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7628824 |
Substrate processing apparatus for processing plurality of substrates in succession
An indexer robot includes two transport arms. The indexer robot simultaneously transports two unprocessed substrates from a cassette to a substrate transfer part in such a manner that each of the...
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7591906 |
Method and apparatus for manufacturing a display, such as, for instance, a polymer OLED display, a display and a substrate for use in the method
Described is a method for manufacturing a display including a substrate on which a structure, such as, for instance, a matrix structure in relief, is provided, which structure bounds a number of...
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7585369 |
Apparatus for coating medical devices
An apparatus for coating medical devices at the point of care with a polymer and/or therapeutic agent comprising an environmentally controlled device coating chamber in which the device may be...
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7575633 |
Fluid dispenser with positive displacement pump
Fluid dispensing apparatus uses positive displacement of the fluid for accurate metering of the quantity of liquid applied to a surface. Positive displacement includes a metering volume that is...
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7563043 |
Coating/developing apparatus and substrate transfer method
In a coating/developing apparatus, a process section includes post-exposure baking units each having a waiting position and configured to perform a baking process on a substrate. An interface...
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7455747 |
Substrate processing apparatus, control method for the apparatus, and program for implementing the method
A substrate processing apparatus, according to which inspection of various devices in the substrate processing apparatus can be carried out with improved reliability, while reducing the burden on a...
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7431584 |
Heat processing apparatus and heat processing method
A heat processing apparatus for heating a mask substrate is disclosed. A mask substrate on which a coating solution has been coated is placed on a heating plate that heats the substrate. A frame...
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7422768 |
Film forming method, film forming apparatus, method of manufacturing device, and apparatus for manufacturing device
The invention provides a film forming method that improves throughput in a preliminary discharge. The film forming method according to the present invention can include a preliminary discharge step...
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7410541 |
Roll coater assembly system
A roll coater assembly system for application of a fluid material having a transport system with a part loading system, an application system, and a curing system for curing the material applied....
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7399364 |
Hermetic cap layers formed on low-κ films by plasma enhanced chemical vapor deposition
A method of forming a cap layer over a dielecrtic layer on a substrate including forming a plasma from a process gas including oxygen and tetraethoxysilane, and depositing the cap layer on the...
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7390365 |
Developing method, substrate treating method, and substrate treating apparatus
A developing method comprises determining in advance the relation of resist dissolution concentration in a developing solution and resist dissolution speed by the developing solution, estimating in...
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7387684 |
Single-dose spray system for application of liquids onto the human body
A spray device for coating a surface of a human body with a spray liquid, the spray device including at least one nozzle and at least one liquid container, wherein the at least one liquid container...
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7353379 |
Methods for configuring a plasma cluster tool
A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically...
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7347900 |
Chemical vapor deposition apparatus and method
A chemical vapor deposition (CVD) apparatus includes a process chamber where a deposition process is performed on a wafer. A gas supply assembly is mounted in the process chamber for supplying a...
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7341629 |
Method, system and apparatus for scraping a roll surface in a molten metal coating process
An apparatus for scraping the surface of a sink roll in a molten metal coating process comprises a support member having a pair of linearly movable arms supported thereon. The support member...
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7335266 |
Method of forming a controlled and uniform lightly phosphorous doped silicon film
Method of forming a lightly phosphorous doped silicon film. A substrate is provided. A process gas comprising a phosphorous source gas and a disilane gas is used to form a lightly phosphorous doped...
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7309395 |
System for forming composite polymer dielectric film
A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed...
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7294205 |
Method for reducing the intrinsic stress of high density plasma films
A layer of reduced stress is formed on a substrate using an HDP-CVD system by delaying or interrupting the application of capacitively coupled RF energy. The layer is formed by introducing a...
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7279046 |
Method and apparatus for aligning patterns on a substrate
A system and method for aligning prior patterning positions formed by a first SPM tip with a second SPM tip in combination with an SPM system includes identifying first location information that...
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7258894 |
Apparatus and method for dispensing liquid crystal material
A liquid crystal material dispensing apparatus includes a spacer height measuring unit for measuring a height of a spacer on a substrate, and a liquid crystal material dispensing system for...
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7217336 |
Directed gas injection apparatus for semiconductor processing
A method and system ( 1 ) for utilizing shaped orifices (e.g., sonic and simple orifices, and divergent nozzles) in the gas inject system ( 20 ) as part of a plasma process system. By utilizing the...
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7205240 |
HDP-CVD multistep gapfill process
A gapfill process is provided using cycling of HDP-CVD deposition, etching, and deposition step. The fluent gas during the first deposition step includes an inert gas such as He, but includes H 2 ...
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7203565 |
Temperature abnormality detection method and semiconductor manufacturing apparatus
A semiconductor manufacturing apparatus includes: a hot plate that heats an article to be processed; a temperature control section that controls temperature of the hot plate; a main body control...
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7198676 |
Device manufacturing apparatus and method, and driving method for device manufacturing apparatus
The present invention provides a device manufacturing apparatus in which a device can be precisely manufactured by stably ejecting a predetermined amount of droplets when the device is manufactured...
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7192486 |
Clog-resistant gas delivery system
Processing gases reactive with each other are provided in parallel to a processing chamber through separate delivery lines including mass flow controllers devoted to each line. The parallel...
