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7387816 |
Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion CVD
A method of making a scratch resistant coated article is provided, the coated article also being resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In...
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7381397 |
Using condensed chemicals to precondition lithium niobate and lithium tantalate crystals
Methods and apparatus for preconditioning a lithium niobate or lithium tantalate crystal. At least a portion of a surface of the crystal is covered with a condensed material including one or more...
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7374648 |
Single piece coil support assemblies, coil constructions and methods of assembling coil constructions
The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the...
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7370416 |
Method of manufacturing an injector plate
A method of manufacturing an injector plate is provided where a wafer is provided and a release layer is disposed on the wafer. Then a photo resist is formed over the release layer. After...
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7357975 |
Carbon-containing hard coating and a method for depositing a hard coating onto a substrate
The carbon-containing hard coating (1) according to the invention comprises nano-crystalline grains being separated from each other by grain boundaries, wherein said hard coating comprises aluminum...
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7354617 |
Fixing belt and method for evaluating it
A method for evaluating a fixing belt includes forming a fixing belt which includes a substrate, an elastic layer laminated on the substrate, and a mold releasing layer laminated on the elastic...
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7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation
A wafer support for an ion implanter includes a wafer holder and a support arm for the holder in the implant chamber. A portion of the support arm adjacent the wafer holder is at least...
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7344760 |
Wear-resistant electrically conductive body
A method for making a wear-resistant electrically conductive body having an electrically conductive diamond-like carbon coating, by ion-accelerating copper ions from a copper ion source onto a...
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7341644 |
Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor
There is not known a conventional method for predicting the consumed degree of consumable supplies and the thickness of deposited films without opening a processing chamber. A method for...
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7338581 |
Sputtering apparatus
A sputtering apparatus includes paired targets 31 disposed in a vacuum chamber 30 , substrate holder 33 disposed at a position nearly perpendicular to the paired target 31 and apart from a...
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7335278 |
Plasma processing apparatus and plasma processing method
An electrostatic chuck 108 is provided on a lower electrode 106 provided inside a processing chamber 102 of an etching apparatus 100, and a conductive inner ring body 112 a and an...
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7329328 |
Method for etch processing with end point detection thereof
A method for performing process end point detection in a semiconductor substrate processing system by monitoring for an increase in a flow of backside gas above a predetermined limit.
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7314650 |
Method for fabricating sputter targets
Sputter targets comprising a target backing plate and a target deposit, are manufactured using electroless and electrolytic deposition of metal and metal alloys on a surface of the target backing...
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7311976 |
Glazing coated with at least one layer having thermochromic properties
A glazing coated with at least one layer having thermochromic properties comprising vanadium oxide, and also with at least one other layer having thermal properties, such as an infrared reflecting...
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7303648 |
Via etch process
Systems and techniques relating to etching vias in integrated circuit devices, in one implementation, include: providing a dielectric material and a conductive material, removing a first portion of...
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7294283 |
Penning discharge plasma source
The preferred embodiments described herein provide a Penning discharge plasma source. The magnetic and electric field arrangement, similar to a Penning discharge, effectively traps the electron...
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7293344 |
Process of making CD uniformity in high track density recording head
A process for achieving tighter reader and writer track width control is disclosed. The write gap layer is used as the plating seed on which the upper pole is electro-formed. This allows the write...
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7285499 |
Polymer spacers for creating sub-lithographic spaces
A method includes forming a group of first structures on a semiconductor device and forming spacers adjacent side surfaces of each of the first structures to form a group of second structures. The...
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7282271 |
Durable thermal barrier coatings
A durable protective coating may be formed by applying a thin layer of metastable alumina to a bond coating on a substrate. A thermal barrier coating may then be applied to the metastable alumina...
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7273655 |
Slidably movable member and method of producing same
A slidably movable member such as an adjusting shim used in a valve operating mechanism of an internal combustion engine of an automotive vehicle. The slidably movable member is used in contact...
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7270891 |
Mixed germanium-silicon thermal control blanket
A passive thermal control blanket and a method for its manufacture, the blanket including a plastic substrate on which is deposited a film that is a homogeneous mixture of silicon and germanium,...
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7270586 |
Organic electroluminescence element and production method thereof
An organic EL element comprising; an anode, a cathode, and an organic layer sandwiched therebetween containing at least an emitting layer, wherein a ratio, [In3d 5/2 ] h /[In3d 5/2 ] n , is from...
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7264883 |
Hard coating film excellent in adhesion and manufacturing method thereof
A hard coating film of the present invention is formed on a substrate, and is a multilayer including at least the following layers (1) to (3). (1) A first layer on the substrate side comprising one...
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7264700 |
Thin film mixed potential sensors
A mixed potential sensor for oxidizable or reducible gases and a method of making. A substrate is provided and two electrodes are formed on a first surface of the substrate, each electrode being...
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7261796 |
Method and apparatus for aligning a machine tool
A machine tool is provided comprising a base, a slide assembly attached to the base for supporting a tool and translating the tool along an axis, and a workpiece holder attached to the base. At...
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7247348 |
Method for manufacturing a erosion preventative diamond-like coating for a turbine engine compressor blade
Methods for making an erosion resistant gas turbine engine compressor airfoil substrates coated with a diamond-like coating (DLC), wherein the coating airfoil substrates are protected from ingested...
