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8182610 |
Cleaning equipment and cleaning method of deposition mask
Equipment is realized which is capable of increasing the frequency of use of a deposition mask of an organic EL element and the recycle of an adhesive agent by efficiently cleaning the deposition...
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8182611 |
Vacuum cleaning apparatus and cleaning method thereof
The invention relates to a cleaning method, and in particular, to a vacuum cleaning apparatus and a vacuum cleaning method thereof. A vacuum cleaning method comprising (a) positioning a dust...
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8176654 |
Method and device for preventing corrosion of a gas inlet nozzle during nitric acid condensation
By a method and a device for preventing corrosion on and in the region of a gas inlet nozzle during nitric acid condensation, contact of the condensing gas with the nozzle and with the surroundings...
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8158530 |
Methods for retaining metal-comprising materials using liquid chemistry dispense systems from which oxygen has been removed
Methods for fabricating a semiconductor device from a semiconductor substrate having a metal-comprising material and a disposable material are provided. In accordance with an exemplary embodiment,...
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8147616 |
Container rinsing system and method
A container rinsing system (10) has an air nozzle adapted to be positioned proximate an opening of the container and adapted to direct a supply of compressed air to the container. A vacuum member...
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8137473 |
Method for cleaning elements in vacuum chamber and apparatus for processing substrates
To clean an element in a vacuum chamber by causing particles sticking to the element to scatter, the present invention uses a means for applying a voltage to the element and causing the particles...
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8133327 |
Substrate processing method, storage medium and substrate processing apparatus
Provided is a substrate processing method that prevents generation of watermarks on a substrate and can be performed at a low cost. The method controls the ambient humidity around the substrate...
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8133325 |
Dry cleaning method for plasma processing apparatus
This dry cleaning method for a plasma processing apparatus is a dry cleaning method for a plasma processing apparatus that includes: a vacuum container provided with a dielectric member; a planar...
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8128755 |
Cleaning solvent and cleaning method for metallic compound
Disclosed are cleaning solvents and cleaning methods for metallic compounds deposited on the equipment that supplies organometallic compounds to the manufacturing tool in the photovoltaic industry...
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8118942 |
Dust removal apparatus and method
A dust collecting installation for collecting airborne dust adjacent to a moving web. An elongate duct extends transversely to the direction of movement of the web and is positioned adjacent to the...
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8118944 |
Self-cleaning pill counting device, and cleaning method
A pills counting device is provided. It comprises a tray comprising a base member and a trough member. The device also comprises a lid member mounted on the base member and being movable between...
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8105441 |
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus
A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a...
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8097088 |
Methods for processing substrates in a dual chamber processing system having shared resources
Methods for processing substrates in dual chamber processing systems comprising first and second process chambers that share resources may include performing a first internal chamber clean in each...
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8097092 |
Method of cleaning and after treatment of optical surfaces in an irradiation unit
The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source (1, 31) emitting...
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8083963 |
Removal of process residues on the backside of a substrate
A substrate is processed in a process chamber comprising a substrate support having a receiving surface for receiving a substrate so that a front surface of the substrate is exposed within the...
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8083859 |
Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber
The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues...
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8083860 |
Capture and removal cleaning system
Example embodiments of the invention include a cleaning system having both daily cleaning tasks and periodic cleaning tasks for cleaning and dusting a room. By utilizing less inventory and more...
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8080109 |
Film formation apparatus and method for using the same
A method for using a film formation apparatus for a semiconductor process includes setting an idling state where a reaction chamber of the film formation apparatus accommodates no product target...
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8080108 |
Method for cleaning a substrate
A method for the continuous vacuum cleaning of a substrate, characterized in that: a species is chosen that has a low sputtering efficiency and is chemically active with regard to the soiling...
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8076655 |
Method of cleaning optical surfaces of an irradiation unit in a two-step process
The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step...
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8075704 |
Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the...
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8069531 |
Deck cleaning tool
An improved deck cleaning tool includes a rigid blade with a sharply angled front end and adapted to dislodge debris build-up commonly found between planks of outdoor decks is supported by a plate...
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8062409 |
Cleaning device and method for cleaning a workpiece
In order to produce a cleaning device for cleaning a workpiece including a suction apparatus for sucking out impurities from an interior of the work piece wherein the suction apparatus has a...
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8052798 |
Particle removal apparatus and method and plasma processing apparatus
A particle removal apparatus for removing particles from a chamber of a plasma processing apparatus, wherein the chamber is connected to a gas exhaust port and a plasma of a processing gas is...
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8048235 |
Gate valve cleaning method and substrate processing system
A gate valve cleaning method that can clean a gate valve that brings an atmospheric transfer chamber and an internal pressure variable transfer chamber that transfer a substrate into communication...
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8042566 |
Ex-situ component recovery
Disclosed herein are devices, methods and systems for ex-situ component recovery. The ex-situ recovery can be performed by desorbing or outgassing components of a processing system in a recovery...
