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4787333 |
Metal vapor generator
A metal vapor generator of the present invention is constituted to locate an airtight joint between a body with an opening around its top and a bottom plate, in the vicinity of the lower portion of...
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4783343 |
Method for supplying metal organic gas and an apparatus for realizing same
In a reduced pressure gaseous phase thin film growth device, in which the pressure within a bubbler is detected during bubbling of an organo-metallic compound and depending on the pressure thus...
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4777022 |
Epitaxial heater apparatus and process
Chemical vapor deposition apparatus has a quartz envelope supporting a resistance heater. A boron nitride pill box configured core supports resistance heater windings. The core has a base having a...
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4776299 |
Source replenishment device for vacuum deposition
A material source replenishment device for use with a vacuum deposition apparatus. The source replenishment device comprises an intermittent motion producing gear arrangement disposed within the...
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4769528 |
Apparatus for the evaporation of active ingredients such as, for example, pyrethrum, incorporated in cellulose or other carrier materials
An apparatus for the evaporation of active ingredients incorporated in cellulose or some other, at least approximately dimensionally stable carrier material has heating means arranged in a housing...
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4759719 |
Teaching device for the demonstration of scientific principles
Demonstration apparatus for showing the process of vapor phase deposition and extractive metallurgy is disclosed wherein a vacuum vessel is provided with an inner vessel containing a resistive...
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4748313 |
Apparatus by the continuous vaporization of inorganic compositions by means of a photon-generating thermal source of radiation heat
An apparatus for the vaporization of inorganic compositions uses a photon-generating thermal source of radiation heat in a continuously operated vacuum vaporization processes. The apparatus...
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4748315 |
Molecular beam source
A molecular beam source suppresses a temperature fall at the opening of a crucible, to make a temperature distribution within the crucible uniform and to prevent the phenomenon of bumping of a...
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4726319 |
Apparatus and method for coating optical fibers
Apparatus for coating an optical fiber with a metal oxide coating material in vapor form, includes a coating chamber through which the fiber moves, the coating chamber including an inlet supplied...
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4724796 |
Vaporization arrangement with a rectangular vaporization crucible and several electron guns
A vaporization arrangement for coating substrates disposed in an areal region, or past through an areal region, comprises a rectangular vaporization crucible with a crucible rim, as well as...
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4714047 |
Method and device for forming ultrafine particle film of compound
A method for forming an ultrafine particle film of compound includes the steps of evacuating a vessel provided with an evaporation source in its bottom portion, by which a material to be evaporated...
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4704988 |
Process and apparatus for obtaining a gaseous stream containing a compound in the vapor state, more particularly usable for introducing this compound into an epitaxy reactor
The invention relates to a process and an apparatus for obtaining a gaseous stream containing a compound in the vapor state, more particularly usable for introducing said compound into a vapor...
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4700660 |
Evaporator for depositing films in a vacuum
An evaporator for depositing films in a vacuum consisting of a crucible for containing an evaporant and adapted to be heated by a heater. A tube is provided for forming a directional flow of...
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4699082 |
Apparatus for chemical vapor deposition
An apparatus for the chemical vapor deposition on substrates of coatings comprising compounds of a titanium sub-group of metals, the vanadium sub-group of metals and the chromium sub-group of...
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4683838 |
Plasma treatment system
An insulator film can be formed at a low temperature without any damage to a substrate to be treated by a plasma in a plasma treatment system which comprises a magnetron for generating a microwave,...
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4682565 |
Vapor nozzle with gas barrier bars
A vacuum vapor depositing system in which a plurality of vapor delivering nozzles fit between, and are guided by, bars supplying inert gas as barrier regions controlling the lateral spread of the...
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4681773 |
Apparatus for simultaneous molecular beam deposition on a plurality of substrates
Apparatus is described which is especially well suited for simultaneous molecular beam epitaxy of materials, such as silicon, on a plurality of substrates.
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4676194 |
Apparatus for thin film formation
A method for forming a thin film on a substrate, which comprises aligning an evaporation means for an evaporating material to be deposited on the substrate, a plasma generating zone for...
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4668480 |
7C apparatus for forming crystalline films of compounds
Two or more crucibles containing different source materials to be vaporized are arranged concentrically, with their mouths open to a vapor chamber defined by an open top envelope within a vacuum...
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4648347 |
Vacuum depositing apparatus
In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a...
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4646680 |
Crucible for use in molecular beam epitaxial processing
A crucible is disclosed for use in molecular beam epitaxial processing exhibiting low flux transient behavior as shutters of individual furnaces are opened to initiate the process and with...
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4640720 |
Method of manufacturing a semiconductor device
A method of manufacturing a semiconductor device, in which method a plurality of epitaxial layers are deposited by molecular beam epitaxy. A significant problem in such a method is the variation in...
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4639377 |
Thin film formation technique and equipment
A thin film formation technique and apparatus therefor which comprises converting a molecular beam effusing from a molecular beam source equipment to a pulsed molecular beam; introducing the pulsed...
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4635586 |
Setup for producing metallic coatings
A process and apparatus for depositing a high-quality metallic coating on a steel strip. In this process, one or several metals or metal alloys are continuously evaporated in a thermal plasma from...
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4627989 |
Method and system for a vacuum evaporative deposition process
A method and system for a vacuum-evaporative film-deposition process displays bar charts of the local evaporation power of each vapor source in the process and the film thickness deposited thereby...
