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7389787 |
Closed loop additive injection and monitoring system for oilfield operations
A system is provided that monitors at the wellsite injection of additives into formation fluids recovered through wellbores and controls the supply of such additives from remote locations. The...
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7387135 |
Valve assembly having rigid seating surfaces
A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall...
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7383851 |
Closed loop pressure control system and electrically operated pressure control valve with integral pressure sensor and method of making same
A solenoid operated valve has a pressure transducer sensing valve outlet pressure integrally formed in the valve body, such as by overmolding. Upon connection of the transducer and solenoid to an...
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7380568 |
Water flow controller
An apparatus for controlling water flow is provided. The apparatus is a novel electronic water controller capable of operation using a battery-type power source, and providing for achievement of...
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7380564 |
System and method for a mass flow controller
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass...
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7373943 |
Self-contained breathing apparatus facepiece pressure control method
An electro mechanically-assisted control system for use in a second-stage regulator. Regulator control assembly ( 20′ ), also referred to as all-electronic (AE) assembly ( 20′ ), includes an...
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7370666 |
Power system with computer-controlled fuel system
The present invention is a fuel-control system for a turbine which includes a programmable logic controller. The controller manages utility and stored natural gas sources using a surge tank and...
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7363182 |
System and method for mass flow detection device calibration
Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a...
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7353841 |
Relative pressure control system and relative flow control system
Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely...
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7352287 |
Pneumatic controller
A pneumatic controller for controlling a device.
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7335396 |
Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
Methods, apparatuses, and systems for controlling mass flow rates and pressures in passageways coupled to reaction chambers are disclosed herein. In one embodiment, a method includes controlling a...
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7334602 |
Apparatus for controlling flow rate of gases used in semiconductor device by differential pressure
Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure...
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7318447 |
Pressure loaded pilot system and method for a regulator without atmospheric bleed
A pressure loaded pilot valve system and method for a regulator valve is provided. The system includes a regulator valve connecting an inlet line to an outlet line, a servo control valve assembly,...
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7314059 |
Systems and methods for controlling pressure of fluids
Systems and methods for using a dual-path fluid routing system that uses a flow restriction device to enhance temperature and pressure control of fluid are provided. Systems and methods for using a...
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7306195 |
Anti-icing actuator assembly for pneumatic valve
An actuator assembly for use in conjunction with a pneumatic valve assembly of the type which includes an airway having an inlet port, an outlet port, and a valve disposed within the airway and...
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7306115 |
Volumetric control apparatus for fluid dispensing
The present invention provides an apparatus for dispensing fluid in preselected volumetric quantities. The apparatus comprises a valve positioned inline with a conduit holding fluid under pressure,...
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7306008 |
Water leak detection and prevention systems and methods
Water leak detection and prevention systems and methods in which water is only delivered to the water pipes in the building when a faucet or appliance demands water and water is delivered through a...
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7302959 |
Low-power wireless inflatable bladder damper for forced air heating, ventilation, and air conditioning systems
A low-power, wireless, inflatable bladder damper device for controlling the flow of air through an airflow channel, and a method of operation for the same. Rather than requiring power supply and/or...
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7299818 |
Integrated microvalve and method for manufacturing a microvalve
An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed...
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7287541 |
Method, apparatus and system for controlling fluid flow
A system, apparatus and method of controlling the flow of a fluid are provided. In accordance with one embodiment of the present invention, a flow control device includes a valve having a flow path...
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7284564 |
Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate
A gas supply system arranged for dispensing of gas at a predetermined flow rate. The system employs a gas dispensing flow circuitry arranged for dispensing gas at selectively variable gas flow...
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7283894 |
System and method for fluid regulation
Systems and processes for fluid regulation may provide diagnostic information that is useful for evaluating the condition and/or needed repairs/maintenance for fluid regulation systems. In...
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7278437 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated...
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7270141 |
Methods and systems for controlling viscosity in real time
Systems and methods are disclosed for controlling a viscosity of a fluid. The control system includes a controller controlling an input to an actuator and an observer estimating the viscosity of...
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7258132 |
Electronically controlled back pressure regulator
An electronically controlled back pressure regulator comprises an analysis device having a vent coupled to the analysis device through a vent path, a pressure sensor coupled to the vent path, a...
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7225085 |
Precision gas flow meter
A precision gas flow meter that is capable of measuring small flow rates of gasses precisely in the range of 0.01 to 10 L per minute. The meter is designed to measure the gas flow in small volume...
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7222639 |
Electrostatically actuated gas valve
A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve...
