|
Match
|
Document |
Document Title |
|
|
6863077 |
Method and apparatus for enhanced chamber cleaning
A system for processing substrates within a chamber and for cleaning accumulated material from chamber components is provided. The system includes a reactive species generator adapted to generate a...
|
|
|
6863740 |
Cleaning method of ceramic member
Disclosed is a cleaning method of a ceramic member, which permits removing with a high accuracy the contaminants from a ceramic member contaminated with the contaminant. The cleaning method...
|
|
|
6857436 |
Method of cleaning passageways using a mixed phase flow of a gas and a liquid
A method of cleaning surfaces using a mixed phase cleaning mixture of an aqueous solution and a flow of gas sufficient to produce droplets of the liquid which are entrained by the gas for a time...
|
|
|
6855209 |
Plasma chamber cleaning
A method for determining optimum plasma chamber cleaning cycles based on an electrical precursor signal. Polymer build up on the interior wall of plasma chamber 1 during normal production runs is...
|
|
|
6848143 |
Scavenging metallic debris from buried metal pipelines
A metal-debris magnetic scavenging tool useable inside a buried, horizontal metallic pipeline through an access opening which has been cut into the upper wall portion of the pipeline overhead where...
|
|
|
6843858 |
Method of cleaning a semiconductor processing chamber
A method of operating a substrate processing chamber. In one embodiment the method includes processing one or more substrates in the substrate processing chamber and subsequently cleaning the...
|
|
|
6837250 |
CVD chamber cleaning using mixed PFCs from capture/recycle
A method of using PFCs recovered from the effluent of a CVD chamber cleaning process as an influent for the cleaning process is provided which includes the steps of selecting a first PFC gas...
|
|
|
6833032 |
Automatic deliming process
An automatic deliming process for a steam oven cooker is described. The process initiates a deliming procedure after a predetermined time of normal operation, which period of time is determined by...
|
|
|
6830630 |
Method of cleaning an internal combustion engine
This invention provides fluid-dispensing devices attachable to an air-intake system of an internal combustion engine for introducing an engine cleaner composition into the air intake system. The...
|
|
|
6830629 |
Method for treating brass
Brass articles having leachable lead are contacted with an aqueous caustic solution that contains a chelating agent. A brass article can optionally be post-treated by contacting it with an aqueous...
|
|
|
6827090 |
Process for removing deposits from water-carrying systems and devices for water supply
Process for removing deposits from water-carrying systems and devices for water supply, or from their individual parts, in which the deposits are dissolved by means of an aqueous treatment solution...
|
|
|
6824620 |
Method for removing particles and non-volatile residue from an object
The invention is directed to a mehtod of cleaning an object in a controlled environment processing chamber into which solvents, water and/or gases are introduced. The process includes first...
|
|
|
6823876 |
Methodology of rotational etching tool maintenance
A method of cleaning and maintenance used for a rotational etching tool, combining the physical characteristics of water (splashed off after striking the surface of a spinning wafer) and a PM...
|
|
|
6821572 |
Method of cleaning a chemical vapor deposition chamber
After a processing chamber is used to deposit a refractory metal film on a substrate, the chamber is plasma-treated with a gas including either nitrogen and/or hydrogen and in-situ cleaned. By...
|
|
|
6819969 |
Chemical vapor deposition process and apparatus for performing the same
An apparatus and a method for performing a chemical vapor deposition process that reduces particle contamination of a wafer, wherein a cleaning gas including a fluorine radical is introduced into...
|
|
|
6814814 |
Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates
In a method of cleaning process residues formed on surfaces in a substrate processing chamber, a sacrificial substrate comprising a sacrificial material is placed in the chamber, a sputtering gas...
|
|
|
6807971 |
Heat treatment apparatus and cleaning method of the same
A semiconductor water is contained in a reaction tube, and the reaction tube is exhausted through an exhaust pipe while supplying ammonia and dichlorosilane into the reaction tube. A silicon...
