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8175754 |
Configuration of a multivariable process fluid flow device
A method of providing configuration information for a process fluid flow device is provided. The method includes receiving a process fluid selection and providing at least one selectable fluid...
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8147774 |
Micro passage chip and fluid transferring method
There is provided by the present invention a novel micro passage chip having such a structure that a fluid can be transferred without using a physical or mechanical squeezing means that is applied...
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8141847 |
Method for controlling or regulating a vacuum valve
A method for controlling or regulating a vacuum valve that includes a valve body (1) with a valve opening (2), a closing member (3), an actuator (5) for moving the closing member (3), and a control...
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8131400 |
Adaptive on-tool mass flow controller tuning
One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than...
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8091572 |
Method for tracking pollution source in process water
A method for tracking a pollution source in process water is presented. Firstly, variation curves of drain water drained from different rinsing tanks are respectively obtained, and a water quality...
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8091252 |
Method of controlling gas valve of dryer
Disclosed herein is a method of controlling a gas valve of a dryer which controls the amount of gas supplied into a gas combustor. The method includes detecting the temperature of hot air supplied...
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8048226 |
Method and system for improving deposition uniformity in a vapor deposition system
A processing system for treating a substrate includes a process chamber, a substrate holder, a gas distribution system, and a flow modulation element. The process chamber has a pumping system to...
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8038076 |
System and method for dynamic solenoid response adjust control
A method is described for controlling a solenoid-operated fluid valve having an output hydraulic pressure that varies in accordance with an input solenoid control current delivered from a drive...
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8036780 |
Flow controller and test method therefor, and flow control method
A flow controller and a test method therefor are provided which enable testing of the flow control of a process gas passing through a fluid path during operation of semiconductor manufacturing...
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7998115 |
Dialysis system having optical flowrate detection
A medical fluid machine includes an enclosure; a disposable unit accepted by the enclosure, the disposable unit including a conduit through which a medical fluid can flow, the conduit including a...
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7988813 |
Dynamic control of process chemistry for improved within-substrate process uniformity
A method and system for dynamically controlling a process chemistry above a substrate is described. The system for adjusting the process chemistry comprises a ring configured to surround a...
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7979165 |
Mass flow rate control apparatus, its calibration method and semiconductor-producing apparatus
A method for calibrating a mass flow controller comprising a calibrating valve disposed on the most upstream side of a path, a mass flow rate control valve mechanism, a tank provided at the path on...
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7974741 |
Managing information related to industrial equipment
An electronics module for an industrial device is associated with an individual industrial device. Audit data for the industrial device is stored in a memory of the electronics module. The audit...
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7957841 |
Method of calculating pump flow rates and an automated pump control system
A method of determining a flow rate of a pump involves determining a volume capacity for a flow line carrying produced fluids from the pump, determining a starting pressure for the flow line and...
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7931817 |
Additive dispensing device and a thermally activated additive dispensing filter having the additive dispensing device
An additive dispensing device is provided. The additive dispensing device includes a reservoir configured to contain a supply of an additive. The reservoir is in fluid communication with a...
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7905243 |
No-drip check valves
A mechanism to check fluid flow from a tube or spigot when it is disconnected from a downstream conduit is provided. The mechanism includes a duckbill check valve that has its bills pointed in the...
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7849890 |
Apparatus for and methods of draining an enclosure
An assembly includes a sensor element operable to generate a signal in response to moisture being present at a predetermined level within a sealed housing, and a valve element coupled to the...
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7849869 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating...
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7814936 |
Sound pressure level feedback control
Methods and systems are provided for predicting internal sound pressure within a flow passage, by measuring a vibration velocity response of a wall of the flow passage, for example, using...
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7806235 |
Environmental compressor protection assembly
A device that relieves lubricant pressure in a divider block lubrication system into a fluid reservoir, a container, or directly back into the compressor frame to which the tubing is connected....
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7743783 |
Method and apparatus for recycling process fluids
A method and apparatus for recycling a process fluid from a drain of a semiconductor process tool. The process fluid may be an acidic cobalt solution or an electroless cobalt solution used in a...
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7727478 |
Micro total analysis system
A system including an inspection chip equipped with at least a pump connection having a flow path opening for interconnecting to a micro-pump, a flow path through which a fluid flows, and a fluid...
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7702423 |
Method and apparatus to control the rate of flow of a fluid through a conduit
An apparatus to control the rate of flow of a stream of pressurized fluid through a conduit. The apparatus comprises a flow measurement device operatively connected to the conduit, a flow control...
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7666660 |
Method for mixing inside a capillary and devices for achieving same
The present invention provides a method for mixing three or more fluids inside a capillary. The present invention further provides a method for optimizing efficient mixing of two or more fluids...
