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6258170 |
Vaporization and deposition apparatus
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process...
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6258171 |
Direct liquid injection system with on-line cleaning
A direct liquid injection system and process which has on-line cleaning of the vaporizers without the need for shutting down the CVD process and thus eliminating down time is provided. The cleaning...
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6245150 |
Vapor coating apparatus
Vapor coating apparatus comprising a chamber having a liquid inlet, atomization means, and chilled substrate support. Carrier gas and coating liquid (e.g. monomer or polymer) are contacted under...
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6245151 |
Liquid delivery system comprising upstream pressure control means
A liquid delivery system (10) for vaporization of a liquid pecursor to form precursor vapor for transport to a deposition zone (36). The system includes a vaporization chamber (12), a porous...
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6237529 |
Source for thermal physical vapor deposition of organic electroluminescent layers
A thermal physical vapor deposition electroluminescent source includes a housing defining an enclosure having side walls and a bottom wall, the enclosure receiving solid organic electroluminescent...
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6235118 |
Method for forming a thin film of ultra-fine particles, and an apparatus for the same
An apparatus for forming a thin film of ultra-fine particles on a base body having a fine hole or a groove with a large aspect ratio (larger than one). The ultra-fine particles are smaller than 0.1...
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6235112 |
Apparatus and method for forming thin film
An apparatus for forming a thin film such as a silicon oxide film on a surface of a substrate such as a semiconductor substrate includes: a reaction chamber having an interior where the substrate...
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6228175 |
Apparatus for generating a wet oxygen stream for a semiconductor processing furnace
Apparatus for producing a wet oxygen stream for a semiconductor furnace to form oxide layers on silicon wafers. A quartz vessel with quartz chips is heated to 450° C. and a mixture of water and...
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6229956 |
Flash evaporator vessel
The resistant heated flash evaporator of the present invention is designed for flash evaporating a metal charge in a confined area and is substantially horse shoe in geometrical configuration...
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6228211 |
Apparatus for etching a glass substrate
An apparatus for etching a glass substrate is disclosed which comprises a container 1; a porous plate 4 being set in the container 1 and having a plurality of holes 30; and a bubbling plate 3 being...
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6220204 |
Film deposition method for forming copper film
A film deposition apparatus to which the present invention is applied comprises a vacuum chamber 11, a plasma beam generator 13, a main hearth 30 which is disposed within the vacuum chamber and...
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6217659 |
Dynamic blending gas delivery system and method
A dynamic blending gas delivery system and method are disclosed. A blended gaseous mixture produced in accordance with the method is used in chemical vapor deposition tools or similar process...
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6210485 |
Chemical vapor deposition vaporizer
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process...
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6202653 |
Processing solution supplying apparatus, processing apparatus and processing method
In this processing solution supplying apparatus, when restarting the hydrophobic process, the air in the supply pipe is exhausted outside before performing the hydrophobic process by using a...
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6189806 |
Metallizing device for vacuum metallizing
A metallizing device for vacuum metallizing arrangements is disclosed having a vaporizer (3) heated by an electrical heating rod (8). This vaporizer (3) is connected to a nozzle element (1) in the...
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6179923 |
Deposition apparatus for an organic thin-film light-emitting element
A deposition apparatus is used for depositing a layer of an organic thin-film light-emitting element on a substrate. The apparatus is formed of a vacuum chamber for depositing the layer for...
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6178925 |
Burst pulse cleaning method and apparatus for liquid delivery system
A liquid delivery apparatus for vaporizing a liquid to produce a vapor therefrom. The apparatus incorporates a vaporizer with a surface arranged to receive liquid thereon. A liquid feed assembly is...
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6176930 |
Apparatus and method for controlling a flow of process material to a deposition chamber
An apparatus and method for controlling a flow of process material to a deposition chamber. The apparatus comprises an injector valve, disposed between the process material source and the...
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6174371 |
Substrate treating method and apparatus
A substrate treating method and apparatus are disclosed which are capable of heating a substrate in a stable atmosphere including the vapor of a treating liquid, without permitting the vapor of the...
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6165275 |
Atmospheric gas generator for heat treatment
An atmospheric gas generator for heat treatment includes a heat treatment furnace for performing heat treatment of a metal material; an alcohol supply device for supplying alcohol to the heat...
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6162296 |
Method and apparatus for manufacturing chalcopyrite semiconductor thin films
The method and the apparatus of manufacturing the I-III-VI 2 type chalcopyrite semiconductor thin films of the present invention control the film composition easily and improve the reproducibility...
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6162300 |
Effusion cell
An effusion cell having a ceramic valve mechanism.
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6152074 |
Deposition of a thin film on a substrate using a multi-beam source
A multi-beam source for deposition of a material on to a substrate with enhanced deposition rate, uniformity and beam directionality. A plurality of orifices are provided in a head unit having a...
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6143077 |
Chemical vapor deposition apparatus
A source gas delivery system 4 which delivers the source gas to the surface of the heated substrate 20 is furnished with a gas delivery guide 44 of a shape such that the distance from the substrate...
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6139643 |
Effusion cell for Si and molecular beam epitaxy system
A crucible is formed of metal, that is, any one of Mo, Ta and W with a thickness of 3 mm or more, and the crucible is melted to produce melted Si liquid, thereby forming a molecular beam. An inner...
