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8172947 |
Substrate processing apparatus and attaching/detaching method of reaction vessel
To provide a substrate processing apparatus, comprising: a reaction vessel having a processing chamber inside that processes a substrate; a heating device that heats said substrate from an outer...
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8156888 |
Chemical mechanical vapor deposition device for production of bone substitute material
A method for fabricating a substitute component for bone, including the processes of: provision of a chemical spray including at least three of calcium chloride, hydrogen phosphate, hydrogen...
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8104421 |
Vacuum chamber on a frame basis for coating installations
The present invention relates to a vacuum chamber and to its production. According to the invention, the vacuum chamber comprises a frame into which insert plates are placed. The insert plates form...
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8097084 |
Vacuum chamber system for semiconductor processing
A vacuum chamber system for semiconductor processing includes at least two evacuable vacuum chambers for receiving semiconductor elements to be processed, each including a vacuum chamber opening...
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8092606 |
Deposition apparatus
A deposition apparatus configured to form a thin film on a substrate includes: a reactor wall; a substrate support positioned under the reactor wall; and a showerhead plate positioned above the...
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8074597 |
Methods and apparatus for purging a substrate carrier
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into...
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8071477 |
Method of manufacturing semiconductor device and substrate processing apparatus
Formation of a boron compound is suppressed on the inner wall of a nozzle disposed in a high-temperature region of a process chamber. A semiconductor device manufacturing method comprises forming a...
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8047231 |
Valve element unit and gate valve apparatus
To provide a valve element unit and a gate valve apparatus which realize a reduction in manufacturing cost by a compact and simple structure and smooth rotary driving of the valve element without...
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8021488 |
Sealing structure of vacuum device
A sealing structure for sealing a gap between a vacuum container 2 and a lid 3 contacted to an opening of the vacuum container 2 to close it. A cavity 66 is formed in an elastomer O-ring 64...
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8012261 |
ALD apparatus and method
An apparatus and method for atomic layer deposition with improved efficiency of both chemical dose and purge is presented. The apparatus includes an integrated equipment and procedure for chamber...
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7993456 |
Device for carrying out a surface treatment of substrates under vacuum
The present invention relates to a device for carrying out a surface treatment of substrates under vacuum, which comprises a housing (1) comprising chambers (2-5) communicate with a vacuum source,...
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7955436 |
Systems and methods for sealing in site-isolated reactors
Substrate processing systems and methods are described for site-isolated processing of substrates. The processing systems include numerous site-isolated reactors (SIRs). The processing systems...
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7947926 |
Heat treatment apparatus, heat treatment method, and recording medium recording program for practicing the method
In a heat treatment method in which a semiconductor wafer is carried into a heat treatment chamber constituted of a heat plate and a cover body covering the heat plate and processed, until the...
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7943006 |
Method and apparatus for preventing arcing at ports exposed to a plasma in plasma processing chambers
A method and apparatus for preventing arcing at a port exposed to a plasma in a plasma chamber use circuit components causing a door sealing the port to provide a short circuit path at excitation...
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7938906 |
Method and apparatus for dynamic thin-layer chemical processing of semiconductor wafers
A semiconductor wafer processing and analysis apparatus (20) includes a processing micro chamber (22) for closely receiving a semiconductor wafer (27) therein. The chamber may be opened for loading...
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7935186 |
Plasma processing apparatus
A plasma processing apparatus is described and which includes a chamber having at least two processing stations which are separated by a wall. At least one channel is formed in the wall, and...
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7931750 |
Sealing lock for a deposition line in vacuum on a flat product
The invention relates to a sealing lock, for an in vacuo chamber for deposition on a, preferably metallic, endless strip, characterized in that: the metal rollers are mounted on brackets, fixed to...
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7927662 |
CVD method in vertical CVD apparatus using different reactive gases
A method of performing a CVD process on target substrates all together in a vertical CVD apparatus includes repeating, a plurality of times, first and second steps of supplying first and second...
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7879181 |
Apparatus for manufacturing flat-panel display
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the...
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7854805 |
Plasma processing plant
A plasma processing plant for plastic bottles, having a vacuum chamber arranged inside the processing chamber and when a respective bottle opening is pressed against a valve, the valve will open...
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7850449 |
Heat treatment equipment
In an embodiment, heat treatment equipment comprises a process tube, an exhaust duct connected to the process tube, and, during operation, exhausting gases present within the process tube. The heat...
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7794546 |
Sealing device and method for a processing system
A method, computer readable medium, and system for treating a substrate in a process space of a processing system that is vacuum isolated from a transfer space of the processing system is...
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7776178 |
Suspension for showerhead in process chamber
Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) Openings in the suspension wall that reduce exposure of the suspension wall to...
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7754014 |
Gas-purged vacuum valve
A vacuum valve assembly for use in a vacuum processing chamber includes a seat defining an opening in the vacuum valve, with the seat having a sealing face adjacent the opening and normal to the...
