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Match Document Document Title
8899245 Machine and method for treating containers of liquids, and manipulator device for said containers  
Machine (10) and method for treating containers (12) of liquids comprising in succession at least a loading station (15), into which the containers (12) to be treated are loaded, and all disposed...
8851092 Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium  
A cleaning apparatus includes a first substrate-holding portion configured to hold a first area of a back surface of the substrate so that the top surface is kept face up; a second...
8578953 Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium  
A disclosed substrate cleaning apparatus for cleaning a back surface of a substrate includes a first substrate supporting portion configured to support the substrate at a first area of a back...
8298341 Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus  
A method is used for removing a metal contaminant deposited on a quartz member selected from the group consisting of a reaction tube, wafer boat, and heat-insulating cylinder of a vertical heat...
8015983 Surface treatment apparatus  
The surface treatment apparatus includes: a supply device for supplying an introduced workpiece to the inside of a treatment cell of a subsequent surface treatment device; a surface treatment...
7806987 Washing device and its work conveying method  
The present invention resides in a washing device constructed by a conveyer of a carrying-in side arranged in a frame, a reservoir lower portion having plural rails for holding the work and an...
7640645 Automatic work-piece setting method  
A method for automation of conventional manual operation of setting the work-pieces on the hanger (H) for transporting the work-pieces, which moves such as in the surface treatment equipment...
7581551 Cleaning apparatus  
The invention provides a cleaning apparatus which can remove an organic material for an organic EL element attaching to a mask made of a thin metal film. The cleaning apparatus of the invention...
7549428 Substrate processing apparatus  
A substrate processing apparatus includes a photosensor for detecting the presence/absence of a substrate in each place within a carrier cassette, a pair of processing tanks for performing the...
7524396 Object processing apparatus and processing method  
A processing apparatus includes a processing bath having a liquid injection port in the bottom thereof, a rectifier plate located between the bottom of the processing bath and a position at which...
7427330 Cleaning bench for removing contaminants from semiconductor process equipment  
Described are cleaning benches and methods for removing contaminant layers from semiconductor process components using small volumes of hazardous liquids and minimizing cross-contamination between...
7384484 Substrate processing method, substrate processing apparatus and substrate processing system  
After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to...
7332440 Wet etching apparatus and method  
A wet etching apparatus and method to shorten processing time and to eliminate formation of unintended mask pattern are described. In the conventional art, after a mask pattern is formed, alien...
7270134 System for treating mass-production parts  
A system for treating, in liquids, a mass-production parts contained in transport baskets, comprising at least one tank which contains liquid for submerging the transport baskets, at least one...
6913028 Flexible container for liquid transport, liquid transport method using the container, liquid transport apparatus using the container, method for washing the container, and washing equipment  
A flexible container for liquid transport made of a flexible material includes a top face portion, a bottom face portion, and a peripheral face portion connecting the top face portion and the...
6755313 Overhead traveling crane system  
An overhead traveling crane system has cylindrical guide members (16d, 18d) and guide bars (15a, 16a) installed on a moving device (18) and a lifting device (15), respectively. The guide bars...
6742530 Semi-aqueous solvent cleaning of paste processing residue from substrates  
A process of cleaning of objects that relate to semiconductor fabrication processes, such as, for example, conductive paste screening in the production of multilayer ceramic substrates and...
6637446 Integrated substrate processing system  
A system and methods for substrate preparation are provided. In one example, a wafer processing system includes a system enclosure that contains wafer processing apparatus within an isolated wafer...
6631818 Overhead traveling crane system  
An overhead traveling crane system, wherein at least two locking members (25a) are mounted vertically slidably on a lifting device (15), a stopper (25b) and a contact member are fixed to the upper...
6615852 Cleaning machine for die used for synthetic resin mould  
A machine for cleaning a die by using electrolysis and ultrasonic vibration which has in combination a degreasing processing system, an electrolytic-cleaning system with an electrolyte circulator...
6576065 Installation and method for chemical treatment of microelectronics wafers  
The invention relates to an installation for treating wafers made of materials serving as microelectronics substrates including a tank for containing a treatment bath, a wafer support device...
6575177 Semiconductor substrate cleaning system  
A modular semiconductor substrate cleaning system is provided that processes vertically oriented semiconductor substrates. The system features a plurality of cleaning modules that may include a...
6460549 Method and apparatus for degreasing a metal part  
Disclosed is a process of recycling and reusing an aqueous degreasing solution for further use as a component of a coolant solution which is itself recycled and reused in metal cutting machines....
6435199 Treatment apparatus  
In an apparatus for treating semiconductor wafers, a plurality of chemical treatment tanks 21a to 21c filled with treatment liquids for processing semiconductor wafers W and a plurality of rinse...
6394113 Method and apparatus for cleaning filters  
In a method and apparatus for cleaning filters, the cleaning is efficiently performed by selecting cleaning steps according to the degree of contamination of the filter media. The degree of...
