Matches 1 - 50 out of 110 1 2 3 >
Match Document Document Title
7568489 Method of and apparatus for eluting impurities  
Impurities can be eluted simultaneously from a plurality of local areas of a surface layer of a semiconductor substrate. A supporting unit supports the substrate, and a sample plate is disposed on...
7501038 Assembling apparatus, assembling method and terminal cleaning apparatus  
A terminal cleaning apparatus integrated to an assembling apparatus for integrating a display panel by bonding an electronic part to an externally connecting terminal of a substrate in which...
7437832 Reduced pressure drying apparatus  
A reduced pressure drying apparatus includes a chamber that closes in an airtight manner during a reduced pressure drying operation, a stage on which a substrate is mounted; and an exhaust unit...
7252098 Apparatus for cleaning and drying substrates  
A method and apparatus for cleaning, rinsing and Marangoni drying substrates is provided. A line of fluid is sprayed along a substrate surface forming an air/fluid interface line, and a line of...
7195021 In-situ cleaning of light source collector optics  
A method for cleaning optics in a chamber. The method can include introducing a first etchant into a chamber that encloses an optical component and a source of electromagnetic radiation that is...
7107999 Substrate processing apparatus for removing organic matter by removal liquid  
An indexer part, removal processing part, interface, and dry processing part are disposed adjacent to each other in a row. That is, the removal processing part that performs removal processing of...
7080652 Automated semiconductor processing systems  
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing...
6945258 Substrate processing apparatus and method  
A cleaning processing system including a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the...
6892740 Method and apparatus for transferring chips  
A chip handling system for integrated circuit (IC) chips each having circuitry on a first face, has a delivery station for receiving, from a first transfer device, a row and column array of chips...
6763839 Substrate cleaning system  
A substrate cleaning system for cleaning wafers using a sheet-type wet cleaning treatment. The system has a sealable system body, a loading/unloading booth having a substrate carry-in section in...
6745783 Cleaning processing method and cleaning processing apparatus  
To provide a cleaning processing method and a cleaning processing apparatus which can improve cleaning efficiency. The apparatus is structured to install processing units 11 a- 11 d which...
6746543 Apparatus for and method of cleaning objects to be processed  
A cleaning apparatus and a cleaning method for cleaning a object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down,...
6736149 Method and apparatus for supercritical processing of multiple workpieces  
An apparatus for supercritical processing of multiple workpieces comprises a transfer module, first and second supercritical processing modules, and a robot. The transfer module includes an...
6701942 Method of and apparatus for removing contaminants from surface of a substrate  
A cleaning apparatus for removing contaminants from the surface of a substrate includes two parts: one which produces an aerosol including frozen particles and directs the aerosol onto the surface...
6630031 Surface purification apparatus and surface purification method  
By a simple apparatus construction and process, it is made possible to “clean precisely” a surface at the molecular/atomic level, and the purification degree of the surface processed minutely...
6616771 Method and system for cleaning and reusing a cannula  
A computer-implemented method and system for cleaning a contaminated cannula so that it may be reused includes moving the contaminated cannula from a drug reconstitution station where the cannula...
6571806 Method for drying a substrate  
A method for drying a disk-shaped substrate. The substrate is typically a substrate used for the manufacture of magnetic disks, and has a centrally located opening. The substrate is lowered into a...
6446646 Substrate processing apparatus  
Chambers each include an inlet port for supplying N 2 gas and an outlet port for discharging an inner atmosphere, and therefore the chambers have different amounts of supply of N 2 gas in a unit...
6342104 Method of cleaning objects to be processed  
A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down,...
6306224 Process and device for treatment of sheet objects in a liquid bath  
A process and device for treating sheet objects, especially fragile sheet objects, by rotation through a liquid bath. The objects are disposed in radial slots in a rotating disk, retained therein...
6251195 Method for transferring a microelectronic device to and from a processing chamber  
An apparatus having a processing chamber for processing a semiconductor wafer under evacuated conditions that is capable of transfer of the wafer from the processing chamber under conditions that...
6251232 Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus  
A substrate holder 90 where a thin film has accumulated on the surface of the holding claws 91 is transferred in a state where no substrate 9 is being held into a film removal chamber 70 which is...
6245156 Substrate transport method and apparatus, and substrate processing system  
Substrate transporting method comprising (a) inputting process data, (b) determining whether a number of units required for processing the wafer is an odd number or an even number, (c1) when a...
6230721 Processing apparatus and method, robot apparatus  
The present inventions provides a processing apparatus to enable a plurality of processing sections to be installed in a smaller space. The apparatus has a plurality of processing sections arranged...
6202655 Anodizing apparatus and apparatus and method associated with the same  
A holder (102) made from an HF-resistant material includes annular suction pads (105, 108). The suction pad (105) is used to hold a small silicon substrate by suction, and the suction pad (108) is...
6155276 Apparatus and method for removing soil contaminants  
A portable ground soil remediation apparatus and method utilizing a water and biodegradeable soap mixture to result in an safe solution to effectively remove crude or refined oil from the soil, as...