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7744949 |
Light emitting device and method of manufacturing method thereof and thin film forming apparatus
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a...
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7740705 |
Exhaust apparatus configured to reduce particle contamination in a deposition system
A method and system for vapor deposition on a substrate that disposes a substrate in a process space of a processing system that is isolated from a transfer space of the processing system,...
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7707965 |
Processing apparatus and lid opening/closing mechanism
A processing apparatus includes an openable/closable lid disposed on a process container, and an opening/closing mechanism configured to open/close the lid. The opening/closing mechanism includes a...
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7700898 |
Heat treatment equipment and method of driving the same
Heat treatment equipment and a method of driving the same are provided. The heat treatment equipment includes: a process tube having an aperture at one side thereof; a sealing unit for opening or...
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7682454 |
Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems
A seal-protected perimeter partition valve apparatus (450) defines a vacuum and pressure sealed space (401) within a larger space (540) confining a substrate processing chamber with optimized...
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7674351 |
Plasma processing apparatus
A vacuum processing apparatus that includes an inner wall member disposed inside of an outer side wall member of a vacuum container, the inner wall member surrounding a side of a sample stand on...
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7674336 |
Processing apparatus
A thermal processing apparatus according to the present invention comprises a processing container having an opening part at a lower end thereof. The processing container can contain an object to...
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7670432 |
Exhaust system for a vacuum processing system
A method, computer readable medium, and system for treating a substrate in a process space of a vacuum processing system is described. A vacuum pump in fluid communication with the vacuum...
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7665917 |
Heat treatment apparatus and methods for thermally processing a substrate using a pressurized gaseous environment
Apparatus and methods for heating a substrate in a pressurized environment inside of a thermal processing system. The substrate is placed in a gaseous environment inside a processing chamber of the...
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7662233 |
ALD apparatus and method
Improved apparatus and method for SMFD ALD include a method designed to enhance chemical utilization as well as an apparatus that implements lower conductance out of SMFD-ALD process chamber while...
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7651583 |
Processing system and method for treating a substrate
A processing system and method for chemical oxide removal, wherein the processing system includes a process chamber having a lower chamber portion configured to chemically treat a substrate and an...
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7641762 |
Gas sealing skirt for suspended showerhead in process chamber
Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) A gas sealing skirt that helps protect the suspension wall from direct contact...
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7632164 |
Process for producing an organic EL display device using different processing units for each of the manufacturing stages
An apparatus and a corresponding process for producing an organic EL display device comprising a first unit for carrying a supporting substrate in, a second unit for heating at least the supporting...
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7622008 |
Gate valve and vacuum container for semiconductor processing system
A gate valve (20) for a semiconductor processing system includes a housing (21) forming a plurality of passages (22A to 22D) arrayed in a first direction. The passages respectively have ports (23A...
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7615118 |
Substrate processing apparatus and substrate processing method
In a substrate processing apparatus of the present invention, when substrates are loaded into a chamber, a frame part formed integral with a substrate holding part is interposed between the chamber...
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7611322 |
Processing thin wafers
There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls...
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7604701 |
Method and apparatus for removing external components from a process chamber without compromising process vacuum
An access assembly for a process chamber, including a wall segment constructed and arranged to access the process chamber, a mounting assembly constructed and arranged to couple the wall segment to...
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7585370 |
Gas-purged vacuum valve
A vacuum valve assembly for use in a vacuum processing chamber includes a seat defining an opening in the vacuum valve, with the seat having a sealing face adjacent the opening and normal to the...
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7582167 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
In one embodiment, the invention is a guard ring for reducing particle entrapment along a moveable shaft of a substrate support. In one embodiment, the guard ring comprises a substantially annular...
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7491913 |
Bake apparatus for use in spin-coating equipment
Bake apparatus for use in baking a substrate, such as a semiconductor wafer, includes a chamber, a hot plate installed within the chamber, and first and second buffer plates for uniformly...
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7462372 |
Light emitting device, method of manufacturing the same, and thin film forming apparatus
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a...
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7431813 |
Multi-chambered substrate processing equipment having sealing structure between chambers thereof, and method of assembling such equipment
Sealing structure provided between a transfer chamber and a chamber, such as a process chamber, connected to the transfer chamber includes an insert member, a docking member, and annular seals. The...
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7422653 |
Single-sided inflatable vertical slit valve
A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber...
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7410542 |
Variable environment, scale-able, roll to roll system and method for manufacturing thin film electronics on flexible substrates
A roll to roll, film forming system overcoming the shortcomings of current roll to roll processing is presented; The roll to roll enabled cartridge is loaded with a bolt of fresh flexible...
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7374620 |
Substrate processing apparatus
A substrate processing apparatus (10A) using a microwave plasma is disclosed wherein an inner partition wall (15) is provided within a process chamber (11) so that the inside of the process chamber...
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7371285 |
Motorized chamber lid
A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom...
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