6345635 Conveying system for work pieces  
A circuit-like system which includes a lower conveyor line, an upper conveyor line and a pair of lift or transfer mechanisms at the end of each line constructed for moving a work piece. A travel...
6318382 Cleaning method and cleaning apparatus, and electrophotographic photosensitive member and cleaning method of electrophotographic photosensitive member  
A method for efficiently cleaning a cleaning subject, especially a method for cleaning an electrophotographic photosensitive member enables a uniform and high quality image to be obtained without...
6308719 Pre-clean deluge system  
A pre-clean deluge system for cleaning automobile white bodies including a cleaning solution filtration and distribution system. The filtration system includes a series of filters specially...
6294028 Mercury process gold ballbond removal apparatus  
A method and apparatus for reducing the risk of environmental contamination from mercury spillage during carry over between processing tanks during the gold ball bond removal process by providing...
6277209 Method and apparatus of regenerating filtration membrane cartridge for activated sludge  
In cleaning by sodium hypochlorite, filtration membrane cartridges are immersed in a washing tank storing a solution of sodium hypochlorite to decompose and remove organic contaminants clogging...
6245156 Substrate transport method and apparatus, and substrate processing system  
Substrate transporting method comprising (a) inputting process data, (b) determining whether a number of units required for processing the wafer is an odd number or an even number, (c1) when a...
6119706 Apparatus for cleaning electronic components  
A degreasing and cleaning apparatus for cleaning circuit boards and the like has a first, wash sump containing a boiling, environmentally friendly wash material and a second, rinse, sump...
6074515 Apparatus for processing substrates  
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an...
5961798 System and method for vacuum coating of articles having precise and reproducible positioning of articles  
A system and method are provided for vacuum coating articles that includes a means for moving the articles in semi-continuous fashion successively through a series of vacuum chambers. A carousel...
5950643 Wafer processing system  
A processing system for processing of wafers that are formed by slicing a cylindrical workpiece which is adhered to a support plate by an adhesive agent. The processing system includes a washing...
5928432 Method for cleaning electronic components  
A degreasing and cleaning method for cleaning circuit boards and the like has a first, wash sump containing a boiling, environmentally friendly wash material and a second, rinse, sump containing...
5915396 Substrate processing apparatus  
A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first...
5853496 Transfer machine, transfer method, cleaning machine, and cleaning method  
A transfer machine having a pair of holding members disposed opposite to each other to hold a plurality of objects arranged at their peripheral edges. A drive mechanism selectively moves the...
5799677 Hermetic enclosure for treating a workpiece with a solvent  
An apparatus for treating a workpiece, the apparatus including a carriage for holding the workpiece, a first station for transferring the workpiece into and out of the carriage, a first chamber...
5540245 Processing equipment of single substrate transfer type  
A wafer processing equipment of a single wafer transfer type comprising a wafer cleaning apparatus, a pure water cooling system, a pure water circulatory system, and a wafer drying apparatus for...
5513666 Method of cleaning works and cleaning apparatus  
Oil quenched works are immersed in water at a temperature of 75° C. while the works are maintained at a temperature of not lower than 100° C. In the step of immersing the works in water, the water...
5494531 Method and apparatus for cleaning medical instruments  
The present invention provides a medical instrument cleaning method and apparatus suitable for thoroughly cleaning medical instruments, particularly instruments used in dental treatment and with...
5494063 Ultrasonic degreasing apparatus  
An ultrasonic degreasing apparatus includes a cleaning section, a rinsing section, a hot water cleaning section, and a drying section. The cleaning section has an ultrasonic oscillator for...
5490894 Cleaning method using azeotropic mixtures of perfluoro-n-hexane with diisopropyl ether or isohexane and cleaning apparatus using same  
Disclosed herein is a mixed solvent composition including perfluorohexane and isohexane or diisopropyl ether.
5472503 Vertical load transferring apparatus  
A raising and lowering mechanism is provided at a work station for vertically transferring articles or products delivered to the station by an overhead delivery conveyor. Discrimination between...
5383482 Semiconductor processing apparatus and module  
Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the...
5377704 Automated agitated immersion washer  
An improved automated agitating immersion washer includes a wash and rinse station which operates by triple-action to agitate and rotate a basket of dirty parts with respect to fluid in a tank and...
5361789 Washing/drying method and apparatus  
A washing/drying method, comprising: dipping a material to be washed into an aqueous solution containing a surfactant having a water repellency so that at least one molecular layer of the water...
5333629 Apparatus for cleaning metal articles  
A method of cleaning metal articles comprises the steps of cleaning metal articles with alkaline washing water, rinsing the metal articles with deoxidized rinsing water, removing water from the...
5313966 Immersion cleaning device  
An immersion cleaning device is provided with concave portions housing respective chemical baths into which a workpiece is selectively immersed. Any gas and mist generated from the chemical baths...

Matches 1 - 50 out of 171 1 2 3 4 >