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6136095 |
Apparatus for filling apertures in a film layer on a semiconductor substrate
The present invention pertains to a carrier layer and a contact enabled by the carrier layer which enables the fabrication of aluminum (including aluminum alloys and other conductive materials...
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6132805 |
Shutter for thin-film processing equipment
A shutter assembly located substantially within a thin-film processing chamber includes a plurality of articulatable components that are movable between open and closed positions within the...
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6132515 |
Liquid precursor delivery system
A system for delivering a liquid phase precursor fluid into a process chamber as a vapor phase fluid at constant pressure, the system comprising: a vaporizer for vaporizing the liquid phase...
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6132518 |
Nickel carbonyl vapour deposition apparatus and method
A closed loop, carbon monoxide self-contained preferably continuous process and apparatus for the production of nickel or nickel coated objects by nickel vapor deposition (NVD), comprising placing...
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6129951 |
Apparatus and method for matrix coating fibres with metal vapour
A physical vapour deposition apparatus for pre-coating fibres of a reinforcement material with a predetermined thickness of matrix metal prior to consolidation to yield a metal matrix composite...
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6123776 |
Gas delivering apparatus for chemical vapor deposition
A gas delivering apparatus useful for improving the level of uniformity of thin film deposited over a silicon wafer in a chemical vapor deposition. By reshaping the injector from a conventional...
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6123765 |
Continuously fed single bubbler for epitaxial deposition of silicon
A delivery system and method for providing a gaseous chemical is provided. The system comprises a single bubbler 12 having a chamber 13 for containing a liquid chemical, at least one inlet tube 14...
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6112695 |
Apparatus for plasma deposition of a thin film onto the interior surface of a container
A gas inlet, which also serves as a counter electrode, is located inside of a vacuum chamber made of an electrically insulating material. A container is mounted on a mandrel mounted on the gas...
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6110290 |
Method for epitaxial growth and apparatus for epitaxial growth
This invention concerns a method for epitaxial growth by the use of a so-called heterogeneous reaction and includes disposing a source material in a first area of a horizontal chamber, disposing a...
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6110291 |
Thin film forming apparatus using laser
A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When...
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6099649 |
Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal
A hot trap converts unreacted organic metal-film precursor from the exhaust stream of a CVD process. The converted precursor forms a metal film on the surface of the hot trap, thereby protecting...
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6098964 |
Method and apparatus for monitoring the condition of a vaporizer for generating liquid chemical vapor
In a method and apparatus for producing a vapor which serves as a chemical processing material by delivering a carrier gas and a reactive liquid to a vaporizer in which the vapor is produced, the...
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6099653 |
Liquid reagent delivery system with constant thermal loading of vaporizer
A liquid reagent delivery and vaporization system, including a housing defining a flow passage for flow of a process fluid therethrough. A vaporizer element is positioned within the housing and...
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6096133 |
Chemical vapor deposition apparatus
An apparatus for depositing a thin film on a substrate by chemical vapor deposition (CVD) includes a material container for containing a liquid CVD source material; a material feeder for feeding...
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6090207 |
Translational target assembly for thin film deposition system
A film deposition system for coating large surfaces includes a target translated in parallel to the surface, and an energetic beam (laser beam) directed in parallel to the surface to be coated and...
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6086711 |
Vapor generation system and process
A vapor generation system includes a supply of liquid; an inert gas stream; an aspirator for aspirating the liquid into the gas stream; a heater for heating the gas stream upstream from the...
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6086679 |
Deposition systems and processes for transport polymerization and chemical vapor deposition
The described deposition systems are designed to accommodate new precursors and chemical processes used for transport polymerization and chemical vapor deposition. The systems consist primarily of...
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6082714 |
Vaporization apparatus and process
The invention relates to an apparatus and process for the vaporization of liquid precursors and deposition of a film on a suitable substrate. Particularly contemplated is an apparatus and process...
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6085025 |
Elliptical ceramic evaporators
An evaporator is provided for the evaporation of metal, which has a cross-sectional area in the region from which evaporation of the metal takes place which is greater than the corresponding...
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6077356 |
Reagent supply vessel for chemical vapor deposition
A liquid reagent dispensing assembly, comprising a gas-pressurizable vessel including a floor, and an interior volume bounded by interior wall and floor surfaces. A dip-tube liquid discharge...
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6074487 |
Unit for vaporizing liquid materials
The object of the invention is to provide a unit for vaporizing liquid materials which can adjust not only a mixing rate but also a concentration of the mixed liquid easily and accurately and which...
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6072939 |
Solid precursor injector apparatus
An apparatus and method are provided for effectively and controllably vaporizing solid material, in general, and specifically, solid precursor material for chemical phase deposition processes. The...
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6063201 |
Effusion cell assembly for epitaxial apparatus
An effusion cell assembly for epitaxial apparatus is disclosed. The assembly includes an effusion cell incluing a growing material, a heater for supplying heats with the effusion cell to effuse the...
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6063455 |
Apparatus for manufacturing diamond film having a large area and method thereof
The present invention relates to an apparatus for manufacturing a diamond film having a large area which is used for a field emission display (FED) and a manufacturing method thereof. The apparatus...
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6053981 |
Effusion cell and method of use in molecular beam epitaxy
An effusion cell (22) including a crucible (28) is configured such that when attached to the MBE apparatus at a predetermined distance from a rotatable substrate holder (24), a longitudinal axis...
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