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4320716 |
Ultra-high frequency device for depositing thin films on solids
A device having means for forming a high frequency excitation zone in an elongated enclosure, a vacuum pump whose connection is positioned at one end of the enclosure, a device permitting the...
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4318889 |
Impermeable cooled closing plug for processing tubes, in particular in semiconductor manufacture
An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon...
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4317667 |
Method and apparatus for fabricating lightguide preforms
A lightguide starting tube or rod (12) passes through opposed lateral openings (51--51) in a chamber (31) which contains an oxy-hydrogen torch (14) used to deposit particulate glass on the rod....
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4297383 |
Apparatus and method for obtaining fingerprints
This invention relates to an apparatus and method for developing latent fingerprints on an object by fuming said object with the vapors of the chemical cyanoacrylate. Apparatus is disclosed...
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4296153 |
Vacuum chamber door assembly and method
A vacuum deposition apparatus comprises a cabinet having a vacuum chamber defined therein. A door is movably mounted on the cabinet for movement between a closed position fully sealing an opening...
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4294194 |
Device for coating objects
A device is disclosed for the formation of electric capacitor metal coatings and glow polymerization coatings to be applied in a vacuum installation in separate vacuum chambers. The air locks which...
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4293590 |
Process for high pressure oxidation of silicon
A process for high pressure oxidation of silicon comprising the steps of inserting silicon wafers and an oxidizing substance into a quartz capsule sealing the quartz capsule gas-tightly by fusing,...
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4280829 |
Apparatus for controlling internal pressure of a bait tube
This invention pertains to an apparatus for controlling the diameter of a glass bait tube during the deposition of glassy layers therein. The exhaust end of the bait tube is connected to a vented...
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4278380 |
Lock and elevator arrangement for loading workpieces into the work chamber of an electron beam lithography system
In apparatus having a work chamber in which workpieces are treated under high vacuum, that improvement comprising an inner chamber having a capacity for a plurality of workpieces, an outer chamber,...
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4266507 |
Cap-mounting mechanism for apparatus for thermal treatment of semiconductors
In an apparatus for thermal treatment of semiconductors, a substantially spherical portion of a cap for a tube is confined between distal ends of a plurality of members and distal ends of a...
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4261808 |
Vacuum coating apparatus with continuous or intermittent transport means
Vacuum coating apparatus having a vacuum chamber containing at least one cathode system and having a system for the continuous or intermittent transport of substrates during the coating. The...
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4258645 |
Coupling for stationary and movable vacuum chambers
Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall...
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4253417 |
Closure for thermal reactor
Apparatus for thermal oxidation of silicon wafers at high pressures of a type wherein a reactor of a refractory material is disposed within a pressure vessel, and wherein a margin of a wafer portal...
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4233937 |
Vapor deposition coating machine
A machine for vapor coating a workpiece with a coating metal supplied in wire form includes a vessel enclosing a vacuum chamber and having a door for providing access to the vacuum chamber. The...
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4226208 |
Vapor deposition apparatus
An apparatus for vacuum deposition of a thin film onto the surface of a substrate includes a vacuum container formed by a base plate, a cylindrical side wall and a top plate to accommodate at least...
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4184448 |
Vacuum coating apparatus having a plurality of lock chambers
Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the...
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4147432 |
Apparatus for thermal diffusion by high frequency induction heating of semiconductor substrates
This invention relates to an apparatus for thermal diffusion by means of high frequency induction heating suitable for mass production of semiconductor substrates of uniform quality; wherein a...
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4129090 |
Apparatus for diffusion into semiconductor wafers
In diffusing an impurity into semiconductor wafers within a silica tube by the use of a heating furnace, a method of diffusion involves the following steps: the semiconductor wafers are inserted...
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4123989 |
Manufacture of silicon on the inside of a tube
A new method and apparatus for producing silicon are disclosed which are characterized by using a silicon tube as the reaction chamber and disproportionating a gaseous silicon compound so as to...
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4099483 |
Tissue processing apparatus
A processing apparatus for tissue specimens, e.g. for histological examination, comprises a vessel defining a vapor space above heating means and a receptacle for volatile processing liquid and,...
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4096823 |
Apparatus for metallization of fibers
A method for decontaminating and subsequently metallizing a filament comprises: Passing the filament through the inner tube of a first chamber for decontamination which comprises two concentric...
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4089735 |
Method for epitactic precipitation of crystalline material from a gaseous phase, particularly for semiconductors
Described is a method of epitactic precipitation of crystalline material from the gaseous phase, upon substrate bodies. The carrier of the substrate bodies is moved in the reaction vessel during...
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4067697 |
Test bar for a vacuum chamber
Device for introducing a specimen into and withdrawing the same from the interior of a chamber sealed from the surrounding environment. The device includes a test bar slidably and sealingly...
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4062319 |
Vacuum treating apparatus
A sputtering apparatus of the bell-jar type includes a high-vacuum pump disposed centrally of, and directly within a vacuum chamber of the apparatus. A separate enclosing member is disposed within...
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4048953 |
Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material
An elongated continuous porous sheet of fibrous carbon, such as paper of matted graphite fibers, woven graphite cloth or carbonized filter paper is longitudinally traversed through a reduced...
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4047624 |
Workpiece handling system for vacuum processing
Apparatus and method are disclosed for transporting discrete workpieces between the outside and inside of a pressure sealable chamber, such as a chamber under vacuum. At least one pressure lock is...
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4031851 |
Apparatus for producing improved high strength filaments
Fabrication apparatus is described for improving the ultimate strength of boron and other high strength filaments. In the apparatus, a gradual cooling zone is placed at the exit end of the reaction...
