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7623007 |
Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and...
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7619497 |
Electrostatic relay
An electrostatic micro relay, in which the contact gap between moving and fixed contacts may be increased and the reliability and high-performance regarding contacting and separating the moving...
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7612424 |
Nanoelectromechanical bistable cantilever device
Nano-electromechanical device having an electrically conductive nano-cantilever wherein the nano-cantilever has a free end that is movable relative to an electrically conductive substrate such as...
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7609136 |
MEMS microswitch having a conductive mechanical stop
A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator...
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7602267 |
MEMS actuator and relay with horizontal actuation
A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a...
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7602266 |
MEMS actuators and switches
Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a...
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7602265 |
Apparatus for accurate and efficient quality and reliability evaluation of micro electromechanical systems
The present invention provides multiple test structures for performing reliability and qualification tests on MEMS switch devices. A Test structure for contact and gap characteristic measurements...
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7602261 |
Micro-electromechanical system (MEMS) switch
An electromechanical switch includes an actuation electrode, a cantilever electrode, a contact, a suspended conductor, and a signal line. The actuation electrode is mounted to a substrate, the...
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7601554 |
Shaped MEMS contact
A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear...
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7598829 |
MEMS actuator and relay with vertical actuation
A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a...
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7595706 |
High-frequency distribution circuit for distributing high-frequency signal
The present high-frequency distribution circuit includes a switch circuit which passes a high-frequency signal from the other terminal of a high-frequency line to an output terminal if a receiver...
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7567018 |
Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first...
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7554421 |
Micro-electromechanical system (MEMS) trampoline switch/varactor
A micro-electromechanical device includes an actuation electrode and a suspended electrode. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the...
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7551048 |
Micro-relay and method of fabricating the same
A micro-relay includes a first substrate having stationary contacts and a stationary electrode, a second substrate arranged so as to face the first substrate, and a movable plate arranged between...
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7548145 |
Hysteretic MEMS thermal device and method of manufacture
A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS...
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7548144 |
MEMS switch and method of fabricating the same
A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of...
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7546677 |
Method for fabricating a micro-electromechanical system switch
A method includes forming a signal line on the substrate so as to have a predetermined opening portion; at least one supporting frame each formed on the substrate at both sides of the signal line;...
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7545246 |
Piezoelectric MEMS switch and method of fabricating the same
A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the...
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7545081 |
Piezoelectric RF MEMS device and method of fabricating the same
A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a...
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7536880 |
Magnetic lid switch
A magnetic lid switch assembly includes a first magnetically actuated electrical switch that has a lever arm movable between a first position wherein the first switch is open and a second position...
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7535326 |
Microswitching element
A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is...
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7528691 |
Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture
Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two...
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7528334 |
Circuit breaker-contactor with a piezo-electric controlled locking
The inventive circuit breaker-contactor ( 1 ) comprises a fixed contact, a contact ( 5 ) movable ( 19, 21 ) with respect to the fixed contact between open and closed positions, means ( 7 ) for...
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7515023 |
Micro-switching device and method of manufacturing micro-switching device
A micro-switching device includes a base substrate and a cantilever fixed to the base substrate via a spacer or anchor portion. The cantilever has an inner surface facing the substrate and an outer...
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7508117 |
Piezoelectric actuator, imaging element moving device using the same, and imaging device using the same
To implement a piezoelectric actuator which can actuate a large object, such as an imaging element, in a predetermined direction at high power without involvement of rotational displacement; which...
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7503989 |
Methods and systems for aligning and coupling devices
A first device has a micrometer-scale or smaller first structure and is flexibly coupled to a first substrate. A second device has a micrometer-scale or smaller second structure and is coupled to a...
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7501920 |
Switch device
A switch device includes: a movable spring that has one end as a fixed end, and the other end as a free end; a substrate that is disposed below the movable spring; a first contact point that is...
