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7618473 |
Method for improving operational efficiency in clogged induction melting and pouring furnaces
A method of restoring the electrical efficiency of channel and pressure pour furnaces includes plunging a fluxing material with a specially designed plunging lance. The plunging lance chamber...
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7615259 |
Method and apparatus for processing workpiece
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized...
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7601227 |
High purification method of jig for semiconductor heat treatment
A method for achieving high purity in a jig for semiconductor heat treatment includes subjecting a semiconductor heat treatment jig made of a substrate having a surface covered with a silicon...
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7597767 |
Paint gun cleaning apparatus
A paint gun cleaning apparatus is provided that prevents the collection of overspray on the discharge end of the paint gun. The cleaning apparatus includes a drum that defines an aperture for...
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7585438 |
Method for the cleaning of filament and fiber spinning devices
Method for the cleaning of spinning devices with a plurality of spinning apertures for the output of molten plastic. With the spinning device in operation, individual dirt-contaminated and/or...
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7582169 |
Device and method for cleaning a powder coating booth
The device according to the invention for cleaning a powder coating booth has a mobile frame, which can be moved along the insides of the booth. The frame includes suction nozzles for sucking off...
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7578904 |
Enzymatic press felt treatment
Methods for reducing or inhibiting deposition on or within press felts to increase the effective life of the press felt and reduce or eliminate the need for batch cleaning are disclosed. The...
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7578886 |
Substrate processing apparatus, substrate processing method, and substrate holding apparatus
A substrate processing apparatus and a substrate processing method is provided for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate...
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7575658 |
Vacuum washer drum
A vacuum drum washer is designed to enable the use of an end-draining drum for drum lengths exceeding 20 feet. The drum washer includes a cylindrical drum having a mesh screen defining an exterior...
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7575641 |
Method and system for cleaning heat exchanger tube bundles
A method and system utilizing a mobile cleaning unit for providing cleaning of heat exchanger tube bundles. The mobile cleaning unit utilizes a pressurized seal positioned about top door of the...
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7572342 |
Method and apparatus for cleaning semiconductor photolithography tools
A system for cleaning semiconductor lithography tools provides for cycling a polished-side down semiconductor wafer through the lithography tool using conventional automated robotics for loading...
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7566370 |
Wafer clamping apparatus and method for operating the same
A wafer clamping apparatus is provided to secure a wafer within a chamber during wafer processing. The wafer clamping apparatus creates a pressure differential between a top surface and a bottom...
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7556697 |
System and method for carrying out liquid and subsequent drying treatments on one or more wafers
Systems for processing microelectronic substrates in a process chamber that incorporate improved technology for transitioning from a wet process to a dry process (especially transitioning from...
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7553378 |
Substrate cleaning apparatus and method
A substrate cleaning apparatus includes a chamber for accommodating a substrate; a mounting table, disposed in the chamber, for mounting thereon the substrate; an electrode disposed in the mounting...
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7544254 |
System and method for cleaning an ion implanter
This disclosure provides an approach for cleaning an ion implanter. In this disclosure, there is a vacuum device having an in-take port adapted to receive a contaminant removing hose. The vacuum...
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7534307 |
Methods for processing wafer surfaces using thin, high velocity fluid layer
Among the many embodiment, in one embodiment, a method for processing a substrate is disclosed which includes generating a fluid layer on a surface of the substrate, the fluid layer defining a...
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7534302 |
Method of cleaning flexible substrate
Provided is a method of cleaning a flexible substrate. The method includes the steps of: preparing a flexible substrate and detaching an impurity adhered to both surfaces of the flexible substrate...
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7531046 |
Process for de-oiling steelmaking sludges and wastewater streams
The present invention is directed to a process for treating an oily mixture consisting of hydrocarbons, solid particles, and water. The steps of the process include placing the oily mixture into a...
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7531045 |
Method for removing haze in a photo mask
An apparatus for removing haze in a photo mask includes sealed chamber having a bake module disposed therein to support a photo mask, a reactant gas feed line to feed a reactant gas into the...
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7527698 |
Method and apparatus for removing a liquid from a surface of a substrate
A method and apparatus for removing a first liquid from a surface of a substrate is provided. A second liquid is supplied to at least part of a surface of a substrate having a rotary movement. The...
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7525010 |
Process to wash polymers contaminated with polychlorinated biphenyls (PCBs)
A process of washing plastics contaminated with polychlorinated biphenyls (PCBs) is provided to reduce the concentration of the PCBs. A two-step process includes a first washing step using a...
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7520938 |
Method for high-pressure processing
An object is subjected to high-pressure processing by bringing at least a high-pressure fluid into contact with the object under pressure in a high-pressure processing chamber, and then the...
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7520298 |
Rotary fluid flow valve
A rotary valve having inner and outer sleeves includes multiple ports configured to provide pressure and vacuum pulses when the sleeves are rotated with respect to each other. A source of pressure...
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7517412 |
Ash and dust removal method
A method of removing dust, dirt and the like from the surface of a paper substrate comprises the steps of transporting the paper substrate along a path of travel, and training the paper substrate...
