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RE39484 |
Process for the production of thin semiconductor material films
Process for the preparation of thin monocrystalline or polycrystalline semiconductor material films, characterized in that it comprises subjecting a semiconductor material wafer having a planar...
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7030451 |
Method and apparatus for performing nickel salicidation
A method and apparatus for performing nickel salicidation is disclosed. The nickel salicide process typically includes: forming a processed substrate including partially fabricated integrated...
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7018920 |
Composite sacrificial material
A composite sacrificial material is deposited in a void or opening in a dielectric layer on a semiconductor substrate. The composite sacrificial material includes a polymeric or oligomeric matrix...
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7018484 |
Semiconductor-on-insulator silicon wafer and method of formation
A method of fabricating a semiconductor-on-insulator semiconductor wafer is described that includes providing first and second silicon substrates. A first thin layer of silicon dioxide is formed on...
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6905557 |
Three dimensional integrated device
A device integration method and integrated device. The method includes the steps of polishing surfaces of first and second workpieces each to a surface roughness of about 5-10 Å. The polished...
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6864579 |
Carrier with a metal area and at least one chip configured on the metal area
A carrier has a metal area that is essentially composed of copper. A chip has a rear side metallization layer. A buffer layer, essentially composed of nickel and having a thickness of between 5 μm...
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6833570 |
Structure comprising an insulated part in a solid substrate and method for producing same
A structure having a first part and at least one second part. The second part is electrically insulated from the first part and the parts are formed in the same wafer of a material. The first and...
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6565649 |
Epitaxial wafer substantially free of grown-in defects
The present invention is directed to an epitaxial wafer comprising a single crystal silicon substrate having an axially symmetric region in which silicon self-interstitials are the predominant...
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6552395 |
Higher thermal conductivity glass for SOI heat removal
In one embodiment, the present invention relates to a method of forming a silicon-on-insulator substrate, involving the steps of providing a first silicon substrate; forming a beryllium oxide layer...
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6551944 |
Process for manufacturing a semiconductor material wafer comprising single-Crystal regions separated by insulating material regions
A process including the steps of: carrying out a directional etching in a semiconductor material body to form trenches having a first width; carrying out an isotropic etching of the semiconductor...
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6340642 |
Process for manufacturing a silicon semiconductor device having a reduced surface recombination velocity
A process for manufacturing a silicon semiconductor device having a reduced surface recombination velocity of charge carriers within a silicon wafer includes forming a plurality of semiconductor...
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6340535 |
Method for the heat treatment of a ZnSe crystal substrate, heat treated substrate and light emission device
This invention relates to a method for the heat treatment of a ZnSe crystal substrate to dope it with Al as a donor impurity, a ZnSe crystal substrate prepared by this heat treatment and a...
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6322634 |
Shallow trench isolation structure without corner exposure
A shallow isolation trench structure and methods of forming the same wherein the method of formation comprises a layered structure of a buffer film layer over a dielectric layer which is atop a...
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6307225 |
Insulating material, substrate covered with an insulating film, method of producing the same, and thin-film device
A bismuth silicate film (insulating film) 3 of Bi 2 SiO 5 oriented predominantly in the direction of (100) is formed on a Si substrate 2 and a ferroelectric thin film 4 is formed on the bismuth...
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6238482 |
Method of producing a wafer with an epitaxial quality layer and device with epitaxial quality layer
A method of making a wafer is provided. A first semiconductor film is formed onto a semiconductor substrate. An epitaxial film is formed onto an epitaxial wafer. The epitaxial wafer is placed with...
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6193813 |
Utilization of SiH4 soak and purge in deposition processes
A method of processing a substrate, such as a semiconductor wafer, in a vacuum processing chamber includes the steps of depositing a material on a surface of the substrate using a gas mixture, and...
