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Document Title |
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8015983 |
Surface treatment apparatus
The surface treatment apparatus includes: a supply device for supplying an introduced workpiece to the inside of a treatment cell of a subsequent surface treatment device; a surface treatment...
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7806987 |
Washing device and its work conveying method
The present invention resides in a washing device constructed by a conveyer of a carrying-in side arranged in a frame, a reservoir lower portion having plural rails for holding the work and an...
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7640645 |
Automatic work-piece setting method
A method for automation of conventional manual operation of setting the work-pieces on the hanger (H) for transporting the work-pieces, which moves such as in the surface treatment equipment (300),...
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7581551 |
Cleaning apparatus
The invention provides a cleaning apparatus which can remove an organic material for an organic EL element attaching to a mask made of a thin metal film. The cleaning apparatus of the invention...
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7549428 |
Substrate processing apparatus
A substrate processing apparatus includes a photosensor for detecting the presence/absence of a substrate in each place within a carrier cassette, a pair of processing tanks for performing the same...
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7524396 |
Object processing apparatus and processing method
A processing apparatus includes a processing bath having a liquid injection port in the bottom thereof, a rectifier plate located between the bottom of the processing bath and a position at which...
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7427330 |
Cleaning bench for removing contaminants from semiconductor process equipment
Described are cleaning benches and methods for removing contaminant layers from semiconductor process components using small volumes of hazardous liquids and minimizing cross-contamination between...
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7384484 |
Substrate processing method, substrate processing apparatus and substrate processing system
After subjected to a developing process, a rinsing process and a replacing process in this order in a developing unit 10A, 10B, a substrate W wet with an anti-drying solution is wet-transported to...
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7332440 |
Wet etching apparatus and method
A wet etching apparatus and method to shorten processing time and to eliminate formation of unintended mask pattern are described. In the conventional art, after a mask pattern is formed, alien...
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7270134 |
System for treating mass-production parts
A system for treating, in liquids, a mass-production parts contained in transport baskets, comprising at least one tank which contains liquid for submerging the transport baskets, at least one...
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6913028 |
Flexible container for liquid transport, liquid transport method using the container, liquid transport apparatus using the container, method for washing the container, and washing equipment
A flexible container for liquid transport made of a flexible material includes a top face portion, a bottom face portion, and a peripheral face portion connecting the top face portion and the...
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6755313 |
Overhead traveling crane system
An overhead traveling crane system has cylindrical guide members (16d, 18d) and guide bars (15a, 16a) installed on a moving device (18) and a lifting device (15), respectively. The guide bars (15a,...
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6742530 |
Semi-aqueous solvent cleaning of paste processing residue from substrates
A process of cleaning of objects that relate to semiconductor fabrication processes, such as, for example, conductive paste screening in the production of multilayer ceramic substrates and...
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6637446 |
Integrated substrate processing system
A system and methods for substrate preparation are provided. In one example, a wafer processing system includes a system enclosure that contains wafer processing apparatus within an isolated wafer...
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6631818 |
Overhead traveling crane system
An overhead traveling crane system, wherein at least two locking members (25a) are mounted vertically slidably on a lifting device (15), a stopper (25b) and a contact member are fixed to the upper...
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6615852 |
Cleaning machine for die used for synthetic resin mould
A machine for cleaning a die by using electrolysis and ultrasonic vibration which has in combination a degreasing processing system, an electrolytic-cleaning system with an electrolyte circulator...
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6576065 |
Installation and method for chemical treatment of microelectronics wafers
The invention relates to an installation for treating wafers made of materials serving as microelectronics substrates including a tank for containing a treatment bath, a wafer support device...
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6575177 |
Semiconductor substrate cleaning system
A modular semiconductor substrate cleaning system is provided that processes vertically oriented semiconductor substrates. The system features a plurality of cleaning modules that may include a...
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6460549 |
Method and apparatus for degreasing a metal part
Disclosed is a process of recycling and reusing an aqueous degreasing solution for further use as a component of a coolant solution which is itself recycled and reused in metal cutting machines....
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6435199 |
Treatment apparatus
In an apparatus for treating semiconductor wafers, a plurality of chemical treatment tanks 21a to 21c filled with treatment liquids for processing semiconductor wafers W and a plurality of rinse...
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6394113 |
Method and apparatus for cleaning filters
In a method and apparatus for cleaning filters, the cleaning is efficiently performed by selecting cleaning steps according to the degree of contamination of the filter media. The degree of...
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6345635 |
Conveying system for work pieces
A circuit-like system which includes a lower conveyor line, an upper conveyor line and a pair of lift or transfer mechanisms at the end of each line constructed for moving a work piece. A travel...
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6318382 |
Cleaning method and cleaning apparatus, and electrophotographic photosensitive member and cleaning method of electrophotographic photosensitive member
A method for efficiently cleaning a cleaning subject, especially a method for cleaning an electrophotographic photosensitive member enables a uniform and high quality image to be obtained without...
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6308719 |
Pre-clean deluge system
A pre-clean deluge system for cleaning automobile white bodies including a cleaning solution filtration and distribution system. The filtration system includes a series of filters specially adapted...
