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7293581 |
Latching micro-regulator
A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and...
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7194863 |
Turbine speed control system and method
One embodiment of the invention provides a turbine control system that adjusts the control thresholds of two-position valves, which provide propellant to the turbine, based on turbine load so as to...
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7140384 |
Substrate processing equipment having mass flow controller
A mass flow controller includes a base having a first passage, an inlet portion for introducing fluid into the first passage, an outlet portion for releasing the fluid from the first passage, and a...
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6705345 |
Micro valve arrays for fluid flow control
An array of micro valves, and the process for its formation, used for control of a fluid flow and having a substrate with a plurality of apertures for directing the fluid to flow from one side to...
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6534003 |
Valve and a method of using a valve
A valve is provided which includes a valve body, a first valve member, and a second valve member. The valve body has a first flow passage formed therethrough and a second flow passage formed...
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6360762 |
Method for feeding gases for use in semiconductor manufacturing
An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus...
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6240944 |
Addressable valve arrays for proportional pressure or flow control
A device for controlling the proportional pressure or flow of fluids over a range of source pressure. An addressable array is interposed between a source pressure and an exit pressure chamber. The...
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6234204 |
Flow control valve
A flow control valve has a supply line connection, and at least one discharge line connection, and is characterized by at least one fine-control valve whose flow rate is continuously or...
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6089533 |
Arrangement having at least one hydraulic actuator
The invention is directed to an arrangement having one or several hydraulic actuators. The arrangement is characterized in that the hydraulic actuators are realized, at in part, by utilizing...
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5927325 |
Microelectromechanical machined array valve
A valve to allow digitally addressable flow controllers is provided. An array of micromachined valves having a range of flow capacities and individually addressable while functioning in an On/Off...
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5875817 |
Digital gas metering system using tri-stable and bi-stable solenoids
A digital gas metering system includes inlet and outlet manifolds, a plurality of conduits each extending between the inlet manifold and the outlet manifold, and a solenoid-operated valve in each...
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5765585 |
Sample decade dilution system and procedure
The method and apparatus of this disclosure are directed to a system for diluting a sample gas. For example, the sample gas may carry excessive water which creates difficulties in analysis. The...
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5520333 |
Tube metering control system
Method and apparatus for dispensing a liquid agricultural agent at a desired rate. A source of the liquid is pressurized and passed in parallel though at least one regulating capillary tube of such...
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5467797 |
Two-position three-way solenoid valve
A solenoid valve is provided which achieves the function of a two-position, three-way directional control valve and functions at high pressures with low leakage rates. In addition, the valve...
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5341834 |
Multiport valve for fluid transfer systems
A multiport valve for a water transfer system passes water, drawn by a pump, through a plurality of collectors. A programmable controller controls operation of the pump and a stepper motor which...
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5329965 |
Hybrid valving system for varying fluid flow rate
In a fluid valving system, binary fluid control lines are connected in parallel between a common fluid inlet and a common fluid outlet. Each line has a binary valve and a metering orifice for...
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5289811 |
Purge control device
A purge control device for an evaporative control system comprises a single housing having two solenoid actuated valves controlling parallel orifices leading from an inlet chamber to an exit flow...
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5150690 |
Flow control system
A flow control system for use in a compressible fluid-fueled internal combustion engine includes a fluid metering device comprising a plurality of fluid lines for communication between an inlet...
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5085247 |
Machining fluid supply device for a wire cut electric discharge machine
A machining fluid device for a wire cut electric discharge machine, which controls the amount of machining fluid supplied from upper and lower nozzles to values suited to different machining modes...
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5065794 |
Gas flow distribution system
Gas distribution system including main, lateral and loop conduits in which gas flow is continuously provided between a source of pressurized gas and venting means so that "dead space" is avoided in...
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5048564 |
High-speed solenoid valve for a fluid under pressure, e.g. for pneumatic circuits
A solenoid valve having an electromagnet arranged in a chamber into which an inlet duct and an outlet duct of the solenoid valve open, whereby the coil is constantly ventilated by the compressed...
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4974707 |
Shock absorber
A shock absorber with a variable damping characteristic has a piston which is reciprocable in a cylinder to divide the oil-filled internal space of the cylinder into two chambers. The chambers are...
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4877056 |
Digital valve
A "digital" valve comprises a plurality of shutters (46) connected in parallel between an inlet duct (2) and an outlet duct (42) of the digital valve, with each shutter (46) being constituted by an...
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4719941 |
Throttle valve
A throttle valve having a housing defining a cavity, with structures providing a flow channel within the cavity, and an inlet and outlet in communication with the flow channel. The throttle valve...
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4628961 |
Multiple orifice stepper control valve
This invention relates to a control valve including a plurality of rotary closure members respectively blocking and opening a plurality of flow passages extending from one port opening to another...