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6139647 |
Selective removal of vertical portions of a film
A post-etch structure resulting in the inverse of a sidewall spacer etch, i.e. removal of the spacer. A vertical portion of a film is removed while leaving horizontal portions substantially intact....
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6114052 |
Ingot plate made of thermoelectric material, rectangular bar cut from the ingot plate, and process of fabricating the ingot plate
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6103020 |
Dual-masked field isolation
A field isolation process utilizes two or more isolation formation steps to form active areas on a semiconductor substrate. Each field isolation step forms a portion of the field isolation in a...
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6066570 |
Method and apparatus for preventing formation of black silicon on edges of wafers
A method for increasing chip yield by reducing black silicon deposition in accordance with the present invention includes the steps of providing a silicon wafer suitable for fabricating...
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6051478 |
Method of enhancing trench edge oxide quality
A shallow trench isolation structure is formed with a nitridated oxide liner on the sides and edges of the trench, thereby reducing interfacial strain. Embodiments include forming a trench opening...
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6045625 |
Buried oxide with a thermal expansion matching layer for SOI
A silicon-on-insulator structure (10) having a thick buried multi-layer (14) is disclosed herein. The thick buried multi-layer (14) comprises a thermal expansion coefficient matching layer (14b)...
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6004406 |
Silicon on insulating substrate
A first silicon single crystal substrate and a second silicon single crystal substrate are bonded together and the first silicon single crystal substrate is formed thin as an SOI layer. An...
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5948162 |
Method for forming SOI structure
An epitaxially grown layer having a large area and an uniform thickness is formed on an insulating layer. The surface of a silicon substrate (2) is oxidized to form a silicon dioxide layer (4)...
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5909626 |
SOI substrate and fabrication process therefor
After partially burying an insulation layer in a first single-crystalline silicon substrate, and flattening, the first single-crystalline silicon substrate and a second single-crystalline substrate...
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5900072 |
Insulating layer structure for semiconductor device
A structure of an insulating layer in a semiconductor device includes a substrate, at least one inorganic insulating layer pattern formed on the substrate, and an organic insulating layer formed on...
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5894037 |
Silicon semiconductor substrate and method of fabricating the same
A silicon semiconductor substrate including a silicon semiconductor layer at one of upper and lower surfaces thereof, the silicon semiconductor layer being composed of polysilicon or noncrystal...
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5891265 |
SOI substrate having monocrystal silicon layer on insulating film
Oxygen ion is implanted into a silicon substrate to remain a silicon layer on a surface of the silicon substrate. In this state, a silicon oxide layer is formed under the silicon layer. Silicon...
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5868870 |
Isolation structure of a shallow semiconductor device trench
A trench for isolating active devices on a semiconductor substrate, formed by creating a trench which has a peripheral edge, and disposing an isolating material in the trench. The isolating...
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5782997 |
Aluminum metallization for SiGe devices
Single crystal aluminum is deposited on SiGe structures to form metal interconnects. Generally, a method of forming single crystal aluminum on Si (1-X) Ge X is presented, including the steps of...
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5782996 |
Graded compositions of II-VI semiconductors and devices utilizing same
A graded layer composition of Zn(Se,Te) in which the Te fraction varies across the layer in a super-parabolic grading profile. Such a graded layer has lower contact resistance than graded layers in...
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5780346 |
N.sub.2 O nitrided-oxide trench sidewalls and method of making isolation structure
A method of forming an isolation structure in a semiconductor substrate is described. A trench is first etched into a semiconductor substrate. A first oxide layer is then formed with the trench....
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5733383 |
Spacers used to form isolation trenches with improved corners
A trench for isolating active devices on a semiconductor substrate, formed by creating a trench which has a peripheral edge, and disposing an isolating material in the trench. The isolating...
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5728231 |
Precursor for semiconductor thin films and method for producing semiconductor thin films
A precursor for manufacturing a semiconductor thin film in which an oxide thin film comprising at least one element as a dopant, selected from a group which consists of Groups IA, IIA, IIB, VA, and...