|
|
|
6805135 |
Cleaning fluid and cleaning method for component of semiconductor-treating apparatus
A cleaning solution is used to remove a byproduct derived from a decomposed substance of a process gas containing C and F. The cleaning solution contains 75 wt % N-methyl-2-pyrrolidone, 15 wt %...
|
|
|
6802910 |
Cleaning and remanufacturing methods for developing container
A cleaning method for cleaning a developer container includes a step of blowing air through an opening formed in the developer container at a first flow rate; a step of sucking air through the...
|
|
|
6799585 |
Use of solutions containing enzymes for cleaning fermentation or storage tanks
A process is presented for cleaning fermentation or storage tanks with an enzyme-containing formulation containing one or more laccases, peroxidases, oxireductases, transferases, isomerases,...
|
|
|
6797188 |
Self-cleaning process for etching silicon-containing material
A method of etching a silicon-containing material in a substrate comprises placing the substrate in a process chamber and exposing the substrate to an energized gas comprising fluorine-containing...
|
|
|
6797070 |
Method for cleaning a cooler apparatus
A method for cleaning a lubricating oil cooler apparatus in situ with a cleaning liquid which includes introducing a cleaning liquid that is compatible with lubricating oil into the shell to cause...
|
|
|
6797857 |
Solidifier for a liquid
A solidifier for a liquid, the solidifier comprising a mixture of absorbents having different apparent densities whereby at least one absorbent is negatively buoyant and at least one absorbent is...
|
|
|
6793716 |
Method and installation for cleaning a particulate filter on a motor vehicle
The particulate filter is disassembled in order to separate it from the exhaust line and the filtering support of the particulate filter is contacted with a cleaning solution, for example contained...
|
|
|
6790289 |
Method of cleaning a plasma processing apparatus
There is provided a method of cleaning completely a deposit on the surface of the member to be cleaned, of a plasma processing apparatus without any damage of the coating which has been formed...
|
|
|
6783083 |
Fluid spraying apparatus
A fluid spraying apparatus ( 10 ) comprising a generally cylindrical body defining a longitudinal axis, which body comprises: a first fixed part ( 12 ) comprising inlet means ( 16 ) adapted for...
|
|
|
6782898 |
Ring-shaped part washing method and washing jig used in the method
In a ring shaped part washing method an ultrasonic vibration plate 33 is disposed in a washing tank 23 filled with a washing fluid 31 , and ultrasonic waves generated by the ultrasonic...
|
|
|
6779533 |
Method and machine for on-line treating and/or processing containers
A method and machine for on-line treating and/or processing containers ( 2 ), whereby a container ( 2 ) is fed along a production line ( 45 ), a portion of which is defined by an endless conveyor (...
|
|
|
6776853 |
Cleaning method and method for manufacturing liquid crystal device
In a cleaning apparatus 500 , as a pre-cleaning step, cleaning is performed in a first and a second backup cleaning bath 602 and 603 using a hydrocarbon-based cleaning liquid composed of a...
|
|
|
6772771 |
Decoke enhancers for transfer line exchangers
In a steam cracking operation the formation of coke is a problem which needs to be overcome. While significant work has been done on decoking of furnaces little work has been done regarding...
|
|
|
6772772 |
Method for cleaning an exhaust gas recirculation system
A method and apparatus for cleaning the EGR system of a vehicle is disclosed. The apparatus includes an induction device that is removably attachable to the manifold of an engine in the location of...
|
|
|
6769439 |
Plasma cleaning method and placement area protector used in the method
In a vacuum processing system used in a semiconductor device manufacturing process, a plate-shaped placement area protector made of a dielectric material having a surface of dimensions and shape...
|
|
|
6770149 |
Method and apparatus for cleaning treatment
A method for a cleaning treatment including a step of forming, in a coating mechanism, a coating film on a substrate provided within a cup. The method further includes dissolving, in an edge...
