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7625452 |
Apparatuses and methods for cleaning a substrate
A method for cleaning a substrate is provided. The method includes providing foam to a surface of the substrate, brush scrubbing the surface of the substrate, providing pressure to the foam, and...
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7614108 |
Pan cleaner
Provided is a pan cleaner, comprising a cleaning portion, a brush sweeping portion having a cleaning component and a driving portion; wherein the cleaning portion provides cleaning fluid for a pan,...
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7610645 |
Filter cartridge cleaning apparatus
A filter cartridge cleaning apparatus includes a housing, a brush mechanism for cleaning a filter cartridge passing through the housing, a guiding mechanism for feeding the filter cartridge toward...
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7531044 |
Glass washing machine with broken glass removal system
A glass sheet washing machine with a broken glass removal system includes a support, a liquid container or reservoir, a pump, a liquid applicator, and a liquid permeable member. The support...
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7516507 |
Integrated megasonic cascade scrubber module and process
Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates,...
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7507296 |
Methods and apparatus for determining scrubber brush pressure
In a scrubber adapted to clean a semiconductor wafer, the torque of a brush rotation motor is monitored while a scrubber brush is in contact with the wafer and is being rotated by the motor. The...
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7503090 |
Glass washing machine with conveyor and brush speed control
A glass sheet washing machine comprising a conveyor for moving a glass sheet along a path of travel at a controlled linear speed and a brush rotatable at a controlled rotational speed positioned...
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7455067 |
Portable food tray pre-wash and water recycling apparatus
A portable food tray pre-wash and water recycling apparatus and method for pre-washing reusable food trays prior to placement in a separate cleaning and sanitizing unit that significantly reduces...
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7451515 |
Cleaning processing system and cleaning processing apparatus
Disclosed herein is a processing system for applying a cleaning processing to a substrate such as a semiconductor wafer which includes a cleaning processing section including a plurality of process...
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7441299 |
Apparatuses and methods for cleaning a substrate
An apparatus for use in processing a substrate includes a brush enclosure extending over a length. The brush enclosure is configured to be disposed over a surface of the substrate and has an open...
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7435302 |
Surface treatment apparatus and method for manufacturing liquid crystal display device
A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated...
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7395573 |
Dust remover and dust removal method
A dust remover includes: a rotary brush for removing dust from a workpiece; a workpiece carrying unit for carrying the workpiece in a first direction; a brush rotation unit for rotating the rotary...
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7392563 |
Probe pin cleaning system
An improved device for cleaning probe pins of a probe head assembly is presented. The device includes a first holding plate, a second holding plate and a cleaning cartridge. The first holding plate...
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7383601 |
Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same
In one embodiment, a substrate preparation system is provided. The system includes a brush, a front head, and a back head. The brush is configured to brush scrub a back surface of a substrate using...
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7377002 |
Scrubber box
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank,...
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7353560 |
Proximity brush unit apparatus and method
An apparatus is provided for producing a wet region and corresponding dry region on a wafer. A proximity brush unit delivers fluids with a rotatable brush to produce the wet region on the wafer. As...
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7346954 |
Arrangement for cleaning surfaces with cleaning equipment having a cleaning belt
An arrangement ( 1 ) for cleaning surfaces ( 2 ), particularly curved or arched or wavy surfaces and/or surfaces ( 2 ) with varying direction of curvature, for example on vehicle chassis, metal...
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7329321 |
Enhanced wafer cleaning method
A method for removing post-processing residues in a single wafer cleaning system is provided. The method initiates with providing a first heated fluid to a proximity head disposed over a substrate....
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7302727 |
Pressed powder pan cleaning machine
An apparatus is provided for cleaning residual powder and other contaminants from external surfaces of pressed powder cosmetic pans before the pans are adhered into the compact. A feed chute feeds...
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7252099 |
Wafer cleaning apparatus with multiple wash-heads
A wafer cleaning apparatus with multiple wash-heads is applied in chemical and mechanical polishing process after wafer cleaning. The wafer cleaning apparatus device includes a supporting base,...
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7231682 |
Method and apparatus for simultaneously cleaning the front side and back side of a wafer
A method for cleaning a semiconductor substrate is provided. The method initiates with transferring the semiconductor substrate into a chamber. Then, a first side of the semiconductor substrate is...
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7220323 |
Cleaning method for magnetic transfer carrier
A cleaning method preventing foreign matter attached to a brush from being transferred back to a magnetic transfer carrier by removing foreign matter attached to a cleaning tool such as the brush...
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7185384 |
Wafer cleaning brush
A semiconductor wafer scrubber has a brush with a nubless outer surface for cleaning the surfaces of a semiconductor wafer. The nubless brush has a body and rotates around a central axis as it...
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7176676 |
Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece
Apparatuses and methods for monitoring microfeature workpiece rotation during processing, such as brushing, by monitoring characteristics corresponding to a state of a magnetic field proximate to...
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7162765 |
Seal system for irrigated scrubber mandrel assembly
An improved cleaning fluid supply housing assembly for a cascade-type substrate scrubber having a sliding piston configured with a flange with recesses so that the piston is out of contact with the...
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7160172 |
Multi-station disk finishing apparatus and method
Multi-disk processing system and method of continuous finishing of memory media disks for digital data storage systems in preparation for magnetic memory coating, comprising four main sub-systems:...