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4620963 |
Vapor transport reactor with composite metal-glass tube
A reactor for use in chemical or physical vapor transport film or crystal growth experiments includes a composite reaction tube which is comprised of an open stainless steel tube which is fused to...
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4620081 |
Self-contained hot-hollow cathode gun source assembly
A self-contained hot-hollow cathode gun source assembly for use in a vacuum chamber includes a crucible block having a hot-hollow cathode gun mounted underneath and providing a hole for the...
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4619844 |
Method and apparatus for low pressure chemical vapor deposition
A method of introducing a controlled flow of vapor from a high pressure sublimation chamber into a low pressure vapor deposition reactor, said vapor being derived from solid source material...
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4613306 |
Evaporator crucible for vacuum depositing systems
Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the...
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4612206 |
Method of controlling deposition amount distribution in a vacuum deposition plating
In a continuous vacuum deposition plating of a metal strip, thinner coating at the edges can be prevented by maintaining the pressure of the deposition chamber in which an evaporation chamber is...
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4609564 |
Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
Complex shapes are coated with material at least in part evaporated from an elongated electrode shaped to conform to the substrate and juxtaposed therewith over the length of the electrode. An arc...
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4606296 |
Evaporation cell for a liquid compound suitable for epitaxy by molecular jets
Evaporation cell for a liquid compound suitable for molecular jet epitaxy on a substrate from a compound which is liquid at ambient temperature and which comprises in per se known manner a cell...
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4596719 |
Multilayer coating method and apparatus
The adhesion of conductive layers to ceramic substrates in the application of such layers by low-energy techniques is improved by interposing between the high-conductivity metal layer and the...
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4592308 |
Solderless MBE system
A molecular beam epitaxy system wherein the wafer on which epitaxial deposition is to occur is not soldered to a substrate holder. Instead, a substrate holder with a lip approximately as high as...
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4592306 |
Apparatus for the deposition of multi-layer coatings
Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for...
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4587134 |
Method of rapidly changing deposition amount in a continuous vacuum deposition process
In the continuous vapor deposition coating of a metal strip, the coating amount can be rapidly changed by keeping the vapor flow at acoustic velocity and changing the cross-sectional area of the...
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4579083 |
Automatic variable rate evaporation source for thin film deposition
An apparatus for automatically controlling the rate of vacuum deposition of thin films on a substrate, consisting of an optical diaphragm or shutter in the form of two overlapping plates which...
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4572842 |
Method and apparatus for reactive vapor deposition of compounds of metal and semi-conductors
Method for reactive vapor deposition of compounds of metals and semi-conductors on at least one substrate by glow discharge. Into a space between a magnetron cathode (1) with a target (5) and the...
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4569829 |
MBE Source bakeout system
A molecular beam epitaxy system including a growth chamber and an analysis chamber, both connected to ultrahigh vacuum pump systems. The analysis chamber includes a source outgassing mount, so...
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4569307 |
Silicon melting and evaporation apparatus for high purity applications
An apparatus for producing high purity silicon melts utilizes a solid silicon body which is drilled to provide bores into which electrodes are inserted. The electrodes preferably are also of...
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4565158 |
Evaporator cell for vacuum deposition on substrates
An evaporator cell for vacuum deposition on substrates comprises a cell housing which has one end with a vapor escape opening and an opposite end into which is positionable a plug member which is...
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4565711 |
Method of and apparatus for the coating of quartz crucibles with protective layers
A silicon crucible for use in holding a silicon melt in the drawing of silicon bars for the production of silicon wafers in the semiconductor industry is provided with a protective coating, e.g. of...
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4561382 |
Vacuum vapor deposition gun assembly
A vapor deposition gun assembly includes a hollow body having a cylindrical outer surface and an end plate for holding an adjustable heat sink, a hot hollow cathode gun, two magnets for steering...
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4556471 |
Physical vapor deposition apparatus
An improved electric arc vapor deposition source plate mounting assembly (8) is disclosed. The source plate assembly is formed of a plurality of cooperatively mating sections (12, 22 and 24) that...
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4552092 |
Vacuum vapor deposition system
A vacuum vapor deposition system including a high-vacuum vapor deposition chamber provided with a rotary cell around which band steel is wound as it is passed through the chamber. A crucible for...
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4553022 |
Effusion cell assembly
An effusion cell assembly includes a self-supporting element disposed within a housing member. The self-supporting element provides efficient heat transfer to a crucible positioned therein and...
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4551221 |
Vacuum-arc plasma apparatus
The apparatus comprises a consumable cathode (1) having a working end face (3), a solenoid (4) coaxially disposed relative to the consumable cathode (1) and having a tubular anode (5) received...
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4550047 |
Silicon source component for use in molecular beam epitaxial growth apparatus
A quantity of silicon serving as a source of the element silicon for use in a molecular beam epitaxial growth apparatus where the silicon is in the form of a monocrystalline wafer with a plurality...
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4546726 |
Apparatus for reacting a semiconductor wafer with steam
An apparatus for reacting a semiconductor wafer with steam includes a reaction tube and a heater for heating the reaction tube. The reaction tube is divided into three chambers by partition plates...
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4546725 |
Apparatus for manufacturing magnetic recording media
A magnetic recording medium manufacturing apparatus is comprised of a cooling rotary cylinder can and a small roller, arranged adjacent to each other. A flexible endless belt is laid over the can...
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