|
|
|
6770214 |
Method of reducing aluminum fluoride deposits in plasma etch reactor
A method of reducing aluminum fluoride deposits in a plasma etch reactor. The deposits can be reduced during a cleaning step wherein the cleaning gas includes BCl 3 energized into a plasma such...
|
|
|
6770150 |
Process for removing deposits from enclosed chambers
Alkaline and acid cleaning solutions ( 180, 182 ), are used sequentially for removing organic and inorganic residues, respectively, from the chamber. The two cleaning solutions are stored in...
|
|
|
6767408 |
Monitoring device and method for operating clean-in-place system
A method for cleaning an apparatus using a clean-in-place system is disclosed. The clean-in-place system is in fluid communication with an inlet and an outlet of the apparatus. In the method, a...
|
|
|
6761775 |
Rinsewater separable and recyclable anaerobic curing impregnation compositions
The present invention relates to anaerobic curing impregnation sealant compositions which are readily separable from water upon mixing.
|
|
|
6758224 |
Method of cleaning CVD device
A method of cleaning a CVD vacuum vessel which has an electrically conductive partition plate which divides an interior of the vacuum vessel into a plasma generating space and a film-deposition...
|
|
|
6743299 |
Method of cleaning infant feeding bottles
A method of cleaning articles, such as infant feeding bottles is disclosed. The method provides for the use of alkali metal chloride, more particularly sodium chloride. The salt is deposited into...
|
|
|
6739380 |
Method and apparatus for removing ceramic material from cast components
The removal of ceramic material from the interior of cast metallic components is accomplished in a closed system. A vessel within the system is filled with a chemical leaching fluid that immerses...
|
|
|
6729338 |
Vacuum transfer system and method for food grade product
A vacuum transfer system for transferring food grade products. A biased ball in a cage with a substantially uninterrupted cage wall is utilized as a check valve. The ball may be biased by a weight...
|
|
|
6719851 |
Lid assembly for opening a process chamber lid and uses therefor
Provided herein is a lid assembly for chemical vapor deposition (CVD) process chamber, comprising a moveable lid, two linear guide rollers connected to the lid, one or more linear lifting...
|
|
|
6712079 |
Process of cleaning the inner surface of a water-containing vessel
The present invention relates to a process of cleaning the inner surfaces of a liquid-containing vessel with an automatic cleaning device, wherein said process is performed by said device and...
|
|
|
6702903 |
Washing method of petroleum equipment and washing solution for use with the method
A washing method of petroleum equipment using washing solution capable of being used in a waterless environment is provided. A compound of surface-active agent and oil is used as the washing...
|
|
|
6699399 |
Self-cleaning etch process
A process for etching a substrate 25 in an etching chamber 30 , and simultaneously cleaning a thin, non-homogeneous, etch residue deposited on the surfaces of the walls 45 and components of...
|
|
|
6695925 |
Method and equipment for cleaning the dispersion head
A method and an equipment for cleaning a dispersion head of a chemical vapor deposition (CVD) machine applied to the semiconductor manufacturing industry are provided. The method includes the steps...
|
|
|
6695928 |
Method for production of (meth) acrylic acid and/or (meth)acrylic esters
A method for the production of (meth)acrylic acid and/or a (meth)acrylic ester is provided. This method for the production of (meth)acrylic acid and/or a (meth)acrylic ester includes washing the...
|
|
|
6695927 |
Method and cleaning solution for cleaning a container
A method and a solution are provided for cleaning a container, in particular a boiler of a conventional power station. The container is degreased and pickled in one method step using an alkaline...
|
|
|
6679274 |
Clean-in-place method for cleaning solution delivery systemes/lines
A method is taught for cleaning photographic chemistry product fouling, including a proteinaceous portion and a non-proteinaceous portion from a liquid delivery system. The method comprises the...
|
|
|
6676769 |
Apparatus and method for cleaning a furnace torch
An apparatus and a method for cleaning a torch for a vertical furnace used in semiconductor processing are disclosed. The apparatus is constructed by two main components of a basket-shaped fixture...
|