|
Match
|
Document |
Document Title |
|
|
8181596 |
Cluster tool architecture for processing a substrate
An apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, a smaller system...
|
|
|
8183502 |
Mounting table structure and heat treatment apparatus
A mounting table structure arranged in a processing chamber is provided for mounting a target object to be processed on the upper surface. The mounting table structure is characterized in having a...
|
|
|
8176869 |
Spray applicating process and production assembly for manufacturing a pallet
A production assembly and associated process for mass producing such as a thermoplastic pallet and which utilizes a multiple insert supporting and continuously moving carousels inter-faceable with...
|
|
|
8158911 |
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
A heating apparatus comprises heating elements arranged of a sheet form and having notches or through holes provided therein, a side wall member made of an electrically conductive material and...
|
|
|
8151814 |
Method for controlling flow and concentration of liquid precursor
A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first...
|
|
|
8151727 |
Perovskite-oxide film, piezoelectric device, and liquid discharge device
A film formed on a substrate different from the monocrystalline perovskite substrate contains a piezoelectric oxide expressed as A(BxC1-x)O3 other than Bi(FeySc1-y)O3 and Bi(Fe, Co)O3, where...
|
|
|
8146530 |
Cluster tool architecture for processing a substrate
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased...
|
|
|
8138451 |
Heating device for heating semiconductor wafers in thermal processing chambers
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer....
|
|
|
8128753 |
Method and apparatus for depositing LED organic film
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic...
|
|
|
8129663 |
Vacuum heating apparatus
Deterioration of an O ring due to radiation heating in a vacuum heating apparatus is prevented to allow heat treatment of a substrate with good annealing properties. The vacuum heating apparatus 1...
|
|
|
8128750 |
Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components
Aluminum-plated components of semiconductor material processing apparatuses are disclosed. The components include a substrate and an optional intermediate layer formed on at least one surface of...
|
|
|
8117985 |
Laser cladding device with an improved nozzle
A laser cladding device for applying a coating to a part comprising a laser which can generate laser light, which is adapted to heat the coating and the part, a main body defining a laser light...
|
|
|
8118938 |
Lower liner with integrated flow equalizer and improved conductance
A plasma processing chamber has a lower liner with an integrated flow equalizer. In an etching process, the processing gases may be unevenly drawn from the processing chamber which may cause an...
|
|
|
8115141 |
Heating element
There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;a protection...
|
|
|
8113143 |
Method and apparatus for extruding a coating upon a substrate surface
A coating apparatus and method are disclosed that applies a coating to a product in a uniform and controlled manner. The coating apparatus comprises a feeding stage, an optional pre-treatment...
|
|
|
8110780 |
Photoirradiation type heat treatment apparatus
To provide a photo-irradiation type heat treatment apparatus that eliminates the adverse influence of a light transmitting window on the temperature distribution of an article to be treated without...
|
|
|
8104421 |
Vacuum chamber on a frame basis for coating installations
The present invention relates to a vacuum chamber and to its production. According to the invention, the vacuum chamber comprises a frame into which insert plates are placed. The insert plates form...
|
|
|
8092607 |
Transporting means and vacuum coating installation for substrates of different sizes
In a vacuum coating installation to coat planar substrates, comprising a vacuum chamber and a transport device arranged in the vacuum chamber for transporting the substrates along a transportation...
|
|
|
8089031 |
Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is stored
The present invention provides a heating apparatus for heating objects to be processed, which can detect a temperature of the objects to be processed with higher precision and accuracy, thereby to...
|
|
|
8082876 |
Manufacturing method of OLED display and apparatus for manufacturing the OLED display
A manufacturing method of an active matrix organic light emitting diode (AMOLED) display and an apparatus for manufacturing the AMOLED display, where the display has improved surface flatness and...
|
|
|
8080767 |
Thermal processing apparatus and thermal processing method for object to be processed
A thermal processing apparatus comprising a processing vessel containing, in addition to a plurality of objects subject to heat treatment, an acoustic wave device for temperature measurement. A...
|
|
|
8076615 |
Substrate processing apparatus and method of manufacturing semiconductor device
A substrate processing apparatus comprises: an outer tube; a manifold connected to the outer tube and made of a non-metal material; an inner tube disposed in the manifold at a more inner side than...
|
|
|
8056501 |
Film forming apparatus and method of manufacturing light emitting device
The problem regarding volatileness of a solvent in an EL forming material, which occurs in adopting printing, are solved. An EL layer is formed in a pixel portion of a light emitting device by...
|
|
|
8028646 |
Coating medical devices
Methods and systems for coating at least a portion of a medical device (e.g., a stent structure) include providing a plurality of coating particles (e.g., monodisperse coating particles) in a...
|
|
|
8017186 |
Film forming method, discharging droplet method and droplet discharging device
The present invention provides film forming method and a droplet discharge method for removing bubbles in a pressurizing chamber to prevent defective discharge without disposing a large amount of...
