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7635418 |
Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate
Apparatus and methods for shielding a feature projecting from a first area on a substrate to a plasma while simultaneously removing extraneous material from a different area on the substrate with...
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7618674 |
Deposition mask and method for manufacturing organic light emitting display using the same
A deposition mask and a method for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being...
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7595091 |
Method of forming multi-domain alignment layer
A method of forming an alignment layer with a multi-domain is provided. The alignment layer is formed on a substrate. A mask having a transmission part and a shielding part is aligned over the...
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7537798 |
Deposition mask frame assembly, method of fabricating the same, and method of fabricating organic electroluminescent device using the deposition mask frame assembly
A deposition mask frame assembly, a method of manufacturing the same, and a method of manufacturing an organic electroluminescent (EL) device using the deposition mask frame assembly are provided....
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7517430 |
Method and apparatus for the controlled formation of cavitation bubbles
The present invention discloses a method and apparatus for the directed formation of a re-entrant micro-jet formed upon the collapse of a cavitation bubble formed proximate to a work surface placed...
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7435300 |
Dynamic film thickness control system/method and its utilization
A dynamic film thickness control system/method and its utilization consisting of a minimum of one mask plate arranged between a substrate and a vapor source. A film thickness control device is...
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7413610 |
Method and apparatus for coating or heat treatment of blisks for aircraft gas turbines
A method for hard-material coating or heat treatment of the blade airfoils of blisks for gas turbines provides for partial heat-insulation and cooling of the other blisk parts during the respective...
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7396558 |
Integrated mask and method and apparatus for manufacturing organic EL device using the same
An integrated mask including a plurality of deposition masks, each deposition mask having an array of deposition apertures formed in accordance with a deposition pattern; and a base plate having a...
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7354500 |
Mask and apparatus using it to prepare sample by ion milling
A mask for use with a sample preparation apparatus that prepares an ion-milled sample adapted to be observed by an electron microscope is offered. It is possible to prepare the sample having a...
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7338699 |
Island projection-modified part, method for producing the same, and apparatus comprising the same
In film-forming devices and plasma-processing devices, filmy matter adheres to the surfaces of the inner parts and it peels to cause dust and particles in the devices. In the devices, the dust and...
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7303635 |
Deposition mask, method for manufacturing display unit using it, and display unit
A deposition mask and a display unit and method of manufacturing same are provided. A red continuous organic layer, a green continuous organic layer, and a blue continuous organic layer are...
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7294245 |
Cover ring and shield supporting a wafer ring in a plasma reactor
A magnetic dipole ring assembly positioned inside a vacuum chamber and around a wafer being sputter deposited with a ferromagnetic material such as NiFe or other magnetic materials so that the...
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7271111 |
Shadow mask deposition of materials using reconfigurable shadow masks
A shadow mask deposition system includes a plurality of identical shadow masks arranged in a number of stacks to form a like number of compound shadow masks, each of which is disposed in a...
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7205033 |
Method for forming polycrystalline silicon film of polycrystalline silicon TFT
Disclosed is a method for forming a polycrystalline silicon film of a polycrystalline silicon thin film transistor. The method includes a step of crystallizing an amorphous silicon film deposited...
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7185419 |
Method of manufacturing a mask for evaporation
A mask frame assembly for evaporation includes a mask and a frame which supports the mask. The mask includes a metal layer having a predetermined pattern, and a coating layer which is formed on a...
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7179335 |
In situ adaptive masks
A variable adaptive mask is provided that can be dynamically modified in situ in a physical vapor deposition process. The mask comprises a fixed mask portion, a plurality of channels extending...
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7163607 |
Process kit for improved power coupling through a workpiece in a semiconductor wafer processing system
Apparatus for supporting a substrate such as a semiconductor wafer in a process chamber to improve power coupling through the substrate. The apparatus contains a pedestal assembly and a pedestal...
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7128806 |
Mask etch processing apparatus
Method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system are provided. In one aspect, an apparatus is provided for supporting a substrate...
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7115169 |
Replaceable shielding apparatus
A replaceable shielding apparatus provides a cost effective way of shielding a portion of a workpiece during processing. The apparatus includes a replaceable shield, made of comparable weight as...
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7097750 |
Device for fixing substrate for thin film sputter and method of fixing substrate using the same
A device to fix a substrate for a thin film sputter, includes a mask, a mask pressing plate, a magnetic body, and a driving unit. The mask having patterns is positioned under the substrate so as to...
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7049549 |
Multi-thermal zone shielding apparatus
A deposition shield partially covering a substrate and having two zones of different thermal properties can provide minimal deposition on the shield together with minimal heat loss due to substrate...
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6988652 |
Solder printing using a stencil having a reverse-tapered aperture
A stencil used for printing solder paste on a contact pad of a printed wiring board has one or more reverse-tapered apertures passing there through, wherein the apertures have a variable...
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6960263 |
Shadow frame with cross beam for semiconductor equipment
A shadow frame and framing system for semiconductor fabrication equipment comprising a rectangular frame having four edges, the edges forming an interior lip with a top surface and an bottom...
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6955726 |
Mask and mask frame assembly for evaporation
A mask frame assembly includes a frame having an opening and a mask having at least two unit mask elements. Both ends of each unit mask element are fixed to the frame in a state of tension. The...
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6913442 |
Apparatus for retaining an internal coating during article repair
An internal coating on an internal passage wall exposed at a passage opening through an article external surface is protected from removal during repair of the article, including removal of at...
