|
Match
|
Document |
Document Title |
|
|
7621301 |
Method of ionized air-rinsing of containers and apparatus therefor
A method and system for cleaning containers being transposed through a container cleaning line, including an open-ended housing, a predetermined container flow path defined by the line of moving...
|
|
|
7617562 |
Apparatus for contactless cleaning of a conveying element and arrangement for transporting and/or storing of rod-shaped articles with an apparatus for contactless cleaning of a conveying element
The invention concerns an apparatus for the contactless cleaning of a conveying element which is designed to receive rod-shaped articles in the tobacco-processing industry, including at least one...
|
|
|
7615259 |
Method and apparatus for processing workpiece
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized...
|
|
|
7585828 |
Windshield washer fluid composition, additive concentrate for use therein, and methods of using the same
Disclosed are windshield washer compositions comprising a nonionic amino-modified silicone-polyalkyl copolymer, said copolymer being water dispersible and hydrophilic. In one embodiment, the...
|
|
|
7552503 |
Apparatus and method for cleaning a surface with high pressure air
A cleaning apparatus and method which includes spraying high pressure air obliquely onto a cleaning surface from an air nozzle disposed in the vicinity of the cleaning surface of a cleaning object...
|
|
|
7544254 |
System and method for cleaning an ion implanter
This disclosure provides an approach for cleaning an ion implanter. In this disclosure, there is a vacuum device having an in-take port adapted to receive a contaminant removing hose. The vacuum...
|
|
|
7544253 |
Method and apparatus for flushing asphalt feeding devices
A vehicle mounted patching system for patching potholes and the like and incorporating method and apparatus for removing and flushing asphalt emulsion from the feed lines of the patcher which...
|
|
|
7527699 |
Concrete/asphalt wet washing system
A surface cleaning system having a storage container, debris collection apparatus and debris conduit is disclosed. Water discharged from spray nozzles configured in a circular arrangement forces...
|
|
|
7518128 |
Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned
A cleaning arrangement is provided for use in an EUV lithographic apparatus, for example an EUV lithographic apparatus with a Sn source. The cleaning arrangement includes a gas source for a...
|
|
|
7507297 |
Cleaning method and cleaning apparatus
A cleaning effect is improved by cleaning a component that has a recess structure by using a cleaning medium of a liquefied gas or a supercritical fluid. By the cleaning method of removing adhering...
|
|
|
7503983 |
Methods of proximity head brushing
A wafer preparation method is provided for producing a wet region and then a corresponding dry region on the wafer. Brushing produces the wet region on the wafer. As the brushing moves in a...
|
|
|
7459028 |
Method for cleaning a lumen
A method and apparatus for removing soil from an inner surface of a lumen wall of a medical instrument are disclosed. A carrier gas entrains particles capable of sublimation at room temperature and...
|
|
|
7410543 |
Substrate processing method
Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. A substrate processing method comprises feeding a processing...
|
|
|
7407554 |
Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
Methods of developing or removing a select region of block copolymer films using a polar supercritical solvent to dissolve a select portion are disclosed. In one embodiment, the polar supercritical...
|
|
|
7396418 |
Process for removing particles from reticle
A process for removing particles from a reticle is described, wherein the process is performed by using a pellicle particle detector (PPD) and a particle removing tool disposed in front of the PPD...
|
|
|
7377982 |
Method for the removal of airborne molecular contaminants using water gas mixtures
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the...
|
|
|
7371289 |
Cleaning and doping of tubulars
Apparatus for cleaning and doping a pin 2 of a tubular 3 during the making or breaking of a string on a well platform. The apparatus comprises a housing 4 having first and second conosed ends...
|
|
|
7364625 |
Rinsing processes and equipment
Described are methods of rinsing and processing devices such as semiconductor wafers wherein the device is rinsed with using a surface tension reducing agent; the method may include a subsequent...
|
|
|
7361233 |
Methods of hydrogen cleaning of metallic surfaces
The pulsed partial pressure hydrogen cleaning of cobalt-based alloys in turbine components is achieved by disposing the component within a vacuum furnace and heating the component. Upon heating to...
|
|
|
7331354 |
Cleaning of tray columns which have been used for rectificatively treating liquids comprising (meth)acrylic acid and/or esters thereof
In process for cleaning tray columns which are used for the purposes of rectifiying liquids comprising (meth)acrylic compounds, a basic liquid is conveyed downward through the tray column and a gas...
|
|
|
7329322 |
Exhaust apparatus, semiconductor device manufacturing system and method for manufacturing semiconductor device
In an exhaust pipe, a rotating shaft takeoff connection is provided so as to support a rotating shaft for rotating a switching valve fixed thereon. The rotating shaft extends to the outside of the...
|
|
|
7314529 |
Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the...
|
|
|
7300524 |
Substrate cleaning method
A substrate cleaning apparatus includes an indexer, a front surface cleaning unit for cleaning the front surface of a substrate, a back surface cleaning unit for cleaning the back surface of the...
|
|
|
7288156 |
Methods for cleaning a substrate
The invention provides a water supplying apparatus and method thereof which has a high capacity of peeling and removing a disused material such as a resist film and the like, and can efficiently...
|
|
|
7287534 |
Cleaning of apparatus in which meth(acrylic) acid-containing organic solvents have been treated and/or generated
A process for cleaning apparatus in which (meth)acrylic acid-containing organic solvents have been treated and/or generated and contain fouling and/or polymer and residues of organic solvent, in...
