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8168004 |
Method for controlling operation of the washing machine
A washing machine that is capable of providing a stable washing mode even when a washing-related device is abnormal during a washing operation is disclosed. When a steam generation unit, which...
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8142571 |
Process for treatment of semiconductor wafer using water vapor containing environment
A process is provided for treating a semiconductor wafer at a target wafer temperature. This process includes the following steps: a) determining the target wafer temperature of the semiconductor...
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8136189 |
Method for controlling washing course of washing machine
A method for controlling operation of a washing machine is provided. The method may include performing heated washing courses at different temperatures while also selectively controlling an...
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8132279 |
Dishwasher that holds water for use during peak electricity demand and associated method of control
A dishwasher and associated control method are provided wherein a water supply manifold supplies a wash chamber with wash liquid. The supply manifold includes a hot water inlet from an external hot...
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8118945 |
Substrate processing method and substrate processing apparatus
A substrate processing method includes a cleaning processing step, a mixed organic solvent supplying step, and a fluorine organic solvent supplying step. The cleaning processing step is a step of...
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8105440 |
Method of cleaning a CVD device
A CVD vacuum vessel including an electrically conductive partition plate which divides the interior of the vacuum vessel into a plasma generating space and a film-deposition processing space, and...
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8097090 |
Mitigation of deposits and secondary reactions in thermal conversion processes
Described herein are systems and methods for reducing cumulative deposition and unwanted secondary thermal reactions in pyrolysis and other thermal conversion processes. In an embodiment, a system...
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8097091 |
Hot source cleaning system
There is an apparatus for cleaning a substrate (5) mounted on a moveable platen. In an example embodiment, the apparatus comprises a first chamber (20), the first chamber has solvent-dispensing...
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8092641 |
System and method for removing organic residue from a charged particle beam system
A system and method for removing an organic residue from a charged particle beam system includes a conduit that is coupled to the column and is for adding oxygen to the column. A heater is coupled...
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8092612 |
Cooling method and cooling device
A cooling device (70) for cooling a work piece (9) that has reached a high temperature due to the implementation of a closing operation in which a bottom portion (9c) is formed by closing an end...
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8083862 |
Method and system for monitoring contamination on a substrate
A method and system for measuring contamination, such as metal contamination, on a substrate. A dry cleaning system is utilized for non-destructive, occasional removal of contamination, such as...
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8080110 |
Method and system to stabilize and preserve iron artifacts
A method, system and device to use a dilute alkaline solution held at sub-critical temperature and pressure conditions to remove rapidly chloride ions from corroded iron artifacts.
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8080109 |
Film formation apparatus and method for using the same
A method for using a film formation apparatus for a semiconductor process includes setting an idling state where a reaction chamber of the film formation apparatus accommodates no product target...
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8080477 |
Film formation apparatus and method for using same
A method for using a film formation apparatus for a semiconductor process to form a thin film on a target substrate inside a reaction chamber includes performing a cleaning process to remove a...
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8062432 |
Cleaning method for turbo molecular pump
A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate...
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8021492 |
Method of cleaning turbo pump and chamber/turbo pump clean process
A method of cleaning a turbo pump is described. The turbo pump is coupled with a CVD chamber of depositing a material and thus accumulates the material therein. The method includes using another...
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8016948 |
Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal
Disclosed herein is a cleaning method useful in removing contaminants from a surface of a coating which comprises an oxide or fluoride of a Group III B metal. Typically the coating overlies an...
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8011116 |
Substrate proximity drying using in-situ local heating of substrate
A method is provided for removing a residual fluid remaining at a point of contact between a substrate support member and a back surface of a substrate being prepared by a proximity head. According...
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7993467 |
Apparatus for removing matte-sticking and method for using the apparatus
An apparatus and method are provided to remove matte-sticking adhered to an inner surface of an inclined rear jacket of an exhaust gas hood for collecting exhaust gas discharged during the...
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7976640 |
On-line heat exchanger cleaning method
A method for the on-line cleaning of a heat exchanger used with petroleum process fluids which create coke deposits of asphaltenic origin on the exchanger tubes. The asphaltenes are removed by...
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7967917 |
Method of cleaning storage case
The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as...
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7955440 |
Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer
After a water film is formed on a wafer front surface in a chamber, the water film is supplied sequentially with an oxidizing component of an oxidation gas, an organic acid component of an organic...
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7942974 |
Method of cleaning a film-forming apparatus
A method of cleaning a film-forming apparatus to remove a silicon-based material deposited on a constituent member of the film-forming apparatus after being used to form thin films includes...
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7923065 |
Method and apparatus for removing image from recording material, and image peeling member for peeling image from recording material
An image removing method including heating a recording material having thereon an image to a temperature so that the image has a plasticity; pressure-contacting an uppermost stream peeling member...
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7909936 |
Dishwasher final steam rinse method
An overall dishwasher operation cycle includes a washing cycle and a final rinse cycle including steam generation. During the final rinse cycle, a dishwasher tub is filled with fluid, heated and...
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7879153 |
Method for cleaning metal nanoparticles
It relates to a method for removing a surfactant, organic materials and chlorine ions remained on the surface of metal nanoparticles, prepared on an organic solvent phase including a surfactant....
