|
Match
|
Document |
Document Title |
|
|
8176951 |
Versatile systems for continuous in-line blending of butane and petroleum
A system and method are provided for in-line processes of blending butane into gasoline streams, and for blending butane into a gasoline stream at any point along a petroleum pipeline. The...
|
|
|
8160833 |
Thermal mass flow sensor with improved response across fluid types
One embodiment of the present invention comprises a mass flow controller. The mass flow controller may comprise a pair of thermal sensing elements, a bridge circuit adapted to receive at least one...
|
|
|
RE43288 |
High purity fluid delivery system
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a...
|
|
|
8131400 |
Adaptive on-tool mass flow controller tuning
One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than...
|
|
|
8109288 |
Flow rate control system and shower plate used for partial pressure control system
A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are...
|
|
|
8087427 |
Vapor phase epitaxy apparatus and irregular gas mixture avoidance method for use therewith
A vapor phase epitaxy apparatus having a processing chamber with a target workpiece such as a wafer being received therein is disclosed. This apparatus includes a first flow path which supplies the...
|
|
|
8056579 |
Mass flow controller
A mass flow controller has: a flow rate sensor section that measures the flow rate of a fluid and outputs a flow rate measurement signal indicating the measurement value; a flow rate control valve...
|
|
|
8052845 |
Reflux divider for a column having portions for the transfer of material arranged in parallel
The reflux divider for a separation column has portions for the transfer of material arranged in parallel which are mutually bounded by a vertical dividing wall and which include members for the...
|
|
|
8019481 |
Flow rate ratio control device
A flow ratio controller having: a main channel; branch channels branching from the end of the main channel; control valves respectively provided in the branch channels; a plurality of flow rate...
|
|
|
7975718 |
In-situ monitor of injection valve
The present invention generally provides methods and apparatus for monitoring performance of an injection valve. In one embodiment, a control signal relates to an actuator movement is monitored and...
|
|
|
7979165 |
Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus
A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on...
|
|
|
7971604 |
Flow controller delivery of a specified-quantity of a fluid
A system and method for delivering a specified-quantity of a fluid using a flow controller based on a fluid delivery profile is described. One embodiment includes a fluid delivery profile that...
|
|
|
7925386 |
Control device for a pneumatically operated actuator
The disclosure relates to a control device for a pneumatically operated actuator in the field of process automation, in particular for continuous control of material flows in the industrial...
|
|
|
7918238 |
Flow controller and its regulation method
A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid,...
|
|
|
7881886 |
Methods for performing transient flow prediction and verification using discharge coefficients
A method for determining an actual gas flow rate as gas flows through a gas flow delivery system is provided. The method includes sending the gas through the gas flow delivery system into a gas...
|
|
|
7881829 |
Mass flow controller
This invention provides a mass flow controller that can prevent a flow rate change due to a pressure change without sacrificing the speed of response to a change of a flow rate setting value and...
|
|
|
7866337 |
Chemically inert flow controller with non-contaminating body
A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional...
|
|
|
7809954 |
Biometric control of equipment
An apparatus for allowing operation of equipment by an authorized operator comprises a biometric scanner 20 receiving a biometric input from an authorized operator, and transmitting an...
|
|
|
7798168 |
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using...
|
|
|
7769493 |
System and method for controlling flow characteristics
The system for controlling flow characteristics allows a user to selectively modify the inherent fluid flow characteristics of a fluid transmission system including a flow process controller and a...
|
|
|
7743114 |
Automated data delivery systems
The Automated Data Delivery Systems (ADDS) are two delivery systems designed to either deliver specific data to customer computers over a network such as the Internet or from one application...
|
|
|
7723700 |
Controlling the flow of vapors sublimated from solids
A vapor delivery system for delivering a steady flow of sublimated vapor to a vacuum chamber comprises a vaporizer of solid material, a mechanical throttling valve, and a pressure gauge, followed...
|
|
|
7699070 |
Shutoff valve apparatus and mass flow control device with built-in valve
Shutoff valve apparatus comprising: a valve block having a valve chest on which gas collects temporarily, an inlet flow path which makes gas flow into a valve chest, an outlet flow path into which...
|
|
|
7658204 |
Semiconductor manufacturing apparatus enabling inspection of mass flow controller maintaining connection thereto
An opening/closing of a plurality of valves are controlled so that a plurality of gases flow into a chamber in an operation of a semiconductor manufacturing apparatus, and the opening/closing of...
|
|
|
7631671 |
Versatile systems for continuous in-line blending of butane and petroleum
A system and method are provided for in-line processes of blending butane into gasoline streams, and for blending butane into a gasoline stream at any point along a petroleum pipeline. The...
