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8177913 |
Cleaning apparatus and method utilizing sublimation of nanofabricated particles
A cleaning apparatus comprises a container configured to hold an article to be cleaned, a cleaning solvent dispenser configured to supply a cleaning solvent to the container, an energy generator...
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8080506 |
Reactive purge compound for polymer purging
The present invention relates to reactive purge compound for cleaning polymer processing equipment wherein the reactive purge compound that includes i) at least about 50 wt.% of a polymeric carrier...
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8075696 |
Method of recovering heat transfer in reactor and regenerator effluent coolers
This invention relates to a method for removing fouling from a heat transfer surface, such as a heat exchanger. The method involves conducting a vapor containing a scouring material to the heat...
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7967915 |
Reduction of attraction forces between silicon wafers
A method for reducing attraction forces between wafers (4) is provided. This method includes the step of, after sawing and before dissolution of the adhesive (5), introducing spacers (6) between...
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7909935 |
Method for cleaning a fluid delivery system
The present invention is directed to a method of cleaning an interior surface of a fluid delivery system. The method comprises introducing a first liquid into the fluid delivery system and...
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7905109 |
Rapid cooling system for RTP chamber
A rapid cooling system for a rapid thermal processing chamber includes a rapid thermal processing chamber having a wafer support for supporting a wafer. A tank having a supply of cooling liquid is...
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7900691 |
Heat exchanger vessel with means for recirculating cleaning particles
A heat exchanger vessel (1) comprises a tubular outer shell (2) in which a bundle of substantially parallel heat exchanging tubes (7) is arranged between a pair of perforated disk-shaped...
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7897213 |
Methods for contained chemical surface treatment
An apparatus, system and method for preparing a surface of a substrate using a proximity head includes applying a non-Newtonian fluid between the surface of the substrate and a head surface of the...
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7846266 |
Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology
Cleaning and reclaiming nano-imprint templates using environment friendly methods and systems is disclosed. A template may be cleaned by a combination of exposure to activated gaseous species...
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7754019 |
Method for removing particles from a semiconductor surface
Method for cleaning a surface is disclosed comprising a cleaning step with an aqueous cleaning medium, which is supplied to said semiconductor surface wherein the cleaning medium comprises cleaning...
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7749327 |
Methods for treating surfaces
Some embodiments include methods for treating surfaces. Beads and/or other insolubles may be dispersed within a liquid carrier to form a dispersion. A transfer layer may be formed across a surface....
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7666066 |
Feeding solid particles into a fluid stream
A method and apparatus for injecting solid particles such as dry ice into an airstream using an airlock having a spherical valve member with spaced through ports and rotatable between an annular...
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7662081 |
Apparatus, composition, and methods to remediate an acid and/or liquid spill
A method to remediate a release of one or more acidic materials, by supplying a powder composition comprising a polyacrylamide, and disposing that powder onto a liquid spill comprising one or more...
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7648584 |
Method and apparatus for removing contamination from substrate
A cleaning material is disposed over a substrate. The cleaning material includes solid components dispersed within a liquid medium. A force is applied to the solid components within the liquid...
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7601226 |
Slurry blasting apparatus for removing scale from sheet metal
An apparatus and method of removing scale from the surfaces of processed sheet metal employs a scale removing medium propelled by counter-rotating pairs of wheels positioned in close proximity to...
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7581335 |
Substrate drying processing apparatus, method, and program recording medium
The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier...
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7566369 |
Method of de-coating metallic coated scrap pieces
Method of de-coating metallic coated scrap pieces, the metallic coated scrap pieces comprising a metallic core layer and a metallic coating layer of which the liquidus temperature of the metallic...
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7534303 |
Liquid absorption by metal-organic frameworks
The present invention relates to a method for the absorption of liquids, which comprises the step of bringing the liquid into contact with at least one sorbent comprising a porous metal-organic...
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7514275 |
Molecular contaminant film modeling tool
A system and method for modeling the effect of a molecular contaminant film on performance of an optical system is disclosed. A mass of material outgassed from materials of the optical system is...
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7497913 |
Method and apparatus for colloidal particle cleaning
Methods and apparatuses for cleaning a surface is provided. In one embodiment, a method includes the step of determining the type and size of the contaminant particles. A solution, which may...
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7473322 |
Method of treating the coverstock of a bowling ball to improve performance
A method for removing plasticizers, oils and other liquids concentrated in areas contiguous to the outer surface of a coverstock of a bowling ball. The method includes the steps of formulating a...
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7465360 |
Methods for removing a dispersed lubricious coating from a substrate
The present invention relates generally to methods of removal of a lubricious coating. In more specific aspects, the invention relates to methods of removal of aqueous polymers comprising...
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7459028 |
Method for cleaning a lumen
A method and apparatus for removing soil from an inner surface of a lumen wall of a medical instrument are disclosed. A carrier gas entrains particles capable of sublimation at room temperature and...
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7422640 |
Method of removing tacky substance or waste liquid containing tacky substance
A method of removing a sticky substance or a waste liquid containing a sticky substance which comprises, mixing a solid substance having inflammability and liquid-absorptivity into the sticky...
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7389941 |
Nozzle device and method for forming cryogenic composite fluid spray
The present invention includes a nozzle device and method for forming a composite fluid. The nozzle device generally comprises a nozzle portion connected to a main body. The main body includes an...
