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7344604 |
LED and a lighting apparatus using the LED
Disclosed herein is a LED and a lighting apparatus, which employs a LED as a light source of low power and high efficiency for an optical projection system. The lighting apparatus comprises a...
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7063751 |
Semiconductor substrate formed by epitaxially filling a trench in a semiconductor substrate with a semiconductor material after smoothing the surface and rounding the corners
A trench is formed in a semiconductor substrate through a mask composed of a silicon oxide film formed on the semiconductor substrate. Then, an edge portion at an opening portion of the mask is...
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7041178 |
Method for low temperature bonding and bonded structure
A method for bonding at low or room temperature includes steps of surface cleaning and activation by cleaning or etching. The method may also include removing by-products of interface...
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6930026 |
Method of forming a semiconductor wafer having a crystalline layer thereon containing silicon, germanium and carbon
A Si substrate 1 with a SiGeC crystal layer 8 deposited thereon is annealed to form an annealed SiGeC crystal layer 10 on the Si substrate 1 . The annealed SiGeC crystal layer includes a...
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6855996 |
Electronic device substrate structure and electronic device
An electronic device substrate structure including a substrate 2, a metal thin film 4 as a (111)-oriented film of a face-centered cubic structure or as a (0001)-oriented film of a hexagonal...
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6589362 |
Zinc oxide semiconductor member formed on silicon substrate
The surface of a silicon substrate is covered with a natural oxide film having a thickness of several tens of angstroms. In an initial process, the natural oxide film is removed with hydrogen...
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6583034 |
Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the...
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6534332 |
Method of growing GaN films with a low density of structural defects using an interlayer
A dramatic reduction of the dislocation density in GaN was obtained by insertion of a single thin interlayer grown at an intermediate temperature (IT-IL) after the growth of an initial grown at...
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6429098 |
Process for obtaining a layer of single-crystal germanium or silicon on a substrate of single-crystal silicon or germanium, respectively, and multilayer products obtained
The process consists in depositing, by chemical vapour deposition using a mixture of silicon and germanium precursor gases, a single-crystal layer of silicon or germanium on a germanium or silicon...
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6319333 |
Silicon-on-insulator islands
Silicon-on-insulator (SOI) islands are formed in a silicon substrate. A first set of trenches is formed in the silicon substrate, leaving laterally-isolated rows of silicon between the trenches....
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6270587 |
Epitaxial wafer having a gallium nitride epitaxial layer deposited on semiconductor substrate and method for preparing the same
The present invention provides an epitaxial wafer comprising a (111) substrate of a semiconductor having cubic crystal structure, a first GaN layer having a thickness of 60 nanometers or more, a...
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6265237 |
In-wafer testing of DFB semiconductor lasers
A method of manufacturing and testing a laser device that facilitates in-wafer testing of the laser device includes forming the laser device on a wafer and forming a light detecting device on the...
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6245161 |
Economical silicon-on-silicon hybrid wafer assembly
An economical hybrid wafer utilizing a lower-quality, lower cost transfer substrate to support a higher-quality thin film. A high-quality thin film (2101) is separated from a donor wafer (2100) and...
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6187687 |
Minimization of line width variation in photolithography
A practical photolithographic process for use in manufacturing isolation structures in semiconductor substrates at the 0.18 μm scale uses an inorganic anti-reflective coating (ARC) layer,...
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6171973 |
Process for etching the gate in MOS technology using a SiON-based hard mask
A process for etching a gate conductor material in the fabrication of MOS transistors is presented. A hard mask layer composed of silicon oxynitride is formed upon a gate conductor layer. The hard...
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6140209 |
Process for forming an SOI substrate
A process for producing an SOI substrate is disclosed which is useful for saving resources and lowering production cost. Further, a process for producing a photoelectric conversion device such as a...
