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Match Document Document Title
8997686 System for and method of fast pulse gas delivery  
A system for and method of delivering pulses of a desired mass of gas to a tool is described. A system for delivering pulses of a desired mass of gas to a process chamber or tool, comprising: a...
8992743 Sputtering method and sputtering apparatus  
This invention provides a sputtering method which can generate an electric discharge under practical conditions and maintain the pressure in a plasma space uniform, and a sputtering apparatus used...
8945339 Film formation apparatus  
A film formation apparatus includes a gas supply mechanism for supplying an aminosilane-based gas, and a silane-based gas that does not include an amino group. Processes of forming a seed layer on...
8667928 Semiconductor processing  
Embodiments of the present disclosure include semiconductor processing methods and systems. One method includes forming a material layer on a semiconductor substrate by exposing a deposition...
8601976 Gas supply system for semiconductor manufacturing facilities  
A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control...
8590484 Semiconductor device manufacturing method and substrate processing apparatus  
Provided is a semiconductor device manufacturing method and a substrate processing apparatus. The method comprise: a first process of forming a film containing a predetermined element on a...
8467895 Processing system and method for operating the same  
An operating method is disclosed for a processing system that comprises multiple process modules each adapted to perform substantially the same process upon a substrate. During process module...
8459203 Powder feeding method, powder feeding apparatus and electrostatical powder spray coating apparatus  
A coating powder feed method, coating powder feeding device, electrostatic powder spraycoating apparatus containing such a coating powder feeding device. The invention includes a dense phase...
8461062 Substrate processing apparatus and method for manufacturing semiconductor device  
The substrate processing apparatus includes: a processing chamber for storing and processing substrates stacked in multiple stages in horizontal posture; at least one processing gas supply nozzle...
8387559 Semiconductor manufacturing plant  
Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas...
8366869 Processing apparatus and processing method  
A processing apparatus includes a process container having a placing table for placing a processing object, an exhaust system having vacuum pumps and a pressure control valve for exhausting...
8122850 Method and apparatus for processing polysilazane film  
A method of processing a polysilazane film includes a first heat process and a subsequent second heat process performed on a target substrate with a polysilazane coating film formed thereon. The...
7981794 Film forming method and substrate processing apparatus  
A barrier layer including a titanium film is formed at a low temperature, and a TiSix film is self-conformably formed at the interface between the titanium film and the base. In forming the TiSix...
7950348 Substrate processing apparatus and semiconductor device producing method  
A substrate processing apparatus is provided with a reaction chamber (201), a substrate rotating mechanism (267) for rotating a wafer (200), and a gas supplying part for supplying the wafer (200)...
7779785 Production method for semiconductor device and substrate processing apparatus  
Disclosed is a producing method of a semiconductor device comprising a first step of supplying a first reactant to a substrate to cause a ligand-exchange reaction between a ligand of the first...
7770538 Apparatus and method for coating printed sheets  
Printed sheets are delivered from a printer to a coating machine which feeds the sheets successively to a coating nip formed between a coating cylinder and an impression cylinder. A transport...
7553374 Coating treatment apparatus and coating treatment method  
In the present invention, a gas flow restraining ring facing corner portions of the front face of a substrate horizontally held on a substrate holding unit and movable up and down, is set to a...
7294205 Method for reducing the intrinsic stress of high density plasma films  
A layer of reduced stress is formed on a substrate using an HDP-CVD system by delaying or interrupting the application of capacitively coupled RF energy. The layer is formed by introducing a...
7235136 Device for reading the rotational speed of a paint sprayer provided with a rotating bowl  
The invention device measures the instantaneous rotation speed of a turbine (6) which is housed inside the body (3) of the paint sprayer (2) and which rotationally drives the rotating bowl (5)...
7067010 Indexing spray machine  
The machine is an index spraying machine. The machine has five different stations. The first station is the load/unload station. At this station, work pieces are unloaded after they have been...
6770320 Apparatus and method for applying fluid  
An apparatus and a method for applying a fluid, which enable an application amount of the fluid to be stabilized even at the start of fluid discharge and at the end of the fluid discharge. The...
6758908 Solvent prewet and method and apparatus to dispense the solvent prewet  
A method and apparatus is provided for more efficient application of photoresist to a wafer surface. One aspect of the method comprises applying solvent to the wafer and spinning it to coat the...
6706118 Apparatus and method of using motion control to improve coatweight uniformity in intermittent coaters in an inkjet printer  
A coating apparatus for applying a coating liquid to a printing substrate. The apparatus includes a rotatable first roll, and a rotatable second roll positioned adjacent to the first roll and...
6692573 Automated pitch button dispensing station and method  
The present invention provides a work station and method for applying a blocking material such as pitch or the like to a selected location on a workpiece or workpieces, wherein the work station...
6648969 Fluidized bed granulation coating device, and fluidized bed granulation coating method  
An upper processing section 10 is provided by evenly spacing out functional stations 13 having respective functions of steps constituting a fluidized bed granulation coating process, on...
6533864 Solution processing apparatus and method  
An upper side of a cup provided around a wafer is formed in a rectangular shape and a lower side thereof is formed in a cylindrical shape. The cup is formed such that, when seen from above, the...
