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5820680 |
Vacuum evaporator
A vacuum evaporator is characterized in that hot-cathode filaments (7) are provided as the electron source around a tip of a rod evaporation material (4); the peripheries of the rod evaporation...
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5820682 |
Laser deposition apparatus for depositing a large area oxide thin film on a substrate
A laser deposition apparatus for a large area oxide thin film which can enable thin films of a large area to be deposited by varying a target affixing method when performing a pulse laser...
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5820678 |
Solid source MOCVD system
A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor...
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5815330 |
Radiation limiter and optical system incorporating the same
An optical system is provided comprising an entry window, an exit window, a radiation transmissive membrane, and first and second lenses. The entry window and the exit window define a radiation...
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5803938 |
Liquid vaporizing apparatus
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through...
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5803976 |
Vacuum web coating
In an apparatus for vacuum web coating, an evaporation means has a plurality of separately spaced outlet nozzles through which vapour is conveyed to a deposition zone at the surface of a chilled...
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5800175 |
Method and apparatus for re-implanting teeth
A method and apparatus for extraction and re-implantation of a natural tooth, such tooth being cleaned and repaired while extracted. The crown of the repaired tooth is mechanically masked and the...
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5795628 |
Device for coating a substrate surface
Device containing a vacuum chamber 30 and situated therein a substrate 10 and a vaporization crucible 22 filled with inorganic materials 24. Situated in the region of the vacuum chamber 30 is an...
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5788769 |
Evaporator boat for an apparatus for coating substrates
A flat, elongate, trough-shaped part (8) made of an electrically conductive ceramic can be heated by the direct passage of current between clamping points at opposite ends. The trough-shaped part...
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5778682 |
Reactive PVD with NEG pump
An apparatus for carrying out reactive physical vapor deposition on a substrate to form a nitride layer, comprises a vacuum chamber, a substrate support in the vacuum chamber, a target over the...
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5779804 |
Gas feeding device for controlled vaporization of an organanometallic compound used in deposition film formation
A gas-feeding device for feeding a starting gas for deposition-film-formation by the chemical vapor deposition method, comprising a container having a space for discharging the starting gas...
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5776254 |
Apparatus for forming thin film by chemical vapor deposition
A chemical vapor deposition (CVD) apparatus for depositing a thin film on a substrate by CVD has a material container for containing a liquid CVD source material, a material feeder for feeding the...
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5776255 |
Chemical vapor deposition apparatus
A chemical vapor deposition apparatus comprises a starting material container holding a starting material in a liquid state, a starting gas generating container into which the liquid starting...
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5773147 |
Ceramic-coated support for powder metal sintering
This invention relates to an apparatus comprising: a) a article having a composition selected from the group consisting of graphite, carbon/carbon, carbon/graphite, and mixtures thereof, and ...
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5747818 |
Thermoelectric cooling in gas-assisted FIB system
Apparatus for supplying a jet of chemical vapor at a substantially constant rate comprises a crucible for containing a quantity of chemical, a hollow needle, a flow path from the crucible to the...
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5738729 |
Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method
In order to maintain a required minimal variation of angle of incidence (a) of a coating material on a flat substrate (3), it is recommended that the substrate (3) be exposed to the evaporation...
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5733375 |
Apparatus for supplying a treatment material
An apparatus for supplying a treating material to a treating device has a tank containing a liquid treating material and a heat exchanger formed by a spiral pipe and provided in the tank. A...
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5730804 |
Process gas supply apparatus
A process gas supply apparatus according to the invention comprises a supply pipe line connecting a supply source containing an organic aluminum metallic compound in a liquid state, to a process...
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5725672 |
Apparatus for the high speed, low pressure gas jet deposition of conducting and dielectric thin sold films
Described is a method for depositing from the vapor phase a chemical species into the form of a thin solid film material which overlays a substrate material. The deposition process consists of...
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5725674 |
Device and method for epitaxially growing gallium nitride layers
An epitaxial growth system comprises a housing around an epitaxial growth chamber. A substrate support is located within the growth chamber. A gallium source introduces gallium into the growth...
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5714008 |
Molecular beam epitaxy source cell
Apparati and methods for varying the flux of a molecular beam emanating from an effusion cell are disclosed. The apparatus includes a means for controllably adjusting the angular distribution of a...
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5711816 |
Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same
A process and apparatus for delivering an involatile reagent in gaseous form, wherein an involatile reagent source liquid is flash vaporized on a vaporization matrix structure at elevated...
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5711813 |
Epitaxial crystal growth apparatus
An epitaxial growth apparatus includes a substrate heating member, a growth chamber, a molecular beam source, a nozzle for ejecting a gaseous source material, an exhaust pipe, and a vacuum chamber....
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5711810 |
Apparatus for variable optical focusing for processing chambers
In a pulsed laser deposition system, the two optical actions of focusing rastering, and the optical chamber window are combined into a single optics system. The single optics system is mounted on...
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5709753 |
Parylene deposition apparatus including a heated and cooled dimer crucible
Chemical vapor deposition apparatus is provided for the quick and efficient deposition of Parylene AF4 onto silicon wafers in the production of semiconductor chips. The apparatus includes a heated...
