited upon a substrate....
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5618389 |
Process for producing transparent carbon nitride films
The present invention provides transparent carbon nitride films, processes or making them and compositions of matter comprising them. The films are made using a magnetron sputter gun and a ion...
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5616179 |
Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films
A process for depositing amorphous or nanophase diamondlike carbon (DLC) and a-C:H carbon/hydrogen films with variable and controllable properties on the surface of a substrate is disclosed. The...
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5612098 |
Method of forming a thin film magnetic structure having ferromagnetic and antiferromagnetic layers
A method of forming a magnetic structure having layers with different magnetization orientations provided by a common magnetic bias layer includes the steps of depositing an antiferromagnetic layer...
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5607781 |
Oxide film with preferred crystal orientation, method of manufacturing the same, and magneto-optical recording medium
An oxide film having, for example, a spinel structure is deposited on a substrate, and ions of an inert gas such as He, Ar, Ne, Kr, or Xe, oxygen gas ions, or metal ion of a film constituting...
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5599590 |
Texture treatment for carbon substrate and for carbon overcoat layer of magnetic disks
A texture treatment for a carbon substrate of a magnetic disk or for a carbon overcoat layer of a magnetic disk is effective to prevent the generation of a stiction phenomenon between a magnetic...
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5573798 |
Method of manufacturing an electrode for measuring pH
This invention relates to a pH measuring electrode having a sensor film which is sensitive to a hydrogen ion (H + ) in the solution. The pH measuring electrode of this invention has a sensor film...
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5543019 |
Method of coating medical devices and device coated thereby
The invention features a method of depositing a coating on a medical device. The method includes: a) placing the medical device in an evacuated chamber, b) introducing a noble gas into the chamber,...
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