6530992 Method of forming a film in a chamber and positioning a substitute in a chamber  
Methods and apparatuses of forming a film on a substrate including introducing a pretreatment material into a processing chamber sufficient to form a film as a portion of an inner surface of the...
6440218 Coating solution applying method and apparatus  
An apparatus for applying a coating solution to a surface of a substrate to form a coating film of desired thickness thereon. The apparatus includes a rotary supporting device for supporting and...
6348099 Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions  
The present invention provides systems, methods and apparatus for high temperature (at least about 500-800° C.) processing of semiconductor wafers. The systems, methods and apparatus of the...
6327974 Spray dampening device having high effective spray frequency and method of using  
A spray dampening device for a printing apparatus, the spray dampening device comprising a plurality of spray nozzles. The spray nozzles are each cycled at a predetermined frequency and at an...
6319324 Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity  
A method and apparatus for reducing surface sensitivity of a TEOS/O3 SACVD silicon oxide layer, formed over a substrate, that deposits a ramp layer while ramping pressure to a target deposition...
6302962 Diffusion system having air curtain formation function for manufacturing semiconductor devices and method of controlling the same  
A diffusion system for manufacturing semiconductor devices has an air curtain formed across a furnace opening for preventing the loss of heat energy from inside the furnace. The diffusion system...
6296709 Temperature ramp for vertical diffusion furnace  
An improved vertical diffusion furnace for semiconductor manufacturing processes is provided. Temperature and flow rate management enables more uniform temperature distribution across the wafer...
6120604 Powder coating painting apparatus with universal modular line control  
A conveyor system for transporting parts through a plurality of processing areas. The conveyor system comprises a plurality of conveyors, each of the conveyors for transporting parts through an...
6099646 Dispensing system of a coater  
A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control...
5810929 Pyrogenic wet thermal oxidation of semiconductor wafers  
An oxidizing gas containing water vapor generated by hydrogen combustion is introduced from an external gas burner via gas supply pipes into the upper space of a process tube surrounded by a...
5702531 Apparatus for forming a thin film  
A plurality of wafers are placed on a boat, and the boat is inserted into a reactor. The reactor is heated by a heater, thereby heating the inserted wafers. Then, air is supplied between the...
5672207 Apparatus for application of a color coat to a workpiece  
An apparatus for color coating and further manipulating workpieces of wood, plastic material or metal includes a color coating station and further product-manipulation stations for finishing the...
5456755 Full automatic coating system for coating various types of products produced in small quantities  
A full automatic coating system includes an endless metal tape driven to run in one direction along an endless traveling path, a product supplying station for automatically selecting products of a...
5411588 Device for processing disc-shaped registration carriers  
The invention relates to a device for processing disc-shaped registration carriers, provided with a number of processing stations in which the disc-shaped registration carriers are supported, and...
5370745 Apparatus for performing related operations on workpieces  
Related operations are performed on workpieces, e.g., coating and curing circuit boards, of different types in random order in assembly line fashion on a rotary table of an apparatus under...
5332462 Apparatus for assembling fiberglass grating from pultruded fiberglass grating bars  
An apparatus for assembling a fiberglass reinforced grating from preformed bearing bars and cross bars includes an elongated open frame table having a plurality of rollers in side-by-side fashion...
5326403 Equipment for discharging treated articles from a barrel in a surface treatment system  
An equipment for discharging treated articles from a barrel in a surface treatment system includes: a carriage movable between a discharging position and a charging position; a water tank...
5322565 Method and apparatus for through hole substrate printing  
A method and apparatus are disclosed for enabling automated printing of through holes extending between top and bottom surfaces of a ceramic substrate or the like. The perimeter of the substrate...
5318631 Pressure control device for a pressure roller  
A pressure control device for controlling the application of pressure provided by a pressure roller to a pressing object, which includes a support member for pivotally supporting the pressure...
5279668 Apparatus for spraying glass containers  
An apparatus for spraying the surfaces of glass containers which are being moved in longitudinally spaced transverse rows by a conveyor wherein a rodless air cylinder is mounted transversely of...
5271953 System for performing work on workpieces  
Work is performed on workpieces, e.g., coating circuit boards, of different types in random order in assembly line fashion on a rotary table of an apparatus under programmed control. The table is...
5246499 Apparatus for applying scratch-resistant coatings to plastic ophthalmic lenses  
Plastic ophthalmic lenses are coated with a scratch-resistant coating using a spin coating process. The lenses are separated from lens mold pieces, and the lenses are routed through a coating...
5244500 Process control system of semiconductor vapor phase growth apparatus  
In a semiconductor vapor phase growing apparatus of the type disclosed in U.S. Pat. No. 4,430,959 dated Feb. 14, 1984, the thickness and resistivity of the semiconductor grown on a substrate by...
5224994 Apparatus and method for liquid treatment of article surfaces  
An apparatus and method is provided for liquid treating, particularly with coating materials such as paint, of an article, especially an article having a plurality of internal passages. The...

Matches 1 - 50 out of 141 1 2 3 >