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8179215 |
MEMS device with integral packaging
A MEMS device and method of making same is disclosed. In one embodiment, a micro-switch includes a base assembly comprising a movable structure bearing a contact pad. The base assembly is...
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8179216 |
Capillary force actuator device and related method of applications
An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be...
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8174306 |
Electrostatic actuator apparatus
According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first...
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8159320 |
Latching micro-magnetic relay and method of operating same
A micro-machined magnetic latching relay has a moveable cantilever comprising a soft magnetic material and having a first end and a second end. The cantilever has a rotational axis which is a...
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8151444 |
Method for manufacturing connecting device for randomly connecting a number of transmitters and receivers
A connection device for random connection of a first member of first transmission/reception units with a second number of second transmission/reception units has a switching matrix that includes a...
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8154365 |
MEMS switching device protection
A micro-machined switching system for equalizing an electrical property, such as charge due to parasitic capacitance formed at an input and an output of a micro-machined switching device. The...
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8149076 |
MEMS device with controlled electrode off-state position
The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The...
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8144445 |
Micro-electromechanical system based switching
A current control device is disclosed. The current control device includes control circuitry and a current path integrally arranged with the control circuitry. The current path includes a set of...
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8138655 |
Electrostatic actuator with electrodes having varying distances at different portions
An electrostatic actuator includes first and second lower electrodes formed apart from each other above a substrate, an electrode portion formed above the first and second lower electrodes and...
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8138859 |
Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
Embodiments of the present invention provide microelectromechanical systems (MEMS) switching methods and apparatus having improved performance and lifetime as compared to conventional MEMS...
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8120451 |
Electrostatic actuator
The present invention relates to a micro-electromechanical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. The...
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8115579 |
MEMS actuators with stress releasing design
The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also...
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8115576 |
MEMS actuators and switches
MEMS structures employing movable conductive member and a number of current-carrying stationary contact terminals which advantageously permit higher current carrying capability that prior art...
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8115577 |
Electromechanical switch, filter using the same, and communication apparatus
An electromechanical switch includes a first beam, a second beam arranged in parallel with the first beam and connected to the first beam through a connecting portion, a first electrode formed so...
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8111118 |
Multi-stable micro electromechanical switches and methods of fabricating same
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch...
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8110761 |
Switching device and communication apparatus and method related thereto
A switching device includes a stationary portion, a movable portion having a movable land portion, and a first beam portion and a second beam portion that couple the movable land portion and the...
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8106730 |
Microswitching device and method of manufacturing the same
A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact...
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8098120 |
Spring structure for MEMS device
A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of...
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8093971 |
Micro-electromechanical system switch
A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position...
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8093968 |
Microelectromechanical element and electromechanical switch using the same
A microelectromechanical element of a hydrophobic surface structure with a long life and high reliability and an electromechanical switch using the microelectromechanical element are provided. The...
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8093972 |
Electromechanical device and electrical device with the electromechanical device
When a high power signal is input to an electromechanical device, electrostatic force can automatically and unintentionally drive the movable electrode. A high reliability electromechanical device...
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8093967 |
MEMS high speed switching converter
The present invention provides a DC high voltage converter having an oscillator driver, main switch array and topological enhanced capacitors. The switch array utilizes MEM cantilevers and...
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8068002 |
Coupled electromechanical relay and method of operating same
An electromechanical relay employing a movable first permanent magnet and a nearby third electromagnet is disclosed. The movable first magnet is permanently magnetized and has at least a first end....
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8044552 |
Actuator driving system in which a drive voltage and number of electrodes parts driven changes in accordance with temperature
An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive...
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8018308 |
Downward type MEMS switch and method for fabricating the same
A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a...
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8018307 |
Micro-electromechanical device and module and method of manufacturing same
The MEMS element of the invention has a first, a second and an intermediate third electrode. It is given an increased dynamic range in that the switchable capacitor constituted by the second and...
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8003906 |
Crossbar device constructed with MEMS switches
Embodiments of crossbar devices constructed with Micro-Electro-Mechanical Systems (MEMS) switches are disclosed herein. A crossbar device may comprise m input terminals, n output terminals, n...
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7999642 |
Miniaturized switch device
The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and...
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7999643 |
Providing a common environment for multiple MEMS devices
The present invention relates to providing a uniform operating environment for each of multiple devices by providing a common environment to the devices. The common environment is provided by...
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7977137 |
Latching zip-mode actuated mono wafer MEMS switch method
A process for making a latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single...
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7978034 |
Electromechanical element and electronic equipment using the same
A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a...
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7969772 |
Magnetic mechanical switch
A method and apparatus for managing data, particularly in regard to non-volatile memory cells. In some embodiments, at least two actuating conductors are at least partially surrounded by a main...
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7969262 |
Reduction of air damping in MEMS device
A micro-electromechanical device has a substrate (10), a movable element, movable towards the substrate by electrostatic forces on electrodes, facing surfaces of the movable element and the...
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7965159 |
Micro-switching device and manufacturing method for the same
A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact...
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7965547 |
Arrangement and method for controlling a micromechanical element
The invention concerns an arrangement for controlling a non-volatile memory arrangement for a circuit comprising: a micromechanical element coupled to a substrate; the micromechanical element being...
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7960900 |
Assembly of a microswitch and of an acoustic resonator
The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric...
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7960804 |
Latching zip-mode actuated mono wafer MEMS switch
A latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process...
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7960662 |
Radiofrequency or hyperfrequency micro-switch structure and method for producing one such structure
The micro-switch structure comprises, on a substrate 1 coated with a passivation layer 2, a first signal line LS-IN and a second signal line LS-OUT disposed in the projected extension of one...
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7956709 |
MEMS switch and manufacturing method thereof
A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as...
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7952041 |
Active-matrix device, electro-optical display device, and electronic apparatus
An active-matrix device includes a substrate; a plurality of pixel electrodes provided on a first surface of the substrate; a plurality of switching elements provided to correspond to each of the...
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7952259 |
Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material
The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The...
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7944332 |
Self-locking micro electro mechanical device
The proposed invention application describes a novel configuration of an extremely small self-locking switching component, based on micro-electromechanical systems (MEMS) technology. Conventional...
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7939993 |
Micromechanical Hf switching element and method for the production thereof
The present invention relates to a micromechanical HF switching element, in which a freestanding movable element is situated above a metallic surface on a substrate in such way that it is drawn to...
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7936240 |
Lithographically controlled curvature for MEMS devices and antennas
Lithographically fabricated apparatus are provided. The apparatus are capable of self-assembly to extend at least in part in an out-of-plane direction. A cantilever arm is anchored to a substrate...
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7928333 |
Switch structures
A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a...
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7924122 |
Collapsible contact switch
Embodiments of the invention describe a contact switch, which may include a bottom electrode structure including a bottom actuation electrode and a top electrode structure including a top actuation...
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7911300 |
MEMS RF-switch using semiconductor
A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the...
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7911299 |
Microactuator, optical apparatus, and optical switch
A microactuator has a fixed portion and a movable portion that is provided in such a way as to be movable relative to the fixed portion between a first position at which it is in contact with a...
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7906738 |
Shaped MEMS contact
A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear...
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7907037 |
Micro-electro-mechanical module
A MEMS module that contains at least one integrated energy storage device whose discharge is minimized and controlled, so that power is available for system operation over longer periods of time....
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