6138694 Multiple stage wet processing platform and method of use  
A multiple stage wet processing platform includes a sealable enclosure, at least two processing modules positioned within the enclosure, at least one of them including a housing having an opening...
6125862 Cleaning apparatus  
Cleaning apparatus provide for the cleaning of a workpiece by first immersing the workpiece in a cleaning tank having a cleaning liquid therein for a predetermined period of time, removing the...
6082382 Continuous washing device for vegetables, fiber, or other materials  
An cleaning mechanism especially well suited for agricultural products in which the agricultural products are moved by a flow of water through a channel in which the water is agitated by vibration...
6026830 Post-CMP cleaner apparatus and method  
An improved and new apparatus and method for post chemical-mechanical planarization (CMP) cleaning has been developed. Use of a QDR (Quick Dump Rinse) DI water bath for receiving a cassette of...
6021790 Substrate treating apparatus and method for treating substrate  
A substrate treating apparatus for successively treating substrates includes a body having a carrying unit for carrying the substrate along a carrying surface. The carrying surface is inclined in a...
5979473 Method and apparatus for washing fruit  
An improved apparatus for washing fruit that includes supporting rollers, a nozzle for directing a spray of water at 100 psi at the surface of the whole fruit; and clean-out bars that reduce the...
5836323 Automated method and apparatus for hydrating soft contact lenses  
An automated means for hydrating a molded hydrophilic contact lens is provided in which a first robotic assembly removes a plurality of contact lens molds from a production line carrier, each of...
5817185 Method for washing substrates  
A method of washing substrates arranged at a substantially equal pitch internal in a cassette which includes steps of (a) transferring the substrates to a holder a pitch interval narrower than the...
5810028 Washing apparatus for disc-like workpieces  
Numerous spin-dry mechanisms 45A, 45B, and 45C for drying workpieces W at individual drying positions by rotating them at high speed are disposed in a drying section 3 of a washing apparatus, and...
5806544 Carbon dioxide jet spray disk cleaning system  
Apparatus for cleaning disks during processing. The apparatus is used with a disk processing system having a conveyor belt for transporting a disk carrier containing disks. The conveyor belt and...
5730162 Apparatus and method for washing substrates  
A substrate washing apparatus includes a bath, a washing solution supply source, a first path for allowing the washing solution overflowing from the bath, a rinse solution supply source, a second...
5671762 Decontamination system for particulate matter  
A decontamination system for particulate matter is provided. The system has a fluid treatment chamber within which three screw-type augers operate to mix hydrocarbon laden soil with treating fluid...
5637152 Soil washing apparatus and method  
An apparatus and method for removing hydrocarbons from soil is disclosed. A gradient force machine pulverizes contaminated soils, which are then mixed with release agents in a mixing tank. A...
5608974 Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process  
A steam drying apparatus in which a process chamber is fitted at a loading opening with a lid which is closed from above. The inner side wall surface of the process chamber has a first surface...
5603777 Substrate surface treating apparatus and substrate surface treating method  
A loader station of substrate treating apparatus receives a transport cassette from a preceding stage. This transport cassette stores a plurality of substrates to be treated, arranged with a...
5578331 Automated apparatus for preparing contact lenses for inspection and packaging  
An apparatus is provided for removing and transporting articles, such as contact lens sections from a manufacturing line to inspection and packaging stations. The lenses are deposited in a...
5573023 Single wafer processor apparatus  
A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable...
5526832 Carrying apparatus for a thin sheet-like workpiece  
A carrying apparatus comprising an endless roller chain belt that moves on a circular track and includes a plurality of fixture plates. Each fixture plate has several interrupted slot lines each of...
5517906 Method and apparatus for removing water from pouches  
The water is removed from food product pouches which have passed through a water bath by advancing the pouches in a continuous stream on a first tray which is vibrated with respect to a frame. The...
5505217 Apparatus for washing and drying discrete parts  
A cleaning and drying apparatus comprises a vessel having a closed bottom and a side wall extending upwardly from the circumference of the bottom. The vessel has an inlet for introducing the...
5476111 Apparatus for hydrating soft contact lenses  
A device and method for high speed production rates in the hydration of soft contact lenses. Such device and method includes the use robotic transfer equipment to transfer contact lens molds...
5467790 Manifold and valve block assembly  
A manifold and valve block assembly, particularly for a bottle washer designed for plastic returnable bottles. The manifold and valve block assembly provides for the successive supply of a...
5460194 Apparatus and process for the remediation of contaminated soil  
A process and apparatus for the remediation of soil is provided with a plug flow of soil and counter-current wash of water. The contaminant-containing soil with water is first treated to disengage...
5450867 Handling mechanism for workpiece fastening pallets  
A handling mechanism for workpiece fastening pallets (1), comprising fastening means (4') for fixing a pallet (1) to the handling mechanism and a wash basin (8) as well as a wash liquid circulating...
Matches 1 - 50 out of 110 1 2 3 >