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6103019 |
Advanced technique to grow single crystal films on amorphous and/or non-single crystal surfaces
A method for producing a pattern of regularly spaced-apart nucleation sites and corresponding devices are disclosed. The method enables formation of a device having an amorphous or otherwise...
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6059895 |
Strained Si/SiGe layers on insulator
An SOI substrate and method for forming is described incorporating the steps of forming strained layers of Si and/or SiGe on a first substrate, forming a layer of Si and/or S i O 2 over the...
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6045626 |
Substrate structures for electronic devices
A substrate structure includes a single crystal Si substrate and a surface layer, with a buffer layer interleaved therebetween. The buffer layer includes at least one of an R--Zr family oxide thin...
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6033490 |
Growth of GaN layers on quartz substrates
In a method of manufacturing a semiconductor device which includes a quartz substrate having a z-cut plane of (0001) plane on a surface, a GaN film is first deposited on the surface. Finally, the...
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6033489 |
Semiconductor substrate and method of making same
A semiconductor substrate is provided that exhibits very low substrate resistance while also providing structural integrity and robustness to resist breakage during manufacturing. The invention...
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5782997 |
Aluminum metallization for SiGe devices
Single crystal aluminum is deposited on SiGe structures to form metal interconnects. Generally, a method of forming single crystal aluminum on Si (1-X) Ge X is presented, including the steps of...
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5714014 |
Semiconductor heterojunction material
A semiconductor heterojunction material includes a heterojunction configured by successively overlaying first, middle and third layers of semiconductor, some or all of the constituent elements of...
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5705423 |
Epitaxial wafer
An improved and highly productive method is proposed for the preparation of an epitaxial wafer (EPW) consisting of a single crystal silicon wafer as the substrate having a mirror-polished surface...
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5685946 |
Method of producing buried porous silicon-geramanium layers in monocrystalline silicon lattices
Lattices of alternating layers of monocrystalline silicon and porous silicon-germanium have been produced. These single crystal lattices have been fabricated by epitaxial growth of Si and Si--Ge...
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5663583 |
Low-noise and power ALGaPSb/GaInAs HEMTs and pseudomorpohic HEMTs on GaAs substrate
An epitaxial structure and method of manufacture for a field-effect transistor capable of low-noise and power applications. Preferably, the epitaxial structure includes an N-type barrier layer...
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5658834 |
Forming B.sub.1-x C.sub.x semiconductor layers by chemical vapor deposition
Active semiconductor devices including heterojunction diodes and thin film transistors are formed by PECVD deposition of a boron carbide thin film on an N-type substrate. The boron to carbon ratio...
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5647917 |
Epitaxy for growing compound semiconductors and an InP substrate for epitaxial growth
When compound semiconductor films are grown on an InP wafer having a surface near a (100) orientation hillocks tend to arise on the films. Off-angle wafers have been adopted for substrates in order...
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5645684 |
Multilayer high vertical aspect ratio thin film structures
This invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the...
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5628834 |
Surfactant-enhanced epitaxy
The present invention broadly concerns layered structures of substantially-crystalline materials and processes for making such structures. More particularly, the invention concerns epitaxial growth...
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5578162 |
Integrated composite semiconductor devices and method for manufacture thereof
An integrated semiconductor device is formed by bonding the conductors of one fabricated semiconductor device having a substrate to the conductors on another fabricated semiconductor device having...
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5540786 |
Light emitting material
A novel photoluminescent material is disclosed comprising an active layer of ZnS 1 -x Te x deposited directly onto a substrate by molecular beam epitaxy. The emitted light is primarily in the blue...
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5529640 |
Epitaxial metal-insulator-metal-semiconductor structures
In one form of the invention, a method for the growth of an epitaxial insulator-metal structure on a semiconductor surface comprising the steps of maintaining the semiconductor surface at a...
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5445897 |
Epitaxial wafer and process for producing the same
In order to grow a GaAs 1 -x P x fixed-composition layer of excellent quality, which has a predetermined composition x, over a GaAs or GaP single crystal substrate, a varied-composition layer is...
