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6358328 |
Method for dry cleaning a wafer container
A method for dry cleaning a wafer container such as a SMIF pod that is equipped with a bottom mounting plate covered with contaminating particles. In the method, the wafer containers are mounted in...
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6357453 |
System and method for cleaning cathode ray tube funnels prior to application of interior coating
An improved chemical wash is used to cleanse the interior of an open Cathode Ray Tube (“CRT”) funnel before a coating of a carbon material is applied. The traditional ammonium bifloride wash...
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6358329 |
Resist residue removal apparatus and method
The resist residue removal method removes resist residues caused at the time of formation of an aluminum wiring pattern on a semiconductor wafer. The method includes the steps of removal fluid...
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6358325 |
Polysilicon-silicon dioxide cleaning process performed in an integrated cleaner with scrubber
An integrated cleaner with scrubber for cleaning and scrubbing semiconductor substrates that includes a housing that contains both a cleaning module and a scrubbing module. The cleaning module is...
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6355111 |
Method for removing contaminants from a workpiece using a chemically reactive additive
A method for drying one or more workpieces. The method includes the use of a chemically reactive additive to remove contaminants from the wafer surface during processing. In particular, during...
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6352081 |
Method of cleaning a semiconductor device processing chamber after a copper etch process
The present invention is a method for removing deposited etch byproducts from surfaces of a semiconductor processing chamber after a copper etch process. The method of the invention comprises the...
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6348101 |
Methods for treating objects
An object is treated by contacting it with an organic solvent and then removing the organic solvent by directly displacing it with a fluid comprising a drying vapor (e.g., isopropyl alcohol or IPA...
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6344090 |
Metal loss inhibitors and processes therewith
An inhibitor especially useful for aqueous solutions being used at high temperatures to remove scale from boiler tubes and the like contains (1) amines including a substituent group with an abietyl...
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6342104 |
Method of cleaning objects to be processed
A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber 42 and a cleaning bath 41 are separated from each other up and down,...
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6325861 |
Method for etching and cleaning a substrate
A method of cleaning a substrate 5 to remove etchant residue 10 formed during etching of the substrate, the method comprising the step of exposing the substrate in a process zone 135, to an...
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6313041 |
Method of enhancing the rate of removal of a layer of light-sensitive material after an etching step in the fabrication of semiconductor electronic devices
Presented is a method of enhancing the rate of removal of a photoresist layer from wafers of semiconductor material after the latter have gone through various process steps to define the patterns...
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6306222 |
Process for cleaning plastics for recycling them
A process for cleaning plastic materials is disclosed, in which foreign materials adhered on and internally intruded into the plastic materials are cleaned to recycle the plastic materials. The...
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6302968 |
Precarboxylic acid rinse method
The invention includes compositions and methods for sanitizing ware without staining, spotting or corroding. In its most preferred mode, the method comprises the steps of washing the ware in an...
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6296718 |
Environmentally friendly method of paint stripping reject painted parts, with no base metal attack
A method of stripping cured paint from reject painted production parts, aluminum and galvanized safe, comprising: a) adding a stripping composition to a strip tank, said stripping composition...
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6290779 |
Systems and methods for dry cleaning process chambers
Chlorine trifluoride (ClF 3 ) is an excellent chemistry for in-situ cleaning of process equipment for chemical vapor deposition (CVD) of metals. ClF 3 is a weakly-bound molecule that breaks down...
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6279584 |
Bulk ultrasonic degreasing, cleaning, and drying method
A system and method for removing a coating from an elongated metal part or a bundle of such parts is described. The disclosed system includes a soaking vessel that contains a solution suitable for...
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6277204 |
Methods for cleaning wafers used in integrated circuit devices
Apparatuses for cleaning wafers used in integrated circuit devices comprise: (1) a dry cleaning section comprising inert gas storage bath, a hydrogen fluoride gas storage bath, and a vapor storage...
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6277208 |
Method of decoloring an image forming material formed on a paper sheet
An image forming material formed on a paper sheet and containing a color former, a developer and a decolorizer, is decolored by heating of the image forming material, contacting the image forming...
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6273102 |
Method of cleaning and maintaining petroleum refining plants
A repairing method of a petroleum refining plant for efficiently conducting cleaning process of process equipment and pipings, unloading process of agglomerated catalyst, rinsing work of the...
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6273962 |
Method to reduce the particles in load-lock chamber
A method for preventing corrosion and particulate in a load-lock chamber is disclosed. The load-lock chamber is adjourning with an etching chamber and a wafer transferred module, each time a wafer...
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6270584 |
Apparatus for drying and cleaning objects using controlled aerosols and gases
Method and apparatus for cleaning and/or drying objects that may have been wetted or contaminated in a manufacturing process. The objects are submerged in a rinse liquid in an enclosed chamber, and...
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6264889 |
Apparatus and method for food processing equipment microbial intervention and pasteurization
An apparatus and method for microbial intervention and pasteurization of food processing equipment. The apparatus comprises a chamber, a steam generator, a controller, a timer, a power source, and...
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6258178 |
Method for removing coated film from plastic bumper of automobile
A heated high pressure air and/or a high pressure water are spouted through nozzles. Therefore, the coated layer is removed without crushing the bumper unlike in the conventional method, and...
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6250314 |
Process of pickling stainless steel
A process and apparatus for pickling the surface of stainless steel strip feeds the stainless steel strip through a plurality of pickling tanks containing a hydrochloric acid pickling acid. The...
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6248178 |
Method for removing pad nodules
A method is disclosed for removing pad nodules. The method provides a wafer comprising pads and pad nodules which are formed on said pads, wherein said pads are made from a metal selected from the...