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7235159 |
Methods for producing and using catalytic substrates for carbon nanotube growth
A catalyst material for carbon nanotube synthesis includes a uniform dispersion of host particles on a substrate. The host particles themselves include catalyst nanoparticles that are effective to...
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7235155 |
Method and apparatus for monitoring plasma conditions using a monitoring ring
A plasma processing system is provided that allows for monitoring a plasma processing system during plasma processing. The plasma processing system includes a processing chamber and a monitoring...
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7228722 |
Method of forming sputtering articles by multidirectional deformation
A method of producing a valve metal mill form having dimensions sufficient to be divided to form a plurality of sputter targets is described. The method includes multidirectional deformation of an...
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7226670 |
Work piece with a hard film of AlCr-containing material, and process for its production
A work piece or structural component is coated with a system of film layers at least one of which is composed of (Al y Cr 1-y ) X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and...
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7226643 |
Thermal pyrolysising chemical vapor deposition method for synthesizing nano-carbon material
A thermal cracking chemical vapor deposition method for synthesizing a nano-carbon material is provided. The method includes steps of (a) providing a substrate, (b) spreading a catalyst on the...
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7217344 |
Transparent conductive film for flat panel displays
Substrates having films are used to produce flat panel displays and similar devices. Various embodiments of transparent conductive films and methods for the same for flat panel displays and similar...
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7204921 |
Vacuum apparatus and vacuum processing method
A vacuum apparatus which can easily regenerate plasma is provided. A matching box used in the vacuum apparatus can vary the impedance thereof by varying the magnitudes of the inductance of variable...
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7204013 |
Method of manufacturing a magnetoresistive sensor
In a method of forming a magnetoresistive sensor, first and second magnetic leads are formed. Next, a junction of magnetic and electrically conductive material is formed between the first and...
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7186298 |
Wafer support system
A wafer support system comprising a segmented susceptor having top and bottom sections and gas flow passages therethrough. A plurality of spacers projecting from a recess formed in the top section...
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7179545 |
Halftone phase shift mask blank, and method of manufacture
A halftone phase shift mask blank has a phase shifter film on a transparent substrate. The phase shifter film is composed of a metal silicide compound containing Mo, at least one metal selected...
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7166187 |
Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling
The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a...
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7158206 |
Sputter for deposition of metal layer and fabricating method of liquid crystal display device using the same
A fabricating method of a liquid crystal display device includes forming a gate line on a first substrate, forming a data line crossing the gate line, forming a switching element connected to the...
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7153544 |
Method of manufacturing transparent electro-conductive film
A touch panel includes a transparent electro-conductive film. The transparent electro-conductive film comprises a primary layer formed on a polymer film, and a transparent electro-conductive thin...
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7153487 |
Using condensed chemicals to precondition lithium niobate and lithium tantalate crystals
Methods and apparatus for preconditioning a lithium niobate or lithium tantalate crystal. At least a portion of a surface of the crystal is covered with a condensed material including one or more...
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7153399 |
Method and apparatus for producing uniform isotropic stresses in a sputtered film
The invention provides a method and apparatus for producing uniform, isotropic stresses in a sputtered film. In the presently preferred embodiment, a new sputtering geometry and a new domain of...
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7147719 |
Double slit-valve doors for plasma processing
In a substrate vacuum processing chamber, a second inner slit passage door apparatus and method to supplement the normal slit valve and its door at the outside of the chamber. The inner slit...
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7147695 |
Microfabricated microconcentrator for sensors and gas chromatography
Devices for enhancing the sensitivity of a microsensor or any other micro device by providing on-line preconcentration. Microconcentrators that can be integrated with a sensor or a micromachined GC...
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7141269 |
Molding technique for copper interconnecting wires by electrochemical displacement deposition on the pre-shaped metal layer
A molding technique for copper interconnecting wires by electrochemical displacement deposition on the pre-shaped metal layer in accordance with the present invention is used to form an adhering...
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7138343 |
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
In order to produce substrate surfaces with a given two-dimensional surface distribution arising from a treatment using a vacuum treatment process, an inhomogeneous plasma ( 5 ) with a density...
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7132130 |
Method for providing a chrome finish on a substrate
An environmentally-friendly process for applying a chrome finish on a substrate is provided. The chrome finish comprises a thin film of aluminum and chromium deposited onto the substrate by...
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7122096 |
Method and apparatus for processing semiconductor
In a semiconductor processing apparatus including a process chamber, a sample stand for holding a sample in the process chamber, and a process gas supply unit for supplying a process gas to the...
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7111382 |
Methods for fabricating redeposition free thin film CPP read sensors
Methods are provided for forming current perpendicular to the plane thin film read heads. In one embodiment, the method comprises the steps of forming a lower sensor lead, forming a lower sensor...
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7100267 |
Magnetic head, method for producing same, and magnetic recording and/or reproducing system
A method for producing a magnetic head, including the steps of forming a magnetic body on a substrate, the magnetic body including a principal plane facing the substrate and a rear plane opposite...
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7082655 |
Process for plating a piezoelectric composite
A transducer having a ceramic element in which the ceramic is elevated above a polymer and a method of manufacturing the transducer. The transducer comprises a piezo-composite element comprising a...
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