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6294028 |
Mercury process gold ballbond removal apparatus
A method and apparatus for reducing the risk of environmental contamination from mercury spillage during carry over between processing tanks during the gold ball bond removal process by providing a...
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6277209 |
Method and apparatus of regenerating filtration membrane cartridge for activated sludge
In cleaning by sodium hypochlorite, filtration membrane cartridges are immersed in a washing tank storing a solution of sodium hypochlorite to decompose and remove organic contaminants clogging the...
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6245156 |
Substrate transport method and apparatus, and substrate processing system
Substrate transporting method comprising (a) inputting process data, (b) determining whether a number of units required for processing the wafer is an odd number or an even number, (c1) when a...
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6119706 |
Apparatus for cleaning electronic components
A degreasing and cleaning apparatus for cleaning circuit boards and the like has a first, wash sump containing a boiling, environmentally friendly wash material and a second, rinse, sump containing...
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6074515 |
Apparatus for processing substrates
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an...
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5961798 |
System and method for vacuum coating of articles having precise and reproducible positioning of articles
A system and method are provided for vacuum coating articles that includes a means for moving the articles in semi-continuous fashion successively through a series of vacuum chambers. A carousel is...
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5950643 |
Wafer processing system
A processing system for processing of wafers that are formed by slicing a cylindrical workpiece which is adhered to a support plate by an adhesive agent. The processing system includes a washing...
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5928432 |
Method for cleaning electronic components
A degreasing and cleaning method for cleaning circuit boards and the like has a first, wash sump containing a boiling, environmentally friendly wash material and a second, rinse, sump containing an...
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5915396 |
Substrate processing apparatus
A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first...
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5853496 |
Transfer machine, transfer method, cleaning machine, and cleaning method
A transfer machine having a pair of holding members disposed opposite to each other to hold a plurality of objects arranged at their peripheral edges. A drive mechanism selectively moves the...
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5799677 |
Hermetic enclosure for treating a workpiece with a solvent
An apparatus for treating a workpiece, the apparatus including a carriage for holding the workpiece, a first station for transferring the workpiece into and out of the carriage, a first chamber for...
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5540245 |
Processing equipment of single substrate transfer type
A wafer processing equipment of a single wafer transfer type comprising a wafer cleaning apparatus, a pure water cooling system, a pure water circulatory system, and a wafer drying apparatus for...
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5513666 |
Method of cleaning works and cleaning apparatus
Oil quenched works are immersed in water at a temperature of 75° C. while the works are maintained at a temperature of not lower than 100° C. In the step of immersing the works in water, the w...
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5494063 |
Ultrasonic degreasing apparatus
An ultrasonic degreasing apparatus includes a cleaning section, a rinsing section, a hot water cleaning section, and a drying section. The cleaning section has an ultrasonic oscillator for...
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5494531 |
Method and apparatus for cleaning medical instruments
The present invention provides a medical instrument cleaning method and apparatus suitable for thoroughly cleaning medical instruments, particularly instruments used in dental treatment and with...
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5490894 |
Cleaning method using azeotropic mixtures of perfluoro-n-hexane with diisopropyl ether or isohexane and cleaning apparatus using same
Disclosed herein is a mixed solvent composition including perfluorohexane and isohexane or diisopropyl ether.
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5472503 |
Vertical load transferring apparatus
A raising and lowering mechanism is provided at a work station for vertically transferring articles or products delivered to the station by an overhead delivery conveyor. Discrimination between...
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5383482 |
Semiconductor processing apparatus and module
Semiconductor processing equipment includes an ID-card removing robot, an ID-card stocking device, and an ID-card attaching robot so that the management of ID cards is performed inside the...
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5377704 |
Automated agitated immersion washer
An improved automated agitating immersion washer includes a wash and rinse station which operates by triple-action to agitate and rotate a basket of dirty parts with respect to fluid in a tank and...
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5361789 |
Washing/drying method and apparatus
A washing/drying method, comprising: dipping a material to be washed into an aqueous solution containing a surfactant having a water repellency so that at least one molecular layer of the water...
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5333629 |
Apparatus for cleaning metal articles
A method of cleaning metal articles comprises the steps of cleaning metal articles with alkaline washing water, rinsing the metal articles with deoxidized rinsing water, removing water from the...
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5313966 |
Immersion cleaning device
An immersion cleaning device is provided with concave portions housing respective chemical baths into which a workpiece is selectively immersed. Any gas and mist generated from the chemical baths...
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5310441 |
Wafer binding method and apparatus
The present invention relates to a method and an apparatus for automatically binding a silicon wafer to a carrier plate. In the binding method of the present invention, the wafer is positioned...
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5301700 |
Washing system
A washing system comprising a wafer washing section having plural chemical washing vessels, plural water washing vessels and a drier, a cassette washing section having a water washing device and a...
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5246578 |
Filter press and cleaning means therefor
In order that higher demands on the purity of the separated liquid can be satisfied, a cleaning plant (12) having wash chambers (13a,b) for the cleaning of the filter plates (8) is arranged in...
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5191908 |
Dipping type surface treatment apparatus
A dipping type wafer treatment apparatus includes housing having first and second openings, a wafer treatment bath provided inside the housing, a clean air unit for producing a downflow, a flow...
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