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4015558 |
Vapor deposition apparatus
Multi-layer coating apparatus and system for coating a substrate having a coating chamber and means for advancing the substrate in a horizontal position through the coating chamber. The coating...
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4009680 |
Apparatus for producing high wear-resistant composite seal
A base metal, such as the aluminum or iron housing of a conventional rotary or reciprocating-piston internal combustion engine, and a sealing member applicable to the pistons or rotor thereof are...
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4008683 |
Machine for treating wafer-form items
A machine which processes discrete wafer-form items in a chamber is provided with a slot-form channel along which the items move between points inside and outside the chamber, a lateral opening...
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3990390 |
Apparatus for vacuum coating of a substrate
Substrate supply and windup rolls are arranged in a housing arranged at each end of a vacuum coating chamber. Gate means provide for optionally sealing of one housing for loading and unloading...
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3981791 |
Vacuum sputtering apparatus
Vacuum sputtering apparatus for treating articles having a housing forming a main vacuum chamber with a plurality of work stations therein. A lock chamber is provided in the main vacuum chamber...
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3973665 |
Article delivery and transport apparatus for evacuated processing equipment
Equipment for processing workpieces on a continuous basis under vacuum transfers workpieces from a feed compartment to an evacuated processing compartment, and removes processed workpieces to a...
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3918396 |
Container for the production of semiconductor bodies
Semiconductor material, in particular silicon, is deposited onto heated carrier members from gaseous semiconductor compounds within a chamber formed by a glass or quartz dome and a base member....
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3915117 |
Vacuum coating apparatus
A vacuum coating apparatus for coating various products comprises a housing which includes a fixed part and a rotatable cover part which together define a closed gas sealable housing chamber which...
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3894926 |
In-out transporter for an enclosed chamber
An In-Out Transporter arrangement for an enclosed chamber, subjected either to a vacuum or to a positive pressure, comprising in combination a gasket sleeve on and covering an entrance and/or exit...
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3868106 |
VACUUM CHAMBER SEAL
A gate for an evacuated chamber used for the treatment of metal strip of band having a thickness ranging from tenths of a millimeter to several millimeters comprising a plurality of guide rolls...
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3865074 |
DEVICE FOR COATING A WIRE OF AN ELECTRICALLY CONDUCTING MATERIAL CONTINUOUSLY FROM THE GAS PHASE
A device for coating a wire continuously from the gas phase, comprising a tubular reaction chamber provided with at least one inlet and outlet for the gas or gas mixture providing the coating and...
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3860444 |
COATING OF WORKPIECES BY VAPOR DEPOSITION
To replenish a bath of molten metal composition in a vacuum chamber, used for the vapor-deposition coating of a workpiece, a wire of the same composition as the bath is continuously fed into the...
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3805735 |
DEVICE FOR INDIFFUSING DOPANTS INTO SEMICONDUCTOR WAFERS
In a silicon tube whose diameter is two to three times larger than the diameter of the wafers to be diffused, a rod is situated centrally and in parallel to the tubular axis and has channels...
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3755133 |
DEVICE FOR EXPOSING SMALL ROLLABLE BODIES TO SPUTTERING
Cylindrical ceramic blanks are fed endwise down grooves in a vibratory table and simultaneously caused to revolve about their axes, while subjected to the deposition of material sputtered from...
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3754529 |
APPARATUS FOR CONTINUOUSLY DEPOSITING BERYLLIA THROUGH VAPORIZATION OF A BASIC FORMATE
An apparatus for vaporizing a basic formate of beryllium by continuous means in which the beryllium basic formate is mixed with a granular inert carrier material such as sand and as an aggregate is...
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3746496 |
DEVICE FOR PRODUCING TUBULAR BODIES OF SEMICONDUCTOR MATERIAL, PREFERABLY SILICON OR GERMANIUM
A device for producing tubular bodies of semiconductor material, preferably of silicon or germanium. To this end, a rod or tube shaped carrier is heated in a reaction gas for precipitating the...
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3738314 |
FILAMENT COATING APPARATUS INCLUDING MERCURY CONTACT HEATING MEANS
Heating means in a vapor deposition chamber includes a plurality of electrical contacts. Each contact is formed by a receptacle containing mercury through which the filament substrate passes. To...
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3735727 |
DEVICE FOR THE PRECIPITATION OF LAYERS OF SEMICONDUCTOR MATERIAL
Epitaxial device in which semiconductor wafers to be coated are disposed at the bottom of a vertical cylindrical reaction vessel and are heated to the high temperature required for precipitation by...
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3735728 |
APPARATUS FOR CONTINUOUS VACUUM DEPOSITION
A vapor deposition apparatus is provided wherein a workpiece strip is passed over a rotatable masking wheel within a vacuum environment. The evaporation source and material to be evaporated and...
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3734056 |
INFRARED SPECTROSCOPY APPARATUS
This invention relates to apparatus for use in isolating monomers of hydrogen-bonded organic compounds, liquids or solids at room temperature in a low temperature inert gas matrix. The apparatus...
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3731651 |
REACTOR SEAL
In a vertical reactor wherein vapor deposition is effected on a moving filamentary substrate, a reactor seal is provided to isolate the reactant gases within the tube from the atmosphere. The...
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3705567 |
DEVICE FOR INDIFFUSSING DOPANTS INTO SEMICONDUCTOR WAFERS
A silicon ampule is provided at its open end with a planar ground section, to which is pressed with the aid of a vacuum pump, a quartz tube provided with a planar ground section. Porosity caused...
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3673981 |
FILMING APPARATUS
System for the vacuum deposition of thin films on sheet material including a plurality of vacuum chambers arranged in end-to-end relation to one another, one of the chambers constituting a filming...
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