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4546725 |
Apparatus for manufacturing magnetic recording media
A magnetic recording medium manufacturing apparatus is comprised of a cooling rotary cylinder can and a small roller, arranged adjacent to each other. A flexible endless belt is laid over the can...
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4545801 |
Raw material supply device
A device is disclosed for supplying a glass raw material gas in the form of the mixed gas consisting of the glass raw material gas and the carrier gas to a vapor deposition device for producing a...
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4543467 |
Effusion type evaporator cell for vacuum evaporators
Vapor sources for vacuum evaporators in which the evaporation rate has hitherto been adjusted by varying the temperature of the vessel containing the evaporative substances, have a very large time...
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4542712 |
Apparatus for molecular beam epitaxy
An apparatus for molecular beam epitaxy according to the present invention is so constructed that a substrate is introduced into a vacuum vessel with a substrate surface for epitaxial growth facing...
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4537794 |
Method of coating ceramics
The adhesion of conductive layers to ceramic substrates in the application of such layers by low-energy techniques is improved by interposing between the high-conductivity metal layer and the...
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4532888 |
Electron-beam coating of very broad strips
Electron-beam (EB) coating of broad strips with improved film quality, and without undue scattering and deflection of the electron beam at long beam paths is accomplished with a shielding mantle,...
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4528939 |
Electrically conductive containment vessel for molten aluminum
The present invention is directed to a containment vessel which is particularly useful in melting aluminum. The vessel of the present invention is a multilayered vessel characterized by being...
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4526132 |
Evaporator
An apparatus for performing deposition on a substrate wherein the discharger is disposed in an outwardly protruding portion of the vacuum chamber. The discharger is positioned in this outwardly...
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4526840 |
Bar evaporation source having improved wettability
As intermetallic composite, bar evaporation source constructed from a mixture of borides and nitrides for use in the evaporation of metals, e.g., aluminum, is arc sprayed with a layer of the metal...
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4526131 |
Magnetic recording medium manufacturing apparatus
A magnetic recording medium manufacturing apparatus is comprised of a cooling rotary cylinder can and a small roller, arranged adjacent to each other, and with the small roller being swingable...
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4526802 |
Film deposition equipment
This film deposition equipment is arranged so that metal is evaporated in atmosphere including reactive gas introduced in a vacuum, and pressure variation of the reactive gas caused by the metal...
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4524717 |
Electron beam strip-coating apparatus
The present invention is a coating apparatus for temperature-sensitive broad strips or similar substrates. To obtain a high quality of coating, it is necessary to minimize the path of the electron...
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4517918 |
Crystal plating chamber apparatus
An improved crystal plating device having a base containing a power circuit and an oscillating circuit. The base is provided with a chamber and has a sealed top enclosing the chamber. At least one...
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4518846 |
Heater assembly for molecular beam epitaxy furnace
In a molecular beam epitaxy furnace, a heater is described for heating the interior of an effusion cell. The heater includes an outer cylindrical sleeve having one end connected to receive a...
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4516525 |
Electron gun equipment for vacuum deposition
This invention relates more particularly to an electron-gun metal evaporation system for solder (lead/tin, lead/indium) deposition upon integrated circuit chips. This system utilizes a crucible...
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4514275 |
Apparatus for physical vapor deposition
An apparatus for physical vapor deposition comprising a vacuum casing one end of which is open; a sealing member provided at the opening of the casing; an electrode for physical vapor deposition,...
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4511594 |
System of manufacturing magnetic recording media
A system of manufacturing a magnetic recording medium in which a magnetic metal or alloy is heated and evaporated by an electron beam gun so that vacuum-evaporated magnetic film is formed on a...
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4505948 |
Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase
Quartz crucibles for the melting of silicon and ceramic substrates are coated with protective materials or metals at least in part evaporated from an electrode with which an arc is struck at low...
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4493287 |
Diffusion equipment
To secure accurate control over rapid diffusion such as the diffusion of zinc into gallium arsenide, the source and slices to be processed are isolated from one another during an initial warm-up...
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4492180 |
Apparatus for indexing and registering a selected deposition mask to a substrate and method therefor
Apparatus for indexing and accurately registering a selected one of a plurality of deposition masks in operative relationship to a substrate comprising carriage means for supporting a plurality of...
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4488506 |
Metallization plant
An apparatus for depositing metal or alloy films by a thermal decomposition process on a substrate includes a furnace having a number of selectively heated zones. The temperature of each zone is...
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4488507 |
Susceptors for organometallic vapor-phase epitaxial (OMVPE) method
Susceptor formed with a base and with a pedestal made of materials respectively having low and high radio-frequency (r-f) absorptivities. Mercury is carried in a cavity in the base and a...
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4484943 |
Method and apparatus for making a fine powder compound of a metal and another element
A method of making a fine powder of a metal and another element in an intimate mutual relation such as an alloy or a chemical compound of a metal and a non metallic element, wherein a gaseous...
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4482799 |
Evaporation heater
An evaporation heater having a wire wound into a coil and a support wire which extends from one arm of the wire outside of the coil, in spaced proximity therewith, to a central position within the...
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4481232 |
Method and apparatus for producing high purity silicon
A method for producing high purity silicon includes forming a copper silie alloy and positioning the alloy within an enclosure. A filament member is also placed within the enclosure opposite the...
