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9028613 Rotating type thin film deposition apparatus and thin film deposition method used by the same  
A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition...
9017524 Vacuum film formation method for inorganic layer, barrier laminate, device, and optical component  
A vacuum film formation method for forming at least one inorganic layer on a support, which comprise transporting a support of which the area of the surface to be coated with an inorganic layer...
8999062 Film depositing apparatus  
A film depositing apparatus comprises: a rotatable drum within a chamber around which a substrate is wrapped in a specified surface region; a film depositing unit comprising a film depositing...
8999735 Method and apparatus for manufacturing organic el device  
Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern,...
8980008 Apparatus and methods for manufacturing thin-film solar cells  
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in...
8980007 Thin film forming apparatus and thin film forming method  
Disclosed is a thin film forming apparatus which is a plasma discharge processing apparatus for performing a plasma discharge processing on the surface of a continuously transported base at or...
8961745 Plant and method for producing a semiconductor film  
The plant is suitable to produce a semiconductor film (8) having a desired thickness and consisting substantially of a compound including at least one element for each of the groups 11, 13, and 16...
8961688 Method and device for plasma treating workpieces  
Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (7) of a treatment station (3), which can be at least partly evacuated, and is...
8956456 Apparatus and method for atomic layer deposition  
Apparatus for atomic layer deposition on a surface of a sheeted substrate, comprising: an injector head comprising a deposition space provided with a precursor supply and a precursor drain; said...
8945307 Apparatus and method for vapor deposition of dielectric wire coating  
Embodiments of the invention involve a technique and process for coating fine diameter, single strand wire of long continuous lengths with Parylene. The special fixture design and process allows...
8927051 Method for manufacturing a compound film  
A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on...
8926756 Strip passing apparatus, apparatus for treating surface of strip with the same, and method for treating surface of strip  
A passing apparatus includes: upper and lower sealing rolls dealing with variations in a thickness of a proceeding strip, the upper and lower sealing rolls allowing the strip to pass; and a strip...
8900365 Apparatus for depositing material on elongate substrate  
Disclosed is a deposition apparatus for depositing a specific substance on an elongate substrate such as an elongate strip of tape or film. The apparatus includes a vacuum chamber, supply reel and...
8900368 Device and method for continuous chemical vapour deposition under atmospheric pressure and use thereof  
The invention relates to a device and a method for continuous chemical vapor deposition under atmospheric pressure on substrates. The device is hereby based on a reaction chamber, along the open...
8895100 ***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***
Method for manufacturing a compound film
 
A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on...
8882918 Vapor deposition apparatus  
A vapor deposition apparatus (50) includes: a mask unit (54) including a vapor deposition source (70), a vapor deposition mask (60), and a mask holding member (80); a substrate holder (52); and at...
8852343 Apparatus for crystal growth  
Apparatus for vapor phase growing of crystals having a single multi-zone heater arranged to heat a heated zone to give a predetermined temperature profile along the length of the heated zone. A...
8840752 Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium  
Disclosed are a flow path switching apparatus and a fluid processing apparatus having a liquid processing unit that performs a processing by supplying different kinds of processing fluid to wafer...
8821638 Continuous deposition apparatus  
Provided is a continuous deposition apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous deposition apparatus is provided with: a...
8808793 Disc vapor lubrication  
A method comprising introducing a workpiece support into a chamber of an apparatus. The workpiece support is for supporting thereon a plurality of workpieces. The apparatus comprising: the chamber...
8795769 Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner  
A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it...
8778080 Apparatus for double-plasma graft polymerization at atmospheric pressure  
Disclosed is an atmospheric-pressure double-plasma graft polymerization apparatus. The apparatus includes a workbench, an initial roller of a roll-to-roll device, an atmospheric-pressure plasma...
8771419 Roll to roll evaporation tool for solar absorber precursor formation  
An evaporation tool for forming a dopant structure on a front surface of a continuous workpiece, wherein the front surface includes a precursor layer to form Group IBIIIAVIA absorbers for solar...
8758513 Processing apparatus  
A processing apparatus includes a loading chamber; a buffer chamber connected to the loading chamber; a first process chamber connected to the buffer chamber; and an unloading chamber connected to...
8758512 Vapor deposition reactor and method for forming thin film  
A vapor deposition reactor and a method for forming a thin film. The vapor deposition reactor includes at least one first injection portion for injecting a reacting material to a recess in a first...
8726829 Chemical bath deposition apparatus for fabrication of semiconductor films through roll-to-roll processes  
A chemical bath deposition apparatus is presented to prepare different thin films on continuous flexible substrates in roll-to-roll processes. In particular, they are useful to deposit CdS or ZnS...