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7509962 |
Method and control system for treating a hafnium-based dielectric processing system
A method and control system for treating a hafnium-based dielectric processing system in which a system component of the processing system is exposed to a chlorine-containing gas. A residual...
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7507298 |
Cleaning equipment and use thereof
By constructing tank cleaning equipment according to the invention such that it comprises a cleaning jetting part ( 7, 9 ) as well as a suction part ( 4 ), the equipment can work with the same...
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7503983 |
Methods of proximity head brushing
A wafer preparation method is provided for producing a wet region and then a corresponding dry region on the wafer. Brushing produces the wet region on the wafer. As the brushing moves in a...
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7503951 |
Fume chamber
A system for measuring fume generation rates and total fume emissions of welding and allied processes includes a fume collection chamber and an automated welding assembly. The fume collection...
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7467634 |
No contact spray apparatus cleaning device
The invention is an automatic no contact machine for cleaning and drying tips, air caps, retainers and cups on spray apparatus when changing liquid or when the apparatus will be idle, or to remove...
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7465359 |
Game ticket scratching device and method
A game ticket scratching device and method includes an elongated tubular member that has an open first end and a closed second end. An axle is mounted within the tubular member adjacent to the...
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7462842 |
Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements
The invention relates to a method for preventing contamination on the surfaces of optical elements comprising a multi-layer system, during the exposure thereof to radiation at signal wave lengths...
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7461663 |
Cleaning apparatus
The cleaning apparatus of the invention includes first and second cleaning tanks cleaning a mask with a predetermined cleaning solution, a vacuum evaporator vacuum-distilling the cleaning solution...
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7419765 |
Method for producing flexographic printing plates by means of laser engraving
Process for the production of flexographic printing plates by means of direct laser engraving, in which the particulate and gaseous degradation products formed in the course of the engraving are...
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7410543 |
Substrate processing method
Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. A substrate processing method comprises feeding a processing...
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7401744 |
Jetting device and a method of jetting device
A jetting device and a method of jetting droplets of viscous medium onto a substrate. The jetting device includes a jetting outlet through which the droplets are jetted. The jetting device further...
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7387689 |
Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces
Methods for processing substrate through a head that is configured to be placed in close non-contact proximity to a surface of a substrate are provided. One method includes applying a first fluid...
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7377982 |
Method for the removal of airborne molecular contaminants using water gas mixtures
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the...
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7377053 |
Method and device for drying substrate
A device for drying substrate comprising a processing vessel housing a specified number of substrates such as semiconductor wafers installed erectedly in parallel to one another, a first substrate...
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7372049 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element
An EUV lithographic apparatus includes an EUV radiation source, an optical element and a cleaning device. The cleaning device includes a hydrogen radical source and a flow tube in communication...
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7364625 |
Rinsing processes and equipment
Described are methods of rinsing and processing devices such as semiconductor wafers wherein the device is rinsed with using a surface tension reducing agent; the method may include a subsequent...
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7361233 |
Methods of hydrogen cleaning of metallic surfaces
The pulsed partial pressure hydrogen cleaning of cobalt-based alloys in turbine components is achieved by disposing the component within a vacuum furnace and heating the component. Upon heating to...
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7354484 |
Liquid processing apparatus and liquid processing method
A cleaning processing apparatus comprises a spin chuck for holding a wafer W, an under plate being positioned to face the back surface of the wafer W with a prescribed gap provided therebetween, a...
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7350315 |
Edge wheel dry manifold
A apparatus for drying a substrate includes a vacuum manifold positioned adjacent to an edge wheel. The edge wheel includes an edge wheel groove for receiving a peripheral edge of a substrate, and...
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7347916 |
Vacuum washer drum
A vacuum drum washer is designed to enable the use of an end-draining drum for drum lengths exceeding 20 feet. The drum washer includes a cylindrical drum having a mesh screen defining an exterior...
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7346956 |
Automatic cart wash apparatus
An automatic cart wash apparatus. The automatic cart wash apparatus provides improved cleaning of stock carts on a regular basis over manual cleaning by store employees. The automatic cart wash...
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7343640 |
Automatic festooned hose apparatus for public transit vacuuming systems and methods for using same
An automatic festoon hose handling system for mass transit vehicles such as buses or the like, includes a vacuum or pressurized fluid source, a hose connected to the source, and a lance portion...
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7335601 |
Method of processing an object and method of controlling processing apparatus to prevent contamination of the object
A method of manufacture includes processing an object in a chamber and subsequently generating an electrical force of attraction to float contaminants off of a region adjacent the processed object...
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7320735 |
Fan cleaning method and apparatus
A simple yet effective system for cleaning fans and air circulators facilitates the cleaning of ceiling and hard-to-reach units without having to remove the blades or other parts to be cleaned. A...
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7316751 |
Cleaner with high pressure cleaning jets
A swimming pool cleaner discharges water jets under the cleaner body, directed toward its center from its sides, to agitate and lift debris toward one or more vacuum intake openings, to greatly...
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7308130 |
Method for inspecting input shaft of power steering system
Provided is a machine and a method for inspecting an input shaft of a power system. First an second cameras take a photograph of first and second champer of the input shaft from directions...
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