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5441913 |
Process of making a semiconductor epitaxial substrate
A semiconductor epitaxial substrate and a process for producing the same, the semiconductor epitaxial substrate comprising a GaAs single-crystal substrate having thereon an In y Ga (1-y) As...
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5421910 |
Intermetallic compound semiconductor thin film
An intermetallic compound semiconductor thin film comprises thin film made of the III-V group intermetallic compound InTlSb. Preferably, the thin film is grown by a vapor phase MOCVD method.
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5399206 |
Arsenic passivation for epitaxial deposition of ternary chalcogenide semiconductor films onto silicon substrates
Ternary II-VI semiconductor films (16) are formed on a silicon substrate (12) by first depositing a monolayer of arsenic (14) or other Group V metal on a cleaned surface of the substrate. The...
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5397429 |
Method of manufacturing photoluminescing porous silicon using spark erosion
A high frequency, high voltage spark generator is used to create a large number of sparks to erode the surface of a silicon wafer to a depth of up to 100 microns. After a sufficient amount of...
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5376579 |
Schemes to form silicon-on-diamond structure
Processes to produce Silicon-On-Diamond (SOD) Structures. In one process, two epitaxial layers are grown on a seed silicon wafer. The first layer is an etch stop layer and the second layer is an...
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5372658 |
Disordered crystalline semiconductor
A semiconductor material having a disordered structure consists of a semiconductor material on which epitaxial growth is possible. The semiconductor material has an energy band structure...
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5373171 |
Thin film single crystal substrate
A thin film single crystal substrate useful in the production of a semiconductor, comprising a base substrate made of single crystal diamond and at least one thin film of a single crystal of a...
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5372970 |
Method for epitaxially growing a II-VI compound semiconductor
A method for epitaxially growing a II-VI compound semiconductor according to this invention comprises the steps of epitaxially growing a GaAs x Se 1 -x layer on a GaAs substrate and epitaxially...
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5314547 |
Rare earth slab doping of group III-V compounds
A semiconductor film is provided characterized by having high carrier mobility and carrier density. The semiconductor film is doped with the rare-earth element erbium so as to improve its...
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5309000 |
Diamond films with heat-resisting ohmic electrodes
A is a heat-resisting ohmic electrode on diamond film, including: a p-type semiconducting diamond film; a boron-doped diamond layer provided on the semiconducting diamond film; and an electrode...
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5304461 |
Process for the selective deposition of thin diamond film by gas phase synthesis
Thin diamond films can be selectively deposited imagewise on a substrate by gas phase synthesis. The substrate may be either a silicon substrate or a basal thin diamond film formed beforehand on a...
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5302232 |
(111) Group II-VI epitaxial layer grown on (111) silicon substrate
A group II-VI epitaxial layer grown on a (111) silicon substrate has a lattice mismatch which is minimized, as between the group II-VI epitaxial layer and the silicon substrate. The grown group...
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5298108 |
Serpentine superlattice methods and devices
The disclosed invention provides a serpentine-shaped semiconductor superlattice for novel electric and electro-optic devices. The invention comprises a stepped, or vicinal substrate, having a...
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5275966 |
Low temperature process for producing antimony-containing semiconductor materials
Tri-isopropylantimony is used as a source of antimony in chemical vapor deposition production of semiconductor materials. The process can be used to introduce antimony as a dopant into III/V and...
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5252498 |
Method of forming electronic devices utilizing diamond
A diamond thermistor is described. Surface portions of temperature sensing diamond of the thermistor are doped with impurity ions by ion implantation except for a sensing area thereof. A pair of...
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5246878 |
Capping layer preventing deleterious effects of As--P exchange
A III-V semiconductor heterojunction in which a capping layer (14) is formed between the two layers (10, 16) of the heterojunction to prevent any deleterious effects due to As--P exchange. When...
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