8702999 Method and apparatus for plasma surface treatment of a moving substrate  
Method and plasma treatment apparatus for treatment of a substrate surface (1) using an atmospheric pressure plasma. An atmospheric pressure plasma is provided in a treatment space (5) between a...
8685166 Apparatus for continuous fabricating superconducting tapes  
Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature...
8673078 Take-up vacuum processing apparatus  
A take-up vacuum processing apparatus includes a chamber, a roller-shaped first electrode rotatably disposed within the chamber, a gas supply unit including a second electrode, and a third...
8657959 Apparatus for atomic layer deposition on a moving substrate  
An apparatus for atomic layer deposition of a material on a moving substrate comprises a conveying arrangement for moving a substrate along a predetermined planar or curved path of travel and a...
8652586 Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition  
The present invention provides novel plasma sources useful in the thin film coating arts and methods of using the same. More specifically, the present invention provides novel linear and two...
8584611 In-line vacuum coating system  
An in-line vacuum coating system includes a vacuum chamber, a coating source and a substrate carrier for holding tubular substrates, the carrier being displaceable using the vacuum chamber. A sure...
8573154 Plasma film forming apparatus  
The present invention relates to a plasma film forming apparatus. In the plasma film forming apparatus, a flow control jig is disposed between a plasma nozzle and a film formation region of a...
8551249 Film cassette for gaseous vapor deposition  
A cassette for supporting a film during a gaseous vapor deposition process includes a central shaft having first and second end plates. A rib on each end plate forms a spiral groove able to accept...
8529700 Apparatus for gaseous vapor deposition  
A vapor deposition apparatus includes an insert within which a material is deposited on the surface of a film. A cassette includes end plates each having a rib that edgewise receive a spiral...
8524003 Loaded film cassette for gaseous vapor deposition  
A cassette for supporting a film during a gaseous vapor deposition has first and second end plates. A rib on each end plate forms a spiral groove that edgewise receives a spiral wrapping of a film...
8481120 Method for coating a substrate and metal alloy vacuum deposition facility  
The invention relates to a process for coating a substrate (S) whereby a metal alloy layer comprising at least two metallic elements is continuously deposited on the substrate (S) by means of a...
8470094 Apparatus for continuous coating  
Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates...
8465589 Machine and process for sequential multi-sublayer deposition of copper indium gallium diselenide compound semiconductors  
A method of manufacture of CIGS photovoltaic cells and modules involves sequential deposition of copper indium gallium diselenide compounds in multiple thin sublayers to form a composite CIGS...
8440020 Apparatus and method for the production of flexible semiconductor devices  
Apparatus for continuously producing flexible semiconductor devices through deposition of a plurality of semiconductor layers onto a moving flexible substrate by using Plasma Enhanced Chemical...
8430966 Vapor deposition apparatus and process for continuous deposition of a thin film layer on a substrate  
An apparatus and related process are provided for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate. A receptacle is disposed within a vacuum...
8404047 Electron beam vapor deposition apparatus and method  
An electron beam vapor deposition apparatus includes a coating chamber having a first chamber section with a first coating zone for depositing a first coating and a second chamber section with a...
8398770 Deposition system for thin film formation  
A process for depositing a thin film material on a substrate is disclosed, comprising simultaneously directing a series of gas flows from the output face of a delivery head of a thin film...
8394197 Corrosion-resistant internal coating method using a germanium-containing precursor and hollow cathode techniques  
Enhanced corrosion resistance is achieved in a coating by using a germanium-containing precursor and hollow cathode techniques to form a first layer directly on the surface of a workpiece, prior...
8382900 Localized linear microwave source array pumping to control localized partial pressure in flat and 3 dimensional PECVD coatings  
A system and method for controlling deposition of thin films on substrates. One embodiment includes a vacuum chamber; a plurality of sources located inside the vacuum chamber; and a plurality of...
8382902 Single disc vapor lubrication  
Apparatus and method for vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a disk-shaped substrate. The invention has particular utility in depositing thin...
8377209 Linear plasma source for dynamic (moving substrate) plasma processing  
The present invention generally relates to a method and apparatus for depositing a layer onto a substrate as the substrate is moving through the processing chamber. The substrate may move along a...
8372196 Susceptor device, manufacturing apparatus of epitaxial wafer, and manufacturing method of epitaxial wafer  
In a manufacturing apparatus for manufacturing an epitaxial wafer with a wafer being mounted substantially concentrically with a susceptor, a center rod is provided to extend in an up-and-down...
8361930 Sintering furnace for producing an HTSC strip  
The invention relates to a method for producing a high temperature superconductor (HTSC) from a strip including an upper side precursor layer and which, for continuous sintering of the precursor...
8361232 Vapor deposition apparatus and process for continuous indirect deposition of a thin film layer on a substrate  
An apparatus and related process are provided for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate. A deposition head is configured for...