|
|
|
8012433 |
Device for dispersing dry powders
A device for dispersing a sample of dry powder onto a surface in a dispersion chamber. The device includes a dispersion chamber situated in an environment, and a pressure source that provides a...
|
|
|
8006637 |
Method and apparatus for membrane deposition
A method and apparatus for applying a uniform membrane coating to a substrate, such as a honeycomb structure, having a plurality of through-channels, wherein the through-channels have an average...
|
|
|
7984689 |
Device for the continuous coating of a strip-like substrate
The invention relates to a device for the continuous coating of a strip-like substrate in a vacuum, especially for producing coating patterns on the substrate, with a printing roller and a backing...
|
|
|
7985945 |
Method for reducing stray light in a rapid thermal processing chamber by polarization
Embodiments of the present invention provide apparatus and method for reducing noises in temperature measurement during thermal processing. One embodiment of the present invention provides a...
|
|
|
7973266 |
Heat treatment apparatus which emits flash of light
In a heat treatment apparatus, a reflector is provided to cover a plurality of flash lamps arranged in an array for emitting a flash of light, and a cooling box is provided over the reflector. The...
|
|
|
7972973 |
Method for forming silicon oxide film, plasma processing apparatus and storage medium
The present invention provides a method for forming a silicon oxide film, with a substantially uniform film thickness and without being so influenced by dense sites and scattered sites in a pattern...
|
|
|
7966966 |
Vacuum high pressure filling equipment
The present invention proposes a vacuum/high pressure filling apparatus which can improve the filling rate and shorten the impregnating time period in immersing a porous workpiece into a filling...
|
|
|
7960254 |
Manufacturing method for epitaxial wafer
To provide a manufacturing method for an epitaxial wafer that alleviates distortions on a back surface thereof due to sticking between a wafer and a susceptor, thereby preventing decrease in...
|
|
|
7954448 |
Film forming apparatus and method of film formation
A film forming apparatus includes a film forming chamber for performing a film formation; an exhaust unit connected to the film forming chamber to discharge a gas out of the film forming chamber; a...
|
|
|
7952054 |
Heating element
There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;a protection...
|
|
|
7946247 |
Coating layer thickness measurement mechanism and coating layer forming apparatus using the same
In a measurement mechanism for continuously measuring a thickness of a coating layer, provided in an apparatus for forming the coating layer on a conductive elongate base material in a coating...
|
|
|
7908993 |
Film forming apparatus, film forming method and method for manufacturing piezoelectric actuator
A film forming apparatus including a film forming chamber which forms a film, a jetting mechanism which jets aerosol containing material particles onto a substrate in the film forming chamber, a...
|
|
|
7908992 |
System and method for dusting soft capsules
A capsule dusting system is designed to expose capsules to a dusting agent in a controlled manner. The system incorporates a tumbling basket positioned within an enclosure. The tumbling basket is...
|
|
|
7900576 |
Process and device for treating and consolidating stone blocks and slabs
A system (10) is disclosed for treating and consolidating with hardenable resins stone blocks (1) comprising at least one liquid- and gas-tight sheet (2) adapted to form a containing housing (3) of...
|
|
|
7890220 |
Low overhead closed loop control system
A tool includes a chamber, a network, a sensor, a tool controller, and a pressure controller. The network carries messages to and from devices on the network. A header portion of a message...
|
|
|
7883902 |
Method and device for dispensing dry powders
The inventive method for dispersing a dry powder sample in a dispersion chamber consists in vacuuming the chamber with respect to the environment, in dispersing a dry powder in the chamber, by...
|
|
|
7879400 |
Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface
There is provided a substrate processing apparatus equipped with a metallic component, with at least a part of its metallic surface exposed to an inside of a processing chamber and subjected to...
|
|
|
7847218 |
System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear...
|
|
|
7836845 |
Substrate carrying and processing apparatus
The present invention provides a substrate carrying and processing apparatus which is intended to reduce the size of the space for storing substrates in each substrate storing section as much as...
|
|
|
7819079 |
Cartesian cluster tool configuration for lithography type processes
The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an...
|
|
|
7815968 |
Centrifugal method for filing high aspect ratio blind mirco vias powdered materials for circuit formation
The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches...
|
|
|
7812286 |
Rapid conductive cooling using a secondary process plane
A method and apparatus for thermally processing a substrate is described. The apparatus includes a substrate support configured to move linearly and/or rotationally by a magnetic drive. The...
|
|
|
7799372 |
Method and device for applying glue to a honeycomb structure
A plunger is used for applying an adhesive to a honeycomb structure. The plunger includes a receptacle, a plunger covering, a metering unit and a chamber. The chamber being delimited by the...
|
|
|
7785419 |
Epitaxial apparatus
An epitaxial apparatus, including a supporting member to support a substrate; an external wall provided to surround the supporting member from the sides; an inner lid member provided in a removable...
|
|
|
7778533 |
Semiconductor thermal process control
During fabrication, a rotating semiconductor substrate is radiated in accordance with a thermal recipe. Temperature measurements of the semiconductor substrate are obtained along with the position...
|