Matches 1 - 50 out of 207 1 2 3 4 5 >


Match Document Document Title
9027739 Wafer transport system  
A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced...
9022209 Cleanable conveyor-belt drive system  
A hygienic drive system for a belt conveyor. The drive system has a stator rigidly mounted in a housing having an outer bearing surface that is continuous with the outer surface of mounting...
8960099 Substrate processing apparatus  
A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of...
8939277 Method for conveying silicon granules in an encapsulated conveying channel  
Silicon granules are conveyed in an encapsulated conveying channel by swaying movement of the channel produced by a permanent magnet excited by an external alternating electromagnetic field.
8833544 Conveying device  
A conveying device for moving a carrying plate includes a pulling mechanism in the form of a belt. To pull the carrying plate, the belt is contacted against the carrying plate via a magnetic force...
8827617 Substrate processing apparatus  
A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends...
8827071 Transporting apparatus with articulated conveying element  
The invention relates to a transporting apparatus for conveying a product, comprising a movable conveying element (2) for conveying the product, also comprising a fixed-location running rail (3),...
8807327 Transfer apparatus with dynamically variable drive zones  
A transfer apparatus includes a primary part, and at least one first and one second secondary part, which are each magnetically coupled to the primary part for drive purposes. A regulation device...
8794426 Pallet-based position adjustment system and method  
A conveyor system that includes a track section including a control system, a drive system that is controlled by the control system and that is configured to provide power through a first...
8720668 Conveyor belt apparatus including magnetically actuated rollers  
A conveyor comprising a conveyor belt having rollers with metallic or magnetic rotors. A magnet or metallic element next to the conveyor belt is positioned to rotate the rotor. A magnetic field...
8720673 Transport apparatus  
The invention relates to a transport apparatus for conveying a product, comprising a moveable conveying element (2) for conveying a product, a stationary sliding rail (3) that is arranged around...
8602706 Substrate processing apparatus  
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
8522958 Vacuum processing apparatus  
An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section (2)...
8511460 Conveyor belt apparatus including magnetically actuated rollers  
A modular conveyor belt and method provides a conveyor belt having rollers with metallic or magnetic rotors. A magnet or metallic element next to the conveyor belt is positioned to rotate the...
8413793 Container conveying system for transporting unit items, in particular baggage items  
A container conveying system for transporting baggage items in containers has at least one unloading station and/or a loading station for loading or unloading the container. The baggage item lies...
8371792 Substrate processing apparatus  
A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends...
8297608 Electrodynamic propulsion system for conveying sheet material  
A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet...
8261905 Wafer carrier drive apparatus and method for operating the same  
A drive rail includes a sealed interior cavity and an exterior drive surface that extends along a length of the drive rail. A first magnetic member is disposed within the interior cavity and...
8177048 Vacuum processing apparatus  
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power...
8151974 Device for the linear movement of a carriage  
A linear axle for contactless energy transmission has a belt with an electrical conductor, a movable carriage and a circuit that is movable with the carriage and which is electrically connected...
8118156 Acoustic wave device  
An acoustic wave device applicable to a wider scope and field and used for transporting a substance of any of wide variety of types to be transported with an improved efficiency without needing to...
8028824 Replacement roller assembly  
A replacement roller support assembly allows repairing of a conveyor roller support system begins with removing at lease one system roller support from the system base. Next a replacement roller...
7988398 Linear substrate transport apparatus  
Substrate processing apparatus having a chamber, a generally linear array of process modules, a substrate transport, and a drive system. The chamber is capable of being isolated from the outside...
7918329 Conveying device using electrostatic adsorbing plate  
Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like...
7916447 Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and electrode  
An electrostatic chuck is provided for a substrate stage that can be used in plasma treatment of various substrates such as a large-sized glass substrate for a flat panel display (FPD), a...
7857297 Electrodynamic propulsion system for conveying sheet material  
A transport system for conveying sheet material along a feed path. The transport system includes an electro-dynamic propulsion system for moving sheet material, or a stacked collation of sheet...
