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7367346 |
Method for cleaning hollow tubing and fibers
Hollow porous fibers containing adhered contaminants are cleaned to remove the contaminants by backflushing a liquid to fill the pores, and adding a flow of gas so as to form a two-phase mixture of...
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7360546 |
Cleaning apparatus for semiconductor wafer
A cleaning apparatus for a semiconductor wafer comprising: a double container including an inner container with an upper opening for accommodating a substrate to be cleaned and an outer container...
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7343922 |
Wafer drying apparatus
A wafer drying method includes submerging a wafer in a cleaning solution in a dry chamber. An organic liquid vapor from an organic liquid is supplied into the dry chamber at a first volumetric...
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7314529 |
Substrate cleaning apparatus and substrate cleaning method
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the...
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7278434 |
Cleaning device with toggle for increasing ozone dissolution in water for cleaning vegetables and fruits
A cleaning device with a toggle serves for increasing ozone dissolution in water for cleaning vegetables and fruits. The cleaning device is placed in a washing barrel. The cleaning device comprises...
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7257319 |
Jewelry cleaning device
A jewelry cleaning device which emits a jet of steam under manually operable control means for the cleansing of various types of small items including jewelry, coins, trinkets, or the like. The...
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7246626 |
Sanitation system for refrigerated fixture having an air curtain
A sanitation system for a refrigerated fixture having an air curtain. This sanitation includes a spray manifold positioned in a case tank of the refrigerated fixture. A reservoir is provided which...
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7237562 |
Substrate processing apparatus and control method of inert gas concentration
Provided is a substrate processing apparatus capable of supplying pure water that is stabilized with respect to the concentration of nitrogen gas. First and second nitrogen concentration meters to...
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7216654 |
Dishwasher
A dishwasher having a dishwasher is provided in which an intake port cover for closing a steam intake port is mechanically operated. The dishwasher has a cavity enclosed in part by a door, and a...
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7191785 |
Substrate processing apparatus for resist film removal
Semiconductor wafers are cleaned by placing the semiconductor wafers in a processing vessel, forming a pure water film on the surfaces of the wafers, forming an ozonic water film by dissolving...
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7172657 |
Cleaning method of treatment equipment and treatment equipment
In a state of the inside of a treatment chamber of treatment equipment being evacuated, therein a cleaning gas containing trifluoroaceticacid (TFA) as a cleaning agent is supplied. Metal such as...
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7127830 |
Reticle carrier apparatus and method that tilts reticle for drying
A method and apparatus for cleaning, rinsing and drying a reticle used in semiconductor device manufacturing, tilts the reticle during the drying process to prevent water from the rinsing process...
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7067017 |
Method and system for cleaning semiconductor elements
The invention relates to a method and system for cleaning semiconductor elements accommodated in a tank which uses ozonized, deionized (DI) ultrapure water. According to the invention, ozone is...
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7047984 |
Device and method for cleaning articles used in the production of semiconductor components
A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that...
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7021323 |
Dust-incompatible article transfer container cleaner
To clean the inside and outside of a container capable of containing dust-free objects for carrying, a cleaning apparatus is used within a clean room or a housing in which the cleaning apparatus is...
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7004181 |
Apparatus for cleaning a substrate
The invention provides a water supplying apparatus and method thereof which has a high capacity of peeling and removing a disused material such as a resist film and the like, and can efficiently...
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6955178 |
Substrate treatment apparatus
A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing...
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6944908 |
Device for keeping optical elements clean, in particular covers for sensors or cameras, in motor vehicles
The invention relates to a device for keeping optical elements clean in motor vehicles, especially sensor or camera covers. This is done according to the present invention by applying a directed...
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6941957 |
Method and apparatus for pretreating a substrate prior to electroplating
A method including the step of providing a substrate having a contact pad, and an under bump metallurgy overlying the contact pad, and a photoresist layer overlying the under bump metallurgy, and...
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6936114 |
Steam cleaning system and method for semiconductor process equipment
Disclosed are systems and methods for removing stubborn contaminants, aluminum fluoride and aluminum chloride in particular, from components of semiconductor-processing equipment. One embodiment...
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6901938 |
Substrate cleaning apparatus
The substrate processing apparatus is provided with a gas-liquid mixing nozzle for generating a gas-liquid mixture by mixing a liquid and a pressurized gas, to discharge the gas-liquid mixture to a...
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6869487 |
Process and apparatus for treating a workpiece such as a semiconductor wafer
A novel chemistry, system and application technique reduces contamination of semiconductor wafers and similar substrates and enhances and expedites processing. A stream of liquid chemical is...
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6863741 |
Cleaning processing method and cleaning processing apparatus
Where a substrate such as a semiconductor wafer held in a process space in a process chamber consisting of an outside chamber and an inside chamber is subjected to a cleaning processing, a chemical...
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6851434 |
Composition, apparatus, and method of conditioning scale on a metal surface
A composition and apparatus and method for aqueous spray conditioning of scale on metal surfaces. An aqueous solution having a base composition of an alkali metal hydroxide is used. The aqueous...
