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7575639 |
Apparatus and method for processing sheet materials
An apparatus and method for processing elongated sheet material through a plurality of processing stations including a cooling station for lowering the temperature of the sheet material. The...
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7563323 |
Substrate treating apparatus
A substrate treating apparatus is capable of promptly heating substrates after exposure, and avoiding an adverse thermal influence on an exposing apparatus. A developing block includes heating...
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7547361 |
Method and apparatus for fabrication of polymer-coated fibers
The present invention discloses the fabrication of polymer-coated, coated fiber composites, hybrid composites and a method and apparatus for fabricating the same. The invention provides for the...
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7541067 |
Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells
A deposition method which deposits a CdS buffer layer on a surface of a solar cell from a process solution including all chemical components of the CdS buffer layer material. CdS is deposited in a...
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7541299 |
Method and apparatus for thermally processing microelectronic workpieces
An apparatus for thermally processing a microelectronic workpiece comprises a rotatable carousel assembly configured to support at least one workpiece. A driver is coupled to the carousel assembly...
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7520936 |
Hardening processing apparatus, hardening processing method, and coating film forming apparatus
The present invention is a hardening processing apparatus for heating a substrate coated with a coating solution to harden the coating film on the substrate, which includes a first processing...
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7517407 |
Cooling system and method for a paper coating device in a papermaking apparatus
A cooling system and method for a paper coating device, especially for cooling a coating blade of the coating device and a coating color to be coated on paper web, whereby a streaking and/or...
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7326298 |
Wire insulating line
In a wire insulating line, a cooling device that cools down a traveling high-temperature linear material, which is resin-coated by an extruder, in cooling water includes a reservoir tank that...
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7220316 |
Wire material plating equipment
An apparatus for plating a wire material is provided in which a range of the plated layer where the temperature is high and flowability is large, thus, easily generating thickness deviation, and a...
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7208066 |
Substrate processing apparatus and substrate processing method
On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply...
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7083681 |
Method for forming coating film on internal surface of elongated tube and unit for forming the same
A method for forming a coating film on an internal surface of an elongated tube, includes longitudinally holding the elongated tube, applying a coating solution to the internal surface of the...
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7067010 |
Indexing spray machine
The machine is an index spraying machine. The machine has five different stations. The first station is the load/unload station. At this station, work pieces are unloaded after they have been...
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7029531 |
Rewetting installation for a material web
A rewetting installation is provided for use with a printed and dried material web. A wetting device applies a silicon emulsion to at least one of a first and second side of the material web. A...
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7011863 |
Substrate processing apparatus and substrate processing method
A substrate which has been subjected to heat processing in any of hot plate units is transferred to a normal cooling unit by a transfer device and subjected to cooling processing to some extent,...
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6969538 |
Method for heat processing of substrate
The present invention relates to a method for heat processing a substrate. After a coating film is formed on the substrate, the substrate is baked at a predetermined high temperature. The baking...
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6913675 |
Film forming apparatus, substrate for forming oxide thin film, and production method thereof
The invention provides a film forming apparatus that is capable of forming films sequentially with two types of film forming mechanisms in the same chamber. The film forming apparatus according to...
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6908512 |
Temperature-controlled substrate holder for processing in fluids
A substrate holder has a disk-like body with a central recess having diameter smaller than the diameter of the substrate placed onto the upper surface of the holder. The substrate can be clamped in...
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6841004 |
Optical fiber coating device having cooler
Disclosed is an optical fiber coating device for coating the outer circumference of the optical fiber with the coating material, in which the coating device is provided with and a gas provider for...
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6827973 |
Substrate processing method
After a first processing solution is spread over the front surface of a substrate and the temperature of the front surface of the substrate is regulated at a predetermined substrate temperature, a...
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6786974 |
Insulating film forming method and insulating film forming apparatus
Both of a first insulating film and a second insulating film are formed by a spin coating method. Accordingly, the formation of the first insulating film and the second insulating film can be...
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6758903 |
Apparatus for coating metal strip
A method and apparatus for extrusion coating both sides of a metal strip. A metal strip, such as aluminum alloy strip, is moved through a pre-conditioner, two extrusion dies, a post-heater and a...
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6730165 |
Polymer impregnation process
A device for impregnating a paper web with a molten polymer to produce a paper with improved resistance to oil and grease are provided. The device includes, as part of an on-machine process, an...
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6699329 |
Coating and curing system
A conveyor system for parts coupled to a loadbar assembly is disclosed. The conveyor system includes a walking beam conveyor and a push bar conveyor. The loadbar assembly and walking beam conveyor...
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6699328 |
Device for the temperature equalisation of coating media
Temperature control of the coating medium is performed to influence the processability of coating media in an applicator system. In order to operate without losing efficiency, devices acting...
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6673155 |
Apparatus for forming coating film and apparatus for curing the coating film
An apparatus for forming a coating film comprising, a coating unit for forming a coating film by applying a coating solution onto a substrate, and a curing unit for curing the coating film by...
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6635580 |
Apparatus and method for controlling wafer temperature in a plasma etcher
An apparatus for controlling wafer temperature in a plasma etcher during a plasma-on state and a method for using such apparatus are disclosed. In the apparatus, an additional temperature sensor...