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5707415 |
Method of vaporizing reactants in a packed-bed, column, film evaporator
A vaporizer (film evaporator) (13) for halide-free, silicon-containing liquid reactants used in producing preforms is provided. The vaporizer includes a plurality of packed-bed columns (22)...
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5702532 |
MOCVD reactor system for indium antimonide epitaxial material
Multiple solid precursor bubblers are used to alleviate channeling effects caused by high carrying gas flow rates to provide for deposition of indium-based epitaxial materials in high-capacity...
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5698037 |
Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the...
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5693146 |
Device for forming a compound oxide superconducting thin film
There is disclosed a device for forming a thin film on a substrate by irradiating a target of a compound oxide superconducting material with a laser beam and evaporating on the substrate a thin...
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5679166 |
Magnetic recording media, magnetic recording media fabrication method, and fabrication equipment
A magnetic recording medium fabrication device includes a cooling drum around which a substrate runs while being cooled thereby, an ion gun arranged upstream to a vapor deposition station for...
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5674574 |
Vapor delivery system for solid precursors and method regarding same
A vapor delivery system for vaporization and delivery of a solid precursor includes a housing having an inlet for receiving a carrier gas. A rotatable substrate surface is contained in the housing...
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5672211 |
Apparatus for depositing a thin layer on a substrate by laser pulse vapor deposition
A method for depositing a thin layer on a substrate by laser pulse vapor deposition provides a substantially cylindrical target having a cylinder axis and a curved target surface. A pulsed laser...
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5672210 |
Method and apparatus for manufacturing superconducting components via laser ablation followed by laser material processing
The method for manufacturing superconducting elements according to the present invention include the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is...
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5671322 |
Lateral flash evaporator
A resistant heated flash evaporator including a body of any desired geometry having two opposite open sides, a cavity which forms a continuous open area extending from each of the two opposite...
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5662742 |
Equipment for manufacturing a semiconductor device using a solid source
In an Si-MBE equipment, a vapor deposition equipment or the like, electrodes for measuring solid source resistance are disposed on both sides of the solid source, thereby being capable of...
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5656091 |
Electric arc vapor deposition apparatus and method
A present invention relates to improvements in electric arc vapor deposition chambers. A first improvement involves the utilization of a heat shield disposed between a source and a substrate to...
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5653813 |
Cyclone evaporator
A cyclone evaporator includes an evaporator body with an evaporation chamber therein. The evaporation chamber preferably includes a thermally conductive sidewall having a generally cylindrical...
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5645642 |
Method for in-situ liquid flow rate estimation and verification
The flow of a liquid reagent gas into a vapor deposition process chamber is adjusted in response to control information provided by a process controller. The controller executes a prescribed...
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5632797 |
Method of providing vaporized halide-free, silicon-containing compounds
A vaporizer for halide-free, silicon-containing liquid reactants used in producing preforms is provided. The vaporizer includes a heated, vertically-oriented expansion chamber (20) and a vertical...
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5630878 |
Liquid material-vaporizing and supplying apparatus
A liquid flow meter is connected in series with a vaporizer having a vaporizing function and a flow rate-adjusting function and vaporizing a liquid material supplied through said liquid flow meter...
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5622567 |
Thin film forming apparatus using laser
A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When...
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5622565 |
Reduction of contaminant buildup in semiconductor apparatus
The present invention provides an apparatus for semiconductor processing in which the reactor chamber and the vacuum conduit means connected to the chamber are coated with a film of halogenated...
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5622564 |
Metallizing apparatus
An apparatus and process for continuous metallizing of components includes a first vacuum chamber having two ends capped by valves and a pair of rails running the length thereof. A shuttle rides on...
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5621847 |
Dynamic vacuum evaporation system
An ultraclean evaporation system which includes a vessel formed of a fluoropolymer inert to hydrogen peroxide and having an impurity level less than the impurity level of samples to be analyzed...
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5620524 |
Apparatus for fluid delivery in chemical vapor deposition systems
Described herein is an apparatus and method for delivering fluid components for semiconductor processes such as chemical vapor deposition (CVD) and chemical etch processes. Any prescribed mixture...
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5596673 |
Evaporation crucible assembly
There is disclosed a crucible assembly comprising: (a) an electrically conductive tube having a first end portion and a second end portion and defining an opening in the surface of the tube,...
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5595603 |
Apparatus for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
An apparatus and method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor is disclosed. A liquid flow controller is closely coupled with a highly efficient liquid...
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5588999 |
Thin film forming device
A thin film forming device comprises a vacuum chamber which is vacuous inside, a substrate holder which is provided in the vacuum chamber for holding a substrate thereon and a molecular beam source...
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5584935 |
Process and apparatus for the deposition of thin electrochromic layers formed of materials with a stoichiometric composition
Thin layers forming an active coloring electrode in an electrochromic cell, in particular in electrochromic glass for use in buildings and vehicles, are produced by vacuum evaporation of metal...
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5582647 |
Material supplying apparatus
A material supplying apparatus includes a container for storing a solution; an inlet pipe for introducing a carrier gas and an outlet pipe; electrodes disposed in the container over the depth...
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