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6841083 |
Device and process for improved scouring efficiency
A device for scouring a coating from a fibrous material includes a tank for immersing a plurality of fibers in scouring solvent therein. The device also includes a bubbling device positioned...
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6837252 |
Apparatus for treating a workpiece with steam and ozone
In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam...
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6821349 |
Method and apparatus for removing a liquid from a surface
A method and an apparatus for removing a liquid, i.e. a wet processing liquid, from at least one surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate....
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6817370 |
Method for processing the surface of a workpiece
An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus...
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6805138 |
Semiconductor device production method and semiconductor device production apparatus
A semiconductor device production method that is used to uniformly and efficiently reduce metal oxides produced on metal (copper, for example) which forms electrodes or wirings on a semiconductor...
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6786976 |
Method and system for cleaning semiconductor elements
The invention relates to a method and system for cleaning semiconductor elements accommodated in a tank which uses ozonized, deionized (DI) ultrapure water. According to the invention, ozone is...
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6719613 |
Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide
A cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants utilizing a multi-stage, multi-mode filtered carbon dioxide-containing...
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6705332 |
Hard floor surface cleaner utilizing an aerated cleaning liquid
A hard floor surface cleaning apparatus includes an aerator, a rotating scrub medium engaging the hard floor surface, a fluid conveyor, and a fluid recovery device. The aerator is configured to...
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6701941 |
Method for treating the surface of a workpiece
An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus...
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6695926 |
Treatment method of semiconductor wafers and the like and treatment system for the same
A method of treating semiconductor wafers in a sealed container is provided and includes transferring and vertically placing a plurality of wafers in the container and sealing the container. An...
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6662600 |
Foamed cleaning liquid dispensing system
A foamed cleaning liquid dispensing system for use in a washing machine includes a cleaning liquid dispenser and a foaming device. The cleaning liquid dispenser includes an output flow of cleaning...
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6640821 |
Endoscope cleaning apparatus
A cleaning tube into which an endoscope is inserted for cleaning is formed with a flexible tube and curled like a loop. A bypass channel is used to link a first end of the cleaning tube and a...
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6634370 |
Liquid treatment system and liquid treatment method
Liquid treatment units are disposed in multi-tiers surrounding a main-arm 35 . Among liquid treatment units, plating units M 1 through M 4 are disposed on a lower tier side, and a unit for...
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6631726 |
Apparatus and method for processing a substrate
A lamp house is located face to face with a substrate which is transferred by a conveyer means. A dielectric barrier discharge lamp is provided in the lamp house to irradiate the substrate with...
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6630031 |
Surface purification apparatus and surface purification method
By a simple apparatus construction and process, it is made possible to “clean precisely” a surface at the molecular/atomic level, and the purification degree of the surface processed minutely...
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6626194 |
Electric shaver cleaning apparatus
A cleaning apparatus for electric shaver components has a removable basket that fits inside a compartment. Cleaning is carried out by pumping cleaning fluid and air into a bottom of the compartment...
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6622738 |
Apparatus and system for removing photoresist through the use of hot deionized water bath, water vapor and ozone gas
An apparatus and system for removing photoresist or other organic material from a substrate such as a semiconductor wafer is provided. The apparatus and system includes a chamber for partially...
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6607001 |
System of reducing water spotting and oxide growth on a semiconductor structure
The present invention relates to a method of cleaning and drying a semiconductor structure in a modified conventional gas etch/rinse or dryer vessel.
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6604535 |
Substrate cleaning apparatus and method
A substrate cleaning apparatus includes a chamber having a substrate support capable of supporting and rotating a substrate in the chamber. A cleaning solution injector is provided to inject a...
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6601594 |
Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece
An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus...
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6589359 |
Cleaning method and cleaning apparatus for substrate
A cleaning method is provided for cleaning a semiconductor wafer. In this method, after removing adhering substances from the wafer by using a chemical liquid of organic amine type, there is...
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6584993 |
Portable-type cleaning device for internal combustion engine
A portable-type cleaning device for internal combustion engine comprising a container containing a cleaning solution and a guiding tube connected to the container and the internal combustion...
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6569258 |
Method and apparatus for cleaning a bell atomizer spray head
A cleaning system and method for a bell atomizer spray head provides an air/solvent mixture to an exterior surface of a bell cup through shaping air passages and outlets during a color change or...
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6564814 |
Engine decarbonizing system
An engine decarbonizing system comprises a manifold with one central and four lateral bores. Pressurized air and decarbonizing fluid in separate containers are adapted to be co-mingled and fed to...
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6555055 |
System for preventing and remediating biofilms in dental equipment
A system having a fluid source and a pasteurizer coupled with a disinfectant unit in flow communication with the fluid source for use in disinfecting dental or other water lines. The combination of...
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6530392 |
Valve cleaning assembly
The present invention is a valve cleaning apparatus and method for transporting a cleaning fluid from a supply tank into the air intake valves of a combustion engine. It comprises housing having a...
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