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7204270 |
Automated water shut-off valve
A device includes a housing that has a plurality of monolithically formed walls, wherein selected walls are provided with inlet and outlet ports respectively. The housing includes a coupling in...
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7201180 |
Water supply system
A water supply system comprising a supply line and a network of consumers, one of which being a monitored consumer who receives the least amount of pressure, a pressure regulation system comprising...
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7195028 |
Self-contained oxygen generator
A self-contained oxygen generator containing a PSA unit and a flowmeter in the outlet line. The flowmeter provides a signal which represents the flow rate of the oxygen in the outlet line. A...
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7163024 |
Flow control valve and flow control device
There are provided a flow control valve and a flow control device suitable for allowing flow control of a fluid with high accuracy. Diaphragms 8 and 9 are mounted to upper and lower openings,...
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7159602 |
Flow-measuring valve device and method
A flow measuring valve device ( 1 ) for fluid, the flow measuring valve ( 1 ) comprising a first restriction ( 48 ) and a second restriction ( 76 ) connected in series with the first restriction (...
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7156116 |
Apparatus and method for operating a valve using a cushion filter
A method, system, and computer program are provided for operating a valve using a cushion filter. The method, system, and computer program receive a process variable signal associated with...
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7143782 |
Pressure regulator module for controlling a gas
A pressure regulator module for controlling a gas is provided, which includes a chamber, at least one gas inlet, and at least one gas outlet. In addition, a proportional valve operating essentially...
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7143774 |
Method and apparatus for providing a determined ratio of process fluids
A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least...
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7140384 |
Substrate processing equipment having mass flow controller
A mass flow controller includes a base having a first passage, an inlet portion for introducing fluid into the first passage, an outlet portion for releasing the fluid from the first passage, and a...
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7137400 |
Bypass loop gas flow calibration
Described herein are apparatuses, methods and systems to monitor the performance of one or more mass flow controllers that supply gases to deposition, etching, and other manufacturing processes. A...
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7131456 |
Mass flow controller
A mass flow controller includes a base having a passage that allows a fluid to pass through the passage. A first control valve controls a mass flow of a fluid passing through the passage. A second...
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7124773 |
Mems pilot valve
A valve including a fluid inlet and a fluid outlet coupled by a fluid channel, all of which are defined by walls and structures produced by micromachining of glass and/or silicon. An actuator can...
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7121296 |
Variable orifice valve for air stream containing particulate coal
A variable orifice valve for balancing the flow of particulate coal in an air stream relative to other parallel conduits. The valve comprises a section of conduit which changes in area along its...
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7117886 |
Vacuum regulating valve
A vacuum regulating valve has high controllability, wherein the opening of a valving member can be quickly and accurately controlled by using a small and inexpensive electric motor. In accordance...
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7114517 |
High purity fluid delivery system
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a...
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7114516 |
Leak-detecting check valve, and leak-detection alarm system that uses said check valve
One object of the present invention is to monitor water pipes regularly and to detect water leaks by using basic equipment and to provide a device that generates an alarm when a leak occurs. The...
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7108009 |
Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto
An opening/closing of a plurality of valves are controlled so that a plurality of gases flow into a chamber in an operation of a semiconductor manufacturing apparatus, and the opening/closing of...
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7104275 |
Pinch valve
A control valve includes an elastomeric flow tube, a plunger having first and second ends, and a pinch member connected to the first end of the plunger. The pinch member is situated adjacent the...
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7100631 |
Multifunction passive and continuous fluid feeding system
The present invention is to provide a kind of multifunction passive and continuous fluid feeding system for external systems, the fluid-feed system including a storing and transmitting component, a...
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7100628 |
Electromechanically-assisted regulator control assembly
An electromechanically-assisted control system for use in a second-stage regulator. Regulator control assembly ( 20 ), also referred to as EMA assembly ( 20 ), includes a mechanical actuator...
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7086410 |
Substrate processing apparatus and substrate processing method
A common solvent vapor supply source 41 and a common processing gas supply source 42 supply ozone gas and steam to a plurality of processing vessels 30 A, 30 B. Pressures in the processing...
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7080656 |
Variable vent diffuser
A diffuser apparatus for variably controlling fluid pressure release is provided. The diffuser apparatus includes an aperture for pressure release and an adjustable plug that can variably expose...
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7069944 |
Flow rate control device
To control a flow rate ranging from an extremely-low rate to a high rate, particularly, to control an extremely-low flow rate accurately, the following processes are executed. A regulator, a flow...
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