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7498911 |
Membrane switch components and designs
The present invention provides a method and apparatus for reducing temperature dependency within Microelectromechanical System (MEMS) switches. The two typical designs for such MEMS switches are...
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7486163 |
Low-voltage micro-switch actuation technique
An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and...
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7477884 |
Tri-state RF switch
A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post...
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7474180 |
Single substrate electromagnetic actuator
A microvalve which utilizes a low temperature (<300° C.) fabrication process on a single substrate. The valve uses buckling and an electromagnetic actuator to provide a relatively large closing...
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7473859 |
Gating voltage control system and method for electrostatically actuating a micro-electromechanical device
A gating voltage control system and method are provided for electrostatically actuating a micro-electromechanical systems (MEMS) device, e.g., a MEMS switch. The device may comprise an...
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7471176 |
Micro electromechanical system switch
A micro electromechanical system (MEMS) switch includes a fixed contact ( 24 ) and a moveable contact ( 35 ) on an armature ( 30 ). The switch has electrodes ( 22, 34 ) associated with both the...
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7471031 |
Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element
In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable...
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7466215 |
Balanced MEMS switch for next generation communication systems
A micro-electro-mechanical system (MEMS) switch is described. The MEMS switch includes both RF-input and output transmission lines formed on a substrate. An RF armature is anchored to the substrate...
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7466065 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method
A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front...
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7463126 |
Micro electromechanical switch and method of manufacturing the same
A micro electromechanical relay opens and closes an electrical circuit by contact/separation between a fixed contact disposed on a base and a movable contact disposed on an actuator by driving of a...
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7463125 |
Microrelays and microrelay fabrication and operating methods
Microrelays and microrelay fabrication and operating methods providing a microrelay actuator positively controllable between a switch closed position and a switch open position. The microrelays are...
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7456482 |
Carbon nanotube-based electronic switch
An improved microelectromechanical switch assembly comprises a linearly movable switch rod constrained via a switch bearing, the switch rod being actuated by electrostatic deflection. Movement of...
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7453339 |
Electromechanical switch
In one aspect, an electromechanical switching device is illustrated. The electromechanical switching device includes a relay with at least one first conductive portion, at least one second...
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7446634 |
MEMS switch and manufacturing method thereof
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface...
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7432788 |
Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate
A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that...
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7420447 |
Latching micro-magnetic switch with improved thermal reliability
A micro-magnetic switch includes a permanent magnet and a supporting device having contacts coupled thereto and an embedded coil. The supporting device can be positioned proximate to the magnet....
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7420135 |
Micro electro-mechanical system switch and method of manufacturing the same
A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes...
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7414500 |
High-reliability micro-electro-mechanical system (MEMS) switch apparatus and method
A micro-electro-mechanical system (MEMS) slotline switch includes a slotline transmission line structure defined on top of substrate, a doubly-anchored conductive beam disposed perpendicular to,...
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7405641 |
Micro-electro-mechanical switch
A micro-electro-mechanical switch is described. The switch comprises a substrate, with a signal transmission portion and an activation portion attached with the substrate. The activation portion...
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7391290 |
Micro magnetic latching switches and methods of making same
A latching micro magnetic switch includes a magnet located proximate to a supporting structure. The magnet produces a first magnetic field with field lines symmetrically spaced about a central axis...
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7391090 |
Systems and methods for electrically coupling wires and conductors
A first device includes a micrometer-scale or smaller geometry first conductor. A second device includes a micrometer-scale or smaller second conductor. An actuator the first and second devices...
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7382218 |
Micromechanical switch and production process thereof
The micromechanical switch comprises a deformable bridge ( 1 ), attached via its ends to a substrate ( 2 ), and actuating means ( 3 ) to deform the deformable bridge ( 1 ) so as to make an electric...
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7373717 |
Method of manufacturing a self-sustaining center-anchor microelectromechanical switch
Provided is a manufacturing method of self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic...
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