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7155767 |
Scrub cleaning device, scrub cleaning method, and manufacturing method of information recording medium
There is disclosed a scrub cleaning device which can reduce cleaning time and which requires no large-scaled device for transferring a substrate to the next cleaning process. The scrub cleaning...
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7137164 |
Glass washing machine with broken glass removal system
A glass sheet washing machine with a broken glass removal system includes a support, a liquid container or reservoir, a pump, a liquid applicator, and a liquid permeable member. The support...
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7096529 |
Box finishing machine with cleaning apparatus and method
A corrugated box finishing machine has a station where dust, debris and other particles are cleaned from the corrugated boards before they are conveyed to the printing station. Electrostatic...
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7087121 |
Device and method for cleaning a surface of a member for storing and transporting goods
A method and device for removing sawdust from a deck surface ( 24 ) of a wooden pallet ( 10 ) is provided. The device comprises a rotary brush ( 124 ) having a working length (WL) defined by a...
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7045018 |
Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same
A method for cleaning and drying a front and a back surface of a substrate is provided. The method includes brush scrubbing the back surface of the substrate using a brush scrubbing fluid...
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7010826 |
Substrate cleaning tool and substrate cleaning apparatus
A substrate cleaning tool having little particle sticking to the tool and a substrate cleaning apparatus having the substrate cleaning tool are provided. The substrate cleaning tool 23 has a...
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7011714 |
Method and device for treating the surfaces of metallic strip material, especially for pickling rolled material
The invention relates to a method and a device for treating surfaces of metallic strip material ( 1 ), especially for pickling rolled material, in a treatment channel ( 2 ), with a pickling medium...
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7007333 |
System and method for a combined contact and non-contact wafer cleaning module
A system and a method for cleaning and rinsing a wafer includes at least three rollers that are capable of supporting a wafer by an edge of the wafer. At least one of the rollers is driven and...
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6990704 |
Substrate cleaning apparatus and substrate cleaning method
In order to perform scrub cleaning of a substrate, two different scrub heads 31 and 32 are employed. The scrub head 31 is superior to the scrub head 32 in terms of a capability of removing...
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6951042 |
Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same
A substrate cleaning apparatus is provided. The apparatus includes a transducer capable of resonating at a high frequency and a brush material attached to a surface of the transducer. The brush...
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6942737 |
Substrate cleaning apparatus and method
A substrate is supported at a plurality of edge positions thereof, to be in horizontal posture, by support pins erected on a spin chuck. A two-fluid nozzle is fixed to a position spaced from and...
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6932884 |
Substrate processing apparatus
A substrate processing apparatus comprises roll chucks for holding and rotating a substrate, a closable chamber housing the roll chucks therein, and a gas introduction pipe for introducing a gas...
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6910240 |
Wafer bevel edge cleaning system and apparatus
A system, method and apparatus for cleaning a substrate edge includes a substrate supporting device for substantially supporting a substrate in a selected plane. The substrate has a circular shape,...
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6907637 |
Edge wheel assembly in a substrate processing brush box
An edge wheel assembly for use in a semiconductor wafer fabrication brush box is provided. The edge wheel assembly is configured to support and to rotate a semiconductor wafer in a vertical...
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6904637 |
Scrubber with sonic nozzle
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a...
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6865764 |
Fixture for assembling a post-CMP cleaning brush
A fixture for assembling a post-CMP cleaning brush. The post-CMP cleaning brush is provided with a brush core and an outer brush, and the outer brush is provided with a hollow portion. The fixture...
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6851151 |
Brush drive assembly in a substrate processing brush box
A modular brush drive assembly used in a brush box for processing a substrate is provided. The modular brush drive assembly includes a pair of brush drives. Each of the pair of brush drives has a...
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6851152 |
Substrate cleaning apparatus
A substrate cleaning apparatus allows an end face and/or a bevel face of a substrate to be scrub-cleaned in a simple and effective manner. The apparatus has a plurality of rotatable substrate...
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6842933 |
Substrate cleaning apparatus and cleaning member
A cleaning apparatus for cleaning a substrate includes a cleaning member, a cleaning member carrier for holding the cleaning member and bringing the cleaning member into contact with a substrate to...
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6842932 |
Cleaning processing system and cleaning processing apparatus
A cleaning processing system for applying a cleaning processing to a substrate such as a semiconductor wafer comprises a cleaning processing section including a plurality of process units each...
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6837777 |
Wafer edge cleaning utilizing polish pad material
An improvement is disclosed in a brush cleaning apparatus for cleaning a major surface of a wafer and including wafer guide wheels for transporting the wafer. The improvement includes a polish pad...
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6837941 |
Cleaning and handling methods of electronic component and cleaning apparatus thereof
A cleaning apparatus of an electronic component of the present invention comprises: means for supplying cleaning water to an object to be cleaned such as alumina titanium carbide wafer, a sponge...
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6833109 |
Method and apparatus for storing a semiconductor wafer after its CMP polishing
In an apparatus, after completion of a CMP (i.e., chemical mechanical polishing) operation of a semiconductor wafer, the thus polished wafer is temporarily stored in a water tank before it is...
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6820298 |
Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint
A brush mounting system for a wafer scrubbing device includes a brush mandrel and a mounting assembly on which the brush mandrel is mounted. The mounting assembly includes a mounting member adapted...
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