|
|
|
7282100 |
Method of cleaning automobile painted surfaces and automobile glass surfaces
A system for cleaning acid rain and mineral deposits from glass and/or painted surfaces includes powdered kaolin clay. The glass is preferably cleaned with this system, then a system for more...
|
|
|
7276449 |
Gas assisted method for applying resist stripper and gas-resist stripper combinations
A method for moving resist stripper across the surface of a semiconductor substrate includes applying a wet chemical resist stripper, such as an organic or oxidizing wet chemical resist stripper,...
|
|
|
7264679 |
Cleaning of chamber components
In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about −40° C. to fracture the...
|
|
|
7252717 |
Method and apparatus for cleaning machines
A method of cleaning a lubrication system of a machine includes removing existing lubricant and circulating a cleaning fluid through the lubrication system. After the cleaning fluid has been...
|
|
|
7247210 |
Methods for treating CIP equipment and equipment for treating CIP equipment
A method for treating CIP equipment is provided according to the present invention. The CIP equipment includes process equipment. The method includes steps of treating the CIP equipment with a...
|
|
|
7231927 |
Method for recycling used-up plastic products and washing process of crushed plastic and apparatus therefor
An object of the invention is to provide a method and an apparatus for recycling plastics which is improved with respect to operation efficiency, operation environment, lowering degradation of...
|
|
|
7209625 |
Method and device for cleaning an optical waveguide removed from its jacket
The present invention is directed to a method for cleaning a section of an optical waveguide removed from its jacket, in which the optical waveguide section is inserted into a treatment cell,...
|
|
|
7189291 |
Method for the removal of airborne molecular contaminants using oxygen gas mixtures
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the...
|
|
|
7189290 |
Method and device for cleaning raw material gas introduction tube used in CVD film forming apparatus
A method and apparatus for cleaning a source gas introduction pipe, which can prevent strong adhesion of contaminant mainly containing carbon powder on an outer surface of the source gas...
|
|
|
7186299 |
Method of rinsing and drying semiconductor substrates
A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to...
|
|
|
7172657 |
Cleaning method of treatment equipment and treatment equipment
In a state of the inside of a treatment chamber of treatment equipment being evacuated, therein a cleaning gas containing trifluoroaceticacid (TFA) as a cleaning agent is supplied. Metal such as...
|
|
|
7168436 |
Gas for removing deposit and removal method using same
The invention relates to a gas for removing deposits by a gas-solid reaction. This gas includes a hypofluorite that is defined as being a compound having at least one OF group in the molecule....
|
|
|
7153372 |
Method for removing particles from elements installed in a vacuum chamber
Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of...
|
|
|
7153370 |
Method of cleaning semiconductor wafer
The present application discloses a method of cleaning a semiconductor wafer by mounting a wafer to a chuck, positioning a gas guard, defining therein a chamber having an open bottom, immediately...
|
|
|
7141123 |
Method of and apparatus for removing contaminants from surface of a substrate
A cleanling apparatus for removing contaminants from the surface of a substrate includes two parts: one which produces an aerosol including frozen particles and directs the aerosol onto the surface...
|
|
|
7112247 |
Canned gas dust remover with air ionizer
In a method and system for removing particles from a surface, a portable, compressed gas can is provided containing a particle removal gas. An air ionizer unit is connected to the gas can. A high...
|
|
|
7108001 |
Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom
A supercritical fluid cleaning system uses process fluid for operating rotary motors in the chamber with fluid bearings and fluid load levitation for rotating workpieces and impellers. Rotating...
|
|
|
7097717 |
Method and device for collecting particulate contaminants during CO2 blasting decontamination
Disclosed is a method and device for collecting particulate contaminants removed using a CO 2 decontamination medium from an early step of a decontamination process. The device removes particulate...
|
|
|
7097714 |
Particulate removal from an electrostatic chuck
The cleaning of particles from an electrostatic chuck. In one embodiment, a method of cleaning an electrostatic chuck in a processing chamber is disclosed. The method comprises directing a flow of...
|
|
|
7087124 |
Cleaning and sanitizing system
A high pressure water stream ( 14 ) is discharged onto a surface to be cleaned. An ozone/water stream ( 16 ) is discharged on the same surface for sanitizing the surface. The high pressure water...
|
|
|
7087123 |
Cleaning and sanitizing system
A high pressure water stream ( 14 ) is discharged onto a surface to be cleaned. An ozone/water stream ( 16 ) is discharged on the same surface for sanitizing the surface. The high pressure water...
|
|
|
7060138 |
Methods for cleaning wafer containers
A system and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure, with spray nozzles in the enclosure for spraying fluid toward the rotor....
|
|
|
7047984 |
Device and method for cleaning articles used in the production of semiconductor components
A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that...
|
|
|
7045022 |
Removal of adherent molten metal from surfaces
The present invention provides a method and process for removing adherent molten metal from a surface by applying a non-wetting agent for the metal to the surface or to the adherent molten metal....
|
|
|
7029539 |
Angular spin, rinse, and dry module and methods for making and implementing the same
A method for processing a wafer in a spin, rinse, and dry (SRD) module is provided. The method includes engaging a wafer in a process plane, spinning the wafer in the process plane, and cleaning a...
|