7854892 Specimen-transport module  
A specimen-transport module adapted for use with each of a plurality of specimen-processing instruments of a multi-instrument clinical workcell. Such module is adapted to transport individual...
7841820 Universal modular wafer transport system  
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle...
RE41760 Bi-directional magnetic sample rack conveying system  
A magnetic sample rack adapted to support liquid containers is urged along a surface by means of a magnetic conveyor system located beneath the surface. The magnetic conveyor system comprises a...
7770714 Transfer apparatus  
A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position...
7743910 Systems for processing workpieces and mechanical arrangements for moving workpieces and/or workpiece remnants  
A mechanical arrangement for moving workpieces and/or processing remnants from processing of a workpiece comprises a load carrier and a load carrier drive. Part of the load carrier drive is formed...
7597186 Substrate transport device  
A substrate transport device includes a chamber, a rotary wheel, a first magnet, a carrier, and a second magnet. The rotary wheel is disposed outside the chamber. The first magnet is disposed on...
7597187 Conveyor system  
A conveyor system has an elongated guide defining a closed transport path extending through a plurality of treatment stations and a plurality of carriers movable on the guide along the path and...
7594654 Sheet conveyor and image formation device with shaped belt platen  
A sheet conveyor includes a conveyor belt that conveys a sheet material while holding the sheet material by attraction with an electric force, and a platen that slidably supports a bottom surface...
7575406 Substrate processing apparatus  
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The...
7533769 Powder coating process and system  
A system and method is described for treating workpieces, in particular vehicle wheels, especially in the context of a powder coating process, with a conveying device that guides the workpieces...
7484289 Systems and methods for the automated fabrication of trusses  
An automated fabrication system is provided that utilizes electromagnetism to manipulate and/or sense the location of raw materials on a platform. Tools located around said platform may be...
7472786 Non-contact conveying device using superconducting magnetic levitation  
A non-contact conveying device (10) using superconducting magnetic levitation capable of stably conveying an object (11), including: a conveying table (12) having a bottom with permanent magnets...
7318517 Process system and device for transporting substrates  
A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with...
7293950 Universal modular wafer transport system  
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle...
7287638 Apparatus, method of manufacturing and method of using a linear actuator  
A linear actuator, method manufacturing and method of using the linear actuator are provided. The invention includes a linear actuator having a plurality of annular magnets surrounded by a bobbin...
7264111 Magnetic specimen-transport system for automated clinical instrument  
A magnetic specimen-transport system for transporting racks of specimen-containers to or within an automated clinical instrument for analysis and/or processing. The magnetic specimen-transport...
7204192 Apparatus, systems and methods for levitating and moving objects  
Apparatus, systems and methods for levitating and moving objects such as vehicles, doors and windows are shown and described herein. The embodiments incorporate a track with lower rails having...
7157873 Systems and methods for reducing torque disturbance in devices having an endless belt  
A system for reducing torque disturbance includes a motor mechanically coupled to an endless belt. The motor is operable to drive the belt, and the belt has a seam that causes a torque disturbance...
7121400 Systems and methods for guiding conveyance elements  
Systems and methods for controlling the planarity of a conveyance element with respect to a guide while the conveyance element is in motion. This control is achieved by coupling a guide to a...
7100759 Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit  
A vertical rapid thermal processing system includes a processing chamber and an elevator structure providing for vertical movement of a workpiece within the processing chamber. The elevator...
7097024 Conveying device for conveying articles and use of such a conveying device  
A conveying device for conveying articles, in particular vehicle bodies, in a known manner comprises at least one skid, which comprises two parallel skid runners and a supporting structure, which...
7077261 Apparatus for transferring flowable material  
The invention related to apparatus for transferring flowable particulate material such as dry tablets, for example pharmaceutical tablets, from one station to another. The apparatus comprises a...
7026732 Path arrangement for a multi-track linear motor system and method to control same  
A path for a linear motor system includes routing system between a trunk of the path and two or more branches. The routing system is operative to couple the trunk with a selected branch to enable...
6971832 Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor  
A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer...

Matches 1 - 50 out of 207 1 2 3 4 5 >