|
|
|
7603186 |
Adaptive response time closed loop control algorithm
A system and method for controlling a flow of a fluid using an adaptive closed-loop-control algorithm is described. One embodiment includes a method for receiving a set point indicator and/or a...
|
|
|
7543595 |
Valve calibration method and apparatus
An arrangement for calibrating a Venturi valve includes a source of flow measurements and a processing circuit. The Venturi valve has a variable shaft position and is operable to provide an air...
|
|
|
7533682 |
System and method of providing water flow rate compensation
A system and method of flow rate compensation is provided to allow precise volume dispensing over widely varied and varying input process media pressure and flow conditions. This system utilizes...
|
|
|
7493195 |
Fluid regulation control
Controlling fluid regulation may provide increased efficiency and reliability. In one general aspect, a system and process for fluid regulation may include the ability to receive a command signal,...
|
|
|
7481240 |
Partial pressure control system, flow rate control system and shower plate used for partial pressure control system
A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are...
|
|
|
7445017 |
Mesovalve modulator
A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the...
|
|
|
7424894 |
Method and apparatus for providing a determined ratio of process fluids
A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least...
|
|
|
7422028 |
Apparatus for controlling and metering fluid flow
A device for metering and controlling fluid flow includes a variable orifice and is configured to use a pressure sensor. The device includes a fluid flow conduit having at least one planar inner...
|
|
|
7412986 |
Method and system for flow measurement and validation of a mass flow controller
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is...
|
|
|
7412336 |
Attitude insensitive flow device system and method
Disclosed herein are systems and methods for attitude insensitive flow devices. The system can include a flow device having a processor and a computer readable medium accessible by the processor...
|
|
|
7389787 |
Closed loop additive injection and monitoring system for oilfield operations
A system is provided that monitors at the wellsite injection of additives into formation fluids recovered through wellbores and controls the supply of such additives from remote locations. The...
|
|
|
7387135 |
Valve assembly having rigid seating surfaces
A valve assembly including a valve body having a bore and a port extending to the bore, an orifice member received in the bore and having an end wall and a side wall, and wherein the end wall...
|
|
|
7380564 |
System and method for a mass flow controller
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass...
|
|
|
7367350 |
Processing device and method of maintaining the device
A film processing device using vaporized liquid source capable of confirming the flow control accuracy of flow control equipment such as a mass flow controller (15) controlling the flow of the...
|
|
|
7334602 |
Apparatus for controlling flow rate of gases used in semiconductor device by differential pressure
Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure...
|
|
|
7299818 |
Integrated microvalve and method for manufacturing a microvalve
An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed...
|
|
|
7287541 |
Method, apparatus and system for controlling fluid flow
A system, apparatus and method of controlling the flow of a fluid are provided. In accordance with one embodiment of the present invention, a flow control device includes a valve having a flow path...
|
|
|
7284564 |
Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate
A gas supply system arranged for dispensing of gas at a predetermined flow rate. The system employs a gas dispensing flow circuitry arranged for dispensing gas at selectively variable gas flow...
|
|
|
7283913 |
Method of executing a leak control system, and a leak control system for performing the method
The invention relates to a leak control system (1) in two-stringed pipe installations and a method of executing a leak control system comprising one stop valve (2) with an associated flow meter (3)...
|
|
|
7225085 |
Precision gas flow meter
A precision gas flow meter that is capable of measuring small flow rates of gasses precisely in the range of 0.01 to 10 L per minute. The meter is designed to measure the gas flow in small volume...
|
|
|
7204270 |
Automated water shut-off valve
A device includes a housing that has a plurality of monolithically formed walls, wherein selected walls are provided with inlet and outlet ports respectively. The housing includes a coupling in...
|
|
|
7163024 |
Flow control valve and flow control device
There are provided a flow control valve and a flow control device suitable for allowing flow control of a fluid with high accuracy. Diaphragms 8 and 9 are mounted to upper and lower openings,...
|
|
|
7159602 |
Flow-measuring valve device and method
A flow measuring valve device (1) for fluid, the flow measuring valve (1) comprising a first restriction (48) and a second restriction (76) connected in series with the first restriction (48), the...
|
|
|
7143782 |
Pressure regulator module for controlling a gas
A pressure regulator module for controlling a gas is provided, which includes a chamber, at least one gas inlet, and at least one gas outlet. In addition, a proportional valve operating essentially...
|
|
|
7140384 |
Substrate processing equipment having mass flow controller
A mass flow controller includes a base having a first passage, an inlet portion for introducing fluid into the first passage, an outlet portion for releasing the fluid from the first passage, and a...
|