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Document Title |
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7608798 |
Plasma catalyst
Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. In one embodiment, a plasma is ignited by subjecting a gas in a...
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7603963 |
Controlled zone microwave plasma system
An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive...
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7601619 |
Method and apparatus for plasma processing
A method and an apparatus for plasma processing which can accurately monitor an ion current applied to the surface of a sample. Predetermined gas is exhausted via an exhaust port by a...
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7592564 |
Plasma generation and processing with multiple radiation sources
Plasma-assisted methods and apparatus that use multiple radiation sources are provided. In one embodiment, a plasma is ignited by subjecting a gas in a radiation cavity to electromagnetic radiation...
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7584714 |
Method and system for improving coupling between a surface wave plasma source and a plasma space
A surface wave plasma (SWP) source having an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface...
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7582845 |
Microwave plasma processing device and plasma processing gas supply member
A microwave plasma processing device can form a uniform thin film on a substrate to be processed. The microwave plasma processing device includes a fixing device for fixing a substrate to be...
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7581511 |
Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
A reactor comprising an energy source, a plasma unit positioned relative to the energy source, and a processing vessel connected to the plasma unit. The energy source has a generator that produces...
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7574974 |
Device for production of a plasma sheet
The invention relates to a device for the production of a plasma ( 16 ) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma,...
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7565879 |
Plasma processing apparatus
A plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material...
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7562638 |
Methods and arrangement for implementing highly efficient plasma traps
An arrangement configured to contain plasma within plasma tube assembly of downstream microwave plasma system. Downstream microwave plasma system is configured to generate plasma within...
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7554053 |
Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system
A plasma system is disclosed. The plasma system includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The plasma system also includes a plasma tube assembly...
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7547860 |
Microwave plasma processing apparatus for semiconductor element production
A plasma processing apparatus 100 used to execute a specific type of processing such as plasma processing on a workpiece by supplying a processing gas into a chamber 110 while applying...
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7544269 |
Method and apparatus for electron density measurement
A plasma processing system including a plasma chamber ( 120 ) having a substrate holder ( 128 ) and a monitoring system ( 130 ). The monitoring system ( 130 ) includes a microwave mirror ( 140 )...
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7533628 |
Volume-optimized reactor for simultaneously coating eyeglasses on both sides
A reactor for simultaneous coating of eyeglasses on both sides thereof. Two partial devices are provided, each with a microwave energy waveguide, a gas supply and an apparatus for evacuating the...
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7531816 |
Vacuum conveying apparatus and charged particle beam equipment with the same
A charged particle beam examination equipment for examining and measuring a semiconductor wafer, comprising a wafer exchange portion for exchanging an unexamined wafer and an examiner wafer with...
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7527706 |
Plasma processing apparatus, process vessel for plasma processing apparatus and dielectric plate for plasma processing apparatus
According to the present invention, with an object of minimizing damage to a dielectric plate and a metal vessel and improving efficiency of plasma processing, a resin layer is disposed in an area...
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7520245 |
Plasma processing apparatus
In a microwave plasma processing apparatus, a metal made lattice-like shower plate 111 is provided between a dielectric material shower plate 103 , and a plasma excitation gas mainly an inert...
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7506609 |
System for generating a local electron-cyclotron microwave low-pressure plasma at a predetermined location within a processing chamber
In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave...
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7501600 |
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a...
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7491908 |
Plasma processing device and ashing method
A plasma processing device comprises a chamber capable of maintaining an atmosphere depressurized less than atmospheric pressure, a transfer pipe connected to the chamber, a gas introduction...
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7485827 |
Plasma generator
A plasma generator comprising a propagation chamber propagating an electromagnetic radiation, and a plasma-generating chamber associated with the propagation chamber; said propagation chamber has a...
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7485204 |
ECR plasma source and ECR plasma device
An ECR plasma source of the invention is constructed of: a plasma generating chamber ( 10 ) having a generally rectangular section in a plane normal to a plasma flow; magnetic coils ( 20, 21 )...
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7478609 |
Plasma process apparatus and its processor
A plasma processing apparatus and a processing apparatus having a widened process condition range allowing plasma generation are obtained by increasing microwave propagation efficiency. The plasma...
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7469654 |
Plasma processing device
A plasma processing apparatus includes a chamber for carrying out plasma processing inside, a top plate made of a dielectric material for sealing the upper side of this chamber, and an antenna...
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7445690 |
Plasma processing apparatus
A plasma processing apparatus includes a chamber for containing a substrate to be processed, a gas supply unit for supplying a processing gas into the chamber, and a microwave introducing unit for...
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7444955 |
Apparatus for directing plasma flow to coat internal passageways
An apparatus for coating surfaces of a workpiece is configured to establish a pressure gradient within internal passageways through the workpiece, so that the coating within the internal...