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7113253 |
Method, apparatus and computer product for substrate processing
A method, apparatus and computer product for processing of substrates in at least a part of a substrate processing system is provided. In an embodiment, the method includes obtaining, using a...
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7108751 |
Method and apparatus for determining consumable lifetime
A plasma processing device comprising a gas injection system is described, wherein the gas injection system comprises a gas injection assembly body, a consumable gas inject plate coupled to the gas...
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7052552 |
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD
A method and apparatus are disclosed for depositing a dielectric film in a gap having an aspect ratio at least as large as 6:1. By cycling the gas chemistry of a high-density-plasma...
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7008124 |
Method and device for processing substrate
A substrate processing method comprises stopping the transfer of a head substrate of a succeeding lot for a period which is an integral multiple of a cycle time after a last substrate of a...
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7001645 |
Magnetic coating, coating method with same and coating apparatus therefor
The invention seeks to provide a magnetized coating suitable for exerting durable magnetic forces. To do this, the method of the invention consists in spreading conductive particles ( 13 ) on a...
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6960264 |
Process for fabricating films of uniform properties on semiconductor devices
A process for forming a thin layer exhibiting a substantially uniform property on an active surface of a semiconductor substrate. The process includes varying the temperature within a reaction...
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6949142 |
Device for controlling a surface treatment installation in automotive industry
A system comprising at least a multiaxial machine, each axis being equipped with motor means, provided with a sprayer and corresponding sensor and actuator, is provided. Said system comprises a...
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6924088 |
Method and system for realtime CD microloading control
A method and apparatus for processing a semiconductor wafer is provided for reducing CD microloading variation. OCD metrology is used to inspect a wafer to determine pre-etch CD microloading, by...
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6916380 |
System for depositing a layered film
The present invention relates to an electrically conductive film stack for semiconductors and methods and apparatus for providing same. A film stack comprising a first layer of a platinum-rhodium...
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6905549 |
Vertical type semiconductor device producing apparatus
A vertical type semiconductor device producing apparatus comprises a vertical type reaction chamber which is to accommodate a plurality of stacked substrates; an exhaust path which exhausts the...
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6899763 |
Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes
An apparatus and method for depositing thin films. The apparatus generally comprises a process chamber having one or more walls and a lid and two heat exchangers. A first heat exchanger is coupled...
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6837938 |
Apparatus associatable with a deposition chamber to enhance uniformity of properties of material layers formed on semiconductor substrates therein
An apparatus for use with a deposition chamber includes a temperature control system that communicates with a heating element of the deposition chamber so as to not cause the formation of a thin...
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6833030 |
Liquid delivery system having safe unit and operating method thereof
A liquid delivery system having safe unit includes: an injection valve connected to a chamber; a mass flow controller connected to the injection valve; an auxiliary valve connected between the...
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6827784 |
Corrugating method and means
A system for adding a desired additive to a corrugating adhesive.
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6821550 |
Apparatus and method for applying process solution
A process solution applying apparatus comprising a substrate holding mechanism for holding a substrate, a process solution supplying system for applying process solution in a prescribed amount to...
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6811806 |
Apparatus and method for spray coating sheet material
An apparatus and method for spraying an atomized liquid compound onto a sheet material traveling along a material coating process line. The apparatus and method heats and mixes a liquid compound...
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6777352 |
Variable flow deposition apparatus and method in semiconductor substrate processing
In one embodiment of the present inventions, an exhaust outlet in a vacuum processing chamber includes a nonsealing flow restrictor which can facilitate rapid opening and closing of the flow...
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6761769 |
Apparatus for applying viscous material
An applicator has a rubber heater ( 51 ) attached to the outer peripheral surface of the application member ( 4 ) in the vicinity of a nozzle ( 3 ). Thereby, the temperature in the vicinity of the...
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6758908 |
Solvent prewet and method and apparatus to dispense the solvent prewet
A method and apparatus is provided for more efficient application of photoresist to a wafer surface. One aspect of the method comprises applying solvent to the wafer and spinning it to coat the...
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6753272 |
High-performance energy transfer method for thermal processing applications
An apparatus and method supports thermal processing of a microelectronic device such as a semiconductor chip in a substrate by heating the substrate with secondary radiation from an energy transfer...
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6740195 |
Detection of nontransient processing anomalies in vacuum manufacturing process
A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor...
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6692573 |
Automated pitch button dispensing station and method
The present invention provides a work station and method for applying a blocking material such as pitch or the like to a selected location on a workpiece or workpieces, wherein the work station...
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6649019 |
Apparatus for conditioning the atmosphere in a vacuum chamber
In the invention, the atmosphere in a vacuum chamber ( 1 ) is conditioned using a primary pump ( 3 ), a secondary pump ( 2 ), speed control means ( 6, 7 ) for controlling the speed of the primary...
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6626996 |
Pizza sauce dispensing devices and methods
A pizza sauce dispenser simultaneously dispenses and spreads a precisely controlled amount of sauce onto a pizza dough base without manually handling the sauce or the dough during operation. The...
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6620246 |
Process controller for coating fasteners
A process controller and method employing a machine vision system for automatically and continuously monitoring and controlling the processing of coated fasteners, and for separating the fasteners...
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