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4624282 |
Two-stage solenoid valve
A two-stage solenoid valve uses a pair of stacked coaxial armatures in a cylindrical sleeve housing. A first armature is provided with a fluid sealing ring and is urged by a first spring to...
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4577658 |
Calibrated fluid flow control device
Calibrated fluid flow control device comprising several valves (1a to 1b) mounted in parallel on a single body (2) receiving in several housings (6), several seats and several interchangeable...
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4369964 |
Sheet feed apparatus for printer or the like
A drum (13) is provided with vacuum openings (14), (16), for suckingly holding a sheet (19) thereto for printing or the like. A sheet feed failure is detected by sensing for a drop in the level of...
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4356840 |
Digital fluid flow control system
In a digital fluid flow control system having a source of fluid at a first pressure and a fluid receiver at a second pressure lower than the first pressure, individually actuatable, digital valve...
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4313465 |
Method and control device for dosing flow media
A method and system for providing dosing of fluid is described. The method and system is directed to the control of a plurality of parallel on/off valves which regulate the flow of the fluid. The...
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4303097 |
Digital fluid flow control apparatus
Digital fluid flow control apparatus comprises a generally cylindrical valve body (10) having a cylindrical axis. An inlet (27) to the valve has an axis extending radially from the cylindrical...
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4287909 |
Valve for developing variable output pressure
A valve is disclosed which receives a fluid such as gas at an input port and varies the fluid pressure at the output port in response to an electrical control signal. In one embodiment, a...
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4170245 |
Digital control valve
A digital valve has a valve body with an inlet passage and two outlet passages straddling the inlet passage. A plurality of slots are cut in the body connecting the inlet passage to each outlet...
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4036011 |
Multiple valve sequential control for a combined cycle power plant
In a combined cycle plant, a process flow demand signal is applied to multiple sequentially operated boiler feedwater valves through a single manual/automatic (M/A) station. Each valve is...
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4030523 |
Digital flow control system
A digital flow control system for testing ramjet engines that permits conl of fuel in steps, or percentages, of full flow rate. Four cavitating venturis connected to four valves control the flow...
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4019533 |
Digital valve assembly
A digital valve assembly has a body provided with a plurality of planar sides and has an inlet passage running axially thereinto and opening past an axial projection and through a plurality of...
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3999572 |
Fluid flow instrumentality
A fluid flow control system having a control valve which maintains a constant output flow rate regardless of input flow pressure variations. Three such constant flow valves are disposed in parallel...
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3942553 |
Digital fluid flow control system with trim adjustment
Individually actuatable digital valve elements in parallel interconnect a fluid source to a receiver. In the flow passage of each valve element, there is a converging-diverging nozzle that feeds...
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3937248 |
Fluid flow control system employing a plurality of digital valve elements
An upstream fluid chamber adapted for fluid flow in a given direction is interconnected to a downstream fluid chamber by a plurality of individually actuatable digital valve elements disposed in a...
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3905653 |
Anti-lock control system with common hydraulic step-by-step valve
An anti-lock control system for the wheel brakes of a vehicle comprises an evaluation circuit responding to the rotary behavior of at least two wheels and a hydraulic step-by-step valve controlled...
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3875964 |
Multiple element control valve
A huge control valve has a valve body comprising a block of castable material, such as concrete, and a plurality of pipes imbedded in the block. The pipes extend through the block from end to end....
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3828814 |
ELECTRICAL CONTROL ARRANGEMENT FOR GAS OR STEAM TURBINES
The basic flow rate for any given output is controlled by main valves driven by a relatively slow electrical drive having a high operating force. Small output changes are rapidly corrected by error...
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3827457 |
FLUID PRESSURE SYSTEM FOR CONVERTING DIGITAL SIGNALS TO ANALOG SIGNALS
A fluid pressure system for converting a digital pressure signal into an analog pressure by control of fluid pressure passing through at least a pair of restrictors in series and by monitoring the...
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3780763 |
PULSE RATIO MODULATION VALVE
A valve disposed for use in a rocket having thrust vector control means for ttitude control of the rocket. The valve is operated by a normally-open two-way solenoid cartridge which controls a...
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3610274 |
FLUID LOGIC CIRCUIT
A NOR fluid logic circuit mechanism comprising an arrangement of diaphragm-controlled valves which have three inputs and which has a single output. This provides effectively a three-input NOR logic...
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3502105 |
ELECTROMAGNETIC VALVES AND APPLICATION THEREOF TO DIGITAL VALVES
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3433257 |
DIAPHRAGM TYPE FLUID LOGIC LATCH
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3331393 |
Digital valve
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3149644 |
Pressure relief valve system
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3081942 |
Digital-to-analog control system
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