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6627261 |
Spray-coating method and spray-coater
The present invention relates to a method and apparatus for coating a moving paper web ( 2 ), in which method the web ( 2 ) to be coated is passed to a coater station and the coating is applied to...
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6593045 |
Substrate processing apparatus and method
A cassette station, a processing station having a coating unit and a developing unit, and an inspecting station having a film thickness inspecting apparatus and a defect inspecting apparatus are...
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6555178 |
Process and apparatus for nickel plating and nickel-plated product
According to the present invention, Ni—B is electrolessly deposited on an object and then Ni—P is electrolessly deposited on the surface of the Ni—B layer formed on the object. In this...
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6554899 |
Paper coating apparatus
An apparatus for coating paperboard comprising a flame treater, a heater, a coater for applying a thin coating of a water-dispersible polymer, a dryer, and a cooler with an air curtain to keep the...
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6544338 |
Inverted hot plate cure module
A curing module for use in fabricating semiconductor wafers is provided. The cure module comprises a housing and a bottom plate. The housing also contains a heating plate adjacent a top surface of...
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6537374 |
Method and system for cooling strip material
A method and a system for cooling a steel strip are disclosed. A high water volume mist cooler and a low water volume mist cooler are disposed along a direction in which the steel strip travels....
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6524389 |
Substrate processing apparatus
In a processing chamber for performing heat processing for a substrate, gas for purge, for example, N 2 is supplied nearly parallel to the substrate placed on a hot plate with a gap forming member...
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6514340 |
Lubricant coat forming apparatus
The present invention provides a lubricant coat forming apparatus for forming a dry coat of water dry type lubricant on the surface of each of cold plastic working materials. The apparatus includes...
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6508920 |
Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device
A method for filling recessed microstructures at a surface of a microelectronic workpiece, such as a semiconductor wafer, with metallization is set forth. In accordance with the method, a metal...
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6464789 |
Substrate processing apparatus
A cooling processing unit for cooling a wafer to a predetermined temperature is disposed between a heat processing unit and a set of a resist coating processing unit and a developing processing...
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6460375 |
Ice coating method for controlling the formation of an ice-coating on the exterior of a hollow glass article
A system is provided for forming an ice coating on the outer surface of blown glass tube-shaped glass pieces ( 30 ) of an art work. The blown glass tubes are attached to a support surface ( 36 )...
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6391112 |
Heat-exchanging workholder for a vacuum unit
A workpiece holding device for a vacuum unit has coolable or heatable transfer plates ( 2 ) displaceable independently of one another in a baseplate ( 1 ) and each comprising a heat transfer...
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6375743 |
Method for improved chamber bake-out and cool-down
A method and apparatus for baking-out and for cooling a vacuum chamber are provided. In a first aspect, an inert gas which conducts heat from the vacuum chamber's bake-out lamps to the shield and...
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6374769 |
Fluid material application system employing tube-in-hose heat exchanger
A fluid material application system is provided with an application deck for applying a fluid material that includes printing ink, adhesive or coating, a source of fluid material, a source of heat...
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6377870 |
Device and method for delivering various transparent substrates into a high-precision measuring instrument
A device and method for delivering various substrates into a high-precision measuring instrument. The device comprises a magazine in which are configured several compartments in which substrate...
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6364949 |
300 mm CVD chamber design for metal-organic thin film deposition
The present invention relates to plasma-enhanced chemical vapor deposition (PECVD) and related chamber hardware. Embodiments of the present invention include a PECVD system for depositing a film of...
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6350316 |
Apparatus for forming coating film
An apparatus for forming a coating film, comprising a process section for applying a series of processes for forming a coating film to a substrate, and a common transfer mechanism for transferring...
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6332724 |
Substrate processing apparatus
Outside air taken in from the outside is cooled to a predetermined temperature by a cooler, and the air cooled by the cooler flows through a low temperature side flow path in a heat exchanger,...
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6312518 |
Apparatus for forming a photoresist film in a semiconductor device and method of forming a photoresist film using the same
An apparatus for forming a photoresist film including a photoresist coating unit for coating a photoresist on a wafer, a first chamber in which a nitrogen gas of high pressure and low temperature...
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6287025 |
Substrate processing apparatus
A resist coating block is composed of a resist coating unit, a cooling unit group, and a first sub-conveying unit that conveys a wafer W between the resist coating unit and the cooling unit group....
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6280584 |
Compliant bond structure for joining ceramic to metal
A compliant bond structure 20 comprising wire mesh 25 strands 50 surrounded by compliant metal 40 is useful for bonding a ceramic surface 30 to a metal surface 35. The wire mesh 25 comprises...
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6257297 |
Protection from excessive heating of components on an object during curing of paint on a localized area of the object
The present invention protects from excessive heating at least one component on an object during curing of paint at a localized area on the object by exposure to a heat source. The present...
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6245148 |
SOG dispensing system and its controlling sequences
The present invention relates to a SOG (Spin-On-Glass) dispensing system and its controlling sequences and, more particularly, to a SOG dispensing system allowing for continuous production and its...
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6231732 |
Cylindrical carriage sputtering system
A cylindrical carriage sputtering system for disk, wafer, and flat panel substrates (20) comprising a cylindrical shaped vacuum sealed passageway formed by two concentric inner (11) and outer...
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