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7380557 |
Method of flushing a coil pipes(s) of a heat exchanger
A heat exchanger coil pipe is internally cleaned off dirt deposits by forcing ice and water to pass the pipe. A system for carrying out the cleaning comprises a suction pump, a wastewater...
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7344651 |
Method for selective removal of materials present in one or more layers on an object, and apparatus for implementation of this method
There is provided a method and apparatus for selective removal of materials present on an object A in one or more layers B by surface abrasion by projection onto the surface of the object A of a...
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7320735 |
Fan cleaning method and apparatus
A simple yet effective system for cleaning fans and air circulators facilitates the cleaning of ceiling and hard-to-reach units without having to remove the blades or other parts to be cleaned. A...
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7318870 |
Method of cleaning semiconductor substrate
A cleaning method for a semiconductor substrate including placing the semiconductor substrate into a cleaning chamber and injecting ozone gas (O3) into the cleaning chamber. This process operates...
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7306680 |
Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatus
A lithographic mask is placed in a chamber which is then sealed. The gas pressure in the chamber is reduced to dislodge contaminant particles on the mask surface.
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7297286 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
A method for manufacturing an article having polymeric residue that is to be removed during the manufacture of the article is disclosed. The article is introduced into a controlled environment of a...
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7288020 |
Method of blasting process
Disclosed is a blast processing method for removing a deposit adhered onto a surface of a ceramic heater formed of aluminum nitride by blowing a blasting material onto the surface. Abrasive grains...
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7261780 |
Ceramic susceptor and a method of cleaning the same
An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated,...
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7211156 |
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents
The present invention provides a method for cleaning a ceramic member for use in a system for producing semiconductors. The method has the step of cleaning the ceramic member with an organic acid...
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7189289 |
Cleaning agent and method for cleaning heater tubes
Disclosed is a cleaning agent for heater tubes, which is capable of eliminating deposits such as soot particulates in tubes installed in industrial heaters that typically use oil, coal or gas. The...
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7185663 |
Methods and compositions for on-line gas turbine cleaning
Methods and compositions for on-line cleaning of internal surfaces of selected sections of a hydrocarbon fuel burning gas turbine and associated heat recovery equipment, during operation. Cleaning...
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7153369 |
Method of chemical mechanical polishing
It is an object of the invention to provide an aqueous dispersion for CMP that produces no scratches on polishing surfaces and that polishes with an adequate rate, when used for polishing of copper...
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7147723 |
Method and assembly for static elimination of cleaning object in clearing apparatus
There is disclosed a method for static elimination of a cleaning target in a cleaning step is carried out by disposing in a cleaning apparatus a conducting means capable of coming into contact with...
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7141123 |
Method of and apparatus for removing contaminants from surface of a substrate
A cleanling apparatus for removing contaminants from the surface of a substrate includes two parts: one which produces an aerosol including frozen particles and directs the aerosol onto the surface...
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7117876 |
Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate
A method of processing thin flat articles, particularly semiconductor wafers, utilizing sonic energy. In one aspect, the invention is a method comprising: supporting a substrate in a generally...
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7097717 |
Method and device for collecting particulate contaminants during CO2 blasting decontamination
Disclosed is a method and device for collecting particulate contaminants removed using a CO2 decontamination medium from an early step of a decontamination process. The device removes particulate...
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7063593 |
Apparatus and process for surface treating interior of workpiece
A process and apparatus for surface treating boundary walls of an interior chamber formed in a workpiece. Nozzle members are inserted through access openings which communicate with opposite sides...
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7056391 |
Liquid-assisted cryogenic cleaning
The present invention is directed to the use of a high vapor pressure liquid prior to or simultaneous with cryogenic cleaning to remove contaminants from the surface of substrates requiring...
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7041176 |
Pipe renovating system and method
A pipe renovating method and system in which a pipe is first cleaned and then coated with a suitable coating material. In the cleaning step, pressurized air and particles of abrasive material are...
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6986816 |
Method for removing deposits from chemical reactors
The invention relates to a process for the removal of deposits formed in a reaction apparatus by the precipitation of solids from a liquid reaction mixture, which process is characterized in that...
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6979372 |
Method for cleaning particle classifier
A method for cleaning portions of a particle classifier, such as for example the rotor and/or stator, includes providing carbon dioxide particles to the classifier. Carbon dioxide particles are...
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6969699 |
Detergent-free scouring composition
The present invention provides a low foaming scouring powder composition, said composition comprising fly ash as an abrasive agent ranges between 40 and 75%, an surfactant ranges between 3 and 6%,...
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6962467 |
Method of removal of hydrocarbons from soils using solids loaded polymer foam
A method of removal of hydrocarbons from soils using solids-loaded polymer foam. A first step involves providing a solids-loaded polymer foam consisting of an open-celled polymer foam matrix with...
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6949145 |
Vapor-assisted cryogenic cleaning
The present invention is directed towards the use of a reactive gas or vapor of a reactive liquid prior to or in combination with cryogenic cleaning to remove contaminants from the semiconductor...
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6945853 |
Methods for cleaning utilizing multi-stage filtered carbon dioxide
A cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants utilizing a multi-stage, multi-mode filtered carbon dioxide-containing...
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