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7846261 |
Methods of using halogen-containing organic compounds to remove deposits from internal surfaces of turbine engine components
Methods for cleaning surface deposits, such as sulfidation deposits or dust particles, from a surface bounding an internal passage in a turbine engine component. The surface deposits are cleaned by...
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7811386 |
Method of controlling a dishwashing machine having a steam generator
A method of controlling a dish washing machine capable of automatically washing items to be washed is disclosed. The method includes performing a steam spraying action defined to spray stream on a...
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7799136 |
Method of cleaning at least one surface of an optical device disposed in a vacuum chamber
A method of cleaning at least one surface of an optical device disposed in a vacuum chamber, which is at least partially contaminated by atoms and/or ions of metalloid and/or metal introduced by a...
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7789965 |
Method of cleaning UV irradiation chamber
A method of cleaning a UV irradiation chamber includes steps of: (i) after completion of irradiating a substrate with UV light transmitted through an optical transmitted window provided in the UV...
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7780793 |
Passivation layer formation by plasma clean process to reduce native oxide growth
Embodiments described herein provide methods for removing native oxide surfaces on substrates while simultaneously passivating the underlying substrate surface. In one embodiment, a method is...
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7763117 |
Method for the manufacture of extended steel products
A method for the manufacture of extended steel products. The steel product is initially contaminated by oils and by at least one of organic and inorganic particles that are suspended or dissolved...
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7699935 |
Method and system for supplying a cleaning gas into a process chamber
A method and apparatus for cleaning a process chamber are provided. In one embodiment, a process chamber is provided that includes a remote plasma source and a process chamber having at least two...
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7691210 |
Resist film removing method
A resist film removing method for removing a resist film disposed on a substrate and having a cured layer at a surface includes covering the surface of the resist film with a protection film;...
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7670462 |
System and method for on-line cleaning of black oil heater tubes and delayed coker heater tubes
A system and method whereby on-line cleaning of black oil heater tubes and delayed coker heater tubes may be effectuated by injecting a high pressure water charge through the tubes during normal...
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7648585 |
Incubator and method for cleaning the incubator
The invention relates to a method for cleaning an incubator and to an incubator designed for carrying out the method. The method involves disinfecting the incubator, or at any rate the climatic...
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7624743 |
Methods and compositions for thermally treating a conduit used for hydrocarbon production or transmission to help remove paraffin wax buildup
Methods are provided for increasing the temperature of a section of conduit used for the production or transmission of hydrocarbon. According to one aspect, the method includes the steps of: (a)...
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7615259 |
Method and apparatus for processing workpiece
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized...
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7601227 |
High purification method of jig for semiconductor heat treatment
A method for achieving high purity in a jig for semiconductor heat treatment includes subjecting a semiconductor heat treatment jig made of a substrate having a surface covered with a silicon...
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7585372 |
Method and apparatus for generating gas pulses
Method and apparatus of producing gas pressure pulses in a dust-deposit cleaning apparatus. The apparatus comprises a combustion chamber and an amplifying horn. According to the method a...
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7546840 |
Method for cleaning reaction container and film deposition system
After semiconductor wafers are loaded into a reaction vessel, and ruthenium (Ru) film or ruthenium oxide film is formed, the interior of the reaction vessel is efficiently cleaned without...
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7540291 |
Method and device for cleaning a blowing head for plastic films
In a first phase, after completion of a production process for plastic films, the blowing head is heated by the heater that is present to a temperature above the melting temperature of the plastic...
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7534306 |
Steam humidifier and method
The steam humidifier fed with a premix of natural gas and forced air under low pressure (less than 1 psi) includes a main frame, a movable lower frame, a two part evaporation canister, releasably...
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7531045 |
Method for removing haze in a photo mask
An apparatus for removing haze in a photo mask includes sealed chamber having a bake module disposed therein to support a photo mask, a reactant gas feed line to feed a reactant gas into the...
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7525010 |
Process to wash polymers contaminated with polychlorinated biphenyls (PCBs)
A process of washing plastics contaminated with polychlorinated biphenyls (PCBs) is provided to reduce the concentration of the PCBs. A two-step process includes a first washing step using a...
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7513955 |
Process for the plasma cleaning of a component
Cracks are conventionally difficult to clean which often leads to damage to other regions of the component for cleaning. According to the invention, a plasma cleaning method is used, whereby a...
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7507297 |
Cleaning method and cleaning apparatus
A cleaning effect is improved by cleaning a component that has a recess structure by using a cleaning medium of a liquefied gas or a supercritical fluid. By the cleaning method of removing adhering...
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7455565 |
Fabrication of group III-nitride photocathode having Cs activation layer
Improved photocathodes are provided by a fabrication method including steps of wet chemically cleaning the photocathode emission surface (to reduce the level of cleaning-induced surface damage),...
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7429337 |
Method for removing at least one area of a layer of a component consisting of metal or a metal compound
The invention relates to a method for removing an area of a layer of a component consisting of metal or a metal compound. According to prior art, corrosion products of a component are removed in a...
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7416611 |
Process and apparatus for treating a workpiece with gases
In a method and apparatus for cleaning or processing a workpiece, a process gas is brought into contact with the workpiece by diffusion through a heated liquid layer on the workpiece, and by bulk...
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