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7442271 |
Miniature microwave plasma torch application and method of use thereof
A miniature microwave plasma torch apparatus ( 10 ) is described. The microwave plasma torch apparatus ( 10 ) is used for a variety of applications where rapid heating of a small amount of material...
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7434537 |
Device for the coating of objects
An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the...
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7430985 |
Plasma processing equipment
Plasma processing equipment capable of increasing the heat resistance of a wave guide by using a high dielectric material, comprising a processing container 44 formed to allow vacuuming, a...
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7418921 |
Plasma CVD apparatus for forming uniform film
A plasma CVD film formation apparatus includes: a reaction chamber; a shower plate installed inside the reaction chamber; and a susceptor for placing a wafer thereon installed substantially...
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7411352 |
Dual plasma beam sources and method
A pair of plasma beam sources are connected across an AC power supply to alternatively produce an ion beam for depositing material on a substrate transported past the ion beams. Each plasma beam...
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7410552 |
Electron cyclotron resonance equipment with variable flare angle of horn antenna
An electron cyclotron resonance equipment generates plasma by application of a processing gas and microwave energy into a vacuum chamber having a wafer therein in an environment of reduced...
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7404991 |
Device and control method for micro wave plasma processing
A microwave is introduced into a process chamber through a waveguide ( 26 ) of the plasma process apparatus, thereby generating plasma. A reflection monitor ( 40 ) and an electric power monitor (...
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7402526 |
Plasma processing, deposition, and ALD methods
A plasma processing method includes providing a substrate in a processing chamber, the substrate having a surface, and generating a plasma in the processing chamber. The plasma provides at least...
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7396431 |
Plasma processing system for treating a substrate
A plasma processing system for treating a substrate includes a processing chamber including a first chamber portion configured to receive a first gas for providing a plasma space, and a second...
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7395779 |
Plasma processing apparatus
A first conductive plate ( 31 A) constituting the radiation surface of a slot antenna ( 30 A) inclines with respect to a first dielectric member ( 13 ) opposed to the radiation surface of the slot...
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7392760 |
Microwave-excited plasma processing apparatus
A microwave-excited plasma processing apparatus shows a wide pressure range and a wide applicable electric power range for normal electric discharges as a result of using slits cut through a...
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7381290 |
Microwave plasma generator
A microwave plasma generator including field-enhancing electrodes consisting of opposed laminae ( 108,109 ) with a gap ( 110 ) between them orthogonal to the direction of propagation through the...
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7354504 |
Dielectric profile controlled microwave sterilization system
A dielectric profiler establishes a dielectric profile of microwave characteristics for identifying, sterilizing or inactivating a target material prior to performing a microwave irradiation event...
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7338575 |
Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding...
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7325511 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus
A microwave plasma processing apparatus includes a processing vessel, a microwave generator, a waveguide guiding a microwave formed by the microwave generator, and a microwave emitting member...
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7323231 |
Apparatus and methods for plasma vapor deposition processes
One aspect of the invention is directed toward a method of forming a conductive layer on a microfeature workpiece. In one embodiment, the method comprises placing a microfeature workpiece in a...
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7312415 |
Plasma method with high input power
A plasma device which is provided with a container, a gas supply system, and an exhaust system. The container is composed of a first dielectric plate made of a material capable of transmitting...
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7311796 |
Plasma processing apparatus
A plasma processing apparatus comprises: a chamber 12 having at least one opening and for generating plasma; a dielectric member 14 provided to cover the opening air-tightly; at least one wave...
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7305935 |
Slotted antenna waveguide plasma source
A high density plasma generated by microwave injection using a windowless electrodeless rectangular slotted antenna waveguide plasma source has been demonstrated. Plasma probe measurements indicate...
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7305934 |
Plasma treatment apparatus and plasma generation method
A plasma processing apparatus includes a table ( 22 ) on which a processing target (W) is to be placed, a processing vessel ( 11 ) where the table is to be accommodated, and a power feed unit ( 40...
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7302910 |
Plasma apparatus and production method thereof
A plasma apparatus includes a container ( 11 ) having an opening, a dielectric member ( 13 ) supported by an end surface of an outer periphery of the opening of the container ( 11 ), an...
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7296533 |
Radial antenna and plasma device using it
A plasma device includes a first conductive plate ( 31 ) in which a plurality of slots ( 36 ) are formed, a second conductive plate ( 32 ) having a microwave inlet ( 35 ) and disposed opposite to...
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7279066 |
Apparatus for forming silicon oxide film
A silicon oxide film ( 1701 ) serving as a gate insulating film of a semiconductor device contains Kr. Therefore, the stress in the silicon oxide film ( 1701 ) and the stress at the interface...
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7255062 |
Pseudo surface microwave produced plasma shielding system
A pseudo surface microwave produced plasma shielding system is a simple device that creates a prescribed plasma environment with a prescribed plasma density gradient, and protects an object...
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