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7634328 |
Method, system and computer program product for monitoring and optimizing fluid extraction from geologic strata
An arrangement which utilizes an inexpensive flap valve/flow transducer combination and a simple local supervisory control system to monitor and/or control the operation of a positive displacement...
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7627397 |
Material-sensitive routing for shared conduit systems
A routing system for shared conduits used in industrial applications is sensitive to material types and material flow histories to allow compatible materials to flow through shared conduits without...
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7617836 |
System and method for supplying functional water
A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional...
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7603186 |
Adaptive response time closed loop control algorithm
A system and method for controlling a flow of a fluid using an adaptive closed-loop-control algorithm is described. One embodiment includes a method for receiving a set point indicator and/or a...
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7556716 |
Method for recording the boiling curve of liquids and device for carrying out the method
Described is a method for recording the boiling curve of liquids, in particular petroleum products and/or solvents, in which a sample amount of the liquid to be analyzed is evaporated and...
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7533682 |
System and method of providing water flow rate compensation
A system and method of flow rate compensation is provided to allow precise volume dispensing over widely varied and varying input process media pressure and flow conditions. This system utilizes...
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7509968 |
Flow control for on-board inert gas generation system
An on-board inert gas generating system includes a flow control valve modulated according to changes in ambient conditions to minimize changes to oxygen content within a fuel tank. The quality of...
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7412986 |
Method and system for flow measurement and validation of a mass flow controller
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is...
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7363112 |
Digital moisture monitor controller with wide applications soil, and hydroponics moisture sensors, and optional X10 multi-sensor, multi-pump controller
Utilizing the latest microprocessor technology, the digital moisture monitor controller along with its wide applications alternating current conduction moisture sensors and optional X10 multi...
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7347050 |
Fuel metering unit
A fuel metering unit 10 for an aircraft. The unit 10 having an inlet leg 12 within which fuel flows, which leg 12 splits into controlling legs 18, 20 which rejoin downstream to form an outlet leg...
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7328716 |
Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using...
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7302959 |
Low-power wireless inflatable bladder damper for forced air heating, ventilation, and air conditioning systems
A low-power, wireless, inflatable bladder damper device for controlling the flow of air through an airflow channel, and a method of operation for the same. Rather than requiring power supply and/or...
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7278437 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated...
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7273062 |
Shut-off valve for preventing the flow of liquid through a conduit, and related processes
A shut-off valve for preventing the flow of liquid through a conduit is described herein. The valve includes a valve body which defines a fluid passage, a portion of which can be venturi-shaped....
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7204263 |
Flow control method for micro system
A method of simply controlling the flow of fluid in a micro system without using a complicated value structure, comprising the steps of adding the substance transformed from sol-gel by stimulation...
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7178544 |
Combination shut-off and resetable excess flow valve
A valve operable with an associated fluid delivery system having fluid flow therethrough includes a housing, a valve body and a resetable excess flow valve. The housing has a first passage and the...
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7177725 |
System for the monitor and control of rest rooms
The present invention is directed to a rest room control system including one or more sensors configured to monitor or control a function associated with the rest room. The system also includes a...
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7155319 |
Closed loop control on liquid delivery system ECP slim cell
A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO)...
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7121292 |
Gray water reclamation system and method for providing and operating same
A method for providing a gray water reclamation system includes connecting one or more gray water sources and one or more black water sources to a main drain line. A collection valve is also...
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7100627 |
Transporting fluids through a conduit
A method of sequentially transporting a first and a second fluid at a volumetric flow rate through a conduit having a cross-section, wherein the first and second fluids have different densities,...
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7056360 |
Optical odorization system
A system is shown for injecting a chemical, such as an odorant, from a chemical supply into a fluid containing system such as a natural gas pipeline. A tank of odorant is maintained under a...
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7028700 |
Method and apparatus for level control in a water tank of a fuel reformer
The present invention provides a method and apparatus for controlling a level in a receptacle capable of storing a fluid. The apparatus includes a first valve governing ingress of the fluid to the...
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7000628 |
Electronic air separation system
A liquid flow metering system is disclosed which includes a pump disposed between a liquid supply and a reservoir. The reservoir includes an inlet connected to the pump, an air/liquid outlet and a...
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6966326 |
Method and system for controlling withdrawal of liquid product from pipelines
This invention is to a method and system for controlling withdrawal of liquid from pipelines. The system includes intercommunicating analyzers, control applications and controllers for analyzing...
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6953044 |
Drained water recovery system and method for operating the same
A drained water recovery system of a process device and recovering method thereof is provided. The recovering method includes using a conductivity meter to measure the conductivity of the drained...
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6938635 |
Level switch with verification capability
The present invention comprises a novel level switch which may be employed to detect liquid levels within a process vessel. The level switch of the present invention is self validating so that...
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