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6911129 |
Combinatorial synthesis of material chips
Systems and methods for providing in situ, controllably variable concentrations of one, two or more chemical components on a substrate to produce an integrated materials chip. The component...
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6899798 |
Reusable ceramic-comprising component which includes a scrificial surface layer
Disclosed herein is a method of roughening a ceramic surface by forming mechanical interlocks in the ceramic surface by a chemical etching process, a thermal etching process, or a laser...
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6890385 |
Multi-face forming mask device for vacuum deposition
A second metal mask ( 13 ) having a screen part ( 13 A) provided with a plurality of parallel, fine slits ( 13 a ) arranged at very small intervals is placed on a base plate ( 12 ) serving also as...
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6878209 |
Organic electroluminescent device
A method for producing an organic electroluminescent device, which is provided with first electrodes formed on a substrate, a thin film layer formed on the first electrode containing at least an...
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6869636 |
Method of evaporating film used in an organic electro-luminescent display
In evaporating thin film used in organic electro-luminescent (EL) display, a mask having a plurality of openings is placed below a display substrate, and a plane evaporation source is placed below...
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6852356 |
Evaporation method and manufacturing method of display device
A glass substrate and a shadow mask are put tightly together by inserting the glass substrate between a magnet and the shadow mask made of magnetic material. A pattern forming of an organic EL...
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6802942 |
Storage plate support for receiving disk-shaped storage plates
To generate an especially good heat transfer between a seating face of a storage plate support and a storage plate, during coating with a sputter source in a vacuum installation, the seating face...
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6749690 |
Aligning mask segments to provide an assembled mask for producing OLED devices
An alignment device for permitting a deposition mask having a plurality of magnetic mask segments to be positioned relative to a substrate to facilitate simultaneous deposition of organic material...
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6699375 |
Method of extending process kit consumable recycling life
One embodiment relates to an apparatus for sputtering material onto a workpiece, the apparatus including a vacuum chamber and a target disposed in the vacuum chamber, the target comprising a...
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6689255 |
System and method for making thin-film structures using a stepped profile mask
A system and method for manufacturing thin-film structures disposed on a substrate. The thin-film structures have different respective thicknesses that vary along a radius of the substrate. A...
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6678304 |
Laser correction method and apparatus
A laser correction apparatus irradiates a laser upward onto a defect on a photomask formed on the bottom surface thereof. The particles generated by the laser irradiation is removed by blowing a...
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6676812 |
Alignment mark shielding ring without arcing defect and method for using
An alignment mark shielding ring for use in a physical vapor deposition chamber and a method for using the ring to avoid arcing problems on the wafer. The alignment mark shielding ring can be...
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6641672 |
Replaceable shielding apparatus
A replaceable shielding apparatus provides a cost effective way of shielding a portion of a workpiece during processing. The apparatus includes a replaceable shield, made of comparable weight as...
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6623605 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
A method and apparatus for fabricating a wafer spacing mask and a substrate support chuck. Such apparatus is a stencil containing a plurality of dual counterbored apertures that is positioned atop...
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6589382 |
Aligning mask segments to provide a stitched mask for producing OLED devices
An alignment device for permitting a deposition mask having a plurality of mask segments to be positioned relative to a substrate to facilitate simultaneous deposition of organic material on to the...
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6475287 |
Alignment device which facilitates deposition of organic material through a deposition mask
An alignment device for permitting a deposition mask to be positioned relative to a substrate to facilitate deposition of organic material on to the substrate which will be part of an organic light...
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6464843 |
Contamination controlling method and apparatus for a plasma processing chamber
A plasma processing chamber includes a substrate holder and a member of silicon carbide such as a liner, focus ring, perforated baffle or a gas distribution plate, the member having an exposed...
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6419753 |
Apparatus and method for masking multiple turbine components
Apparatus and method to facilitate vapor phase coating of turbine airfoils. A dovetail receptacle receives the dovetails of a plurality of airfoils. The airfoils are separated by spacers with the...
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6402886 |
Use of a chemically active reticle carrier for photomask etching
A method and apparatus for improving etch uniformity in reticle etching by eliminating local effects at the edge of the reticle is disclosed. The present invention relates to a reticle frame which...
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6391115 |
Underplatform coating tool
The present invention relates to an improved tool for holding at least one turbine blade having a platform during the application of a coating to underplatform areas of the at least one turbine...
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6375747 |
Distribution mask for depositing by vacuum evaporation
A distribution mask including at least two separate blanking panels ( 22 ), one of which is mounted mobile. The two blanking panels ( 22 ) are substantially coplanar, and, controlled by a common...
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6277658 |
Method for monitoring alignment mark shielding
A method of using a monitor wafer to monitor the shielding of alignment marks during material deposition steps. The alignment marks are shielded using shielding tabs attached to the clamp ring used...
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6264804 |
System and method for handling and masking a substrate in a sputter deposition system
A substrate handling system auxiliary to a plasma sputtering system is described. The substrate handling system inserts an unprocessed substrate (e.g., an optical disk), an inner mask, and an outer...
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6258227 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
A method and apparatus for fabricating a wafer spacing mask on a workpiece support chuck. Such apparatus is a central body containing a plurality of apertures that is positioned atop the workpiece...
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6214413 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck
A method and apparatus for fabricating a wafer spacing mask on a substrate support chuck. Such apparatus is a stencil containing a plurality of apertures and at least one high aspect ratio opening...
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