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8151814 |
Method for controlling flow and concentration of liquid precursor
A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first...
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8147774 |
Micro passage chip and fluid transferring method
There is provided by the present invention a novel micro passage chip having such a structure that a fluid can be transferred without using a physical or mechanical squeezing means that is applied...
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8150553 |
Apparatus and method for pressure fluctuation insensitive mass flow control
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure....
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8132587 |
Apparatus and method for introducing air into a hydropneumatic reservoir
Apparatus for introducing air (3) into a hydropneumatic reservoir (1) connected to pipework (2) comprising a sensor (6) of the pressure in the reservoir, a valve (9) controlled by a signal from the...
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8124031 |
Discharge volume control method, discharge pressure control method, and microbody forming method
A second valve is opened to combine an injection-pressure generating pressure with a maintaining pressure into an injection pressure. After the injection pressure is applied to a capillary to cause...
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8122901 |
System and method for microfluidic flow control
A system and method for controlling fluid flow within a microchannel includes a fluid circuit comprising a fluid outlet well and one or more fluid inlet wells, all in communication with a...
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8118982 |
Gas flow set-up for multiple, interacting reactive sputter sources
A method and apparatus for physical vapor deposition of films on a substrate is provided. The apparatus comprises a series of connected sputtering chambers through which a substrate passes to...
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8100293 |
Microfluidic dispensing assembly
A microfluidic dispensing system may include diaphragm pumps that may be used for aspirating in corresponding ingredients via a nozzle or a tip from supply sources. Tips may be placed in contact...
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8097222 |
Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
A microfluidic device for nucleic acid analysis includes a monolithic semiconductor body (13), a microfluidic circuit (10), at least partially accommodated in the monolithic semiconductor body...
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8066023 |
System and method for collecting and increasing the pressure of seal leak gas
A system and a method for recovering and increasing the pressure of seal leak gas for recycle or passage to further processing.
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8053249 |
Method of pumping fluid through a microfluidic device
A method is provided for pumping fluid through a channel of a microfluidic device. The channel has an input port and an output port. The channel is filled with fluid and a pressure gradient is...
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8020574 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated...
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8015989 |
Method and apparatus for dampening pressure fluctuations in a fluid delivery system
A method and apparatus are provided for a cost effective pressure dampening device used in a fluid delivery system for substrate processing. In one embodiment, the pressure dampening device is...
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8011380 |
Single component two-stage regulator
Disclosed is a cylindrical, single-component two-stage regulator for controlling a pressure and a flow rate of a gas. The regulator includes a housing for holding the two stages having an ingress...
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8003063 |
Microfluidic devices and methods for multiple analyte detection
The invention is directed to microfluidic devices comprising at least two processing channels, wherein each of the processing channels comprises an inlet, an outlet, and a high-flow-resistant and...
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7959876 |
Fluidic device
A fluidic device includes a first reservoir to receive a first fluid, a second reservoir to receive a second fluid, and a main channel coupled to the first and second reservoirs through one or more...
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7950407 |
Apparatus for rapid filling of a processing volume
A method and apparatus for supplying greater fluid flow and/or fluid volume from a fluid provided from a facility source to a substrate processing chamber is provided. The apparatus couples to an...
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7936566 |
Electronic control unit and waterproof case
An electronic control unit has a respiratory filter mounted on a waterproof case. Raised protective walls formed in the case surround the portion of the case at which the respiratory filter is...
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7933688 |
Electrically controlled pressure relief valve and system and method for controlling same
A system and method for controlling an electrically controlled pressure relief valve may use a soft position control loop to control the position of the valve. A pressure relief valve may also...
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7926501 |
Subsea pressure systems for fluid recovery
Systems and methods for recovering power fluid from a device under water and for pumping recovered power fluid to a surface of the water, the systems and methods, in certain aspects, including:...
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7922833 |
Gas regulator for thermal energy machining
A thermal energy machining (“TEM”) machine gas handling system in which the improvement is a fluid-controlled pressure regulation subsystem for controlling the dispensing of a TEM process gas via...
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7909052 |
Apparatus and method for controlling gas flow
A gassing system includes a gassing device, a pressure regulator in communication with the gassing device and a gas source and a PLC electrically connected to the pressure regulator. In addition,...
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7896954 |
Fluid storage and purification method and system
A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. A solvent mixture comprising an ionic liquid and a cosolvent is...
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7890216 |
Control valve and positioner diagnostics
Valve positioning systems may include one or more components and a controller. Components may include one or more electric-to-pressure output converters, relays, gas supplies, and/or actuators. A...
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7878214 |
Ullage pressure regulator
A system for maintaining pressure in the liquid fuel tank of a high-speed flight vehicle, such as a hypersonic flight, scramjet powered air and space vehicle, manages tank ullage using a pressure...