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6248179 |
Method of removing polymeric material on a silicon water
A method of removal of polymers of the type including bromine, chlorine, silicon, and carbon, present on a semiconductor wafer partly covered with resist, including of rotating the wafer in its...
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6245292 |
Method for cleaning instruments within dental care and surgery
The invention refers to a method for cleaning and sterilizing instruments within dental care, and incorporating the following partial steps, separately partly known in themselves, a) that the...
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6235124 |
Method and solution for removal of mildew
A solution for mildew removal, which includes an aqueous solution of 1-2%(weight by volume) sodium perborate and a non-ionic detergent added as a surfactant. A method for mildew removal, which...
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6231684 |
Apparatus and method for precision cleaning and drying systems
A chamber having selectable and controllable access through which a process part is placed within and removed from a processing system. The chamber is designed to selectively isolate the external...
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6217665 |
Method of cleaning substrate using ultraviolet radiation
Dirt, particularly of inorganic matter, attached to a substrate, such as a glass substrate for liquid crystal devices, is effectively removed by irradiating the substrate with ultraviolet rays...
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6217666 |
Countercurrent reduction of oxides on moving metal
Oxides on the surfaces of metal are reduced by directing reducing gases at them in a forceful and turbulent manner in an enclosure. The oxide-bearing surface is heated to at least 900 degrees F.
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6216709 |
Method for drying a substrate
A method for drying workpieces in accordance with our invention includes the step of immersing the workpieces in a liquid, holding the workpieces with a first holding mechanism, slowly draining the...
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6214128 |
Method and apparatus for preventing silicon hole defect formation after wet cleaning
A method and an apparatus for preventing silicon hole defect formation on a silicon wafer after a wet cleaning process are disclosed. In the method, a supply tank and a cleaning tank are provided...
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6214129 |
Cleaning method with hydrochloric acid-hydrogen peroxide mixture
A cleaning method to inhibit the adhesion of micro particles to a member to be cleaned by decreasing an amount of generation of bubbles. In a method for cleaning a member to be cleaned by dipping...
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6210488 |
Method of removing a thermal barrier coating
A method of removing a thermal barrier coating from cooling holes in the surface of a component designed for use in a hostile thermal environment, such as the turbine, combustor and augmentor...
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6209552 |
Method of preventing or reducing formation of polymeric deposits in vessels during emptying
A method of emptying vessels containing dispersions, solutions or suspensions of polymers in which during the emptying process the liquid medium also used to take up the polymers into the...
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6202318 |
System for processing wafers and cleaning wafer-handling implements
A system (10) for processing wafers and cleaning wafer cassettes (160, 260, 460) includes a work cell (12) having a plurality of processing stations (14) for processing wafers, and at least one...
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6197122 |
Compounds with substituted cyclic hydrocarbon moieties linked by secondary or tertiary oxycarbonyl containing moiety providing reworkable cured thermosets
Compounds containing two cyclic hydrocarbon moieties which are substituted to provide crosslinking functionality and which are linked to each other by secondary or tertiary oxycarbonyl containing...
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6196238 |
Apparatus for removing coated film from plastic bumper of automobile
A heated high pressure air and/or a high pressure water are spouted through nozzles. Therefore, the coated layer is removed without crushing the bumper unlike in the conventional method, and...
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6187729 |
Cleaning composition comprising solvating agent and rinsing agent
A liquid cleaning composition comprising a solvating agent and a rinsing agent, the ratio of the vapor pressure of said rinsing agent to the vapor pressure of said solvating agent being at least...
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6176941 |
Method of removing contaminants from an epidermal surface using an oscillating fluidic spray
A process for cleansing microorganisms from the pliant epidermal surface of a human hand which comprises brushlessly scrubbing the pliant epidermal surface of the human hand with a plurality of...
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6176244 |
Machine dish-washing process
A machine dish washing process wherein a detergent is given such a composition and/or is dispersed over the crockery in such a way that with the detergent a cleaning layer with an appearance...
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6165279 |
Method for cleaning a semiconductor wafer
A method for cleaning a semiconductor wafer which includes the sequential steps of cleaning the wafer in a dilute hydrofluoric acid bath, cleaning the wafer in a first ozone bath, cleaning the...
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6158596 |
Substrate holder, and system and method for cleaning and drying same
In a wafer transport chuck 10 for holding wafers W by means of a pair of holding members 11, each of the holding members 11 has an upper holding portion 12 and a lower holding portion 13 which...
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6142170 |
Apparatus and method for dispensing disinfectant compositions for disinfecting water systems and lines
In accordance with the present invention, there is provided an asepsis dispenser apparatus for dispensing disinfectant solutions for cleansing and decontaminating the contaminated surfaces of...
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6098306 |
Cleaning apparatus with electromagnetic drying
Dielectric heating is used to assist with the cleaning of sorbent materials contaminated with oils and the like and the recovery of the solvent. In particular, a pressurized system is used such...
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6096100 |
Method for processing wafers and cleaning wafer-handling implements
A system (10) for processing wafers and cleaning wafer cassettes (160, 260, 460) includes a work cell (12) having a plurality of processing stations (14) for processing wafers, and at least one...
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6090213 |
Ultrasonic parts cleaning system
An automated cleaning system for parts is disclosed. The parts to be cleaned are elongated tubes closed on one end which are mounted upside down on nozzles on a fixture. The fixture is placed in a...
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6080242 |
Method for cleaning tier sheets
The method can be performed by receiving at least one sheet and guiding the sheet through an apparatus for cleaning sheet providing tension to the sheet for processing; and processing both planar...
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6074490 |
Shoe cleaning method
The invention relates to a specialized shoe cleaning method that will clean athletic shoes in such a manner that the newly cleaned shoes resemble brand new shoes. The method or process includes...
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