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8038800 |
Method and device for cleaning the door of a coke oven
The invention relates to a method and a device for cleaning the door of a coke oven, said door comprising a sealing edge and a membrane that is attached to the door panel of the coke oven....
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8029650 |
Antifreeze recycling systems
A method for purifying used antifreeze is disclosed. An antifreeze recycling systems uses a simple-distillation apparatus adapted to distill clean antifreeze from used antifreeze. A novel scraper...
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8025736 |
Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma
Semiconductor device fabrication equipment performs a PEOX (physical enhanced oxidation) process, and includes a remote plasma generator for cleaning a process chamber of the equipment. After a...
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8024831 |
Cleaning method
A cleaning method using a cleaning apparatus having an adhesive sheet, a conductive sheet in contact with a base material of the adhesive sheet, and a pressing member for pressing the conductive...
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8016947 |
Cleaning method and system
A method of cleaning a surface such as a driveway or a vertical wall which includes converting or retro-fitting a zero-turn radius (ZTR) or other type of mower to a cleaning apparatus. The...
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8016996 |
Method of producing a sparged cleaning liquid onboard a mobile surface cleaner
A method is provided, which includes moving a mobile floor cleaning machine along a floor. Onboard the mobile floor cleaning machine, a liquid is sparged by electrolysis. The sparged liquid is...
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8012340 |
Method for generating electrochemically activated cleaning liquid
A method is provided, which includes moving a mobile floor cleaning device along a floor; electrochemically activating a liquid on the mobile floor cleaning device, and dispensing the...
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8007718 |
System for and method of processing bone material using supercritical fluids
A method of processing bone material using supercritical fluids is disclosed. The method comprises placing the bone material in a processing chamber, adding supercritical fluid to the processing...
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8007596 |
Cleaning device having drive means with multiple driving modes
A cleaning device (10) incorporates drive means (14) and cleaning means (20), wherein the drive means (14) are operable to drive the cleaning means (20) across a surface to be cleaned, and wherein...
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7998277 |
Removing hair from a surface
A method of removing hair from a surface laden with hair comprising moving a hair collection element along the surface in a first direction to collect hair, depositing the collected hair at a first...
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7994487 |
Control of particles on semiconductor wafers when implanting boron hydrides
A method for reducing particle contamination during implantation of ions comprises providing an implantation system for implanting ions into a workpiece via an ion beam, wherein one or more...
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7967914 |
Method and apparatus for cleaning fabrics, floor coverings, and bare floor surfaces utilizing a soil transfer medium
An apparatus and method for cleaning fabrics, floor coverings, and bare floor surfaces utilizing a soil transfer cleaning medium is disclosed. A method of mechanically removing soil from a surface...
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7967916 |
Method of preventing pattern collapse during rinsing and drying
A system and method for preventing a pattern formed on a substrate from collapsing during a rinsing and drying phase of a fabrication operation includes determining a plurality of process...
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7967917 |
Method of cleaning storage case
The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as...
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7967913 |
Remote plasma clean process with cycled high and low pressure clean steps
A remote plasma process for removing unwanted deposition build-up from one or more interior surfaces of a substrate processing chamber after processing a substrate disposed in the substrate...
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7964040 |
Multi-port pumping system for substrate processing chambers
An exhaust foreline for purging fluids from a semiconductor fabrication chamber is described. The foreline may include a first, second and third ports independently coupled to the chamber. A...
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7959789 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method for generating electrochemically activated cleaning liquid
A method is provided, which includes moving a mobile floor cleaning device along a floor; electrochemically activating a liquid on the mobile floor cleaning device, and dispensing the...
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7959788 |
***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method of producing a sparged cleaning liquid onboard a mobile surface cleaner
A method is provided, which includes moving a mobile floor cleaning machine along a floor. Onboard the mobile floor cleaning machine, a liquid is sparged by electrolysis. The sparged liquid is...
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7955440 |
Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer
After a water film is formed on a wafer front surface in a chamber, the water film is supplied sequentially with an oxidizing component of an oxidation gas, an organic acid component of an organic...
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7934879 |
Camera module, fabricating method and cleaning method thereof
A camera module includes a lens module, an image sensor, a circuit board for supporting the image sensor, and a lens holder for connecting the lens module and the circuit board. A method for...
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7905471 |
Vacuum ring designs for electrical contacting improvement
Recesses (72), surface contours, contact tip modifications (52, 56), and/or other methods of ensuring pressure between a bottom surface (50) of a test plate (5) and top surfaces (52) of electrical...
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7902270 |
Medical or veterinary material, method for the production and use thereof
A material can be molded into part made of a biocompatible binder containing one or several compounds for adding calcium and phosphorus It has been subjected to a surface pickling operation...
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7901514 |
Substrate cleaning method and developing apparatus
A cleaning method of cleaning a surface of a substrate that is processed by a developing process. The method includes pouring a cleaning liquid onto a central part of the substrate. A dry area that...
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7887640 |
Medical manipulator and cleaning method for medical manipulator
A medical manipulator and a cleaning method therefor are provided. The medical manipulator includes an operation command unit equipped with a motor, and a working unit, which is detachable with...
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