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4478174 |
Vacuum coating vessel with movable shutter plate
A vacuum coating vessel is provided comprising a casing having a vacuum coating compartment separated from a vapor source compartment by a partition having vapor ports. A slidable shutter plate is...
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4470370 |
Means for loading vapor coating materials into an evaporator
For the loading of evaporators in vapor coating plants with shaped pieces made of vapor coating materials there is used an apparatus which is characterized by rolls having indentations for...
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4454836 |
Vacuum evaporating apparatus utilizing multiple rotatable cans
An apparatus for vacuum evaporating magnetic material onto a base. Cylindrical cans are disposed parallel to one another and rotated either in the same or opposite directions. A tape-shaped base is...
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4451241 |
Method of manufacturing a TV camera tube
A method of manufacturing a camera tube having structure suitable for the HN system comprising a glass faceplate covered by an n-type transparent electrode layer consisting of, for instance, Nesa...
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4449478 |
Arrangement for coating substrates by vacuum deposition
An arrangement for coating substrates in an apparatus for vacuum deposition comprises a rotatable substrate holding structure in the form of a circular plate provided with holders for the...
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4448802 |
Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam
A method of evaporating an evaporative substance under vacuum comprises bombarding the evaporative substance with electrons from a low voltage arc discharge established between a cathode and an...
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4446357 |
Resistance-heated boat for metal vaporization
The resistance-heated boat of the present invention is comprised of a heating portion and a crucible portion separated by a heat conducting, substantially non-electrical conducting portion. The...
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4438153 |
Method of and apparatus for the vapor deposition of material upon a substrate
A method of and apparatus for depositing material upon a surface, e.g. to coat the surface or to form compounds containing this material by bonding with the substrate material of the surface, in...
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4426237 |
Volatile metal oxide suppression in molecular beam epitaxy systems
When growing GaAs by molecular beam epitaxy (MBE), a typical related reaction acts to affix Ga 2 O 3 to the growth surface and hence incorporates such oxide contaminants in the epitaxial layer as...
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4426569 |
Temperature sensor assembly
An effusion cell assembly is disclosed and includes a temperature sensor designed to balance sensor temperature and cell crucible temperature by an increased heat radiation collection.
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4412508 |
Nozzle beam source for vapor deposition
A nozzle beam source for use in the vapor deposition of electrode materials such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The nozzle beam source includes...
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4408563 |
Apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
An apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein...
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4407712 |
Hollow cathode discharge source of metal vapor
A hollow cathode discharge device is disclosed for ion plating a substrate with high temperature metal vapor. A hollow cathode tube is adapted to receive pellets of the high temperature metal at a...
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4406252 |
Inductive heating arrangement for evaporating thin film alloy onto a substrate
The invention is a thin film alloy source utilizing a supply of alloy wire selected for deposition onto a substrate. The wire is advanced through an induction heating means at a controlled rate for...
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4403002 |
Vacuum evaporating apparatus
A method and apparatus for vacuum evaporating magnetic material onto a base. Cylindrical cans are disposed parallel to one another and rotated either in the same or opposite directions. A...
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4401052 |
Apparatus for continuous deposition by vacuum evaporation
An apparatus to deposit material on a substrate, such as in the making of thin solar cells, consists of two chambers. A manifold chamber having a plurality of spaces nozzles assures efficient and...
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4395440 |
Method of and apparatus for manufacturing ultrafine particle film
A method and apparatus for manufacturing an ultrafine particle film which has great practical utility when deposited on an appropriate substrate. The particle film is produced from various...
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4393013 |
Vapor mass flow control system
A system for precisely controlling the mass flow rate of vapor from a bubbler by a carrier gas stream.
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4392453 |
Molecular beam converters for vacuum coating systems
This invention relates to coating of substrates in a vacuum system. A beam of molecules incident upon a molecular beam converter is transformed into a molecular beam flowing from the converter...
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4392452 |
Evaporation device
In a vacuum container an active (or atomic state) gas consisting of either one of active hydrogen, active oxygen and active nitrogen with a partial pressure of 1×10 -3 Torr or less is produced....
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4389973 |
Apparatus for performing growth of compound thin films
A method and an apparatus are provided for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound. A carrier gas...
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4386578 |
High velocity metallic mass increment vacuum deposit gun
A vacuum deposit device for use in producing thin film depositions. A metallic mass is accelerated along a pair of rail-type electrodes. The discharge current passing through the mass during...
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4386113 |
Method of making a magnetic recording medium
A method of making a magnetic recording medium including a step of continuously depositing a ferromagnetic layer with the use of electron beam for heating an evaporation source material. A...
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4380212 |
Arrangement for uniformly coating surfaces of revolution by vapor deposition in a high vacuum
Surfaces of revolution to be coated by vapor deposition are placed in centering holes of a rotary dome which is centrally seated on a rotary ring. The rotary ring centered by means of fixedly...
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4362767 |
Magnetic thin film and method of making it
A magnetic thin film is composed of an oxide of Fe x Co y Cu z having spinel structure wherein x, y and z represent respective atomic ratios, x+y+z=1, 0.50≤x<0.95, 0.05<y≤0.30 and...
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