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5721145 |
Method of making a semiconductor substrate having gettering effect
The present invention is mainly characterized in that a semiconductor substrate improved so as to maintain a gettering effect for a long time can be obtained. A polycrystalline silicon film is...
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5698063 |
Intermediate workpiece employing a mask for etching an aperture aligned with the crystal planes in the workpiece substrate
A method for differentially etching an N-sided polygon aperture through a first major surface of a <100> silicon wafer along the <111> planes begins with depositing a mask and defining...
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5658834 |
Forming B.sub.1-x C.sub.x semiconductor layers by chemical vapor deposition
Active semiconductor devices including heterojunction diodes and thin film transistors are formed by PECVD deposition of a boron carbide thin film on an N-type substrate. The boron to carbon ratio...
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5610104 |
Method of providing a mark for identification on a silicon surface
The present invention concerns a method for making an identification mark on a silicon surface. In a preferred embodiment, the identification mark formed on the silicon surface does not...
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5509974 |
Etch control seal for dissolved wafer process
A dissolved wafer process is modified by providing an etch control seal around the perimeter of an etch resistant microstructure, such as a micromechanical or microelectromechanical device, formed...
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5478408 |
SOI substrate and manufacturing method therefor
There is provided an SOI (Silicon On Insulator) substrate having a thick SOI layer, where crystallographic defects mainly consisting of OSFs (Oxidation Induced Stacking Fault) are practically...
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5470398 |
Dielectric thin film and method of manufacturing same
A dielectric film is provided which may be used as an insulating layer of a capacitor of a semiconductor DRAM. The dielectric film is comprised of three elements, namely, titanium, silicon and...
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5443661 |
SOI (silicon on insulator) substrate with enhanced gettering effects
A silicon-on-insulator (SOI) substrate is arranged such that a polycrystalline silicon film which functions as a gettering site for heavy metals is provided on a first single crystal silicon...
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5368880 |
Eutectic bond and method of gold/titanium eutectic bonding of cadmium telluride to sapphire
A method of forming a eutectic bond, of Cadmium Telluride to Sapphire utilizing the Gold/Silicon eutectic bonding of the Cadmium Telluride to the Sapphire. A multi-layer structure of: Chromium...
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5354387 |
Boron phosphorus silicate glass composite layer on semiconductor wafer
A composite BPSG insulating and planarizing layer is formed over stepped surfaces of a semiconductor wafer by a novel two step process. The composite BPSG layer is characterized by the absence of...
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5354386 |
Method for plasma etching tapered and stepped vias
A multi-step plasma etch method for etching a tapered via having uniform bottom diameter ("CD") and extending through the resist and into the oxide layer of a coated semiconductor substrate, and a...
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5352530 |
Transparent films and laminates having the same
A highly transparent film having high strength, suitable extensibility, high weather resistance, low moisture absorption and so on is disclosed, which consists mainly of EVAT. And also various...
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5332451 |
Epitaxially grown compound-semiconductor crystal
An epitaxially grown compound-semiconductor crystal comprising a substrate, a buffer layer formed directly or indirectly on the substrate, and an active layer formed on the buffer layer. The buffer...
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5282903 |
High quality oxide films on substrates
A method for providing an oxide film of a material on the surface of a substrate using a reactive deposition of the material onto the substrate surface in the presence of a solid or liquid layer of...
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5281283 |
Group III-V compound crystal article using selective epitaxial growth
A III-V group compound crystal article comprises a substrate having a non-nucleation surface with smaller nucleation density (S NDS ) and a nucleation surface (S NDL ) which is arranged adjacent to...
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5248350 |
Structure for improving gate oxide integrity for a semiconductor formed by a recessed sealed sidewall field oxidation process
A process for forming field oxide regions between active regions in a semiconductor substrate. Pad oxide, polysilicon and first silicon nitride layers are successively formed over substrate active...
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