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7881886 |
Methods for performing transient flow prediction and verification using discharge coefficients
A method for determining an actual gas flow rate as gas flows through a gas flow delivery system is provided. The method includes sending the gas through the gas flow delivery system into a gas...
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7861737 |
Method of optimizing heavy crude transportation by incorporation under pressure of dimethyl ether
Heavy crude transportation optimization method wherein at least one solvent is added to said crude. According to the method, a predetermined amount of dimethyl ether (DME) is added under pressure...
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7849870 |
Piezoelectric pressure control valve
A pressure control valve having a common plenum formed by two flow control valves that each utilize electrically controlled piezoelectric actuators to generate a number of possible operating states...
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7849869 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating...
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7819118 |
Medical gas delivery method and apparatus
A method is provided for connecting a secondary source of a medical gas to a control panel of a medical gas supply. The control panel is connected in the system fluidly between primary supply...
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7814922 |
Apparatus for controlling the pressure in a process chamber and method of operating same
A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said...
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7809473 |
Apparatus and method for pressure fluctuation insensitive mass flow control
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure....
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7779853 |
Proportional pressure control valve
A proportional pressure control valve particularly for electro-hydraulic transmissions. The valve includes a cage having pump, clutch, and tank port openings. A spool is received within the cage...
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7763211 |
Method and apparatus for generating large pressures on a microfluidic chip
The present invention relates to a method and apparatus for generating pressure suitable in magnitude for powering micro-sized devices. The present invention typically comprises a gas generation...
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7722809 |
Bioagent detection device
A detection device is provided for detecting the presence of an agent in a fluid. The device includes a body defining first and second chambers. It is intended for the first chamber accommodating...
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7708023 |
Solid product dispenser
A dispenser (10) uses first and second flow controls (70, 73). The flow controls maintain first and second flow ranges independent of diluent pressure within a pressure range, wherein the use...
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7706926 |
Adaptive feedback sources for application controllers
The present invention provides an advanced spray control system for controlling a sprayer, which comprises a controller, a plurality of sensors and feedback means, and an output means for...
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7680563 |
Pressure control device for low pressure processing chamber
A control method which quickly adjusts a plasma processing apparatus to a desired pressure regardless of gas type, gas flow rate or target pressure simply by optimizing constants. The plasma...
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7658200 |
Semiconductor manufacturing apparatus and control method thereof
The present invention provides a semiconductor manufacturing apparatus having a slit valve control system including first and second process chambers disposed adjacent to each other, a slit...
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7648682 |
Wick systems for complexed gas technology
The invention relates to an improvement in apparatus and process for effecting storage and delivery of a gas. The storage and delivery apparatus is comprised of a storage and dispensing vessel...
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7645418 |
Gas washing device
A gas purge device for a metallurgical melting vessel includes a conically shaped ceramic body (2) in contact at its top side with heat contained in the melting vessel. The ceramic body has a...
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7640944 |
Valve for prevention of low flow rates through flow meter
A flow responsive valve for a flow metering system comprising a fluid meter having a minimum measuring flow threshold. The valve is shiftable between an open position at flow rates above the...
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7565911 |
Two stage regulator method and apparatus
A two stage air regulator is disclosed wherein both stages are contained in a single billet, extruded, or machined housing. The first stage receives an input pressure of about 5000 PSI from an air...
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7546846 |
Pressure regulator
A variable pressure regulator control device comprising a valve body having a fluid inlet, a fluid outlet, a fluid pressure-sensing chamber, and a valve seat in fluid communication with said inlet...
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7543596 |
Liquid flow controller and precision dispense apparatus and system
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a...
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7539560 |
Control valve and positioner diagnostics
Valve positioning systems may include one or more components and a controller. Components may include one or more electric-to-pressure output converters, relays, gas supplies, and/or actuators. A...
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7537730 |
Reaction card and use of same
A reaction card (1) having a body, a front surface (62) and a rear surface (63) defined by an edge (68), at least one inlet (2, 3, 4 and/or 5) and at least one outlet (7and/or 8), connected by a...
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7537019 |
Systems and methods to slowly reduce the pressure in a pressure chamber over time
Systems and methods for performing a stepwise depressurization of a high-pressure fluid (liquid) filled chamber are shown and described. At least two valves are controllably opened and closed in a...
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7520332 |
Method and associated system for setting downhole control pressure
A method and associated system for setting downhole control pressure. A method of setting a downhole control pressure includes the steps of: installing a pressure control system with a pressure...
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7505818 |
Converter method, system and apparatus
An x to pressure converter that uses valves oscillating between open and closed positions in a pulse width modulated mode, to force the output pressure to equal the input X.
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